Chapter 10 Mechanical Feedthroughs

Mechanical Feedthroughs
Rotary Feedthroughs with Magnetofluid Sealing Rotary Feedthroughs with Magnetically Linked Drive Rotary-Linear Feedthroughs and Transfer Systems Linear Translators and Aligners
10
Y, XY and XYZ Translators
MultiCentre and EpiCentre
Contents
Rotary Feedthroughs with Magnetofluid Sealing
Introduction Page SUPERSEAL Series Page RMS Series Page RMS-BS/RMS-LS Series Page RMS-F1/RMS-F2 Series Page RMS-F1-W/RMS-BS-W Series Page RMS-HS/RMS-HS-C Series Page RMS-F1-HS/RMS-F1-HS-C Series Page RMS-F1-HS-W/RMS-F1-HS-W-C Series Page 10-3 to 10-4 10-5 to 10-6 10-7 10-8 10-8 10-9 10-9 10-10 10-10
Rotary Feedthroughs with Magnetically Linked Drive
MagiDrive Series Page 10-11 to 10-20 UHV Rotary Source Shutters Page 10-21 to 10-22
Rotary-Linear Feedthroughsand Transfer Systems
Introduction Page MPP/MPPL/MPPRL - Push Pull Series Page WSL/WSLR - Wobble Stick Series Page PP Series - Sample Transfer Systems Page
10-23 10-24 10-25 10-26 to 10-29
Linear Translators and Aligners
Z Translators Page 10-30 to 10-37 Port Aligners Page 10-38
Y, XY, XYZ Translators
Introduction Page Y Translators Page XY Translators Page XYZ Translators Page
10-39 10-40 10-41 to 10-42 10-43 to 10-45
10
MultiCentre UHV Probe Manipulators
Manipulators for research and development in surface physics, in synchrotron applications and other analysis methods in UHV - MultiCentre probe handling system Page 10-46
EpiCentre MBE Manipulators
Manipulators for probe heating at MBE, CVD and sputter processes or other applications with heated probes Page 10-47 - EpiCentre Model 100 Page 10-48 - EpiPRO Page 10-49
Telescopic Manipulator for Radial Transfer
Radial Telescopic Transfer Arm Page 10-50
10-2
www.vacom-vacuum.com

Introduction
VACOMs rotary feedthroughs with magnetofluid sealing are delivered by RIGAKU, a leading manufacturer of these products. They stand out especially due to the following properties: Large transmission torque No backlash Appropriate for rough, fine and high vacuum High pressure capacity High reliability due to leak-free operation Very low magnetic leakage Maintenance-free design Long-term maintenance Up to 15,000 revolutions / minute Manufacturing of customised solutions (100 pieces and upward)
Functional principle
Unlike the conventional rotary feedthroughs with elastomer or bellow seal, a magnetic fluid is used as the dynamic seal that fills the gap between the moving shaft and its stationary housing. These liquid o-ring seal is held in place by powerful ring magnets without causing friction. This will result in no wearing or minimal heat generation so that long service life and high reliability are assured. The feedthroughs withstand differential pressures of above 2.5 bar. They have very low leak rates of up to 10-11 mbar l/s (He) or less and are absolutely vacuum suitable. They reach a rotational speed up to several thousand revolutions per minute. RIGAKUs rotary feedthroughs have already proven long life and reliability by its use as components of high power x-ray generators and semiconductor process equipment. Besides standard examples customised solutions are available.
Temperatur dependency
Because the magnetofluid is a liquid, the operating temperature is an important parameter for the usage of rotary feedthroughs. A non-stop operation is possible up to a temperature of 60 C. The use of water-cooled feedthroughs is recommended at higher temperatures. Furthermore the usage of temperature resistant carrier oils for the magnetofluid, such as PFPE, becomes necessary. Figure 1 allows a rough estimation of the point, when water cooling is recommended. Please contact your customer adviser for further information.
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Figure 1
10-3

SUPERSEAL Series
Magnet alignment SUPERSEAL series
The SUPERSEAL series has an antipole alignment of the ring magnets. There are two ring magnets applied. The shaft itself serves as a pole shoe to support the ring magnets and the grooves for the sealing magnetofluid. The shaft's diameter is enlarged at the sealing area and designed to serve this purpose (see figure 2). This design is simpler and cheaper. Furthermore, it is possible to set static O-ring seals aside. However, it still has the same advantages concerning pressure capacity, leakage and service life as the RMS series.
Figure 2
Magnet configuration RMS series
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The standard feedthroughs of the RMS Series include 4 antipole ring magnets with the pole position: NS-SN-NS-SN. This alignment creates an especially strong field strength at the pole shoes which generate low external stray fields. Milled circular grooves are located at the pole shoes inside, facing the shaft. The shaft itself is not weakened by grooves or the like. A strong magnetic field is concentrated in the gap between the magnet and the shaft, forming the magnetofluid into liquid o-rings between the grooves (see figure below) due to this design. A pressure stage is created between every two of these o-rings (see figure 3). Besides the very good leakage properties this design has another advantage, to withstand high differential pressures with few stages. Furthermore there evolves only minimal frictional heat due to the relatively big gap between magnet and shaft, as well as the low persistent forces of the magnetofluid. This also results in minmal maintenance requirements.
Figure 3
10-4

SUPERSEAL Series
Simple rotary feedthrough with bulkhead fitting for wall fastening, with KF or CF flange
No internal o-ring seals Very low magnetic stray fields No magnets inside vacuum Rugged stainless steel shafts 6 mm or 8 mm Revolution 5000 RPM without load Pressure-resistant up to 2.5 bar differential pressure Insensitive to external magnetic fields (> 500 Gauss) Magnetofluid: synthetic oil or PFPE Technical data Transmittable torque shaft 6mm 5.65 Nm shaft 8mm 18.00 Nm Max. revolution (loadfree) synthetic oil 5000 RPM PFPE 2500 RPM Static friction resistance synthetic oil 7.8 Ncm PFPE 14.2 Ncm Rotary friction resistance (100 RPM) synthetic oil 4.3 Ncm PFPE 15.6 Ncm Vacuum area synthetic oil up to 10-8mbar PFPE up to 10-9mbar Max. temperature synthetic oil 80C PFPE 100C Vapour pressure magnetofluid synthetic oil 10-10mbar PFPE 10-12mbar Max. pressure difference 2.5 bar Helium leakage rate < 5 10-9mbar l/s Material housing/shaft stainless steel 17-4 PH bearing grease Fomblin/Krytox blend Vapour pressure grease lubricant 10-13mbar Max. bearing load (static) 1350 N Vacuum side arbitrarily Order Code 10C-26100900 10C-26101400 10C-26101100 10C-26101300 10C-26101000 10C-26101200 10C-26100902 10C-26101402 10C-26101102 10C-26101302 10C-26101002 10C-26101202 Vacuum connection DN40CF DN40CF DN25KF DN25KF M26 M26 DN40CF DN40CF DN25KF DN25KF M26 M26 Shaft diameter [mm] 8 6 8 6 8 6 8 6 8 6 8 6 Magnetofluid bearing oil synthetic oil synthetic oil synthetic oil synthetic oil synthetic oil synthetic oil PFPE PFPE PFPE PFPE PFPE PFPE
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10-5

SUPERSEAL Series
10C-26100900 and 10C-26100902
10C-26101100 and 10C-26101102
10C-26101400 and 10C-2601402
10C-26101300 and 10C-26101302
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10C-26101000 and 10C-26101002
10C-26101200 and 10C-26101202
10-6

RMS Series
Standard feedthroughs for a large range of applications in industry and research
Shaft ball bearings on both sides of the magnetofluid sealing Transmission of large torques Very high revolutions Various vacuum connections Robust and long-lasting Design with water cooling (optional) Design with a hollow shaft (optional) Technical data Vacuum range Operating temperature Differential pressure He-leakage rate Material housing Material shaft Material pole shoes Ball bearing greasing vacuum side atmosphere side Magnetofluid bearing oil standard reactive gases high temperature Material O-Rings Water cooling flow pressure water temperature connection < 10-8mbar 0100C (without cooling max. 60C) < 2.5 bar < 10-11mbar l/s stainless steel type 303 stainless steel type 630 stainless steel type 630 high vacuum grease Grease with added anticorrosive synthetic oil PFPE PFPE FKM (included in shipment) 14 l/min 3 bar 25C thread Rc 1/8" (2x or 4x)
Option hollow shaft (HS) The models of the RMS series with a hollow shaft (HS) can be assembled with shafts of non-magnetic materials and special shafts (tubes, drive shafts or the like). The magnetofluid sealed area of the RMS-HS series is situated between a cylindrical hull (called hollow shaft) and the external housing. The hollow shaft and the housing can be turned in the opposite direction. The shaft that is actually going to be turned, is inserted accurately through the hollow shaft. Two static O-ring seals inside of the hollow shaft connect it with the shaft and seal the gap vacuum tight. If the shaft is turned, the hollow shaft turns as well. You can protect the shaft and the hollow shaft from distortions or displacements by means of a clamp (optional).
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10-7

RMS-BS/RMS-LS Series
Rotary feedthroughs for wall fastening RMS-BS series with housing exposed to atmosphere RMS-LS series with housing exposed to vacuum O-Ring groove on the front of the housing Including O-Ring seal, screw nut and washer Shaft diameter (mm): 5, 6, 10 and 20
Serie RMS-BS
Serie RMS-LS
RMS-F1/RMS-F2 Series
Rotary feedthroughs with flange RMS-F1 series with housing exposed to atmosphere RMS-F2 series with housing exposed to vacuum Flange with through holes and O-Ring groove Including O-Ring seal Shaft diameter (mm): 5, 6, 10, 12, 20, 30 and 40
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Serie RMS-F1
Serie RMS-F2
10-8

RMS-F1-W/RMS-BS-W Series
Rotary feedthroughs with water cooling and connection for wall fastening or with flange Housing exposed to atmosphere RMS-F1-W series with flange, through holes and O-Ring groove RMS-BS-W series with thread for wall fastening and O-Ring groove at the front, including screw nut and washer Including O-Ring seal Shaft diameter of series RMS-BS-W (mm): 12 and 20 Shaft diameter of series RMS-F1-W (mm): 6, 10, 12 and 20
Serie RMS-BS-W
Serie RMS-F1-W
RMS-HS/RMS-HS-C Series
Rotary feedthroughs with hollow shaft Housing exposed to atmosphere O-Ring groove at the front of vacuum side Design with or without safety clamp Including O-Ring seal Hollow shaft diameter (mm): 10, 12, 20, 24, 32, 38, 40, 50 and 75
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Serie RMS-HS
10-9

RMS-F1-HS/RMS-F1-HS-C Series
Rotary feedthroughs with hollow shaft and flange Housing exposed to atmosphere Flange with through holes and O-Ring groove Design with or without safety clamp Including O-Ring seal Hollow shaft diameter (mm): 10, 12, 20, 24, 26, 32, 38, 40, 50 and 75
Serie RMS-F1-HS
RMS-F1-HS-W/RMS-F1-HS-W-C Series
Rotary feedthroughs with hollow shaft, flangeand water cooling Housing exposed to atmosphere Flange with through holes and O-Ring groove Design with or without safety clamp Including O-Ring seal Hollow shaft diameter (mm): 10, 12, 20, 24, 26, 32, 38, 40, 50 and 75
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Serie RMS-F1-HS-W
10-10

MagiDrive Series
Introduction
Rotary feedthroughs with magnetically coupled drive are the optimal solution to transfer rotations into UHV systems. VACOM offers MagiDrive feedthroughs from the British expert UHV Design. A rotary feedthrough with magnetically coupled drive enables rotation to be transferred into a vacuum system without the need for mechanical connections. The actuated shaft is placed in a totally closed housing and is connected to the vacuum side only. The drive is placed outside of the housing and includes magnets. The magnetic field of the drive couples to the shaft through the wall of the housing. If the drive is moved, the shaft will be rotated too due to the magnetic coupling (see figure 4). MagiDrive Rotary feedthroughs have many advantages compared to other feedthroughs of similar design. High power magnets of the latest magnetic materials technology are used for the feedthroughs. This causes very strong magnetic coupling with a very small torsion during rotation. The rotary feedthroughs are bakeable up to 250 C with installed magnets. Only high-alloyed special steel is used for housings and shafts. The magnetic stray fields are very small. Due to the fact that the drive and the shaft are not mechanically connected there is no need for bellows and other flexible elements as for seals. Leakage at the actautor due to wear of connections or of gaskets is impossible. Different bearing types are available for the vacuum side shaft bearing for special applications such as low particel generation or semiconductor processes. Numerous drive options such as manual, pneumatic, motorized are available. For further information please see the following pages.
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Figure 4 Also available as design with hollow shaft. Please find further information on the next page.
10-11

MagiDrive Series
MagiDrive with hollow shaft
MagiDrive feedthroughs of the types MD35H, MD64H and MD100H have an additional CF adapter on the drive end (rear of drive gear). This flange is fixed and does not rotate. The driving shafts of these rotary feedthroughs consist of a tube. Resulting in free passageway from the rear of the feedthrough to the vacuum side. This enables feedthroughs to be passed axially through the tube of the rotating shaft. A further important feature is the stacking of up to four MagiDrive rotary feedthroughs (see figure 5). This enables to create up to four independently rotating axes. The stacking allows a simple solution for multi-motion requirements. The free inner diameters of the shafts are 12 mm for MD35H with a DN16CF rear flange, 26 mm for MD64H with a DN40CF rear flange and 65 mm at MD100H with DN63CF mounted to the rear.
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Figure 5
10-12

MagiDrive Series
Magnets of high-performance materials Strong magnetic coupling through the wall of the actuator housing Housing machined from one piece No bellows No O-Rings Complete UHV applicable Bakeable Low backlash and high precision at low loading or acceleration Magnetically shielded (standard) Numerous options Special designs on request
Overview MagiDrive models

Model MD10 MD16 MD19 MD20 MD21 MD25 MD35, MD35H, MD35LBH MD64, MD64H, MD64LBH MD100, MD100H Vacuum Connection DN10CF DN16CF DN16CF DN40CF DN40CF DN40CF DN40CF DN63CF DN100CF Max. Torque [Nm] 0.18 0.45 0.55 0.45 0.55 2.4 4.5, 4.5, 6.0 10.0, 10.0, 8.0 40.0, 40.0
Manual actuaction
T TF B BF C F
C B K P D R A
= Manual with hand wheel (standard) = Friction control for manual actuation = Thumbscrew brake for manual actuation = Thumbscrew brake and friction control for manual actuation = Hand wheel with degree scaling (5 - or 1 graduation) and friction control for manual actuation = Hand wheel with degree scaling (5 - or 1 graduation) and thumbscrew brake for manual actuation = Hand wheel with knurled end cap = Hand wheel with timing pulley = Dual shaft
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Pneumatic actuation
= Pneumatic drive, adjustable 30 - 170, with air flow regulating valves RAI = Similar to RA, with visual position indicator S RA = Pneumatic drive, sideways mounted, adjustable 30 - 170, with air flow regulating valves SRAI = Similar to SRA, with visual position indicator
Electric actuation
IS ISS SS SSS ID SD
= Stepper motor axially mounted = Stepper motor axially mounted, with visual position indicator = Stepper motor, sideways mounted = Stepper motor, sideways mounted, with visual position indicator = DC motor, axially mounted = DC motor, sideways mounted
Gearing options
Please find all available gearing options at page 10-15. We gladly assist you at selecting the right option for your application.
10-13

MagiDrive Series
Shaft drives
X000 = Stub shaft or tubular shaft with mounted flange (depending on design) X030 = Extended shaft, fixed, length 30mm XM = Exchangeable shaft extension DX = Double-sided shaft H = Hollow shaft LB = Hollow shaft with large passage
Ball bearings
Z CE SE
= Standard bearing (stainless steel, MoS2 coated) = Ceramic, ultra clean, for UHV high temperature applications = Special bearing for semiconductor and cryogenic applications
There are different options available for actuation, shaft and ball bearing. The complete order code is created in connection with the type. Please find the possible options in the following table:
MagiDrive Model Options MD10 MD16 MD19 MD20 MD21 MD25 MD35 MD35H MD35LB MD64LB MD64 MD64H MD100 MD100H * T TF B Actuation Manual BF CF CB K P RA Pneumatic RAI SRA SRAI IS ISS Electric SS SSS ID SD X 000
Shaft type X 030 MX 000 D
Ball bearing Z CE SE
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*Hand wheel with timing pulley (similar to option P)
= Standard = Option = not available
Order Information
Please use the following order code to order of rotary feedthroughs: Size Actuation Gearing options Shaft Bearings E.g.: MD10TX000Z
10-14

MagiDrive Series Gearing Options
Size Motor Type In-Line DC (ID) MD10 In-Line stepper motor (IS) Gearing Option
1 2 3 4 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4
Max. Output Torque [Nm]

0.18 0.18 0.18 0.18 0.07 0.18 0.18 0.18 0.21 0.35 0.45 / 0.55* 0.45 / 0.55* 0.45 / 0.55* 0.45 / 0.55* 0.11 0.45 / 0.51* 0.45 / 0.55* 0.45 / 0.55* 0.65 1.46 2.4 2.4 0.43 1.08 1.95 2.40 1.50 0.92 2.07 2.40 1.00 1.53 2.40 2.40 0.86 1.95 3.90 4.50 0.43 1.08 1.95 3.90 2.00 1.22 2.76 4.50 1.00 1.53 2.76 4.50 1.73 4.31 7.88 10.00 0.92 1.84 4.20 8.40 3.45 6.90 10.00 10.00 4.60 3.68 8.40 10.00
Max. Output Spin Speed [1/min]

228 137 61 41 200 23 16 8 230 135 70 42 21 8 1000 300 150 60 307 123 61 31 460 184 92 46 667 200 80 40 750 120 60 30 230 92 46 23 460 184 92 46 500 150 60 30 500 120 60 30 245 98 49 25 440 220 88 44 160 80 32 16 300 150 60 30
MD16 MD19* MD20 MD21*
In-Line DC (ID)
In-Line stepper motor (IS)
Side mounted DC motor (SD)
In-Line DC (ID) MD25 Side mounted stepper motor (SS)
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In-Line DC (ID) MD35 MD35H
Side mounted stepper motor (SS)
In-Line DC (ID) MD64 MD64H
Side mounted stepper motor (SS)
10-15

MagiDrive Series with DN10CF Flange Connection
Smallest possible UHV compatible rotary feedthrough Large torque Very compact Technical data Type description Flange connection Design Shaft style Break-away torque Max. no load spin speed Max. axial thrust Max. bakeout temperature
MD10 DN10CF machined from one piece, stainless steel 316L stub, 3.5mm, with flattening 0.18 Nm 230 U/min 9N 250C
Order Code MD10TX000Z
Description MD10 rotary feedthrough, manual, standard bearing
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Available options with flange connection DN10CF Size MD10 T TF CF P IS ID RA RAI
For explanations of the abbreviations see page 10-13f.
Actuation
Gearing Option
Shaft X000
Bearings Z
(1-4)* (1-4)*
*Gearing options - We are glad to help you selecting the suitable product.
10-16

Two types MD16 and MD19 with different magnetic force Established and variable usable design Robust and powerful Technical data Flange connection Design Shaft style Break-away torque - MD16 - MD19 Max. no load spin speed Max. shaft axial thrust Max. bakeout temperature
DN16CF machined from one piece, stainless steel 316L stub, 9mm, with female thread M5 0.45 Nm 0.56 Nm 1000 U/min 20 N 250C
Order Code MD16TX000Z MD19TX000Z
Description MD16 rotary feedthrough, manual, standard bearing MD19 rotary feedthrough, manual, standard bearing
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Available options with flange connection DN16CF Size Actuation Gearing Option Shaft Bearing
T TF BF P CF MD16 MD19 K KF D IS ISS ID RA RAI

X000 X030 XM
Z CE
(1-4)* (1-4)* (1-6)*
*Gearing options - We are glad to help you selecting the suitable product.
10-17

5 model with 4 magnetic forces 3 shaft types and axial loadings Robust and powerful Numerous options for actuation and ball bearings Model MD35 optional with rear side flange and hollow shaft Optionally 2 stage with 2 coaxial rotation axes Technical data Flange connection DN40CF Rear flange DN16CF (MD35H only) Design machined from one piece, stainless steel 316L Shaft style - MD20/MD21 9mm, with female thread M5 - MD25 9.53mm, solid tubular shaft with mounted flange and - MD35/MD35H 3 x M3 threaded holes Break-away torque - MD20 0.45 Nm - MD21 0.56 Nm - MD25 2.4 Nm - MD35/MD35H 4.5 Nm Max. no load spin speed 500...1000 U/min Max. shaft axial thrust - MD20/MD21 20 N - MD25 142.5 N - MD35/MD35H 142.5 N Max. bakeout temperature 250C Order Code MD20TX000Z MD21TX000Z MD25TX000Z MD35TX000Z MD35HTX000Z Description MD20 rotary feedthrough, manual, standard bearing MD21 rotary feedthrough, manual, standard bearing MD25 rotary feedthrough, manual, standard bearing MD35 rotary feedthrough, manual, standard bearing MD35H rotary feedthrough, manual, with hollow shaft, standard bearing
MD20/MD21
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Available options with flange connection DN40CF MD25 Size Actuation Gearing Option Shaft Bearing
T TF BF P CF MD35 MD20 MD21 MD25 MD35 K KF D IS ISS ID RA RAI

X000 030 M
Z CE
(1-4)* (1-4)* (1-6)*
*Actuation and gearing options - We are glad to help you selecting the suitable
product.
10-18

3 models with or without rear flange Very large torque Optionally 2 stage with 2 coaxial rotation axes Constructed for high loadings Technical data Flange connection Rear flange Design Shaft style Break-away torque Max. no load spin speed Max. shaft axial thrust Max. bakeout temperature Order Code MD64TX000Z MD64HTX000Z
DN63CF DN40CF (MD64H only) DN63CF (MD64LBH only) machined from one piece, stainless steel 316L tubular shaft with mounted flange and 6 x M3 threaded holes 10 Nm 440 U/min 415 N 250C Description
MD64 rotary feedthrough, manual, standard bearing MD64 rotary feedthrough with hollow shaft, manual, standard bearing
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Available options with flange connection DN63CF Size Actuation Gearing Option Shaft X000 T BF CB P IS* MD64 MD64H ISS* SS* SSS* ID* SD* RA RAI
Bearing
Z SE
(1-4)* (1-4)* (1-4)* (1-4)* (1-4)* (1-4)*
product.
10-19

2 models with or without rear flange Very large torques Optionally 3 stage with 3 coaxial rotation axes Constructed for high loadings Technical data Flange connection Rear flange Design Shaft style Break-away torque Max. no load spin speed Max. shaft axial thrust Max. bakeout temperature Order Code MD100TX000Z MD100HTX000Z DN100CF DN63CF (MD100H only) welded housing, stainless steel 316L tube with mounted flange and 6 x M5 threaded holes 40 Nm 230 U/min 415 N 250C Description MD100 rotary feedthrough, manual, standard bearing MD100 rotary feedthrough with hollow shaft, manual, standard bearing
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Available options with flange connection DN100CF Size Actuation T MD100 MD100H P SS* SSS* SD
Shaft X000
Bearing Z
product.
10-20

UHV Rotary Source Shutters
Introduction
High quality rotary source shutters by UHV Design are becoming an industry standard. The pneumatic actuation provides a low cost solution for shutter applications such as sputter sources, ion guns or viewport shutters. Based on the MagiDrive rotary feedthroughs (see MagiDrive Introduction on page 10-11), the product range includes six different sizes to match the torque requirements for an array of applications. Each drive is fitted with an external pneumatic actuator, providing adjustable sweep between 30 - 170. Flow control valves are also supplied to adjust the speed of actuation. Use of the MagiDrive range ensures ultimate vacuum integrity through a homogenous design of the vacuum system. A solenoid operated spool valve switches compressed gas between the actuator ports. Energising the solenoid will sweep the shutter through the required angle. De-energising the solenoid returns the shutter to its start position. Actuators can also be fitted with 'Auto Switch' assemblies, complete with reed switches for system feedback and visual position indicators. Source shutters are supplied with the standard MagiDrive shaft options. Customised shafts can be quoted on request. Extended bearing housings can be provided for longer shafts. You can find an overview of the available viewport shutters in chapter 7, "Vacuum Optics".
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10-21

UHV Rotary Source Shutters
Switching between two fixed end positions Pneumatic actuation Compact Robust and reliable Powerful Adjustable tilt Variable speed of actuation
Technical data Connection Actuation Tilt Mechanic shaft connection Max. compressed air supply Compressed air connection Flow rate regulating valve Limit switches Option
CF flanges pneumatic, double-acting 30 - 170, adjustable end positions 9mm shaft stub with M5 female thread or tube with mounted flange (see MagiDrive) max. 6.8 bar M5 x 0.8mm 2 pieces 2 Reed switches (optional) baffles and holding fixtures on request
Size MD10 MD16 MD20 MD25 MD35 MD64
Flange Connection DN10CF DN16CF DN40CF DN40CF DN40CF DN63CF
Max. Torque [Nm] 0.18 0.45 0.45 1.00 2.5 10
10
Available options
Size MD10 MD16 MD20 MD25 MD35 MD64
Actuation RA RAI
Shaft X000 XM
Bearing Z
10-22
Rotary-Linear Feedthroughs and Transfer Systems

MPP/MPPL/MPPRL Push Pull Series
Introduction
Push Pull feedthroughs are available with linear or linear plus rotary motion with up to 250 mm stroke. This compact range is specifically designed for low load applications in high and ultra high vacuum such as probe transfer or manual shutters. Advantage of the Push Pull Series is a high power-to-size ratio. The rigid linear coupling results in a linear thrust of over 90 N and torque of more than 0.4 Nm. The magnetic coupling technology of UHV Design removes the need for edge-welded bellows. The elimination of welded bellows maximises the vacuum integrity and provides a robust, cost effective solution. Unlike bellow-sealed designs, the magnetic Push Pull feedthroughs are not subject to the thrust due to vacuum, resulting in smooth, free-moving operation. The magnetic Push Pull feedthroughs offer a simple and safe alternative to push pull systems with bellows. The range consists of three series with varying actuation options (manual, pneumatic, stepper or DC motorised). MPPRL series provides a linear and continuous rotary motion of the vacuum shaft. Linear strokes between 50 mm and 250 mm are offered as standard. Special strokes are available on request. MPPL series provides internally guided linear motion of the vacuum shaft, guaranteeing a rotation-free motion. Furthermore, the high axial thrust coupling produces no torque and so external rotation of the thimble does not apply a rotational force internally, ensuring smooth motion. In contrast to MPPL series, MPP series provides linear motion of an 'unguided' vacuum shaft. This is used to manipulate slides or pivot arms where a guided system may conflict with the mechanism. Please note that although the vacuum shaft is free to rotate the MPP does not provide rotation.
PP Series - Sample Transfer Systems

Introduction
PP series (PowerProbe) provides a magnetically linked actuation which enables linear motion with or without rotation. The standard option has a break-away force of 180 N. Additionally, there are two versions available: with low (70 N) and with high power (310 N).
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WSL/WSLR Series - Wobble Stick Series

Introduction
Wobble Sticks (WSL and WSLR) are one of the simplest manipulation tools to transfer manual movements into vacuum systems. Wobble Sticks by UHV Design provide a modular design: WSL series enables a lateral/tilt movement through a robust hydroformed bellows adaptor and a linear push/pull motion through a magnetic coupling. Additionally, the WSLR series also provides continuous rotation. The magnetic coupling technology eliminates the need for edge-welded bellows. This reduces the risk of leaks and in doing so, improves the reliability of the system for sensitive applications.
10-23

Serie MPP/MPPL/MPPRL
Push pull feedthroughs for linear and rotary motion with magnetically linked drive
Three models MPPRL MPPL MPP Small and compact UHV compatible Smooth operation Bellows-free construction Bakeable up to 250 C Standard stroke 50250mm Technical data Flange connection Drive shaft Max. axial force Max. torque Position fixing Max. bakeout temperature Order Code MPPRL16-50-H MPPRL16-100-H MPPRL16-150-H MPPRL16-200-H MPPL16-50-H MPPL16-100-H linear and rotary motion linear motion - guided vacuum shaft linear motion - unguided vacuum shaft
MPPRL
MPPL and MPP
DN16CF, DN40CF hollow shaft 8mm, with flat area and 2 x M3 tapped holes 98 N 0.45 Nm locking screw for linear motion only (not available for model MPP) 250C Flange Connection DN16CF DN16CF DN16CF DN16CF DN16CF DN16CF DN16CF DN16CF DN16CF DN16CF DN16CF DN16CF Stroke 50 100 150 200 50 100 150 200 50 100 150 200
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MPPL16-150-H MPPL16-200-H MPP16-50-H MPP16-100-H MPP16-150-H MPP16-200-H
To order a DN40CF flange connection please insert 35 instead of 16.
Available options for MPP and MPPL: Series MPP 50 100 150 250
Stroke
Actuation H P ID IS
Series MPPL
Stroke 50 100 150 250
Actuation H P ID IS
10-24

WSL/WSLR Series
Wobble stick feedthroughs for linear and rotary motion with magnetically linked drive
Two types with 3 or 4 axes of motion WSL linear and tilt motion WSLR linear, rotary and tilt motion WSLR-F linear, rotary and tilt motion and pincer (Flag) WSLR-E linear, rotary and tilt motion and gripper (ESCA) WSLR-P linear, rotary and tilt motion and gripper (Puck) UHV compatible Bakeable up to 250 C Standard stroke 150 or 250mm Optional with gripper or pincer
Gripper
Technical data Flange connection Drive shaft Max. break-away force Max. torque Max. suggested sample mass Max. bakeout temperature Max. tilt Order Code WSL-150-H WSL-250-H WSL WSLR-150-H WSLR-250-H WSL
DN40CF round shaft 8mm 65 N 0.45 Nm 260 g 250C 15 Stroke 150 250 150 250
Pincer
Flange Connection DN40CF DN40CF DN40CF DN40CF
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WSLR
10-25

PP Series
Transfer rod useable for all application also for big loads
5 model series Linear motion with and without rotation Applicable also for big loads UHV applicable Round shafts of stainless steel Huge axial force (180 N standard) Optional 2 further forces (70 N or 310 N) Very high torque Low deflection Robust, precise and repeatable Suitable for horizontal and vertical mounting Locking screw for position fixing Bakeable up to 250 C Model LPP PP EPP DAP Linear motion only Linear and rotary motion Linear motion with vertical lift mechanism for sample transfer at the shaft cone point Linear and separate rotary motion, 2 coaxial round shafts, outer shaft only with linear motion Description Max. Stroke [mm] 1219 1524 1219 1219
Technical data
Flange connection
Axial force
DN40CF DN63CF (onlywithstroke1524 mm)
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Torque Max. torque with horizontal mounting Max. load with vertical mounting Actuation options Max. bakeout temperature Position fixing
Actuation options
Standard High Low
180 N 310 N (LPP, PP only) 70 N (LPP, PP only)
see chart see chart see chart see table 250C locking screw
H HR E SD SS
= hand wheel = hand wheel with 2 bakeable limit switches for retracted position = hand wheel with extension = side mounted 24 V DC motor with 2 bakeable limit switches = side mounted stepper motor with 2 bakeable limit switches
MagiDrive Type LPP PP EPP DAP
Coupling Low Standard High H HR
Actuation E SS SD
= Standard = Option = not available
10-26

PP Series
Model LPP
Stroke 2501219mm Drive shaft 15mm with M8 inner thread and guidance for linear motion
Stroke A
250 461
304 515
457 692
609 870
914 1225
1219 1530
Model PP35
Stroke 3041524mm Stroke up to 1219 mm with flange DN40CF, stroke 1524 mm with flange DN63CF Drive shaft 15mm with M8 inner thread
10
Stroke A
304 515
457 692
609 870
914 1225
1219 1530
1524 1845
10-27

PP Series
Model EPP
Stroke 3041219mm Drive shaft with lift mechanism in front (plate 20 x 60mm, stroke 12mm)
Stroke A
304 566
457 717
609 870
914 1290
1219 1594
10
Model DAP
Stroke 3041219mm Drive shaft 15mm with M8 inner thread and guidance for linear motion
Stroke A
304 566
457 721
609 931
914 1290
1219 1594
10-28

PP Series
Available options:
Model LPP
Series LPP
Flange 35
Linear stroke 250 304 457 609 914 1219
Actuation H HR E SD SS
LPP also available with low or high power axial force.
Model PP35
Series PP
Flange 35 64*
Linear stroke 304 457 609 914 1219 1524*
Actuation H HR
PP also available with low or high power axial force. *Stroke 1524mm with flange DN63CF
Model EPP
Series EPP
Flange 35
Linear stroke 304 457 609 914 1219
Actuation H HR
10
Model DAP
Series DAP
Flange 35
Linear stroke 304 457 609 914 1219
Actuation H HR
10-29

Translators for Motion along the Z Axis
Introduction
Linear translators (linear shift mechanisms) provide linear motion along the port axis (Z). Typical applications are the positioning of beamline filters, the adjustment of sputter sources and deposition stages including industrial applications. The translators are equipped with CF flanges, bakeable up to 250 C and totally UHV compatible. Bellow-sealed linear translators provide a smooth, precise motion by means of kinematically designed external leadscrew driven mechanism with anti-rotation and anti-deflection system. The rigid construction provides a high load capability. The edge welded bellows are manufactured from stainless steel 316L and have a minimum design life of 10,000 cycles. Systems with a design life of up to 1 million cycles are available on request.
Bellows sealed Robust Precise and smooth-running Repeatable Totally UHV compatible Various actuation possibilities 6 model series Technical data Material diaphragm bellows Bakeout temperature Life cycle (diaphragm bellows) Z stroke Actuation Accuracy stainless steel 316L 250 C (without motor or pneumatic) 10,000 cycles (optional to 1 m) 25mm1000mm (depending on series) manual, pneumatic, stepper or DC motor 10 m (optional)
Actuation
10
H P SD SS
= manual with hand wheel (with gear ratio for big dimensions) = pneumatic = side mounted DC motor = side mounted stepper motor Pneumatic actuation Motorised actuation
Manual actuation
Graduations
DLA LP ES = engraved scale (resolution 1 mm) DLA = digital scale with LCD display (resolution 0.01 mm) LP = linear potentiometer (resolution 2 m)
10-30

Type Series
Model LSM
Standard construction for all applications Largest number of flange connections, DN10 to DN160 Largest number of actuation options Up to 350 mm standard stroke Flange with threaded holes Model HLSM with through bolt holes (from DN40) Model LSM10 Model LSM16 25 H P 50 100 Model Stroke [mm] Actuation Scale (optional) Wiring upgrade (optional) UP 25 50 75 LSM38* LSM64* HLSM100 HLSM150 100 150 200 250 300 350 H P SS SD ES DLA LP Stroke [mm] 35 Stroke [mm] Actuation H Actuation Scale (optional) ES
Modell HLSM
10
*For HLSM with through bolt holes add "H" at the beginning of order code.
Modell LSML
Construction for big strokes Strengthened frame structure Nominal width DN40 and DN63 200 mm to 1000 mm standard stroke Flange with threaded holes (HLSML with through bolt holes in mounting flange)
Model
Stroke [mm]
Actuation
Scale (optional)
Wiring upgrade (optional) UP
200 LSML38 LSML64 HLSML38 HLSML64 300 400 500 600 800 1000
H SD SS P
ES DLA
10-31

LSM / HLSM dimensions
A: expanded length B: compact length manual actuation side mounted stepper motor
Order code LSM38 LSM38-25 LSM38-50 LSM38-75 LSM38-100 LSM38-150 LSM38-200
A 98.7 123.7 162 187 250 312.5 377.5 446.5 509 106.7 131.7 170 194.5 260 322.5 387.5 456.5 519.1
B 73.7 73.7 87 87 100 112.5 127.5 146.5 159 81.7 81.7 95 94.5 110 122.5 137.5 156.5 169.1
C 181 205 242.9 268.3 331 394.3 459.3 531.6 590.3 189.2 212.6 250.9 275.8 341.9 408.3 468.3 538.3 600.9
D 154.7 154.7 154.7 154.7 154.7 154.7 154.7 154.7 154.7 154.7 154.7 154.7 154.7 154.7 154.7 154.7 154.7 154.7
E 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75
F 38 38 38 38 38 38 38 38 38 38 38 38 38 38 38 38 38 38
G 71.3 71.3 71.3 71.3 71.3 71.3 71.3 71.3 71.3 71.3 71.3 71.3 71.3 71.3 71.3 71.3 71.3 71.3
H 256.5 256.5 256.5 256.5 256.5 256.5 256.5 256.5 256.5 256.5 256.5 256.5 256.5 256.5 256.5 256.5 256.5 256.5
J 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163 163
K 39 39 39 39 39 39 39 39 39 39 39 39 39 39 39 39 39 39
10
LSM38-250 LSM38-300 LSM38-350 HLSM38 HLSM38-25 HLSM38-50 HLSM38-75 HLSM38-100 HLSM38-150 HLSM38-200 HLSM38-250 HLSM38-300 HLSM38-350
10-32

LSM / HLSM dimensions
Order code LSM64 LSM64-25 LSM64-50 LSM64-75 LSM64-100 LSM64-150 LSM64-200 LSM64-250 LSM64-300 HLSM64 HLSM64-25 HLSM64-50 HLSM64-75 HLSM64-100 HLSM64-150 HLSM64-200 HLSM64-250 HLSM64-300 HLSM100 HLSM100-25 HLSM100-50 HLSM100-75 HLSM100-100 HLSM100-150 HLSM100-200 HLSM150 HLSM150-25 HLSM150-50 HLSM150-75 HLSM150-100 HLSM150-150 HLSM150-200 176 201 226 251 322 372 151 151 151 151 172 172 287.8 312.9 337.9 362.9 433.9 483.8 304.7 304.7 304.7 304.7 304.7 304.7 229 229 229 229 229 229 150 150 150 150 150 150 104.7 104.7 104.7 104.7 104.7 104.7 389 389 389 389 389 389 310.7 310.7 310.7 310.7 310.7 310.7 105.4 105.4 105.4 105.4 105.4 105.4 175 200 225 250 300 381.5 150 150 150 150 150 181.5 287.2 312.5 337.2 362.2 412.2 493.7 266 266 266 266 266 266 177 177 177 177 177 177 102 102 102 102 102 102 105 105 105 105 105 105 350.2 350.2 350.2 350.2 350.2 350.2 272.5 272.5 272.5 272.5 272.5 272.5 92.2 92.2 92.2 92.2 92.2 92.2 135 161 186 211 274 336.2 417.3 467.3 111 111 111 111 124 136.2 117.3 167.3 244 249 274 299 362 418 505.2 555.2 203 203 203 203 203 203 203 203 122.5 122.5 122.5 122.5 122.5 122.5 122.5 122.5 65 65 65 65 65 65 65 65 75 75 75 75 75 75 75 75 296.4 296.4 296.4 296.4 296.4 296.4 296.4 296.4 212.2 212.2 212.2 212.2 212.2 212.2 212.2 212.2 64 64 64 64 64 64 64 64 136 161 186 211 261 317 378 448 111 111 111 111 111 117 128 148 224 247.3 271.8 298.9 348.9 405.7 460 530 203 203 203 203 203 203 203 203 122.5 122.5 122.5 122.5 122.5 122.5 122.5 122.5 65 65 65 65 65 65 65 65 75 75 75 75 75 75 75 75 296.4 296.4 296.4 296.4 296.4 296.4 296.4 296.4 212.2 212.2 212.2 212.2 212.2 212.2 212.2 212.2 64 64 64 64 64 64 64 64 A B C D E F G H J K
10
10-33

LSML / HLSML dimensions
A: expanded length B: compact length actuation: manual/motor
Order code HLSML38 HLSML38-200 HLSML38-300 HLSML38-400 HLSML38-500 HLSML64 HLSML64-200 HLSML64-300 HLSML64-400 HLSML64-500 HLSML64-600 HLSML64-800
A 330.3 462.5 591.4 717 325 467.3 592 700 860 1101
B 130.3 162.5 191.4 217 125 167.3 192 200 260 301
C 415.3 542.4 674.9 799 408.2 550.5 675.2 783.2 947.2 1184.2
D 160.8 160.8 160.8 160.8 204 204 204 204 204 204
E 103 103 103 103 161.4 161.4 161.4 161.4 161.4 161.4
F 38 38 38 38 65 65 65 65 65 65
G 71.5 71.5 71.5 71.5 72 72 72 72 72 72
H 265.5 265.5 265.5 265.5 313.7 313.7 313.7 313.7 313.7 313.7
J 163 163 163 163 219 219 219 219 219 219
K 39 39 39 39 64 64 64 64 64 64
10
10-34

Type Series
Model CLSM
Compact construction with short mounting length DN40 to DN63 Up to 100 mm standard stroke Flanges with mit threaded holes Model Stroke [mm] Actuation Scale Wiring upgrade (optional) UP 25 CLSM38 CLSM64 50 75 100 H SD SS P ES DLA
Model LSMT
Complies with model LSM, but with adjusting bellows (tilt 2) for the travelling flange Nominal width DN40 and DN63 Up to 100 mm standard stroke Flanges with threaded holes Model Stroke [mm] Actuation Scale (optional) Wiring upgrade (optional) UP 50 75 100 H P SS SD LSMT64 25 50 100 H P SS SD ES DLA UP ES DLA
LSMT38
10
Model LSMX
Complies with Model LSM, but with adjustment device (X axis 5 mm) on the travelling flange Nominal width DN40, DN64 and DN100 Up to 100 mm standard stroke Flanges with threaded holes
Model
Stroke [mm]
Actuation
Scale (optional) ES
Wiring upgrade (optional) UP
LSMX38 LSMX64 LSMX100
50 100
H P SD SS
10-35

CLSM dimensions
Order code CLSM38 CLSM38-25 CLSM38-50 CLSM38-75 CLSM38-100 CLSM64 CLSM64-25 CLSM64-50 CLSM64-75
A 63 92 125 163 106 131 156 188
B 38 42 50 63 81 81 81 88
C 173 202 235 273 221 221 221 221
D 142 142 142 142 206 206 206 206
E 75 75 75 75 122.5 122.5 122.5 122.5
F 39 39 39 39 65 65 65 65
G 102 102 102 102 73 73 73 73
H 247 247 247 247 259 259 259 259
J 152 152 152 152 215 215 215 215
K 39 39 39 39 67 67 67 67
10
CLSM64-100
LSMT dimensions
Order code LSMT38 LSMT38-50 LSMT38-100 LSMT64 LSMT64-25 LSMT64-50
A 142 199.5 180.5 230.5
B 92 99.5 130.5 130.5
C 213 270.5 307 307
D 155 155 203 203
E 75 75 122.5 122.5
F 38 38 65 65
G 89 89 55.5 55.5
H 259 259 298 298
J 165 165 213 213
K 39 39 64 64
10-36

LSMX dimensions
manual actuation
A: expanded length B: compact length
10
side mounted stepper motor
Order code LSMX38 LSMX38-50 LSMX38-100
A 143 206
B 93 106
C 205 267
D 155 155
E 105 105
F 26 26
G 52 52
H 257 257
J 183 183
K 39 39
10-37

Port Aligners Diaphragm Bellows for Length and Angle Compensation
Robust Compact Highly stressable Technical data Axial stroke Adjustment angle Bellow material Flange material Bakeout temperature Mounting flange PA-35 PA-64 PA-100 PA-150 PA-200 DN40CF DN63CF DN100CF DN160CF DN200CF A 59 75 90 100 100 B 73.4 93 108 125 125 C 106 166 206 279.4 329.4 5mm 3 stainless steel 316L stainless steel 316L 250C D 20 26 26 45 44 E M8 M12 M12 M16 M16 F 38 65 102 127* 127* G 88 140 180 238.4 290
* Options available
Model PA
Flange 35 64 100 150 200 100
Holes H T
10
Order code PA-35H PA-35T PA-64H PA-64T PA-100H PA-100T PA-150H PA-150T PA-200H PA-200T M16 M16 8.9 M8 8.3 M8 8.3 M6 8.3 Threaded holes (T) Through holes (H) 6.4
10-38
Y, XY, XYZ Translators

Translators for Motions along Multiple Axes
Introduction
UHV translators enable mechanical XYZ-movements in vacuum systems with different tilt angles, which are e.g. required in connection with probe analysis. These manipulators are characterised by high resolution and enable a precise positioning of probes or metrology in a vacuum chamber. Typical applications are the electron spectroscopy, laser optical analysis, beamlines or thin film deposition (e. g. MBE, CVD). The British expert UHV Design, represented by VACOM, is specialised to build sophisticated manipulators for these applications by using different modular components.
Bellows sealed Robust Precise and smooth-running Repeatable Totally UHV compatible Various actuation possibilities 5 model series Technical data Material diaphragm bellows Max. bakeout temperature Life cycle (diaphragm bellows) Z stroke XY stroke Actuation Accuracy stainless steel 316L 250C (without motor or pneumatic) min. 10,000 cycles (optional to 1 million) 25mm1000mm (depending on series) 10mm oder 22mm manual, pneumatic, stepper or DC motor 10 m (optional)
10
10-39
Y Translators
Y Translators for 1 Axis Linear Motion
Mounting flange DN63CF or DN100CF Diaphragm bellows sealed Robust Precise and smooth-running Repeatable Totally UHV compatible Various actuation possibilities Technical data Mounting flange Diaphragm bellows Bellows durability Bakeout temperature Actuation options Model Main flange Trav. flange Stroke Bellows ID Free ID Mounting height Model LDM 64 100 38 64 H IS ID LDM64-64-H CF flanges, screw orientation shifted, M8 threaded holes stainless steel 316L 10,000 cycles 250C (motor demounted) manual with hand wheel, stepper or DC motor LDM64/64 DN63CF DN63CF 7.5 60 60 87.5 LDM100/38 DN100CF DN40CF 31 90 38 182 Trav. Flange LDM100/64 DN100CF DN63CF 31 90 60 182 Actuation
LDM64/38 DN63CF DN40CF 7.5 60 38 87.5
Main Flange
10
LDM100-64-H
10-40
XY Translators
Translators for 2 Axes Linear Motion
Mounting flange DN63CF, DN100CF or DN160CF Diaphragm bellows sealed Robust Precise and smooth-running Repeatable Totally UHV compatible Hand or stepper motor actuation Technical data Connection CF flanges, screw orientation shifted, M8 threaded holes Stroke max. 14mm or 31mm Bellows material stainless steel 316L Bellows durability 10,000 cycles XY resolution 0,01mm with manual drive 0,0005mm with stepper motor Bakeout temperature 250C (motor demounted) Actuation options hand wheel with micrometer scale, stepper motor with gear Model XY14-64 XY14-100 XY31-100-38 XY31-100-64 XY31-150-64 XY57-150-150 Series XY14 64 100 XY31 100 150 XY57 38 64 H IS Inner 38 38 38 60 60 120 flange to flange 135 147 165.5 165.5 180 310 Main Flange XY stroke 14mm (vector) 10mm (per axis) 31mm (vector) 22mm (per axis) 57 mm (vector) 40mm (per axis) Travelling Flange 38 H IS Sample max. 22mm (for full stroke) max. 28mm (for full stroke) max. 36mm (for full stroke) Actuation
10
XY14 (manual actuation)
150
150
H, IS
Scale drawing for XY31 on page 10-43.
10-41
XY Translators
Translators for 2 Axes Linear Motion
Rotatable Axis MultiBase Manipulator The Rotatable Axis MultiBase X-Y manipulator enables the X and Y axes to be rotated about the axis of the manipulator, whilst under vacuum. The mounting flanges of the vacuum system and at the Z translator remain fixed while the actuation of the XY translator moves around them. This is a unique possibility to precisely align the movement axes with a port axis of the chamber. This feature is especially useful where e.g the user wants to move the sample along the axis of a lens, etc. mounted on ports which are not exactly parallel or perpendicular to the manipulator axes. Using the Rotatable Axis MultiBase manipulator together with z-shifts, rotary drives and other options for sample handling, probe heating or cooling, a complete eucentric manipulator system can be assembled without a sliding seal or differentially pumped rotary housing being required.
Technical data Mounting flange Max. stroke Material diaphragm bellows XY resolution Rotation angle
DN63CF, DN100CF or DN160CF Max. 14mm or 31mm Stainless steel 316L 0,01mm with manual drive 0,0005mm with stepper motor 360
10
Please find order codes at page 10-41, with -RH for manual and -RS for stepper motor actuation along the rotatable axis.
10-42
XYZ Translators
Modular Translators for Linear Motion along all 3 Axes
Combination of Z linear translator and XY translator 5 XY translator models Up to 1000 mm Z stroke Highly stressable Separate diaphragm bellows for motion in XY and Z (exchangeable) Optional manual or motor actuation
Technical data Main flange Travelling flange Bakeout temperature XY resolution Actuation options XY Z stroke Z stroke resolution Actuation options Z Diaphragm bellows material Mounting position
DN63CF, DN100CF or DN160CF (screw orientation shifted, M8 threaded holes) DN40CF or DN63CF, (screw orientation shifted, M6 or M8 threaded holes) 250C (motor demounted) 0,01mm with manual actuation 0,0005mm with stepper motor hand wheel with micrometer scale, stepper motor with gear 251000mm 0,25mm with manual drive 0,01mm with digital linear scale 0,0005mm (semi step mode) manual, stepper or DC motor stainless steel 316L any, without support
10
XY31 (manual drive)
10-43
XYZ Translators
Modular Translators for Linear Motion along all 3 Axes
Model XY14-64-38 XY14-100-38 XY Actuation H S Optional R.A.M.B* Z Stroke Z-50 Z-100 Z-200 Z-400 Z-600 Z Actuation H SS SD
XY31-100-38 XY31-100-64 XY31-150-38 XY31-150-64
H S
R RS
Z-50 Z-100 Z-200 Z-400 Z-600 Z-800 Z-1000 (CF63 only)
H SS SD
XY57-150-38 XY57-150-64 XY57-150-100** XY57-150-150**
H S
Z-50** Z-100** Z-200** Z-400 Z-600 Z-800 Z-1000 (CF63 only)
H SS SD GH**
10
* R.A.M.B: Rotable Axis MultiBase Actuation ** Only limited strokes available GH: Manual with geared-handwheel H: Manual handwheel R: Manual actuation RS: Stepper motorized S: Side mounted stepper motor SD: Side-mounted DC motor SS: Side-mounted stepper motor
10-44
XYZT-Translatoren
Modular Translators for Linear Motion along all 3 Axes and Tilt Motion
XYZ Translator with tilt motion Exchangeable bellow UHV compatible High load capacity Precise and smooth-running Optional manual or motor actuation Technical data Mounting flange Flange Z stroke Z resolution XY stroke XY resolution Tilt motion Actuation Max. bakeout temperature Order Code XYZT64-50-H XYZT64-100-H XYZT64-150-H XYZT64-200-H
DN63CF, DN100CF oder DN160CF DN63CF (screw orientation shifted, M8 threaded holes) 50, 100, 150 or 200mm 0.25mm with linear scale 0.01mm with digital scale 0.0005mm with stepper motor 12.5mm 0.001mm with manual actuation 0.0005mm with stepper motor (semi step mode) 2 (manual) Manual, stepper or DC motor 250C (motor demounted) Z Stroke 50 100 150 200 Actuation* manual/micrometer scale manual/micrometer scale manual/micrometer scale manual/micrometer scale
*For selection of other actuation: S for stepper motor (all axes without tilt motion) or D for DC motor (all axes without tilt motion)
315.4 230 extended, 180 compressed 188.80
10
2.00
T TIL
Bolt spacers for system mounting
114 Micrometer Drive For 'Y' Plane 12.5 mm
Micrometer Drive For 'X' Plane 12.5 mm
Calibrated handwheel
60
Linear scale for Z motion
84.2
Tilt adjustment screw
10-45
UHV Manipulators
MultiCentre UHV Probe Manipulators
Manipulators for research and development in surface physics, synchrotron applications and other analytical methods in UHV Introduction
MultiCentre provide a complete solution for probe transfer and manipulation. UHV manipulators enable mechanical motion in vacuum systems necessary in connection with probe analysis. For applications which require various axes, tilt, rotation or probe heating or cooling, the British expert UHV Design, represented by VACOM, is specialised to build sophisticated manipulators with up to 6 independently movable axes by using different modular components. These manipulators are characterised by high resolution and enable a precise positioning of probes or metrology in a vacuum chamber.Typical applications are the electron spectroscopy, laser optical analysis, beamlines or thin film deposition (e. g. MBE, CVD).
MultiCentre probe handling system Complete solution for research and analysis Translation in all 3 directions Up to 2 rotation axes (polar and azimuthal) Highly stressable High resolution and accuracy Probe transfer with bayonet connector Probe heating by PBN heater elements or e-beam heater Electrically isolated receptor Manual actuation or stepper motor Optional with LN2 or cryostatic cooling vectoria Optional with rotatable XY translator Custom solutions Technical data Max. probe diameter max. 33mm XY stroke 12.5 mm or 19 mm or 40 mm Z stroke 25mm1000mm XY stroke resolution manual actuation: 0.01mm stepper motor: 0.0005mm Z stroke resolution manual actuation: 0.25 mm (optional 0.005 mm with digital linear scale) stepper motor drive: 0.0005 mm Probe rotation polar: 180 azimuthal: Continuous with LN2 cooling (90 with LHe cooling) Probe heater (optional) PBN heater element: > 1000 C e-beam heater: > 1200 C Probe cooling < -150 C with LN2 cooling < 30 K with LHe cooling Temperature measurement type K thermocouple (type N optional) Electrical probe isolation 1000 V, > 500 MOhm
10
Puck Style
Flag Style
ESCA Stub Style
10-46
UHV Manipulators
EpiCentre MBE Manipulators
Manipulators for probe heating in MBE, CVD and sputter processes or other applications with heated probes
The modular EpiCentre manipulators offer a complete UHV solution for the heating, rotation, positioning, manipulation and insertion of probes or substrates. 2 series - EpiCentre 100 and EpiPRO Probe heating up to 1200 C Sample size up to 200 mm Temperature uniformity Heat-proof mechanical construction and bearing Applicable for corrosive processes Simultaneous probe rotation and heating Manual or motor drive PgG and PBNG graphite heating elements
Custom sample holder
PBN heater element with heat-proof housing
MagiGear rotary feedthrough for sample rotation
Differentially pumped quartz enclosure for heater elements
10
10-47
UHV Manipulators
EpiCentre Modell 100
Modular assembled heater manipulator with numerous options
Individually configurable due to modular configuration
Separate linear motion of sample holder and complete system Adjustable distance between heater element and sample Adjustable distance to coating source DC motor for probe rotation Optional quartz enclosure for heating element to protect from corrosive gases Custom sample holders Biasing capabilities up to 2 kV DC or 80 W HF Motorizable Process adjusted Technical data Sample diameter 25mm200mm (1" - 8") (bigger diameters on request) Standard heater elements PgG and PBNG (others upon request) Max. temperature 1200 C for standard heater modules, 1000 C for quartz-enclosed heater modules (based on a test with a Mo block) Temperature uniformity nominally 2.5 C across the central 90 % of a Si wafer Rotation speed up to 80 rpm Thermocouples type C (tungsten rhenium) or type K (Chromel/Alumel) Biasing capability 2 kV DC or 2 kV DC isolated/ 80 W RF power Sample / flange size / rotary feedthrough - 25 - 50 mm (1 - 2") / DN100 - 1 0CF / 1 stage - 75 mm (3") / DN160CF / 1 stage - 100 mm (4") / DN200CF / 1 or 2 stage - 125 mm (5") / DN200CF / 2 stage - 150 mm (6") / DN250CF / 2 stage - 200 mm (8") / DN300CF/ 2 stage Options - differential pumped quartz enclosure for hot plates - motor drive for linear motion - special design of the grip
10
10-48
UHV Manipulators
EpiPRO
New development of the EpiCentre series and especially designed for deposition, sputter and CVD processes
Standard configuration for two wafer sizes Patented EpiCentre rotation and heating Reference sensor for adjustment of bracket Compact substrate lowering mechanism with magnetic coupling DC and RF biasing as standard option Identical design of all options from atmosphere side Individually configurable by modular design
Technical data Wafer diameter 100mm and 150mm (4'' and 6'') as standard (2'' and 8'' on request) Standard heating elements PgG (PBNG,SiC graphite and -SiC heating elements on request) Max. temperature 1200C across the central 90 % of a Si wafer Temperature uniformity nominal 2.5C across the central 90 % of a Si wafer Insertion length 240mm or 300mm Thermocouple two O-Ring sealed, sheathed type K thermo couples, UHV feedthroughs optional Bias options DC system or combined DC/RF system 2 kV DC isolation, 80 W RF power Sample transfer facility 25mm magnetically coupled and pneumatically actuated lowering of the bracket to facilitate probe transfer Positioning magnetic proximity home switch assembly for position sensing as standard System mounting flange DN300CF (CF 14''), others on request
10
10-49
Telescopic Manipulator for Radial Transfer

Radial Telescopic Transfer Arm
MD100 MagiDrive with hollow shafts for polar rotation of the arm: Mounting flange Max. axial load Max. radial load Max. torque Max. bakeout temperature Configuration Positioning DN100CF max. 400 N max. 400 N max. 40 Nm max. 250 C (without motor) laterally mounted stepper motor, tubular shaft with mounting flange and standard bearings external switch for 180 rotation with reference point and end position
MD35H MagiDrive to drive the Arm extension motion: Mounting flange Configuration Positioning Telescopic transfer arm system: Stroke Reproducibility Configuration 700 mm 0.5 mm fully extended to end position complete with telescopic actuation and roll supports mounted at rear of MD100 side-mounted stepper motor, tubular shaft with mounting flange, standard bearings and special mechanical connection to MD100 to avoid cross talk of arm rotation and extension internal switch with reference point and end position of linear motion
10
Refer to chapter 1 "Vacuum Chambers"
Linear lift/lower mechanism: Vertical travel Bellows Actuation 22 mm with 100 CF transfer opening 50 mm with 150 CF transfer opening exchangeable side-mounted stepper motor
10-50

Chapter 10 Mechanical Feedthroughs

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Chapter 10 Mechanical Feedthroughs

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Mechanical Feedthroughs

Y, XY and XYZ Translators

MultiCentre and EpiCentre

Rotary Feedthroughs with Magnetically Linked Drive

Rotary-Linear Feedthroughsand Transfer Systems

10-23 10-24 10-25 10-26 to 10-29

Linear Translators and Aligners

Z Translators Page 10-30 to 10-37 Port Aligners Page 10-38

Y, XY, XYZ Translators

Introduction Page Y Translators Page XY Translators Page XYZ Translators Page

10-39 10-40 10-41 to 10-42 10-43 to 10-45

MultiCentre UHV Probe Manipulators

EpiCentre MBE Manipulators

Telescopic Manipulator for Radial Transfer

Radial Telescopic Transfer Arm Page 10-50

Rotary Feedthroughs with Magnetofluid Sealing

Rotary Feedthroughs with Magnetofluid Sealing

Magnet configuration RMS series

Rotary Feedthroughs with Magnetofluid Sealing

Rotary Feedthroughs with Magnetofluid Sealing

10C-26100900 and 10C-26100902

10C-26101100 and 10C-26101102

10C-26101400 and 10C-2601402

10C-26101300 and 10C-26101302

10C-26101000 and 10C-26101002

10C-26101200 and 10C-26101202

Rotary Feedthroughs with Magnetofluid Sealing

Rotary Feedthroughs with Magnetofluid Sealing

Rotary Feedthroughs with Magnetofluid Sealing

Rotary Feedthroughs with Magnetofluid Sealing

Rotary Feedthroughs with Magnetically Linked Drive

Rotary Feedthroughs with Magnetically Linked Drive

Rotary Feedthroughs with Magnetically Linked Drive

Overview MagiDrive models

Rotary Feedthroughs with Magnetically Linked Drive

Shaft type X 030 MX 000 D

*Hand wheel with timing pulley (similar to option P)

= Standard = Option = not available

Rotary Feedthroughs with Magnetically Linked Drive

Max. Output Torque [Nm]

Max. Output Spin Speed [1/min]

MD16 MD19* MD20 MD21*

In-Line stepper motor (IS)

Side mounted DC motor (SD)

In-Line DC (ID) MD25 Side mounted stepper motor (SS)

In-Line stepper motor (IS)

Side mounted DC motor (SD)

In-Line DC (ID) MD35 MD35H

Side mounted stepper motor (SS)

In-Line stepper motor (IS)

Side mounted DC motor (SD)

In-Line DC (ID) MD64 MD64H

Side mounted stepper motor (SS)

In-Line stepper motor (IS)

Rotary Feedthroughs with Magnetically Linked Drive

Order Code MD10TX000Z

Description MD10 rotary feedthrough, manual, standard bearing

Rotary Feedthroughs with Magnetically Linked Drive