Snapshot steps..

follow them to complete the tutorial created by me for mems cantilever

switch.
Click on next
Select electromagnetic as first physics(for me its recently added you search in all libraries
below you will find it in one of them)
Click on the + sign belowto add the select library in the window
epeat steps to add !solid mechanics" and !moving mesh ale".
Click on finish
So you can see that all there physics that are re#uired for the design of mems cantilever switch
are selected.the physics are selected on the need of re#uirements and not pre defined in
manuals.so it comes with experience .
$ow we have to draw the geometry.so firstly select the units
ight click on geometry and select block
%he screen for specifying the details of si&e and position window will come as shown on the
side
So ' am drawing a beam that is ()* x +, x *.-, microns in length. width and thickness
respectively
then the position of the beam is specified so as beam is going to be above all the layers and
there has to be a gap between beam and bottom electrode ' have specified it as /./,(that is
thickness of bottom electrode *.-, + gap height (.,).
then click on build selectedas shown
So you can see the beam formed
0ou can rename for your continence by doing right click on the block selected as shown..
epeat the steps and draw the other blocks like bottom electrode and transmission line as
re#uired with respective position and si&es
now material selection to aluminum as in my case of evey geometryright click click on
materials as shown to select material browser
$ow find the material and add it to the model
1y default all materials will be selected as the material in browser you can add or remove parts
with your desires .
%he red sign in the above figure means the value is known for simulation and is desired by the
user input if not inputted the simulation will throw as exception
$ow for closed domain analysis of moving mesh ale physics selected we re#uire a boundary
condition of air surrounding our structure so we have to build one more geometry part air and
then select the material air
%he boundary air has to removed from aluminum as shown
$ow add material air..
$ow setting up boundary conditions in physics selected
2round condition on the boundary you want like for me its (3 domain so user has to add each
domain as specified in the box with the help of plus sign
'ntial values &ero
'nitial conservation of temperature and pressure as desired by user
4pplying electric potential on beam5bottom electrode
6efining variable force name that is to be carried forward as interface between one physics to
other
7e don8t consider the air domain for solid mechanics .
9ree end for deformation of beam
9ixed domains that wont move that is no effect of displacement due to force
that is no effect of displacement due to force
Most important step .
Value of electrostatic force in solid mechanics to cause displacement
Es stand for the electrostatics physics
nTx is the normal stress developed
and that value Fes multiplied with nTx
hence
es.nTx_Fes and similarly for y axis and z axis.as sown in aove fi!ure
next step meshing
Computation takes some time and once its done you can plot the results.
ight click on 3d plot
So above is one of the way of result
So different combinations. possibilities and types are there for result analysis few examples are
below..