Finfet Transistors: Vlsi Circuit Design - Cse 60462 Patrick Donnelly

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FinFET Transistors

VLSI Circuit Design -- CSE 60462 Patrick Donnelly

D. Hisamoto et al., "A Folded-channel MOSFET for Deep-sub-tenth Micron Era", IEDM Technical Digest, pp 1032-1034, 1998.

http://www.eetimes.com/electronics-news/4396720/Globalfoundries-to-offer-14-nm-process-withFinFETs-in-2014

Circuits Using This Device


Can be used as a regular MOSFET.
"Cadence is expected to treat FinFETs as transistors, automating the way they are generated in custom design flows in ways suitable for the target foundry."

== > FinFETs primarily are explored for optimal performance characteristics.

http://www.eetimes.com/electronics-news/4398727/TSMC-taps-ARM-V8-in-road-to-16-nm-FinFET

Key Parameters Silicon Fin Thickness (Gate Length) Silicon Fin Width/Height (Capacitor Area)

Challenges in Design
Lithography
3D structures (narrow height)

"Strain Engineering" for fins Doping for fins

http://en.wikipedia.org/wiki/File:Doublegate_FinFET.PNG

Intel Tri-Gate Transistors


Currently in 22nm Ivy Bridge CPUs. "Trapezoidal, or triangular" in cross-section. 22nm 37% performance increase over 32nm planar; 50% power decrease with same performance. Improved switching delays. Higher drive current.

http://www.eetimes.com/electronics-news/4373195/Intel-FinFETs-shape-revealed http://www.intel.com/content/www/us/en/silicon-innovations/silicon-innovations-technology.html

http://en.wikipedia.org/wiki/File:Trigate.jpg

http://www.eetimes.com/electronics-news/4373195/Intel-FinFETs-shape-revealed

FinFET in New Technologies


GlobalFoundaries (AMD) to offer FinFET technology in 2014 with 14nm process. TSMC also to offer FinFET at 16nm in 2014.

http://www.eetimes.com/electronics-news/4396720/Globalfoundries-to-offer-14-nm-process-with-FinFETs-in-2014http://www. eetimes.com/electronics-news/4398727/TSMC-taps-ARM-V8-in-road-to-16-nm-FinFET

Questions?
D. Hisamoto et al., "A Folded-channel MOSFET for Deep-sub-tenth Micron Era", IEDM Technical Digest, pp 1032-1034, 1998. http://www.eetimes.com/electronicsnews/4396720/Globalfoundries-to-offer-14-nm-processwith-FinFETs-in-2014 http://www.eetimes.com/electronicsnews/4398727/TSMC-taps-ARM-V8-in-road-to-16-nmFinFET http://www.eetimes.com/electronicsnews/4373195/Intel-FinFETs-shape-revealed http://www.intel.com/content/www/us/en/siliconinnovations/silicon-innovations-technology.html

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