TRNG I HC CNG NGH I HC QUC GIA H NI

K THUT O LNG V CM BIN

TM HIU SENSOR PIEZOELECTRIC MICROPHONES 2510M4A

H Ni, thng 4/2012

Piezoelectric microphones 2510M4A

I.

S lc v m thanh

m thanh l cc dao ng c hc (bin i v tr qua li) ca cc nguyn t, phn t hay cc ht lm nn vt cht v lan truyn trong mi trng vt cht nh cc sng. m thanh c c trng bi tn s, bc sng, chu k, bin v vn tc lan truyn (tc m thanh). i vi thnh gic ca ngi, m thanh thng l s dao ng, trong di tn s t khong 16 Hz n khong 20 kHz, ca cc phn t khng kh, v lan truyn trong khng kh, va p vo mng nh, lm rung mng nh v kch thch b no. Sng m Sng m l cc sng dc truyn qua mi trng rn lng kh v c tn s trong vng nghe c.

Vn tc sng m Sng m cng l mt sng c, nn ph thuc va vo qun tnh ca mi trng ( d tr ng nng), va vo tnh n hi ca mi trng ( d tr th nng).
v= tinh _ dan _ hoi = quan _ tinh B

p : modul khi ca mi trng, xc nh tnh thay i th tch V ca V / V phn t mi trng khi p sut p (lc trn n v din tch) thay i. B=

: Khi lng ring ca mi trng.

Trong khng kh nhit 20C tc m l 343m/s; ca nc l 1482m/s.

Phng trnh sng m dch chuyn dc s ca mt phn t khi lng do mi trng sng m gy ra l:

s = S m cos(kx wt ) S m :bin m (dch chuyn cc i t v tr cn bng)

k= 2 v = 2 f : vf ln lt l bc sng v tn s sng m.

T = 1/ f : chu k sng m
bin thin ca p sut trong mi trng do sng m gy ra:

p = pm sin(kx t )
Trong , bin p sut l

pm = (v ) Sm

Cng m Cng m I ca mt sng m l tc trung bnh m sng m truyn nng lng qua mt n v din tch v c xc nh bng:
I= 1 2 v 2 S m (W/m2) 2

Vi m chun (tn s f = 1000Hz) tai ngi c th nghe c m t

10
12

10W / m 2

Mc cng m theo dexiben = (10dB) log I ,

0

Trong , I 0 = 1012 W / m 2 l cng m chun. Nh vy, c cng tng ln 10 ln th mc cng m cng thm 10dB.

Cc c trng sinh l ca m cao: do tai con ngi cm th, cao ca m ph thuc vo tn s m. Tn s cng cao th m cng cao.

Tai con ngi c th cm nhn c cc m thanh tn s t 16 n 20000 Hz. f < 16Hz: h m f > 20 000Hz: siu m to: Cm gic m thanh to hay nh. to ca m ngoi ph thuc vo bin dao ng v tn s m, cn ph thuc vo cng m hay mc cng m. phn bit to ca hai m th chnh lch mc cng m ca chng t nht l 1dB. m sc: Sc thi ring ca m thanh do mi ngun m pht ra. Dng phn bit c cc m cng tn s.

Giao thoa v cng hng Giao thoa ca hai sng m kt hp l hin tng lm tng cng hay suy gim bin sng m ti mt im trong mi trng m hai sng truyn qua. Cng hng l hin tng bin t cc i xy ra khi tn s dao ng ring bng tn s ca ngoi lc cng bc. II. Cc thng s cm bin Piezoelectric microphone 2510M4A sensor

Cu to hnh hc cm bin

Cc c trng bin -tn s v nhit Cm bin 2510M4A microphone o ting n m thanh cng cao v bin ng p sut rt thp. Cu tao kn v phm vi nhit hot ng rt rng t -67 F n 500 F (-55 C n 260 C) lm cho b cm bin ny cc k hu ch trn mt phm vi rng ca iu kin mi trng, bao gm c cm nhn vi nhng thay i cao, v b cm bin c s b rung ng kt hp vo cc phn t cm bin. Microphone l mt thit b t to ngun m khng i hi ngun in bn ngoi . Thng s Tnh cht ng n v

Di o nhy

Tn s cng hng Di thng 1dB 3dB H tn gii hn (-3 dB) p ng bin p ng nhit tuyn tnh 120 to 164 dB SPL Tnh cht in in tr in dung Th khng Tnh cht mi trng Di nhit lm vic m rung ng Ti 2kHz Gii hn rung iu ha Gii hn sc c trng vt l Kch thc ng knh Trng lng Vt liu Kt ni Momen xon Hiu chun Cung cp nhy

dB SPL[1] pC[2] rms / 140 dB SPL pC rms/psi [3] pC rms/N/m2 [4]hoc (mV/Pa) dB re 1 pC rms /1 bar kHz Hz Hz dB M pF F (C) Output of unit at 105dB SPL/ 1g pk g pk [5] g pk Inch[6] g(oz)[7] Mates Endevco 3000 Series Cables Nm pC/pk / 140 dB SPL pC/rms /140 dB SPL

100 to >180 31 1069 0.155 -33.1 30 2 to 4kHz 1 to 10kHz <0.7 Xem biu 0.5 >20 000 5200 -67 to +500 -55 to +260 Hn kn 150 1000 Hnh v 0.816 57(2.0) Thp khng g Cp ng trc, loi 10-32

[1]. 0 dB SPL = 0.0002 bar (dynes/cm2 ) = 20x10-6 N/m2 = 20 Pa. [2]. 1pC=1mV [3]. 140 dB SPL = 2.9x10-2 psi.

[4]. 140 dB SPL = 200 N/m2. [5]. 1gpk = g peak [6]. 1Inch = 2.54cm [7]. 1oz = 28.34952 g (Ounce)

M hnh cam bin 2510M4A c mt mng rt dy ngn nga nh thng hoc thit hi do ht tc ng, x ly sai s ngu nhin, hoc xung p sut cao. Cch in gia u d v b mt gn kt nhm ngn chn vic d liu mt mat do truyn

xung t. M hnh 2510M4A c thit k ch yu hot ng vo b khuch i. Cp di c th c s dng kt ni gia u d v b chuyn i m khng nh hng n nhy. Mc d c s thit k c hng vo vic ti a ha cc thay i c tnh, M hnh 2510M4A cng cho kt qu tuyt vi khi hot ng vo b khuch i in p. Model 2510M4A, vi cc chi tit k thut in ging ht vi m hnh c bn Model 2510, cung cp lp t c bit cho mng chn phng hoc cc ng dng khc. III. Nguyn l lm vic

M hnh c kh tng t ca mt microphone 1. Hiu ng p in (Piezoelectric) Hiu ng p in l hin tng xut hin phn cc in hoc thay i phn cc in c trong mt s cht in mi t nhin(thch anh, tuamalin..) hoc nhn to (sulfat liti, thch anh tng hp) khi chng b bin dng di tc dng ca mt lc c chiu nht nh. Hiu ng p in l hiu ng thun nghch. Di tc dng ca lc in trng c chiu thch hp, vt liu p in b bin dng. c bit vt liu p in c th t ti trng thi cng hng rt cao. N nh mt my bin i trc tip t nng lng in sang nng lng c hc v ngc li. Nu nh theo chiu hng thun, c ngha l tc dng lc ln vt th s sinh ra in v ngc li l p in nghch : tc ng hiu th vo vt th s sinh ra cng bin dng lm bin i lc. Mt vt c cu to bi ba yu t PZT (ch Pb, zorconi, titan ) s c tnh cht p in.

Cm bin p in l mt loi thit b c p dng hiu ng ny xc nh lc hoc cc i lng gy nn lc tc dng vo vt p in (nh p sut, gia tc,..) thng qua vic o in p trn hai bn cc ca vt liu.

Vt liu p in thun c cu trc i xng tinh th.

Trong tt c cc cht in mi, in trng tc dng s gy nn s dch chuyn in tch lin kt ra khi v tr cn bng ca chng. S xut hin hoc thay i momen lng cc xy ra ng thi vi s thay i kch thc. V d vi tinh th thch anh.

Hnh trn l mng tinh th thch anh: Khi khng c ng lc, cc trng tm G + v G- ca cc in tch m v dng trng nhau cho nn momen lng cc bng khng. Nu c tc dng lc ln cu trc, th cu trc trn b bin dng. cc trng tm G + ca cc in tch dng v G- ca cc in tch m s khng trng nhau na. dn ti xut hin momen lng cc v cc in tch trn b mt, l hiu ng p in.

Cng thc lin h: gi s ting n sinh ra mt lc F tc dng vo din tch S Khi : in tch do lc F sinh ra l: Q = kF , k l hng s in p. in dung ca t: C =
ab Q kFc . T in p sinh ra l: U = = c C ab

Vt liu p in c th l thch anh, h gm PZT c cng thc chung l PbTi1-xZrxO3 gi tr x thng sp x 0.5, quyt nh tnh cht vt l, tnh cht nhit ca vt liu.

2. Cng ngh c bn v cc loi Microphone Nh c th thy t phng trnh sng, trng m thanh c th c m t y ch cn o lng v p sut. iu ny c ngha rng tt c cc thng s m thanh khc u c th c xc nh t o lng p lc, v trong thc t, thng cng ch c p lc l tham s o c d dng. Cc cm bin micro o lng m thanh c thit k ch yu cng da trn o lng p lc. Nguyn L Hot ng Khi mt i tng rung trong mi trng khng kh, cc phn t khng kh b mt s bt u rung ng, ln lt rung cc phn t ln cn bn cnh chng. Rung ng ny s di chuyn thng qua khng kh nh p lc dao ng, tn s v bin c xc nh bi bn cht m thanh ca ngun. Mng nh ca con ngi chuyn nhng dao ng p lc hoc m thanh thnh tn hiu in c phn tch bi b no ca chng ta. V d nh l m nhc, li ni, ting n,vv. Micro 2510M4A c thit k ging nh tai ca con ngi, bin i cc dao ng p lc thnh tn tng t, c th c ghi li v phn tch cho chng ta bit thng tin v ngun gc ca rung ng hoc bn cht ca mi trng truyn m t u ra ca microphone. Ap lc m thanh c phn tich trong mt giai oan thit k khng chi bao v nhng phn quan trong xung quanh no ma con lu tr ta con phn tich no. Ging nh tai ngi, microphone c thit k o lng mt giai ln v bin , nhng n vi c trng nh : dB, Hz V d v mt microphone.

Elictrical connector : u ra Shrink tubing grooves : thu nh ng rnh IC amplifier : IC khuch i

Element lead : yu t dn Seal surface : b mt b n du ( b mt nim phong ) Preload screw : vt ti trc Quartz crystal : thch anh tinh th Electrode : in cc End piece : on cui Diapphragm : Mn chn. Nguyn l chung: Khi c m thanh i ti microphone th cng ng ngha vi p lc m gy tra cho vt liu p in ca micro v sinh ra hiu in th p in c gi tr t l thun vi p lc m thanh, cng ng ngha vi t l thun vi cng m thanh. Trn c s tuyn tnh khi o c hiu in th ti u ra ca cm bin ta c th bit c cng m thanh. Cc loi cm bin Vi cm ng microphone th c th ch to theo 2 phng php l cm bin theo kiu in dung v cm bin theo kiu in tr. + Vi cm bin microphone in dung (dng t in)

B t in cho micro hot ng da trn mt thit k in dung. Hai bn cc ca t in c lm bng thch anh, quartz, tourmaline, lithium sulfatpht sinh in p khi chu mt p lc. V ca b t in dng cho micro s dng cc nguyn tc dn truyn c bn v s chuyn i p lc m thanh thnh cc bin th in dung , m sau c chuyn i sang mt in p in. Ch to t in bng cch ph hai bn cc ln hai mt i din ca mt phin p in mng v tc dng mt lc ln hai bn cc th trn hai bn cc xut hin cc in tch tri du. Hiu in th trn hai bn t t l thun vi lc tc dng. Cch ghp ni cc bn p in:

Trong nhiu trng hp cc bn p in c ghp thnh b theo cch ghp ni tip hoc song song.

Khi ghp song song th in dung ca cm bin tng gp i cn khi ghp ni tip in p h mch v tr khng trong tng gp i nhng in dung gim xung cn mt na. + Vi cm bin microphone in tr. Nguyn l hot ng: Khi vt dn chu bin dng c hc m in tr ca n thay i, hin tng c gi l hiu ng p tr. Cm bin c nguyn l hot ng da trn hin tng gi l cm bin p tr. C ngha l khi mt in tr b thay i in tr khi c lc tc dng th in tr c dng lm cm bin p tr. Ta c

R = l (1 + 2k p + m) = K l

Trong : K l nhy ca cm bin p tr. Vi vt liu lng k p = 0.5, b qua h s m v K=2. Vi kim loi k p = 0.2 4 v h s K = 0.5 4.

Vi cht bn dn quan h gia v c th hin qua biu thc:

p = k1 = k1E1 = m1

Vi k1: h s; E: modul n hi. Do h s m rt ln nn k =100 200 trong iu kin bnh thng. Cm bin p tr c chia lm 2 loi l p tr kim loi v p tr bn dn. Cm bin p tr kim loi: loi cm bin c phn ra thnh dy mnh, l mng v mng mng.

Cm bin p tr dy mnh gm dy in tr un hnh rng lc, dy c ng knh t 0.02 0.03mm. hai u dy hn vi 2 l ng Berin hoc ng pht pho ni vi mch o. Hai pha dn hai tm giy mng c 0.1mm hoc nha polime c nh hnh dng dy. Chiu di L = nl0 vi n=10 20 L0 chiu di on dy, n: l s on dy. in tr dy R=10 150 . Cm bin p tr l mng: l l rt mng c dy t 4 12 m lm t hp kim constantan, ch to theo phng php n mn quang hc. nhy cao. Cm bin p tr mng mng: c ch to bng phng php bc hi kim loi c nhy cao bm vo mt khung c hnh dng nh trc. c nhy cao.

Cm bin p tr bn dn: Loi cm bin ny c ch to t cht bn dn nh silic, gecman, asenua. Cm bin p tr chia lm 2 loi loi ct v loi khuch tn. a. loi ct.

L mt mu ct t tm n tinh th pha tp. cc mu ct ny c gn ln mt tm bng nha, c chiu di t 0.1 5mm. dy 102 mm. b. loi khuch tn.

in tr c to nn bng cch khuch tn tp cht nh Sb, Ga,.. vo mt phn ca n th Silic pha tp.Ty theo loi tp cht khuch tn m ta c p tr loi N hay loi P. Nguyn l: Bnh thng cc in t phn b trong tinh th bn dn bng nhau, dn in khng thay i. Khi b bin dng cc in t phn b trong tinh th bn dn b thay i o dn in thay i v in tr b thay i theo. Tn hiu u ra ca micro my rt b nn cn cho qua mt b khuch i trc khi cho vo vi iu khin x l v hin th LCD.

Trong qa trnh o bin dng v ng lc cn quan tm n mt s khu nh chn v tr, lm mt. Khi ng lc theo mt hng no , cm bin c dn theo hng tc ng ca ng lc.

IV.

Thit k mch o

S khi

V.

ng dng thc nghim

Th nghim (o lng) m thanh c thc hin cho mt lot cc l do khc nhau, t vic thit k cc sn phm mi, sn phm gim st, n chc nng bo tr tin on, bo v c nhn. Mt s ng dng in hnh ca microphone l:

+ S dng Microphone trong nghin cu v thit k sn phm: Do p sut m thanh qu mc c th gy ra thit hi cho sn phm hoc tai ca con ngi. V th microphone c s dng o lng mc p lc ca m thanh tc dng trn b mt. p sut m thanh c th lm bong thch cao ra khi bc tng, gy thit hi cho mt cnh my bay o lng m thanh c s dng trong mt lot cc ng dng bao gm: nghin cu ting n ca ng m ca, cc cam ly hp, tc ng khi ng. Phn tch ca ting n ng c trong mt cabin hoc ni tht xe hi, hoc m thanh t cc thit b tiu dng c th nghim ko di tui th ca sn phm v gi cho s thoi mi ca ngi s dng.

+ Cm bin m thanh dng cho gim st y t t ng: B cm bin m thanh nh hnh 1 cn c mt phn mm ci t trong my tnh. Phn mm l h thng phn tch m thanh. Nhim v chnh ca n l d tm cc tnh hung nguy him da vo phn tch m thanh. Tnh hung nguy him l tnh hung bnh nhn b ng, b au, b m. Nhim v ca h thng phn tch m thanh c t ra da vo nhng nhn xt sau y: Khi b ng, bnh nhn rt c th lm bn gh, nh ri cc chn; khi b au th s ku rn; khi b m th s ho, th dc. Nhng m thanh k trn c kh nng i din cho cc tnh hung nguy him. Ni cch khc, nu c cc m thanh ny th nhiu kh nng l c (nhng) tnh hung nguy him. Nh vy nhim v ca h thng phn tch m thanh l d tm cc m thanh v gi tn hiu cnh bo. Cc m thanh ny c gi l cc m thanh bt thng. Nhng m thanh bnh thng bao gm cc ting ng trong phng v ting ni. Hot ng ca h thng ny c m t bng lu trong hnh 2.

+ Microphone c s dng vi mc ch bo tr d phng: ta c th s dng micro o lng tng cng mc m thanh hoc thay i tn s kim tra liu sn phm c hot ng bnh thng hay khng. ng c, bnh rng, vng bi, li, hoc cc thnh phn cng nghip khc c th c nhng thay i trong mc cng m hoc thay i tn s khi khng lm vic ng. Micro chnh xc cao c th c s dng xc nhn rng mt sn phm ang gp mt vn , hoc c th c dng d on sai lch ca mt thnh phn trong sn phm.

+ ng dng kim tra v hiu chnh m thanh : Cc trng i hc, cc chnh ph v cc cng ty c lp c thit b kim tra m thanh thc hin cc bi kim tra v cc d n nghin cu thnh gic. Cc micro c s dng kim tra v hiu chnh h thng m bo tnh chnh xc ca cc thit b kim tra.

+ Microphone c s dng biu din v ghi m li xc minh mc p lc ln sn phm qua m bo cc tiu chun v ting n trong cc ca hng, kho hng v siu th.

+ Phn tch nhim ting n - C mt s mc p lc m thanh m tai ngi c th chu ng c trong mt lng thi gian nht nh trc khi tai ngi b gy hi. Mt vi trong s ny l ting n cng nghip, sn bay, v ting n ng cao tc t. Th nghim m thanh c thc hin t c mt s hiu bit tt hn v cc mc m thanh c trong cc mi trng xung quanh, v nhng iu chnh cn thit cung cp tt hn bo v mi ngi.

+ Nhiu knh th nghim : S lng Microphone c s dng trong k thut ton nh m thanh v bn p lc ngy cng tng. Mng li microphone c th c thit lp ni ln s khc bit trong p lc m thanh ti cc im khc nhau xung quanh mt ng c hay lp mt chic xe hi hoc trong mt khng gian no .Mt s ng dng bao gm gim st hot ng a chn, theo di v tinh v xc nh ngun ting n t v cng nghip. Micro c th c s dng chuyn i thng tin 2chiu p lc m thanh phc tp thnh lnh vc m thanh 3 chiu, s dng phng trnh sng c bn, cho bit cng b mt v cc mu bc x. Micro mng, micro Loi trng, c thit k cung cp mt gii php hiu qu o lng nhiu knh m thanh.

Kt lun
m thanh l mt c trng thng xuyn xut hin ca i sng hng ngy. Da trn cc c trng ca sng m, ch yu l p lc m thanh, cc loi cm bin o m thanh c ch to nhm nh gi, nh lng cc loi m thanh khc nhau c th phn bit c chng. 2510M4A l mt loi cm bin o p sut ting n m thanh cng cao (t 100 n 180 dB SPL) vi chnh xc v n nh tng i. Cm bin c th hot ng trong di nhit rng t -55 n 260C, ph hp vi nhiu iu kin khc nhau ca mi trng xung quanh. Nguyn l ch yu ca loi cm bin l da trn hiu ng p in. Cng vi s pht trin ca k thut in t

(nh mch khuch i, cp truyn dn,..) v vi iu khin, nhiu ng dng c s dng thit k mch o cho loi cm bin ny, nng cao chnh xc ca i lng hin th ra. Nghin cu ch ra rng cc cm bin microphones c nhiu kh nng ng dng trong thc t v tng lai c trin vng tip tc pht trin nhiu hn.

Ti liu tham kho 1. Piezoelectric Microphone Model 2510M4A- Datasheet 2. The Measurement_ Instrumentation and Sensors Handbook 3. Gio trnh o lng in v cm bin o lng_Nguyn Vn Ha 4. Cc b cm bin trong k thut o lng v iu khin- L Vn Doanh 5. The microphones book 6. handbook of modern sensors physics designs and application