Qual1 AOM 1xN Switch 2013-07-01

Reliability and Qualification Report P/N 621-1002/1008
A-One MEMS, Inc.

Reliability & Qualification Report
MEMS Based Optical Switch
(1x2, 1x3, 1x4, 1x5, 1x8 Ports)
Part No.: 621-1002/1008

Raw Switch
Author:
B. Sastri
Rev
00
Process Owner
B. Sastri
Revision History
Approval
Date
06/30/2013
ECM/ECR
A-One MEMS Confidential

This document contains
confidential & proprietary
information that is the property
of A-One MEMS Inc. and must
be treated as CONFIDENTIAL.
Project Manager:
Sohail Umar
Description of Change
Initial release
A-One MEMS, INC.

Printed copies are uncontrolled
and must be verified against the
controlled version.
A-One MEMS Inc. Proprietary Information
4051 Clipper Ct.

Fremont, CA 94538, USA
Page 1 of 24
Table of Contents
1.
2.
3.
4.
5.
6.
7.
8.
PURPOSE ............................................................................................................................ 3
REFERENCE ....................................................................................................................... 3
PRODUCT DESCRIPTION .................................................................................................. 3
QUALIFICATION TEST DESCRIPTION .............................................................................. 5
4.1. TEST PROCEDURE ............................................................................................... 5
4.2. PASS/FAIL CRITERIA ............................................................................................ 5
TEST DEFINITIONS ............................................................................................................ 7
TEST RESULTS .................................................................................................................. 9
TEST DATA ....................................................................................................................... 10
7.1. HIGH TEMPERATURE STORAGE TEST DATA.......................................................... 10
7.1.1.
Test Conditions ..........................................................................10
7.1.2.
Test Results ...............................................................................10
7.2. LOW TEMPERATURE STORAGE TEST DATA .......................................................... 13
7.2.1.
Test Conditions ..........................................................................13
7.2.2.
Test results .................................................................................13
7.3. DAMP HEAT TEST DATA ..................................................................................... 16
7.3.1.
Test Conditions ..........................................................................16
7.3.2.
Test Results ...............................................................................16
7.4. TEMPERATURE CYCLING TEST DATA ................................................................... 19
7.4.1.
Test Conditions ..........................................................................19
7.4.2.
Test results .................................................................................19
7.5. MECHANICAL SHOCK IL TEST DATA..................................................................... 22
7.5.1.
Test Conditions ..........................................................................22
7.5.2.
Test Results ...............................................................................22
7.6. MECHANICAL VIBRATION IL TEST DATA ................................................................ 23
7.6.1.
Test Conditions ..........................................................................23
7.6.2.
Test Results ...............................................................................23
MEMS RELIABILITY VERIFICATION ................................................................................ 24
8.1. LONG TERM MEMS RELIABILITY ......................................................................... 24
8.1.1.
Hinge tests performed: .............................................................24
8.1.2.
Hinge test Results .....................................................................24
Page 2 of 24
1. PURPOSE
This document presents the qualification test data for the raw MEMS 1x4 Optical Switch made by
A-One MEMS Inc. The MEMS based Optical Switch products are used to route the optical signal
from the input fiber to the selected output fiber transmitted optical path. This operation is controlled
by the applied DC voltage over the device electrodes.
The MEMS devices, packaging, optical & electrical components, and assembly processes are
identical for 1x2, 1x3, 1x4, 1x5, and 1x8 Optical Switches made by A-One MEMS Inc. The
Company is therefore claiming Telcordia Qualification of 1x2, 1x3, 1x5, and 1x8 MEMS Switch
products by similarity with the 1x4 MEMS Switch that was tested for this report.
2. REFERENCE
Telcordia GR-1221-CORE Generic Reliability Assurance for Fiber Optic Components
3. PRODUCT DESCRIPTION
The MEMS device is packaged in a hermetically sealed standard TO39 can. A multi-fiber pigtail is
aligned with the MEMS through lens mounted in the TO39 Cap and laser-welded to the package.
The MEMS is hermetically sealed in the TO39 package. The sealed packages are 100% tested for
hermeticity and the passed ones have less than 1 x 10-8 std cc/sec leak rates. Figure 3 shows the
Optical Switch mechanical drawing.
Page 3 of 24
Figure 3: SWITCH Mechanical Specification Drawing
Page 4 of 24
4. QUALIFICATION TEST DESCRIPTION

4.1. TEST PROCEDURE
Table 4.1 shows the sample size and test sequence the switch devices per Telcordia GR-1221CORE requirements. Four groups of 11 units each were used so that 4 of the 6 tests could progress
in parallel. Group 2 units were first used for Low Temperature Storage, and subsequently for
Mechanical Vibration test. Group 4 units were first used for Temperature Cycling, and subsequently
for Mechanical Shock.
Table 4.1: SWITCH Testing Group List
Test No.
1
2
3
4
5
6
Sample Size
11
11
11
11
11
11
TEST
High Temperature Storage
Low Temperature Storage
Damp Heat
Temperature Cycling
Mechanical Shock
Mechanical Vibration
GROUP
Group 1
Group 2
Group 3
Group 4
Group 4
Group 2
4.2. PASS/FAIL CRITERIA

The following Table 4.2 shows the general pass/fail criteria for qualification.
Table 4.2: General Qualification Pass/Fail Criteria for Switch
1550 nm
Initial
Post Test
IL per Port
< 1 dB
< 1.2 dB
RL per Port
> 50 dB
> 50 dB
Parameter Definitions:
Before the stress test, the voltage required to switch the input to any output port with minimum
insertion loss at 1550 nm should be recorded. After the stress test, the same voltage should be
applied to the device.
1) The minimum IL is measured at 1550 nm for all output ports at room temperature only.
2) The RL is measured with no voltage applied.
Page 5 of 24
3) Test Set-up for Optical Measurements
Agilent Polarization
Controller
8169A
Agilent Detector Array

8169A/81635A(x2)/81533A
Agilent Tunable Laser Source

8164A/81642
DUT
1x4
Switch
Fig A. Measurement of IL, PDL, WDL Set-up
DUT
JDSU PS3
Multimeter
1x4
Switch
Fig B. Measurement of RL Set-up
Page 6 of 24
5. TEST DEFINITIONS
The following is the description of the individual qualification item.
4) High Temperature storage (Dry Heat)
The high temperature storage (Dry Heat) test is based on the procedures stated in EIA/TIA 455-4A. Switch test samples are subjected to a temperature resistance test at a modified test
temperature of +85C with a relative humidity less than 40%, and a test duration of 2000 hrs for
qualification and 5000 for information. Optical parameters, IL and RL are measured before and
after the test.
5) Low Temperature storage
The low temperature storage test is based on the procedures stated in EIA/TIA-455-4A. Switch
test samples are subjected to a temperature resistance test at a modified test temperature of
-40C, and test length duration of 2000 hrs for qualification and 5000 for information. Optical
parameters IL and RL are measured before and after the test.
6) Damp Heat
Switch test samples are subjected to a temperature test at a test temperature of +85C with a
Relative Humidity of 85% and test duration of 100 hrs and 500 hrs. The test is in compliance
with GR-468-CORE. Optical parameters IL, RL and PDL measurements are made at the before
and after the test.
7) Temperature Cycling
Switch test samples are subjected to a temperature cycle between +85C and 40C for 500
cycles. Temperature rises from 40oC to +85o C within 25min. The temperature falls from +85o C
to - 40oC in 25 min. The dwell time at specified temperature is 20min. The operating humidity
condition is uncontrolled. The Optical parameters IL and RL are measured before and after the
test.
8) Mechanical shock (Impact test)
The above test method described in GR-1221-CORE is based on MIL-STD-883, Method 2002,
with the following conditions:
a. Number of Shocks: 5 times per direction for 6 directions (on 3 axes)
b. Shock Level: 500G
c. Duration: 1 ms
The Switch must not incur physical damage according to GR-1209-CORE 5.1.8
recommendations. Optical parameters IL and RL are measured before and after the test.
Page 7 of 24
9) Mechanical Vibration Test

The variable frequency vibration test is performed to evaluate the mechanical integrity of the
Switch. Test samples are subjected to a sinusoidal vibration with amplitude of 1.52 mm
maximum total excursion (20G at 55 Hz). Test samples are to withstand vibrations from 20Hz to
2000Hz. Each cycle has 4 min duration. This test is performed with 4 cycles per axis, total three
perpendicular axes. The vibration test is to be performed according to EIA/TIA-455-11A, test
condition IV. Optical parameters IL and RL are measured before and after the test.
10) Fiber Side pull
Our pigtail supplier performs this test.
11) Fiber and Cable retention
Our pigtail supplier performs this test.
Page 8 of 24
6. TEST RESULTS
The following qualification items are tested and passed the required criteria.
summarized as below in Table 5. Detailed data provided in Section 6.
The results are
Table 6.1: SUMMARY OF QUALIFICATION TEST RESULTS

Test and conditions
SS
Sample
Group
High temperature storage:

85 C
2000 hrs
11
Low temperature storage:

-40 C
2000 hrs
11
Damp heat:
85 C / 85% RH
500 hrs
11
Temperature cycling:
-40 C to 85 C,
100 cycles
Test
results
Section
PASS
7.1
PASS
7.2
PASS
7.3
11
PASS
7.4
11
PASS
7.5
IL < 0.5 dB
and
IL 1.0 dB
Environmental
Tests
Mechanical
Tests
Mechanical shock:
5 times/direction
6 directions
500 G acceleration
1ms duration
Mechanical vibration:
20 G,
20 2000 Hz
4 min/cycle
4 cycles/axis
Side pull:
0.23 kgmf load, 90
5 sec, 2 directions
IL < 0.5 dB
and
IL 1.0 dB
11
PASS
7.6
11
NA
PASS
Qualified
by pigtail
supplier
PASS
Qualified
by pigtail
supplier
IL < 0.1 dB
Fiber Integrity
Tests
Cable retention:
0.45 kgmf load
5 sec, 3 times
Test Pass/Fail
Criteria
and
IL 1.0 dB
11
NA
Page 9 of 24
7. TEST DATA
7.1. HIGH TEMPERATURE STORAGE TEST DATA
7.1.1. Test Conditions
Storage Temperature: 85 C.
Humidity: uncontrolled.
Duration: 2000 hours.
Sample Size: 11 (Group 1)
Testing Temperature: Room Temperature
Tested Parameter for Pass/Fail: Minimum IL, RL, PDL, WDL
Test Result: Pass
7.1.2. Test Results
Table 7.1.1: Minimum Insertion Loss Measurement (in dB)
Group 1
Sample
P1
A0020
A0021
A0022
A0023
A0024
A0025
A0026
A0027
A0028
A0029
A0030
0.81
0.80
0.78
0.82
0.84
0.78
0.80
0.79
0.82
0.82
0.81
IL Initial
P2
P3
0.80
0.81
0.80
0.76
0.81
0.83
0.77
0.81
0.80
0.79
0.80
0.79
0.81
0.79
0.81
0.80
0.81
0.78
0.81
0.81
0.80
0.83
P4
0.81
0.80
0.78
0.79
0.82
0.81
0.80
0.82
0.80
0.81
0.80
IL Post Test
P1
P2
P3
P4
0.89
0.85
0.80
0.79
0.79
0.81
0.87
0.83
0.84
0.85
0.78
0.86
0.84
0.85
0.81
0.78
0.80
0.81
0.79
0.79
0.84
0.78
0.82
0.79
0.82
0.83
0.78
0.82
0.84
0.79
0.79
0.85
0.80
0.86
0.82
0.81
0.82
0.80
0.83
0.83
0.79
0.78
0.85
0.77
P1
0.08
0.05
0.02
-0.03
-0.05
0.03
0.07
0.04
0.02
0.03
-0.03
Change in IL
P2
P3
0.06
0.03
0.05
0.05
-0.03
-0.03
0.04
-0.02
-0.01
0.05
-0.02
0.03
-0.02
0.03
0.02
-0.02
0.01
0.06
-0.02
-0.02
0.05
-0.03
P4
IL < 1 dB
P/F
0.05
0.02
0.03
0.03
-0.02
0.02
0.03
-0.03
-0.02
0.04
-0.03
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
Page 10 of 24
Table 7.1.2: Return Loss Measurement (in dB)
RL Initial
P2
P3
Group 1
Sample
A0020
A0021
A0022
A0023
A0024
A0025
A0026
A0027
A0028
A0029
A0030
P1
57.00
57.00
58.00
58.00
58.00
61.00
58.00
59.00
59.00
57.00
60.00
58.00
57.00
58.00
58.00
59.00
59.00
59.00
57.00
58.00
60.00
60.00
58.00
59.00
59.00
58.00
58.00
58.00
57.00
58.00
58.00
58.00
59.00
RL Post Test
P2
P3
P4
P1
59.00
57.00
58.00
59.00
58.00
59.00
58.00
58.00
58.00
59.00
60.00
58.00
57.00
59.00
57.00
59.00
59.00
58.00
58.00
60.00
57.00
59.00
59.00
57.00
59.00
57.00
60.00
58.00
58.00
57.00
59.00
59.00
59.00
59.00
58.00
60.00
58.00
58.00
57.00
57.00
58.00
58.00
58.00
59.00
P4
60.00
57.00
59.00
58.00
58.00
58.00
58.00
59.00
57.00
58.00
60.00
Change in RL
RL > 50 dB
P1 P2 P3 P4
P/F
1
0
1
-1
1
-2
0
-1
1
0
-1
1
0
1
-1
1
-1
-1
0
1
-1
-1
1
-1
1
0
0
-1
0
0
0
0
0
1
0
1
-1
0
-1
0
1
-1
-1
0
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
Table 7.1.3: Polarization Dependent Loss Measurement (in dB)

Group 1
Sample
A0020
A0021
A0022
A0023
A0024
A0025
A0026
A0027
A0028
A0029
A0030
P1
0.03
0.04
0.07
0.07
0.06
0.05
0.05
0.03
0.05
0.03
0.04
PDL Initial
P2
P3
0.04
0.03
0.07
0.05
0.06
0.03
0.06
0.06
0.07
0.07
0.05
0.03
0.03
0.06
0.04
0.03
0.07
0.05
0.05
0.07
0.03
0.07
P4
0.05
0.05
0.06
0.07
0.04
0.06
0.06
0.04
0.05
0.04
0.05
PDL Post Test

P1
P2
P3
P4
0.08
0.04
0.03
0.04
0.03
0.06
0.04
0.03
0.07
0.08
0.08
0.09
0.07
0.06
0.05
0.06
0.09
0.08
0.03
0.05
0.03
0.05
0.03
0.09
0.07
0.07
0.03
0.06
0.08
0.09
0.04
0.05
0.05
0.06
0.04
0.08
0.08
0.08
0.08
0.07
0.06
0.06
0.08
0.07
Change in PDL
P1
P2
P3
P4
0.05
0.00
-0.04
-0.03
-0.03
0.01
-0.01
0.00
0.02
0.05
0.04
0.05
0.04
-0.01
0.00
0.00
0.06
0.02
-0.03
-0.02
-0.04
0.00
0.00
0.06
0.01
0.03
0.00
-0.01
0.03
0.04
-0.03
0.02
-0.02
0.01
-0.01
0.02
0.01
0.04
0.02
0.01
0.02
0.01
0.04
0.02
P/F
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
Page 11 of 24
Table 7.1.4: Wavelength Dependent Loss Measurement (in dB)

Group 1
Sample
A0020
A0021
A0022
A0023
A0024
A0025
A0026
A0027
A0028
A0029
A0030
P1
0.11
0.14
0.12
0.10
0.13
0.14
0.16
0.12
0.16
0.08
0.11
WDL Initial
P2
P3
0.10
0.06
0.11
0.14
0.09
0.10
0.07
0.09
0.12
0.05
0.10
0.06
0.07
0.14
0.13
0.09
0.07
0.06
0.12
0.09
0.06
0.12
P4
0.08
0.07
0.12
0.12
0.11
0.07
0.09
0.06
0.07
0.06
0.13
WDL Post Test

P1
P2
P3
P4
0.16
0.18
0.16
0.17
0.12
0.13
0.16
0.13
0.13
0.15
0.12
0.13
0.11
0.16
0.14
0.15
0.15
0.10
0.11
0.16
0.13
0.09
0.07
0.06
0.18
0.10
0.15
0.17
0.08
0.09
0.08
0.11
0.07
0.11
0.13
0.16
0.12
0.14
0.19
0.12
0.07
0.14
0.09
0.12
Change in WDL
P1
P2
P3
P4
0.05
0.04
0.04
0.07
-0.01
-0.01
0.00
0.01
-0.03
0.07
0.01
0.03
0.05
0.05
0.00
0.06
0.05
0.03
0.02
0.04
0.08
-0.01
0.01
-0.01
0.04
-0.03
0.06
0.10
0.02
-0.03
-0.01
0.05
-0.05
0.03
0.06
0.04
0.00
0.03
0.12
0.03
0.01
0.07
0.03
-0.01
P/F
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
Page 12 of 24
7.2. LOW TEMPERATURE STORAGE TEST DATA

Storage Temperature: -40 C.
Tested Parameter for Pass/Fail: Minimum IL, RL, PDL, WDL
Test Result: Pass
7.2.2. Test results
Table 7.2.1: Minimum Insertion Loss Measurement (in dB)
Group 2
Sample
P1
A0007
A0008
A0009
A0010
A0011
A0012
A0013
A0014
A0015
A0016
A0017
0.79
0.82
0.81
0.82
0.81
0.83
0.78
0.79
0.80
0.79
0.82
IL Initial
P2
P3
0.81
0.81
0.78
0.76
0.83
0.82
0.77
0.81
0.82
0.81
0.80
0.81
0.80
0.83
0.81
0.80
0.82
0.78
0.80
0.81
0.81
0.82
P4
0.78
0.82
0.79
0.79
0.81
0.80
0.81
0.82
0.80
0.80
0.81
IL Post Test
P1
P2
P3
P4
0.80
0.85
0.82
0.79
0.85
0.86
0.81
0.84
0.81
0.82
0.81
0.84
0.83
0.81
0.79
0.85
0.79
0.82
0.83
0.84
0.83
0.79
0.79
0.79
0.85
0.84
0.82
0.83
0.83
0.78
0.79
0.84
0.79
0.80
0.84
0.81
0.82
0.82
0.82
0.83
0.81
0.79
0.83
0.83
P1
0.01
0.03
0.01
-0.03
0.04
0.03
0.03
0.05
0.01
0.03
-0.01
Change in IL
P2
P3
0.03
0.02
0.03
0.03
0.02
-0.03
0.05
0.02
0.02
0.02
-0.01
-0.02
-0.01
0.02
0.03
0.02
0.01
0.05
-0.02
-0.02
0.03
-0.03
P4
IL < 1 dB
P/F
0.02
0.02
0.02
0.03
0.01
0.02
0.02
-0.01
-0.01
0.03
0.02
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
Page 13 of 24
RL Initial
P2
P3
Group 2
Sample
A0007
A0008
A0009
A0010
A0011
A0012
A0013
A0014
A0015
A0016
A0017
P1
57.00
57.00
58.00
58.00
58.00
61.00
58.00
59.00
59.00
57.00
60.00
58.00
57.00
58.00
58.00
59.00
59.00
59.00
57.00
58.00
60.00
60.00
58.00
59.00
59.00
58.00
58.00
58.00
57.00
58.00
58.00
58.00
59.00
P4
P1
59.00
57.00
58.00
59.00
58.00
59.00
58.00
58.00
58.00
59.00
60.00
57.00
58.00
57.00
59.00
59.00
60.00
59.00
59.00
60.00
57.00
61.00
RL Post Test
P2
P3
57.00
58.00
59.00
57.00
60.00
58.00
58.00
57.00
58.00
61.00
61.00
58.00
59.00
59.00
58.00
58.00
57.00
57.00
58.00
58.00
58.00
60.00
P4
59.00
57.00
59.00
58.00
57.00
58.00
58.00
59.00
57.00
60.00
60.00
Change in IL
RL>50dB
P1 P2 P3 P4
P/F
0
1
-1
1
1
-1
1
0
1
0
1
-1
1
1
-1
1
-1
-1
0
0
1
1
0
0
0
0
0
-1
0
0
0
0
1
0
0
1
-1
-1
-1
0
1
-1
1
0
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
Change in PDL
P1
P2
P3
P4
P/F

Group 2
Sample
A0007
A0008
A0009
A0010
A0011
A0012
A0013
A0014
A0015
A0016
A0017
P1
0.05
0.05
0.06
0.06
0.03
0.04
0.05
0.04
0.05
0.07
0.06
PDL Initial
P2
P3
0.06
0.07
0.06
0.05
0.06
0.07
0.05
0.05
0.03
0.06
0.03
0.04
0.06
0.05
0.04
0.07
0.06
0.06
0.03
0.06
0.04
0.03
P4
0.05
0.03
0.06
0.05
0.06
0.04
0.06
0.07
0.05
0.04
0.05
PDL Post Test

P1
P2
P3
P4
0.08
0.05
0.07
0.03
0.09
0.06
0.05
0.04
0.08
0.09
0.04
0.09
0.08
0.06
0.08
0.03
0.08
0.09
0.08
0.04
0.03
0.09
0.07
0.03
0.03
0.07
0.09
0.07
0.09
0.03
0.05
0.07
0.03
0.08
0.07
0.09
0.04
0.04
0.03
0.09
0.03
0.04
0.04
0.04
0.03
0.00
0.01
-0.03
0.06
0.02
0.00
0.00
0.03
0.02
-0.02
0.03
0.01
0.00
0.03
-0.03
0.01
0.04
0.03
0.01
-0.03
0.06
0.03
-0.03
-0.02
0.03
0.02
0.01
0.03
0.00
-0.01
0.03
0.00
0.03
0.04
0.03
-0.01
-0.02
-0.01
0.03
-0.04
-0.01
0.00
-0.01
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
Page 14 of 24

Group 2
Sample
A0007
A0008
A0009
A0010
A0011
A0012
A0013
A0014
A0015
A0016
A0017
P1
0.12
0.14
0.12
0.09
0.12
0.11
0.07
0.05
0.11
0.08
0.13
WDL Initial
P2
P3
0.07
0.10
0.11
0.07
0.06
0.10
0.11
0.08
0.13
0.07
0.08
0.09
0.13
0.07
0.09
0.08
0.09
0.12
0.10
0.09
0.09
0.11
P4
0.12
0.11
0.11
0.10
0.08
0.11
0.10
0.09
0.07
0.10
0.07
WDL Post Test

P1
P2
P3
P4
0.14
0.12
0.17
0.18
0.16
0.17
0.14
0.12
0.18
0.17
0.10
0.08
0.08
0.11
0.09
0.16
0.08
0.07
0.16
0.11
0.13
0.10
0.10
0.16
0.15
0.12
0.15
0.07
0.15
0.14
0.14
0.13
0.11
0.07
0.18
0.09
0.09
0.08
0.16
0.12
0.12
0.05
0.16
0.12
Change in WDL
P1
P2
P3
P4
0.02
-0.02
0.05
0.09
0.04
0.06
0.07
0.07
0.07
0.09
-0.03
0.01
-0.02
0.00
0.02
0.10
-0.02
-0.04
0.08
-0.02
0.06
0.02
0.01
0.03
0.08
0.03
0.07
-0.02
0.03
0.04
0.05
0.04
0.00
-0.05
0.07
-0.02
-0.01
0.00
0.05
0.02
0.03
-0.02
0.06
0.05
P/F
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
Page 15 of 24
7.3. DAMP HEAT TEST DATA

Temperature: 85 C.
Humidity: 85 %.
Tested Parameter for Pass/Fail: IL, RL, PDL, WDL
Test Result: Pass
7.3.2. Test Results
Table 7.3.1: Insertion Loss Measurement (in dB)
Group 3
Sample
A0040
A0041
A0042
A0043
A0044
A0045
A0046
A0047
A0048
A0049
A0050
P1
0.83
0.81
0.80
0.82
0.84
0.79
0.80
0.78
0.81
0.83
0.80
IL Initial
P2
P3
0.82
0.80
0.79
0.82
0.82
0.81
0.77
0.81
0.81
0.81
0.82
0.80
0.80
0.83
0.81
0.83
0.80
0.80
0.83
0.83
0.82
0.79
P4
0.82
0.82
0.78
0.82
0.83
0.80
0.82
0.79
0.80
0.82
0.81
IL Post Test
P1
P2
P3
P4
0.89
0.86
0.88
0.88
0.93
0.84
0.85
0.83
0.89
0.88
0.83
0.87
0.83
0.84
0.85
0.87
0.88
0.82
0.83
0.87
0.87
0.87
0.85
0.83
0.90
0.84
0.86
0.83
0.85
0.90
0.87
0.90
0.82
0.89
0.84
0.81
0.89
0.90
0.86
0.84
0.84
0.83
0.91
0.86
P1
0.06
0.05
0.08
0.06
0.09
0.05
0.05
0.05
0.08
0.05
0.03
Change in IL
P2
P3
0.05
0.03
0.05
0.03
0.05
0.07
0.05
0.02
0.06
0.06
0.05
0.05
0.03
0.07
0.03
0.03
0.03
0.05
0.07
0.04
0.08
0.03
P4
IL < 1Db
P/F
0.07
0.02
0.03
0.07
0.07
0.06
0.02
0.05
0.03
0.09
0.05
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
Page 16 of 24
RL Initial
P2
P3
Group 3
Sample
A0040
A0041
A0042
A0043
A0044
A0045
A0046
A0047
A0048
A0049
A0050
P1
60.00
58.00
61.00
57.00
59.00
58.00
58.00
59.00
60.00
59.00
61.00
58.00
58.00
59.00
59.00
60.00
61.00
58.00
58.00
58.00
59.00
59.00
59.00
59.00
59.00
59.00
60.00
59.00
57.00
59.00
57.00
59.00
60.00
RL Post Test
P2
P3
P4
P1
59.00
58.00
57.00
59.00
59.00
58.00
58.00
58.00
57.00
58.00
60.00
61.00
59.00
62.00
58.00
59.00
57.00
59.00
60.00
59.00
60.00
62.00
59.00
58.00
60.00
60.00
60.00
61.00
57.00
59.00
57.00
57.00
58.00
59.00
60.00
58.00
60.00
60.00
60.00
57.00
60.00
57.00
60.00
59.00
P4
58.00
59.00
57.00
58.00
58.00
56.00
58.00
59.00
58.00
59.00
61.00
Change in IL
RL > 50 dB
P1 P2 P3 P4
P/F
1
1
1
1
0
-1
1
1
-1
1
1
1
0
1
1
0
0
-1
1
-1
-2
-1
0
1
-1
1
0
1
0
1
0
1
-1
-1
1
0
-1
-1
-2
0
1
1
1
1
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS

Group 3
Sample
A0040
A0041
A0042
A0043
A0044
A0045
A0046
A0047
A0048
A0049
A0050
P1
0.05
0.03
0.04
0.03
0.07
0.03
0.07
0.06
0.07
0.04
0.05
PDL Initial
P2
P3
0.07
0.05
0.03
0.05
0.05
0.05
0.06
0.07
0.07
0.03
0.03
0.04
0.03
0.03
0.06
0.03
0.05
0.07
0.04
0.04
0.07
0.03
P4
0.04
0.05
0.06
0.03
0.06
0.07
0.04
0.05
0.06
0.05
0.06
PDL Post Test

P1
P2
P3
P4
0.07
0.03
0.05
0.07
0.08
0.09
0.08
0.08
0.09
0.08
0.07
0.08
0.03
0.07
0.07
0.05
0.06
0.03
0.08
0.05
0.05
0.04
0.03
0.08
0.06
0.04
0.09
0.04
0.03
0.06
0.04
0.03
0.08
0.04
0.07
0.03
0.05
0.08
0.03
0.04
0.07
0.06
0.08
0.04
P1
0.02
0.00
0.01
0.04
0.01
0.06
0.01
0.02
0.02
0.04
0.02
Change in PDL
P2
P3
P4
0.01
-0.02
0.04
0.02
0.00
0.01
-0.03
0.01
-0.02
0.02
0.01
-0.01
0.05
0.03
-0.02
0.06
-0.01
-0.04
0.02
0.00
-0.04
0.05
0.00
0.02
-0.03
0.02
0.02
-0.04
0.00
0.02
0.00
0.03
-0.02
P/F
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
Page 17 of 24

Group 3
Sample
A0040
A0041
A0042
A0043
A0044
A0045
A0046
A0047
A0048
A0049
A0050
P1
0.10
0.09
0.08
0.12
0.06
0.11
0.13
0.09
0.09
0.10
0.08
WDL Initial
P2
P3
0.08
0.06
0.10
0.12
0.06
0.08
0.10
0.06
0.06
0.07
0.14
0.10
0.07
0.08
0.07
0.07
0.11
0.12
0.08
0.05
0.07
0.06
P4
0.07
0.13
0.07
0.09
0.14
0.09
0.09
0.12
0.14
0.07
0.08
WDL Post Test

P1
P2
P3
P4
0.13
0.07
0.18
0.18
0.08
0.13
0.11
0.11
0.14
0.12
0.09
0.16
0.09
0.16
0.14
0.09
0.10
0.12
0.10
0.12
0.15
0.07
0.08
0.15
0.13
0.08
0.06
0.11
0.16
0.09
0.06
0.07
0.11
0.09
0.05
0.14
0.16
0.11
0.06
0.15
0.08
0.10
0.13
0.15
Change in WDL
P1
P2
P3
P4
0.03
-0.02
0.10
0.06
0.02
0.02
-0.02
0.02
0.05
0.02
0.01
0.08
0.03
0.06
0.02
0.03
0.02
0.02
0.04
0.06
0.08
-0.07
-0.02
0.08
0.05
0.01
-0.01
0.00
0.04
0.01
0.01
0.00
0.05
0.02
-0.08
0.07
0.07
-0.03
-0.03
0.06
-0.04
-0.04
0.06
0.07
P/F
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
Page 18 of 24
7.4. TEMPERATURE CYCLING TEST DATA

Temperature range: -40 C to 85 C.
Dwell time at extreme temperatures: 20 minute.
Temperature rising rate: 25 minute from -40 C to 85 C.
Temperature falling rate: 25 minute from 85 C to -40 C.
Numbers of cycles: 500 cycles.
Sample Size: 11 (Group 2B)
Tested Parameter for Pass/Fail: IL, RL, PDL, WDL
Test Result: Pass
7.4.2. Test results
Group 4
Sample
A0060
A0061
A0062
A0063
A0064
A0065
A0066
A0067
A0068
A0069
A0070
P1
0.79
0.82
0.81
0.80
0.81
0.83
0.80
0.79
0.82
0.81
0.82
IL Initial
P2
P3
0.81
0.81
0.82
0.83
0.84
0.82
0.78
0.83
0.81
0.84
0.83
0.80
0.80
0.83
0.81
0.82
0.80
0.79
0.82
0.83
0.83
0.79
P4
0.81
0.79
0.83
0.80
0.83
0.81
0.81
0.80
0.83
0.84
0.81
IL Post Test
P1
P2
P3
P4
0.78
0.85
0.82
0.83
0.87
0.86
0.83
0.84
0.86
0.83
0.83
0.82
0.82
0.80
0.86
0.87
0.86
0.81
0.85
0.84
0.87
0.85
0.82
0.81
0.81
0.83
0.87
0.82
0.81
0.87
0.86
0.86
0.81
0.83
0.79
0.86
0.84
0.86
0.83
0.83
0.83
0.86
0.87
0.84
P1
-0.01
0.03
0.01
0.03
0.06
0.03
0.03
0.05
0.04
0.02
0.01
Change in IL
P2
P3
0.01
0.01
-0.02
0.03
0.03
0.04
0.03
0.02
0.03
0.03
0.02
0.02
0.01
-0.02
0.02
0.05
0.02
0.02
0.05
0.03
0.03
0.02
P4
IL < 1 dB
P/F
0.02
0.00
0.03
0.04
0.03
0.02
0.02
0.03
0.03
0.03
0.03
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
Page 19 of 24
RL Initial
P2
P3
Group 4
Sample
A0060
A0061
A0062
A0063
A0064
A0065
A0066
A0067
A0068
A0069
A0070
P1
58.00
58.00
59.00
58.00
58.00
61.00
59.00
58.00
59.00
58.00
58.00
58.00
58.00
60.00
58.00
60.00
59.00
58.00
58.00
59.00
59.00
60.00
58.00
59.00
59.00
59.00
58.00
59.00
59.00
58.00
58.00
60.00
59.00
P4
P1
59.00
58.00
58.00
59.00
59.00
58.00
58.00
58.00
59.00
59.00
59.00
59.00
59.00
60.00
58.00
59.00
62.00
59.00
59.00
58.00
56.00
59.00
RL Post Test
P2
P3
58.00
59.00
59.00
58.00
61.00
58.00
57.00
59.00
59.00
58.00
60.00
58.00
60.00
59.00
58.00
58.00
58.00
60.00
58.00
58.00
61.00
58.00
P4
59.00
59.00
58.00
58.00
59.00
58.00
57.00
58.00
60.00
59.00
58.00
Change in RL
RL>50dB
P1 P2 P3 P4
P/F
1
1
1
0
1
1
0
1
-1
-2
1
0
1
-1
0
1
-1
-1
1
0
-1
0
0
1
0
-1
0
-1
1
0
0
1
-1
0
1
0
-1
0
0
-1
0
1
0
-1
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
Change in PDL
P1
P2
P3
P4
P/F

Group 4
Sample
A0040
A0041
A0042
A0043
A0044
A0045
A0046
A0047
A0048
A0049
A0050
P1
0.05
0.07
0.03
0.05
0.06
0.04
0.07
0.04
0.05
0.05
0.04
PDL Initial
P2
P3
0.06
0.03
0.06
0.04
0.05
0.03
0.03
0.04
0.06
0.04
0.07
0.04
0.04
0.06
0.06
0.05
0.06
0.07
0.06
0.03
0.03
0.03
P4
0.07
0.03
0.03
0.05
0.03
0.04
0.06
0.03
0.07
0.03
0.06
PDL Post Test

P1
P2
P3
P4
0.07
0.09
0.03
0.07
0.05
0.03
0.07
0.08
0.03
0.03
0.07
0.07
0.04
0.03
0.03
0.08
0.06
0.07
0.03
0.07
0.07
0.07
0.05
0.03
0.04
0.06
0.08
0.06
0.03
0.07
0.03
0.05
0.07
0.07
0.04
0.06
0.03
0.03
0.06
0.04
0.03
0.09
0.05
0.07
0.02
0.02
0.00
0.02
-0.01
-0.01
0.00
0.04
-0.02
-0.02
0.03
0.01
0.01
-0.03
-0.01
0.03
0.03
0.04
-0.01
0.01
0.03
0.00
0.01
-0.01
-0.02
0.00
0.03
0.00
-0.04
0.01
0.00
0.02
0.04
0.00
0.01
0.03
-0.02
0.00
0.02
-0.02
0.00
0.02
0.02
0.01
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
Page 20 of 24

Group 4
Sample
A0040
A0041
A0042
A0043
A0044
A0045
A0046
A0047
A0048
A0049
A0050
P1
0.05
0.06
0.07
0.11
0.05
0.10
0.07
0.07
0.05
0.08
0.06
WDL Initial
P2
P3
0.10
0.13
0.09
0.07
0.08
0.07
0.08
0.10
0.07
0.11
0.12
0.06
0.11
0.10
0.13
0.07
0.07
0.12
0.12
0.11
0.05
0.14
P4
0.10
0.04
0.09
0.08
0.08
0.10
0.12
0.09
0.06
0.07
0.10
WDL Post Test

P1
P2
P3
P4
0.09
0.10
0.09
0.11
0.07
0.13
0.07
0.08
0.08
0.09
0.07
0.13
0.16
0.11
0.09
0.14
0.12
0.07
0.14
0.06
0.12
0.15
0.12
0.09
0.15
0.14
0.06
0.17
0.10
0.12
0.14
0.11
0.14
0.08
0.14
0.09
0.10
0.16
0.14
0.14
0.05
0.12
0.11
0.14
Change in WDL
P1
P2
P3
P4
P/F
0.04
0.04
0.02
0.00
0.02
0.03
0.00
0.01
0.03
0.01
0.01
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
0.03
0.03
0.02
0.02
0.06
0.05
-0.01
0.04
-0.01
0.01
0.03
0.06
-0.02
0.05
0.01
-0.01
0.10
-0.02
0.00
0.03
0.06
0.00
-0.02
0.10
0.00
0.02
0.08
0.04
0.02
-0.04
0.06
0.04
0.04
Page 21 of 24
7.5. MECHANICAL SHOCK IL TEST DATA

Acceleration: 500 G.
Numbers of shocks: 5 times per direction.
Numbers of directions: 6 directions.
Shock duration: 1ms.
Sample Size: 11 (Group same as temperature cycling)
Tested Parameter for Pass/Fail: Minimum IL
Test Result: Pass
7.5.2. Test Results
Group 4
Sample
A0060
A0061
A0062
A0063
A0064
A0065
A0066
A0067
A0068
A0069
A0070
P1
0.78
0.85
0.82
0.83
0.87
0.86
0.83
0.84
0.86
0.83
0.83
IL Initial
P2
P3
0.82
0.82
0.80
0.86
0.87
0.86
0.81
0.85
0.84
0.87
0.85
0.82
0.81
0.81
0.83
0.87
0.82
0.81
0.87
0.86
0.86
0.81
P4
0.83
0.79
0.86
0.84
0.86
0.83
0.83
0.83
0.86
0.87
0.84
IL Post Test
P1
P2
P3
P4
0.79
0.86
0.82
0.85
0.89
0.87
0.85
0.87
0.87
0.85
0.83
0.83
0.82
0.81
0.89
0.90
0.89
0.83
0.87
0.84
0.89
0.86
0.85
0.86
0.82
0.85
0.87
0.84
0.82
0.89
0.87
0.88
0.82
0.85
0.81
0.89
0.86
0.87
0.85
0.83
0.86
0.88
0.89
0.85
P1
0.01
0.01
0.00
0.02
0.02
0.01
0.02
0.03
0.01
0.02
0.00
Change in IL
P2
P3
0.01
0.00
0.01
0.03
0.03
0.03
0.02
0.02
0.00
0.02
0.01
0.03
0.05
0.01
0.02
0.00
0.02
0.01
0.02
0.01
0.02
0.01
P4
IL < 1 dB
P/F
0.02
0.02
0.03
0.02
0.01
0.02
0.00
0.03
0.02
0.02
0.01
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
Page 22 of 24
7.6. MECHANICAL VIBRATION IL TEST DATA

Acceleration: 20 G.
Frequency: 20 2000 Hz.
Duration: 4 minutes per cycle.
Numbers of cycles: 4 cycles per axis.
Numbers of axis: 3 axes.
Sample Size: 11 (same as low temp storage)
Tested Parameter for Pass/Fail: Minimum IL
Test Result: Pass
7.6.2. Test Results
Group 2
Sample
A0007
A0008
A0009
A0010
A0011
A0012
A0013
A0014
A0015
A0016
A0017
P1
0.80
0.85
0.82
0.79
0.85
0.86
0.81
0.84
0.81
0.82
0.81
IL Initial
P2
P3
0.84
0.83
0.81
0.79
0.85
0.79
0.82
0.83
0.84
0.83
0.79
0.79
0.79
0.85
0.84
0.82
0.83
0.83
0.78
0.79
0.84
0.79
P4
0.80
0.84
0.81
0.82
0.82
0.82
0.83
0.81
0.79
0.83
0.83
IL Post Test
P1
P2
P3
P4
0.82
0.87
0.84
0.80
0.88
0.88
0.84
0.85
0.82
0.85
0.81
0.85
0.86
0.82
0.80
0.86
0.81
0.85
0.85
0.86
0.84
0.80
0.80
0.80
0.85
0.86
0.83
0.84
0.83
0.80
0.81
0.87
0.82
0.82
0.86
0.83
0.84
0.84
0.84
0.85
0.82
0.80
0.85
0.85
P1
0.02
0.02
0.02
0.01
0.03
0.02
0.03
0.01
0.01
0.03
0.00
Change in IL
P2
P3
0.01
0.03
0.01
0.01
0.01
0.02
0.03
0.02
0.02
0.01
0.01
0.01
0.01
0.00
0.02
0.01
0.01
0.00
0.02
0.02
0.03
0.03
P4
IL < 1 dB
P/F
0.02
0.02
0.02
0.02
0.02
0.02
0.02
0.01
0.01
0.02
0.02
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
PASS
Page 23 of 24
8. MEMS RELIABILITY VERIFICATION

8.1. LONG TERM MEMS RELIABILITY
Long term MEMS reliability is tested by rapid cycling of MEMS devices over deflection angles
larger than those encountered in the switch device at rates much higher than those used in
normal operation. The purpose is to determine if actuator hinges undergo mechanical fatigue
and/or break during extended operation. MEMS devices used in the 1x4 Switch have been
tested for 10 billion operations per hinge.
8.1.1. Hinge tests performed:
a. Hinge lifetimes are tested at the first resonance frequency and the resonant
frequencies before and after stress test are compared.
b. Hinge memory or reversibility is tested by comparing deflection angles at voltages
higher than those during normal operation before and after stress test.
8.1.2. Hinge test Results
a. Hinge lifetimes exceed 10 billion cycles. Resonance frequencies have changed by
less than 3% which is accuracy of our measurements.
b. Hinge memory is not detectable at 10 billion cycles as deflection angles have
changed by less than 4% which is accuracy of our measurements.
Page 24 of 24

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Reliability and Qualification Report P/N 621-1002/1008

A-One MEMS, Inc.

Part No.: 621-1002/1008

A-One MEMS Confidential

A-One MEMS, INC.

A-One MEMS Inc. Proprietary Information

4051 Clipper Ct.

Reliability and Qualification Report P/N 621-1002/1008

A-One MEMS Inc. Proprietary Information

Reliability and Qualification Report P/N 621-1002/1008

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Reliability and Qualification Report P/N 621-1002/1008

Figure 3: SWITCH Mechanical Specification Drawing

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4. QUALIFICATION TEST DESCRIPTION

4.2. PASS/FAIL CRITERIA

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3) Test Set-up for Optical Measurements

Agilent Detector Array

Agilent Tunable Laser Source

Fig A. Measurement of IL, PDL, WDL Set-up

Fig B. Measurement of RL Set-up

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Reliability and Qualification Report P/N 621-1002/1008

9) Mechanical Vibration Test

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The results are

Table 6.1: SUMMARY OF QUALIFICATION TEST RESULTS

High temperature storage:

Low temperature storage:

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Reliability and Qualification Report P/N 621-1002/1008

A-One MEMS Inc. Proprietary Information

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Table 7.1.2: Return Loss Measurement (in dB)

Table 7.1.3: Polarization Dependent Loss Measurement (in dB)

PDL Post Test

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Reliability and Qualification Report P/N 621-1002/1008

Table 7.1.4: Wavelength Dependent Loss Measurement (in dB)

WDL Post Test

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Reliability and Qualification Report P/N 621-1002/1008

7.2. LOW TEMPERATURE STORAGE TEST DATA

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Table 7.2.2: Return Loss Measurement (in dB)

Table 7.2.3: Polarization Dependent Loss Measurement (in dB)

PDL Post Test

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Reliability and Qualification Report P/N 621-1002/1008

Table 7.2.4: Wavelength Dependent Loss Measurement (in dB)

WDL Post Test

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7.3. DAMP HEAT TEST DATA

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