WorkBench Structure

TCAD: Process and Device Simulation TMA WorkBench: Virtual IC Factory

Workspace
Projects
Experiments
Process Recipe Wafer Flow Simulator Driver

Machines
Libraries
Modules

Modules Steps Commands

Parameters

Tools ToolKit Simulator Drivers

Command Builder

Spread Sheet

X. ZHOU

1997

WorkBench Projects and Libraries

TCAD: Process and Device Simulation TMA WorkBench: Virtual IC Factory

Workspace
Projects Machines
Modules

Library
Tools Simulator Drivers

Experiment

X. ZHOU

1997

WorkBench Experiments
TCAD: Process and Device Simulation TMA WorkBench: Virtual IC Factory

Experiment
Process Recipe Wafer Flow Simulator Driver

Workspace

Root Module
Experiment

Modules

ToolKit

Module

X. ZHOU

1997

WorkBench Modules
TCAD: Process and Device Simulation TMA WorkBench: Virtual IC Factory

Module
Icon Driver Name Annotation

Module Concept
Module

What to do (engineering goal)

Level Command Parameter

0 1 2.1

Step_1 Step_2
Command Parameter_1 Parameter_2

Step (compound command)

How to do it
Command

(technology specific)

Step_3

How (simulator specific)

List of parameters

Parameter Label Min Max Control

X. ZHOU

1997

WorkBench Drivers
TCAD: Process and Device Simulation TMA WorkBench: Virtual IC Factory

Wafer

Module
% simulator <input_file> load in.file=<previous wafer> command parameter ... command parameter ... ...... save out.file=<current wafer>

Driver
unix load save

Wafer

X. ZHOU

1997

WorkBench Variables and Wafer Components

TCAD: Process and Device Simulation TMA WorkBench: Virtual IC Factory

Process Recipe

Wafer Flow OK

Variable

Definition

unix tsuprem4 # load mask in.file= //|".tl1" initial in.file= . . tif save savefile out.file= . tif
field_ox

/
OK

the root wafer the child of the root wafer the input file the parent wafer the current wafer

// #

OK

OK

Module field_ox
Icon Driver Name field_ox

Wafer field_ox OK
Name field_ox Text

Wafer Components mask extract savefile in.file= //|".tl1" out.file=.|".ext" out.file=.|".out" field_ox:0_0 field_ox:0_0.ext field_ox:0_0.out field_ox:0_0.inp

principal component

X. ZHOU

1997

WorkBench ToolKit
TCAD: Process and Device Simulation TMA WorkBench: Virtual IC Factory

Experiment Process R eci p e Wafer Flow Driver

TMALayout TMAVisual

CurveTool
ToolKit Layout Mich Curve

Tool Name Machine Level Command Parameter

X. ZHOU

1997

WorkBench Command Builder

TCAD: Process and Device Simulation TMA WorkBench: Virtual IC Factory

Command Builder
Manual TSUPREM-4 Command DIFFUSION Description

Workspace

Experiment

Module

Parameter TIME

X. ZHOU

1997

WorkBench Run Table

TCAD: Process and Device Simulation TMA WorkBench: Virtual IC Factory

Experiment Process R eci p e Wafer Flow Driver

Mo du le

implant
ToolKit

dose=5e12 oxide thichnes

extract Parameter Label

Control
Ch_dose

Run Table

Run Table
Des Label Name

Ch_dose

dose tox

5e12

X. ZHOU

1997

Wafer State and Simulation Status

TCAD: Process and Device Simulation TMA WorkBench: Virtual IC Factory

Icon
1

Color
Yellow Purple Blue Black

Simulation Status
Module ready for simulation Module being simulated Module waiting for available CPU to be simulated Module simulation failed Module completed successfully


ok 1

Green

t To make a wafer green at the completion of the Module simulation, a Principal Component file with the name <module_name>:0_0 must be created
X. ZHOU
1997

Creating a Simulator Driver

TCAD: Process and Device Simulation TMA WorkBench: Virtual IC Factory

Experiment
Process Recipe Wafer Flow Driver
drv

Name drv

Machines

unix

sim #
load

load in.file= . .
premod

mod:0_0.inp $driver drv $step load load in.file=premod:0_0 $module mod $step step-1 command-1 param-1 command-2 : $step-2 : $end module mod $step save save out.file=mod:0_0

save

save out.file= .
mod

ToolKit

drv

Name mod

step-1

command-1 command-2
step-2

param-1

Run

% sim mod:0_0.inp

X. ZHOU

1997

Creating a Tool
TCAD: Process and Device Simulation TMA WorkBench: Virtual IC Factory

Experiment
Process Recipe Wafer Flow Driver Name plot

Tool

Machines

unix

graph
step-1
mod
OK

ToolKit
plot

command-1 command-2 :

param-1

mod:0_0.plot.inp % graph mod:0_0.plot.inp $tool plot $step step-1 command-1 param-1 command-2 :

X. ZHOU

1997