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Finfet Transistors: Vlsi Circuit Design - Cse 60462 Patrick Donnelly
Finfet Transistors: Vlsi Circuit Design - Cse 60462 Patrick Donnelly
Finfet Transistors: Vlsi Circuit Design - Cse 60462 Patrick Donnelly
D. Hisamoto et al., "A Folded-channel MOSFET for Deep-sub-tenth Micron Era", IEDM Technical Digest, pp 1032-1034, 1998.
http://www.eetimes.com/electronics-news/4396720/Globalfoundries-to-offer-14-nm-process-withFinFETs-in-2014
http://www.eetimes.com/electronics-news/4398727/TSMC-taps-ARM-V8-in-road-to-16-nm-FinFET
Key Parameters Silicon Fin Thickness (Gate Length) Silicon Fin Width/Height (Capacitor Area)
Challenges in Design
Lithography
3D structures (narrow height)
http://en.wikipedia.org/wiki/File:Doublegate_FinFET.PNG
http://www.eetimes.com/electronics-news/4373195/Intel-FinFETs-shape-revealed http://www.intel.com/content/www/us/en/silicon-innovations/silicon-innovations-technology.html
http://en.wikipedia.org/wiki/File:Trigate.jpg
http://www.eetimes.com/electronics-news/4373195/Intel-FinFETs-shape-revealed
http://www.eetimes.com/electronics-news/4396720/Globalfoundries-to-offer-14-nm-process-with-FinFETs-in-2014http://www. eetimes.com/electronics-news/4398727/TSMC-taps-ARM-V8-in-road-to-16-nm-FinFET
Questions?
D. Hisamoto et al., "A Folded-channel MOSFET for Deep-sub-tenth Micron Era", IEDM Technical Digest, pp 1032-1034, 1998. http://www.eetimes.com/electronicsnews/4396720/Globalfoundries-to-offer-14-nm-processwith-FinFETs-in-2014 http://www.eetimes.com/electronicsnews/4398727/TSMC-taps-ARM-V8-in-road-to-16-nmFinFET http://www.eetimes.com/electronicsnews/4373195/Intel-FinFETs-shape-revealed http://www.intel.com/content/www/us/en/siliconinnovations/silicon-innovations-technology.html