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Sub 10 NM CNT Transistor
Sub 10 NM CNT Transistor
Transistor
Qing Shi
Outline
Background information
a) key problems in small transistors b) how to solve them? some new schemes: Si nanowire transistor FinFET ETSOI/UTBSOI CNT tansistor
Outline
Background information
a) key problems in small transistors b) how to solve them? some new schemes: Si nanowire transistor FinFET ETSOI/UTBSOI CNT tansistor
Background information
key problems in small transistors Good transistor: 1. High Ion/Ioff ratio high on state current and small off state current 2. Low inverse threshold slope(SS factor) voltage change when drain current decreases to 1/10 arising problems: Size of transistor leakage current high Ioff and low ratio =
( )
Background information
key problems in small transistors Paths far from the gate cannot be neglected (short channel)
This means: the drain current can no longer be controlled by gate voltage!
Outline
Background information
a) key problems in small transistors b) how to solve them? some new schemes: Si nanowire transistor FinFET ETSOI/UTBSOI CNT tansistor
Background information
key problems in small transistors
Besides: satisfy other conditions to be a good transistor (high Ion and low threshold slope)
Outline
Background information
a) key problems in small transistors b) how to solve them? some new schemes: Si nanowire transistor FinFET ETSOI/UTBSOI CNT tansistor
Outline
Background information
a) key problems in small transistors b) how to solve them? some new schemes: Si nanowire transistor FinFET ETSOI/UTBSOI CNT tansistor
Outline
Background information
a) key problems in small transistors b) how to solve them? some new schemes: Si nanowire transistor FinFET ETSOI/UTBSOI CNT tansistor
Outline
Background information
a) key problems in small transistors b) how to solve them? some new schemes: Si nanowire transistor FinFET ETSOI/UTBSOI CNT tansistor