105

105
MEMSTECH2008, May 21-24, 2008, Polyana, UKRAINE
The Matlab/Simulink Modeling and Numerical Simulation of an Analogue
Capacitive Micro-Accelerometer !art 1" open loop
Teodor #ucian $rigorie
Abstract - The paper eal !"#h an open loop analo$%e
&apa&"#"'e ("&ro-a&&elero(e#er )o#h *ro( #he po"n# o* '"e!
o* (a#he(a#"&al (oel"n$ an #hro%$h #he a&h"e'e(en# o*
&er#a"n n%(er"&al +"(%la#"on+ !h"&h (%+# &on*"r( #he
(a#he(a#"&al (oel+ an "n #he +a(e #"(e help #o e+#a)l"+h
#he op#"(al ar&h"#e&#%re o* #he +y+#e(, The &apa&"#"'e
#ran+%&er "+ one o* "**eren#"al #ype, !"#h #!o *"-e pla#e+
an one (o'"n$, !h"&h play #he role o* proo* (a++,
S#r%&#%re o* #he +y+#e( &on#a"n+ #he proper #ran+%&er an
an ele&#ron"& e'"&e .&har$e a(pl"*"er / pha+e-+en+"#"'e
e(o%la#or0 #o pro&e++ #he +"$nal o)#a"ne *ro(
#ran+%&er, The a&&elero(e#er "+ (a#he(a#"&al (oele, #he
(a#he(a#"&al rela#"on )e"n$ e-pre++e )o#h "n &o(ple-
o(a"n an "n #"(e, The (a#he(a#"&al (oel"n$ &on#a"n+
#!o "+#"n&# pha+e+1 #he (oel"n$ o* #he proper
a&&elero(e#er, !h"&h "n&l%e+ #he proo* (a++ an ela+#"&
ele(en#, an #he (oel"n$ o* #he "**eren#"al &apa&"#"'e
#ran+%&er *or #he proo* (a++ "+pla&e(en#+, U+"n$ #he+e
(a#he(a#"&al rela#"on+, #he )lo&2 +&he(a+ are real"3e *or
ea&h )lo&2 +epara#ely an *or #he *%ll +y+#e(, S#ar#"n$ *ro(
#he n%(er"&al 'al%e+ o* #he a&&elero(e#er+ para(e#er+ #he
n%(er"&al +"(%la#"on+ !"#h pro$ra(("n$
MAT4A56SIMU4INK are (ae *or ea&h o* #he e%&e
)lo&2 +&he(a+,
Keywords" Capa&"#"'e M"&ro-A&&elero(e#er,
Ma#he(a#"&al (oel"n$, 5lo&2 +&he(a+, N%(er"&al
+"(%la#"on,
1 %NT&'()CT%'N
The acceleration *en*or* have a great importance in *trap-
do+n inertial navigation becau*e the architecture of a *trap-
do+n inertial *,*tem include* three *uch *en*or* in cla**ic ca*e
at the level of the *en*ing function and *i- *uch *en*or* in ca*e
of the *ub*titution of the g,rometer* +ith accelerometer* ./10 10
234
A* the *trap-do+n navigator contain* obligator, a navigation
computer it i* obviou* that the data ac5ui*ition from the inertial
*en*or* mu*t be interfaced +ith *peciali6ed circuit* for *ignal*
conditioning ./734 That *uppo*e* additional co*t* if mechanical
*en*or* are u*ed 8o+ever0 the di*coverie* in ph,*ic* from the
la*t ,ear* and the improvement of the manufacture technologie*
in electronic* domain did po**ible the development of the
electronic acceleration *en*or* *imultaneou*l, +ith the
mechanical *en*or* The obtained re*ult* +ere and are
e-tremel, *pectacular*0 thing reflected al*o b, the evolution of
the *trap-do+n inertial navigation *,*tem*
The re*earche* +ere developed on three principal direction*"
the improvement of the performance*0 the miniaturi6ation of the
electronic *en*or* and the obtaining of a price capable to
compete +ith mechanical *en*or* The development of the
component* and the appearance of *ome manufacture
technologie* +ith good performance* brought the electronic
*en*or* in front of the mechanical *en*or* from the point of
vie+ of the performance*0 and +ere decrea*ed their dimen*ion*
until a fe+ mm
2
order or more ./534 The initial price* of the
electronic *en*or* +ere high enough but the initiation of the
*erie* production had an important influence in their decrea*ing
%t e-i*t much more t,pe* of acceleration *en*or*0 but all of
the*e are ba*ed on the di*placement of a proof ma** becau*e of
the inertia force generated b, the applied acceleration 9hat
make* them different i* the method u*ed to mea*ure the proof
ma** di*placement
The electronic detection of the acceleration can be made
u*ing three principal method*" the pie6ore*i*tive method ./:-;340
the tunneling current method ./100 110 1134 and the capacitive
method ./12-1<34 Al*o0 the proof ma** of the accelerometer can
ha* the form of an ela*tic lamella embedded at one end or the
form of a plan plate attached in t+o or more point* on the fi-ed
*tructure of the accelerometer through ela*tic coupling The
determination of the acceleration u*ing fir*t method i* made
u*ing a pie6ore*i*tor fi-ed on the ba*e of the embedded lamella=
the pie6ore*i*tor re*i*tance i* modified b, the lamella deviation
The method +ork* *ucce**full, in ca*e of relative high
deviation* of the lamella0 and *he ha* *ome dra+ back if +e
+ant a great re*olution for the acceleration detection More0 the
pie6ore*i*itive element* have comple- variation* if the ambient
temperature i* changing +hat limiting their u*ing at the
manufacturing of the accelerometer* +ith medium *en*itivit,
The *econd method *uppo*e* the pre*ence of a *harp metallic
tip0 on the proof ma**0 and an electrode0 micro-machined on the
fi-ed *tructure of the accelerometer A tunneling current of
about 1nA can be mea*ured0 +hen a (C voltage bia* i* applied
bet+een the *harp metallic tip and the electrode The current
depend* e-ponential b, the di*tance bet+een the *harp metallic
tip and the electrode The proof ma** di*placement can be
mea*ured +ith a 00001 > preci*ion The method i* ver, preci*e0
but ver, e-pen*ive becau*e of the complicated manufacturing
technolog," the cavit, that contain* the proof ma** mu*t be
vacuumed0 the conductive la,er* obtained through depo*ition
have a ver, *mall thickne** and are currentl, made from noble
metal*0 the control of the di*tance bet+een the *harp metallic tip
and the fi-ed electrode mu*t be ver, good becau*e the
tran*ducer ha* a big *en*itivit,
The capacitive method i* developed much enough in the la*t
,ear* becau*e of the po**ibilitie* of *ignal proce**ing +ith the
technolog, of integrated circuit* Thi* one pre*ent* the
advantage of the miniaturi6ation0 but nece**itate* the pre*ence
of *peciali6ed circuit* for *ignal proce**ing So0 the M?MS
technolog, had a good *tart0 leading to the reali6ation on the
*ame *ub*trate of an acceleration tran*ducer +hich include* the
afferent circuit* for *ignal* conditioning The manufacturing
technolog, and the ad@u*tment* +hich mu*t be made in ca*e of
the capacitive method are more acce**ible comparativel, +ith
tho*e in the tunneling current method
The principal ob@ective of the paper i* to model
mathematicall, and to *imulate numericall,0 u*ing the
MAT#AA/S%M)#%NB model*0 an analogue capacitive micro-
accelerometer ./1734 for it* full characteri6ation from the both
v
v
x )
1
1

co* 1

t
1
1
( )
0
a
1

0
0
x
0 0
0
0
point* of vie+ of *tationar, regime and d,namicall, regime
%% AAS%C '!?&AT%'NS
%n principle the accelerometer operation relie* on the action
of the input acceleration of a proof ma** that ha* a
F
el1
F
=

0
A
1
=

0
A
(d
0
1
1

x
)
1
1
1
=

0
A
7
=

0
A
V
1
( )
(d
0
V
1
1
1

co* 1

t
.54
parallelipipedic *hape and i* placed on a *ub*trate u*ing four
el 1
1 ( )
1
7 ( )
*ilicon fle-ible bar* .fig 1 /1234 'n the *ame *ub*trate there are
t+o electrode*0 placed on oppo*ed *ide* of the mobile pla5ue
d
0
+ x d + x
5
The couple of fi-ed electrode* and the mobile pla5ue form t+o
capacitor* +ho*e capacitie* var, +ith the application of an
acceleration that ha* the abilit, to change the proof ma**
po*ition
The ph,*ical 5uantitie* from fig 1 are" m - proof ma**0 a
r
0
r
The fre5uenc, of *uppl,ing voltage* i* ver, high . f
=
10 86 40
*o that the component* +ith *ine variation from e5uation* .54
are *trongl, filtered b, the *en*itive element that behave* like a
lo+-pa** mechanical filter A* a con*e5uence the t+o
electro*tatic force* can be a**umed a* con*tant and their
e-pre**ion* are"
y acceleration and po*ition of the carr,ing vehicle0 a
x
0 x
acceleration and proof ma** po*ition +ith re*pect to the carr,ing

A V
1
r r r
F
=
0 1
0
vehicle0 F
e
0 F
a
0 F
i
- the ela*tic0 the damping and re*pectivel,
el1
7
(
d

x
)
1
.:4
the inertial force* The ab*olute value* of the three force* are
provided b, the follo+ing e5uation*"
F
e
= kx0
F
el 1
=

0
A
7
V
1
1

(
d
+
x
)1
F = b
d x
0
1
.14
v
1
F
el1
F = ma = m
d y
0
+here k i* the re*ulting ela*ticit, con*tant and b i* the vi*cou*
damping coefficient

d
0
F
el 1
d
0
r r r
F
e
F
a
F
i
r
x
m
y
a
Silicon fle-ible bar*
v
1
Cig 1 Action of the electro*tatic force*
The re*ulting electro*tatic force +ill be
Cig 1 Mechanical model of the accelerometer
0
AV
1
1 1
0
9hen the fi-ed electrode* are not *upplied b, electric
F
el
=
F
el1

F
el 1
=
7

(d

x)
1

(d
+
x)
1

.D4
energ,0 according to fig 1 the motion e5uation of the proof
ma** i* ./120 1D0 1<34
and the e5uation .14 become*
1 1
1 1
m
d y
=
m
d x
+
b
(
x
)
d x
+
kx

F .<4
m
d y
=
m
d x
+
b
dx
+
kx .14
dt
1
dt
1
dt
el
dt
1
dt
1
dt
)*ing .24 and .D40 the e5uation .<4 +ill be
The accelerometer i* miniaturi6ed0 *o the vi*cou* damping i*
provided b, the air that i* enclo*ed in it* +atertight carca** Cor d
1
x

A
1
1
a
1

dx
relativel, large di*placement* of the mobile pla5ue .a* high a*
m 4 the vi*cou* amorti6ation i* given b, the e-pre**ion ./1734 =
dt
1
k

1m

(
d
0

AV
1

x
)2
+
(
d
+
x
)2

dt

x
+
0 1
1

1
.;4
1

1 1
m 7m

(
d

x
)
1
(
d
+
x
)
1
b(x ) = A

1

(d
0
x
)
2
+
(
d
+
x
)
2

0
.24

0 0

+here i* the air vi*co*it,0 A i* the mobile pla5ue area and

1d
0
i* the di*tance bet+een the fi-ed electrode*
%%% MAT#AA/S%M)#%NB M'(?#S AN( N)M?&%CA#
S%M)#AT%'N 'C T8? ACC?#?&'M?T?& A#'CBS
Cig 2 depict* the block diagram of the accelerometer
%f the fi-ed electrode* are *upplied b, the voltage*
mechanical model 'ne denote* b, C and C the lo+e*t and
1 1
v
1
= V
1
*in t0
v
1
= v
1
= V
1
*in t0
.74
highe*t capacitie* of the variable capacitor* The, can be
*imulated a* follo+*
then the follo+ing electro*tatic force* +ill act over the mobile
pla5ue .fig 14
0
0
2 1
0
d
0
-
i
0
C
C
=

0

r
A
=

0

r
Ad
0
+

0

r
Ax
0
V .*4
=
V .*4
*C
2
R
1
.174
1
d

x d
1

x
1
d
1

x
1 i 0
1
+
*C R
0 0 0
.104
7 1
C
=

r
A


=

r
Ad


0

r
Ax

)*ing .114 and .1240 the e5uation .174 become*

1
+ x d
1
x
1
d
1
x
d
1
x
1
d x
1
i
.1
+
*C R 4
[
*.1C
+
C 4
+
1 / R
]

a
+
dt
1
1

+ -
*

dt
A
1

1
x
*
1 1
+

The block diagram of the detection device can be modeled a*

depicted b, fig 5
v
1
1m

(
d
0

x
)
2
k
(
d
0
+
x
)2

x
0

r
Ax
d
1

x
1

1 *
1
C R
v
(
1
+
*C R
)[
*
(
1C
+
C
) +
1/ R
] 0 7 1 0 2 1
m

AV
1
1 1
1

1
Cig 5 Alock diagram of the detection device
%n order to *imulate the *,*tem0 one con*ider* for it the
0 1
7m

(
d
0

x
) (
d
0
+
x
)

follo+ing parameter* ./1734" m = <01mg 0 A = 11mm

1
0
Cig 2 Alock diagram of the mechanical model
d
0
= 10m 0
r
= 1 0 k = <202N/m 0 = 10<
10

5
N*/m
1
0
%f x << d
0
0 one can con*ider the appro-imation
f
=
100k86 0 V
1
=
005E 0 R
1
=
150M

0 R
1
=
<10 kF 0
C
1
C
0
+ C0
.114
C
2
=
1nC 0 C
7
=
11pC 0 C
0
=
100:pC
'ne repre*ent* the accelerometer block diagram in
C
1

C
0

C0
MAT#AA/S%M)#%NB and determine* the voltage v
i
+ith
+here
re*pect to the input acceleration The model from fig : i*
obtained
C =

0

r
A
0
d
0
.114
acceleratia
m
Gain4
+
+
Fi
valori Fi
1/s
vezi x
1/s
x v1
valori x
f(u)
*
-2* R2* C3
vi
C =

0

r
Ax

d
1

x
1
To determine the proof ma** di*placement x and0 implicit the
applied acceleration a 0 the capacitive detection device mu*t be
-
-
um
!nte"rator
*
#ro$uct
m
Gain1
Fa
!nte"rator1
f(u)
Fcn
Fcn2
vezi %c
#ro$uct1
%c valori
%c
C3s+1/R1
&ransfer Fcn1
valori vi
vezi vi
coupled +ith a charge amplifier +ho*e output voltage reflect*
the acceleration modification .fig 7 /170 1534
C
7
vezi Fa
valori Fa
m
Gain2
Fe
-'-
Gain
v
1
R
1
C
1
C
1

v
0
2
R
1
G
H
v
i
vezi Fe
vezi Fel
valori Fe
m
Gain3
Fel valori
Fel
f(u)
Fcn1
v
1
Cig 7 (etection device +ith charge amplifier
Cig : Simulink model of mechanical part +ith detection device
Step-like acceleration *ignal* +ere applied at the model input
and there +ere obtained the variation of the mobile pla5ue
po*ition x.t 4 .fig D4 and the variation of the capacit, difference
The capacitor C
2
i* u*ed in order to block the direct voltage C .t 4 .fig <4
*ignal* that could po**ibl, occur on the mobile pla5ue and the
The value* of the *tep-like acceleration *ignal* u*ed for
re*i*tor
R
1
maintain* the proof ma** to a defined potential V
0
*imulation are 1g 0 1 g 0 7 g 0 :
g
and <g along a time-interval
and provide* a time con*tant
= C
1/ 1
R
1
that i* much higher a*
of 001* The *tep-like *ignal* +ere applied after 0001 * Crom
compared to the e-citation *ignal period
fig D and fig < one can notice an increa*e of the time con*tant*
once the input *ignal i* increa*ed The e-planation of thi*
The proof ma** potential V
0
e5uation" V .*4
=
V
1
.* 4*C
1
+
V
1
.* 4*C
1
0
0
can be calculated u*ing the
.124
phenomenon con*i*t* in the non-linear feature* of the reaction
from the block-*cheme of the mechanical element .the
amorti6ation and electro*tatic force*4 'ne can al*o notice that
*.C
1
+
C
1
+
C
2
4
+
1 / R
1
the time con*tant* of x.t 4 e-hibit an appro-imatel,
proportional increa*e *tarting from 5m* A, contra*t0 the
and the potential from the amplifier output can be calculated
increa*e of C .t
4
time con*tant* become* more and more
u*ing the e5uation
*ignificant *tarting from 10 m*
<g
:g
7g
1g
1g
7
2
to+ard the ma-imum value0 then fall* *lo+l, and reache* 0 after
the mobile pla5ue movement amorti6ation0 +hile the ela*tic
1 force rai*e* from 0 and become* *tead, at a value that e5ual* the
1
*ome of the other t+o force* 9hen the time-characteri*tic*
from fig ; there +ere con*idered the *en*e* of force* that act
0 001 007 00: 00< 01
t /*3
over the proof ma**
x /m 10

:
3
<g
:g
7g
1g
1g
<g
:g
7g
1g
1g
F
i
10
2
F
el
F
a
F
e
x /m 10

:
3 Crom the graphic one can *ee that the electro*tatic force F
el
<
i* 2-order lo+er than the other* but tend* to a con*tant value
D
(uring the tran*ient regime the amorti6ation and ela*tic force
:
change their +eight* from 100I to 0I and vice-ver*a during
5
their balancing
Thi* +a,0 the amorti6ation force pre*ent* an initial @ump
0
Cig D Eariation of the mobile pla5ue po*ition x.t 4
:

C /C

10

11
3
7
1
1
15
0
1
-1
05
0
0 001 007 00: 00< 01
t /*3
-7
-:
0 001 001 002 007 005
t /*3
Cig 10 (i*placement x of the proof ma** for *ine input*
Cig < Eariation of the capacit, difference C .t 4
Aa*ed on the*e ob*ervation* one can e-pect a linear
dependence of the *tead, value* of x +ith re*pect to a %n the
The anal,*i* of *,*tem re*pon*e for *ine input* reveal*
intere*ting conclu*ion* The time evolution of x di*placement
of the proof ma** for *ine input* +ith variou* magnitude* i*
*ame time the dependence of the *tead, value* of C +ith
depicted b, fig 10 The *imulation +a* accompli*hed for *ine
re*pect to a i* e-pected to e-hibit a *trong non-linear behavior input *ignal* +ith fre5uenc, of 7086 and magnitude* of 1g 0
*tarting +ith a certain value of the applied acceleration The
1 g 0 7 g 0 :
g
and re*pectivel, <g The effect of the *,*tem
non-linear feature* are al*o increa*ed b, the non-linear block
non-linear feature* can be noticed in thi* ca*e too The *,*tem
placed bet+een x.t 4 and

C .t 4 0 +here the +eight

of
x
1
from
an*+er0 x.t 4 0 i* a *ine +ave +ho pre*ent* di*tortion* that gro+
the nominator i* increa*ed a* a i* increa*ed
9e calculated the force* F
i
.inertial force40 F
el
.electro*tatic
+ith the input *ignal magnitude Juite from the beginning .for
time interval* comparable to the time con*tant*40 one can notice
force40 F
a
.damping force40 F
e
.ela*tic force4 and +e
vi*ible pha*e change* bet+een the output* +ith different
repre*ented them +ith re*pect to time for an interval of 00015*
.fig ;4 The model *imulation +a* performed for a *tep-like
*ignal +ith the value a = 2g 0 applied at t = 00005*
Forces /N 10

7
3
magnitude*0 but thi* effect i* amplified in the high magnitude
input* domain Aa*ed on the*e notice* one can conclude that the
accelerometer in open loop can be al*o u*ed a* a *en*or +ithin a
limited range of acceleration*
The curve* from fig 11 and fig 11 repre*ent the *tead,
2
value* of x.t 4 and C .t
4
for acceleration* +ithin the range
1
10g 10g The dependenc, x.a4 i* appro-imatel, linear0
proving that the mechanic model behave* +ell a* *en*itive
1
element +ithin the entire range 10g 10g The *ituation i*
0
different +ith the capacitive po*ition tran*ducer The curve
C .a4 reveal* the introdu-cing of *ome *trong non-linearitie*
-1
for higher acceleration* of 2 7 g 0 *o the mea*ure range mu*t
-1 be limited to 7 g 7 g
-2
0 0005 001 0015 001 0015
t /*3
Cig ; $raphic* of the force*
:g
7g
1g
05g
0
5
0
C
7 0
C C
7 7
x /m

10
5
3
that i* modulated in magnitude +ith C (t ) )nder the
1
condition* in +hich x
<<
d
0
0 the e5uation .1<4 become*
v
(
t
)
1
0

r
AV
1
x *in

t .1;4
05
i
C d
1
7 0
and it* magnitude +ill become direct proportional to x and
0
con*e5uentl, to a The curve* from fig 12 +ere obtained
through the *imulation of the model from fig : for a time of
-05
0002 * at *tep-like input* of acceleration +ith value* of 005g 0
1 g 0 7 g
and re*pectivel, : g The curve* e-hibit an
-1
appro-imatel, linear dependenc, +ith the acceleration for input
-10g -5g 0 5g 10g
a /m/*
1
3
value* under 7 g Cor value* higher than 7 g 0 the acceleration
Cig 11 Stead, value* of x.t 4
re*ult* in an increa*e of the +eight corre*ponding to the term
d
1
x
1
from e5uation .1<4 and e5uation .1;4 i* no longer valid
C /C 10

11
3
<
:
7
1
0
-1
-7
-:
-<
-10g -5g 0 5g 10g
a /m/*
1
3
Cig 11 Stead, value* of

C .t 4
v
i
/E3
07
02
01
01
0
-01
-01
-02
-07
001;;< 001;;<5 001;;; 001;;;5 002
t /*3
Cig 12 AccelerometerK* re*pon*e at *tep-like input*
Con*idering the model from fig :0 if one *eparate* the part
According to the model from fig :0 the *ine voltage v
1
.t 4 i*
bet+een

C and v
i
0 and perform a *imulation for con*tant
modulated in magnitude b, the *ignal

C .t 4 Crom .1540
if
input* of C 0 one get* the curve* from fig 17 .for C > 0 4
C
2
>> 1C
0
0 1/ R
1
0 and *C
7
R
1
>> 1 ./17340 +e get and fig 15 .for C < 0 4 '+ing to the high fre5uenc, of the
V .*4
=
1 C
V .*40
.1:4
*ignal0 it +a* e-tracted along a *hort interval0 analogou* to the
procedure u*ed for fig 12 The magnitude* of voltage* v
i
(t ) are i 1
7
that i*
direct proportional to C Thi* confirm* both the pa**ing from
the e5uation .154 to e5uation .1:4 through appro-imation and
re*pectivel, the converting from comple- domain to time
V .*4
=
1

0

r
A

x
V
(
*
)

.1D4
domain reflected b, e5uation* .1:40 .1D4 and .1<4 Another
i
C d
1

x
1 1 relative *impl, ob*ervation i* that the *+itching of C *ign
re*ult* in a modification of the *ignal v
i
(t ) +ith a value of
Crom the previou* *imulation* one can *ee that the value* of the
mechanic model time con*tant* are a* high a* ten of m* '+ing
to the high fre5uenc, of the *ine *ignal v
1
(
t
)
. f
=
10 86 4 one
can con*ider that the *ignal x
1
(t ) i* appro-imatel, con*tant +ith
re*pect to
v
1
.t
4
and the e5uation .1D4 can be tran*lated in the
time-domain under the form
v
(
t
) =
1 C
v
(
t
) =
1
0

r
A x
v
(
t
)

.1<4
i 1
d
1
x
1 1
!racticall,0 one mu*t +ait for the output *ignal of the load
amplifier
v
i
(
t
)
to get the *ame *hape a* the *ine *ignal v
1
(
t
)
110
110
01
0
-01
2 21 27 2: 2< 7
01
0
-01
2 21 27 2: 2< 7

ifier
1
-1
1
v
v
; 1
005
0
C=1 pC
of v
1
and decoupled on the other Aoth interrupter* operate in a
con@ugate manner *o a* the circuit perform* a function that i*
-005
2 21 27 2: 2< 7
*imilar to the rectification The voltage *ign v
d
i* then filtered
01
C=1 pC u*ing a lo+-pa** filter %n thi* +a, the output *ignal v
f
+ill
v
i
/E3
0
-01
01
2 21 27 2: 2< 7
C=7 pC
contain information concerning both the magnitude of v
i
(
t
)
and
re*pectivel, it* pha*e .through it* *ign4
0
-01
2 21 27 2: 2< 7
C=: pC
R
7
R
2
-
v
i
H
R
:
v
i

R
5
-
H
v
i

C
5
v
in
v
d
R
D
R
<
-
H
f
Amplifier %nverter
v
id
C
R
10
:
R
t /* - 10
-7
3
Cig 17 v
i
(
t
)
dependence* for

C
=
con*tant .

C
>
0 4
v
1
1
-1
*gn
;
#!C
005
0
-005
C=-1 pC
2 21 27 2: 2< 7
C=-1 pC
Cig 1D (emodulator electronic *cheme
The demodulator electronic *cheme can be modeled a*
depicted b, fig 1D /173 The tran*fer function* of the three
block* from fig 1D are
01
V L .*4 R
0
i
=
7
0
-01
2 21 27 2: 2< 7
V
i
.*4 R
2
V L L .*4
R
.104
v
i
/E3
C=-7 pC
i
=
:
=
10
01 V L
i
.*4 R
5
0
V
f
.* 4 R + R
=
; 10
-01 V .*4 *
1
R R R C C
+
*/C R (R
+
R )
C R R 3
+
R

2 21 27 2: 2< 7
d D < ; 5 : : ; D < 5 D 10 ;
C=-: pC
The follo+ing notation* are u*ed
k
a
= R
7
/ R
2
0
t /* - 10
-7
3
k
A
= 1 + R
10
/ R
;
0
.114
a = R R R C C 0
Cig 15 v
i
(t ) dependence* for C = con*tant . C > 0 4
1 D < ; 5 :
Con*idering the above conclu*ion*0 one can deduce that the
acceleration detection can be performed through the
a
1
=
C
:
.R
D
+
R
<
4

C
5
R
D
R
10
/ R
;
0
The e5uation* .104 become
determination of
v
i
(t )
magnitude Still a ver, *eriou* problem
V
i
L .*4
=
ka 0
occur* here %f the *ignal
v
i
(t ) i* demodulated through the V
i
.*4
e-traction of it* magnitude0 one cannot preci*el, kno+ if the
determined acceleration i* po*itive or negative A* one could
*ee0 the acceleration *ign i* influenced b, the pha*e of v
i
(
t
)

A*
a con*e5uence0 during the detection *tage one mu*t u*e a pha*e-
V
i
L L .*4
=
10
V
i
L .*4
V
f
.* 4
=


k


A

.114
*en*itive demodulator a* the one depicted b, fig 1: /173 V
d
.*4 a
1
* + a
1
* + 1
Ampl
v
in
v
id
v
d
#!C
depicted b, fig 1< %n order to *imulate the model0 the follo+ing
v
i
v
f
R
7
= R
5
= R
:
= R
;
= 10k 0 R
D
= R
<
= 1<0 k 0 R
10
= 50:
k 0
1
C
5
= C
:
= 105nC )*ing them0 the follo+ing variable*
2
*gn
+ere computed .114" k
A
=
105:
0
a
1
=
002<<<

10 * 0
a
1
= D10; 10 * 0 k
a
= 10 The cutting fre5uenc, of the lo+-
Cig 1: !ha*e-*en*itive demodulator
The control of both interrupter* i* performed b, mean* of the
alternative voltage *ign v
1
The, are coupled for an alternation
111
111
pa** filter become0 under the*e condition*0
f
t
=
7010;D86

70186
0 1 1 2 7
v
d
/E3
10
5
d
1
x
dx
a
+ dt
1
1 dt 1 x
1
1* C
2
R
1
(1
+
*C R )[*(1C
+
C )+
1 / R
]
v
i
-10
0 1 1 2 7
v
id
/E3
0
-5
C d
1
T
1
0

(d x)
1
0
0
v
A
T
0
7

1
d
vezi vi
vi
valori
vi
-'-
Gain2
vin
valori vin
vezi
vin
(itc)
vezi vf
v
i
/E3
1
0
-1
0 1 1 2 7 5
-5
intrare
sinusoi$ala
-'-
Gain1
+
+
um1
*+
a2,s
2
+a1,s+1
&ransfer Fcn2
vf
valori
vf
v
in
/E3
10
5
t /* - 10 3
v$
0
0 1 1 2 7 5
v1
i"n
(itc)1
vi$
valori v$
vezi v$ v
id
/E3
10
t /* - 10
-5
3
valori vi$
vezi vi$
5
0
Cig 1< MAT#AA/S%M)#%NB model of the demodulator
Con*idering that the input i* a *ine function +ith the
5
5
t /* - 10
-5
3
magnitude V
i
=
1E and the fre5uenc, f = 10 86 .e5ual to
0
that of the voltage v
1
.t 4 40 the characteri*tic* from fig 1; and
0 1 1 2 7 5
fig 10 are obtained %n both figure* there are outlined the
voltage +aveform* up to the input in the lo+-pa** filter %n both
ca*e* +e con*idered the influence of acceleration *ign over the
t /* - 10
-5
3
Cig 10 Eoltage +aveform* up to the input in
the lo+-pa** filter . a < 0 4
*ignal pha*e of the input v
i
.t 4 Cig 1; repre*ent* the voltage*
due to a po*itive acceleration and fig 10 depict* the voltage*
o+ing to a negative one 'ne can notice that the demodulator
Con*idering the acceleration lo+er than 7 g 0 the proof ma**
operate* a* a rectifier" in the ca*e
negative alternation and in the ca*e
po*itive alternation
a > 0
a < 0
it rectifie* along a
it rectifie* along a
di*placement* can be a**umed a* ver, lo+ . x
<<
d
0
4 and
e5uation .154 become*
The output of the pha*e-*en*itive demodulator can be
calculated +ith
v
1
k k
f

a A
1

0

r
AV
1
x
7 0
.1:4
1
T
v
f
=
k
A
v
d
.t 4
=
k
A

v
d
.t 4dt
=
Con*e5uentl, the output *ignal v
f
i* appro-imatel, linear
0

T / 1 T

+ith the di*placement x of the proof ma** and con*e5uentl,

+ith the applied acceleration0 but under the condition that the
=
k


(
k
)
v .t 4dt
+

k v .t 4dt

0
.124
acceleration *hould not e-ceed 2

7g
a i

0
a i
T / 1

%E N)M?&%CA# S%M)#AT%'N 'C T8? ?NT%&?

+here T repre*ent* the period of the *ignal
v
i
.t 4 that
ACC?#?&'M?T?& AN( C'NC#)S%'NS
generate* v
d
.t 4 After the *ub*titution v
i
.t 4 = V
i
*in
t
+e get %f +e merge the block diagram of the mechanic model .fig
240 the block diagram of the detection device .fig 54 and the

T / 1 T

block diagram of the demodulator0 +e get the block diagram of k k V 7 k k V

v
=
a A i

*in

tdt
+

*in

tdt

=
a A i
0
.174
f
T

that i*
T / 1

T
the entire accelerometer0 depicted b, fig 11

-
v
=
1
k k V

1
k k
1

0

r
AV
1
x
.154
+ -
* *
f

a A i

a A
C d
1

x
1


A
1
1 1
1m

(
d

x
)
2
+
(
d
+
x
)
2
v
i
/E3
1
0
-1
0 0
k
m
0 1 1 2 7 5

AV
1

1 1

v
in
/E3
0
-5
t /* - 10
-5
3
0 1

7m
0

(d + x)
1

5
t /* - 10
-5
3
7 1 0 2
v
1
C
0

r
Ax
d
1
x
1
-10
0 1 1 2 7 5
-5
v
in
v
d
/E3
0
-5
t /* - 10 3
-1
+
k
a

k
A
v
f
a *
1
+
a *
+
1
-10
0 1 1 2 7 5
t /* - 10
-5
3
v
1
1
v
id
+ 1 1
Cig 1; Eoltage +aveform* up to the input in
the lo+-pa** filter . a > 0 4
-1
s"n
Cig 11 Alock diagram of the entire accelerometer
- 2* R2* C3
-'-
C3,s+1/R1
001;;: 001;;D 001;;< 001;;; 002
t /*3
001;;: 001;;D 001;;< 001;;; 002
t /*3
-
%n the above the block* that form the accelerometer +ere
*imulated one at a time The operation of accelerometer a* a
+hole mu*t be al*o con*idered0 e*peciall, becau*e in the ca*e of
intermediate and final block*0 the time-variation* of the input
5uantitie* +ere not con*idered The*e 5uantitie* actuall, come
value* of the *tep-like input* u*ed for *imulation +ere cho*en a*
follo+*" po*itive and negative value*0 lo+er and higher
magnitude* and re*pectivel, a combination bet+een *tep input*
that *hould outline the accelerator abilit, to follo+ be mean* of
it* output the input 5uantit, %n thi* +a,0 for *imple *tep-like
from the previou* block* input* +ith the value* a = 1g 0 a = 1g 0 a = 7 g and
The MAT#AA/S%M)#%NB model that +a* u*ed for the
entire *imulation of the accelerometer i* that depicted b, fig 11
%n order to empha*i6e all the po**ible a*pect* of the problem0 the
a = 7 g 0 the characteri*tic* from fig 120 fig 170 fig 15 and
re*pectivel, fig 1: +ere obtained
vin
+
+
1/s
vezi x
1/s
x v1
valori x
f(u)
*
vi
valori vi
vezi vi
-'-
Gain2
valori vin
(itc)
vezi vin

*+
vezi vf
vf
acceleratia -
um
!nte"rator
*
!nte"rator1
f(u)
Fcn2
#ro$uct1
%c
&ransfer Fcn1
Gain1 um1
a2,s
2
+a1,s+1
&ransfer Fcn2
v$
valori vf
#ro$uct
Fcn -ezi %c
valori %c
(itc)1
vezi v$
valori v$
-'-
Gain
f(u)
Fcn1
v1
$emo$ulare
i"n
vi$
valori vi$
vezi vi$
Cig 11 MAT#AA/S%M)#%NB model of the entire accelerometer
x /m - 10
-:
3
1
di*placement x of the proof ma**0 the variation C of the
05
0
variable capacitor* capacitie* and the accelerometer output
voltage v
f
4 'ther 5uantitie* +ere
0 0005 001 0015 001 0015 002 x /m - 10
-:
3
C /C - 10
-11
3
1
1
0
t /*3 0
-05
-1
0 0005 001 0015 001 0015 002
0 0005 001 0015 001 0015 002 C /C - 10
-11
3 t /*3
v
i
/E3
005
0
t /*3
0
-1
-1
0 0005 001 0015 001 0015 002
-005
001;;5
v
in
/E3
0
-01
-07
001;;5
v
id
/E3
0
-01
-07
001;;5
v
d
/E3
0
-01
-07
001;;5
v
f
/E3
0
-05
001;;: 001;;D 001;;< 001;;;
001;;: 001;;D 001;;< 001;;;
001;;: 001;;D 001;;< 001;;;
001;;: 001;;D 001;;< 001;;;
002
t /*3
002
t /*3
002
t /*3
002
t /*3
v
i
/E3
005
0
-005
001;;5
v
in
/E3
07
01
0
001;;5
v
id
/E3
07
01
0
001;;5
v
d
/E3
07
01
0
001;;5
v
f
/E3
001;;: 001;;D 001;;< 001;;;
001;;: 001;;D 001;;< 001;;;
t /*3
002
t /*3
002
t /*3
0 0005 001 0015 001 0015 002
t /*3
Cig 12 The time-evolution of all 5uantitie* from the block-
*cheme for a = 1g
%n the figure* 120 170 15 and fig 1:0 one can notice the time-
05
0
0 0005 001 0015 001 0015 002
t /*3
evolution of all 5uantitie* from the block-*cheme Some of the
5uantitie* +ere repre*ented for the entire *imulation period .the
Cig 17 The time-evolution of all 5uantitie* from the block-
*cheme for a = 1g
repre*ented in the final *tage* of the *imulation %t +a* the ca*e
+hen onl, the final *tage of the *ignal and it* modification* of
x /m - 10
-:
3
0
-1
pha*e and amplitude .the voltage v
i
from the detection circuit
-7
output0 the output voltage v
in
acro** the inverting *ide of the
0 0005 001 0015 001 0015 002
demodulator and re*pectivel, the demodulator output voltage
v
d
4 pre*ented intere*t
x /m - 10
-:
3
C /C - 10
-11
3
0
-5
t /*3
7 0 0005 001 0015 001 0015 002
v
i
/E3
1 05
t /*3
0
0
0 0005 001 0015 001 0015 002
C /C - 10
-11
3
5
0
t /*3
-05
001;;5
v
in
/E3
1
1
001;;: 001;;D 001;;< 001;;; 002
t /*3
0 0005 001 0015 001 0015 002
v
i
/E3
05
0
-05
001;;5
v
in
/E3
0
-1
-1
001;;5
v
id
/E3
0
-1
-1
001;;5
v
d
/E3
001;;: 001;;D 001;;< 001;;;
001;;: 001;;D 001;;< 001;;;
001;;: 001;;D 001;;< 001;;;
t /*3
002
t /*3
002
t /*3
002
t /*3
0
001;;5
v
id
/E3
1
1
0
001;;5
v
d
/E3
1
1
0
001;;5
v
f
/E3
7
1
0
001;;: 001;;D 001;;< 001;;;
001;;: 001;;D 001;;< 001;;;
001;;: 001;;D 001;;< 001;;;
002
t /*3
002
t /*3
002
t /*3
0
-1
-1
001;;5
v
f
/E3
0
001;;: 001;;D 001;;< 001;;; 002
t /*3
0 0005 001 0015 001 0015 002
t /*3
Cig 1: The time-evolution of all 5uantitie* from the block-
*cheme for a = 7 g
+hen the input value i* increa*ed0 a higher difference can be
-1
noticed bet+een the magnitude of v
i
and that of v
d

-7
0 0005 001 0015 001 0015 002
t /*3
Cig 15 The time-evolution of all 5uantitie* from the block-
*cheme for a = 7g
After the anal,*i* of the four figure* one can notice the
'ne can notice certain *,mmetr, of 5uantitie*0 appearing for
the *ame value* of input* +ith oppo*ite *ign* Therefore one can
conclude that there i* a *,mmetrical *tatic characteri*tic v
f
.a4
for the *tudied accelerometer The fir*t 2 notice* a**ert the
tendenc, of obtaining a nonlinear *tatic characteri*tic but0 on the
other *ide0 the D-th notice a**ert* that +ithin the range
follo+ing"
7 g 7
g
the nonlinear influence* of the mechanical model
the time con*tant* become higher a* the *cheme from input
and of the detection circuit cannot be neglected0 the dependenc,
to+ard output=
the time con*tant* corre*ponding to the *ame 5uantit, rai*e
V
i
= f .a4 being appro-imatel, nonlinear 'ne cannot
+ith the input increa*e=
the time con*tant* re*t con*tant for the *ame 5uantit,0 for the
guarantee the *ame thing for the relation v
f
=
f .a4 The 7-th0
5-th 0 :-th and <-th notice* prove the e-i*tence of a nonlinear
ca*e of input* +ith the *ame magnitude but oppo*ite *ign*=
dependenc, v = f .V 4 +ithin the range

7 g

7 g The
f i
a pha*e-difference occur* bet+een the voltage* v
i
and v
1
= it
deviation* from linearit, of thi* dependenc, are not ver, high0
i* reflected b, the voltage*
in
and v
id
0 +hich pre*ent but are vi*ible a* compared to tho*e of the dependenc,
pa**ing +ith an ob*ervable value0 on the other *ide of the null V
i
= f .a4 A* a con*e5uence one e-pect* to obtain a *tatic
a-i*=
pha*e-difference bet+een the voltage* v
i
and v
1
rai*e* +hen
nonlinear charac-teri*tic

7 g

7 g
v
f
= f .a4 0 even +ithin the domain
the output 5uantit, i* increa*ed and it become* con*tant for
input* +ith the *ame magnitude and oppo*ite *ign*=
The graphical repre*entation of the *tead, value* of the

the u*eful *ign v
d
i* lo*t0 before it* entrance in the lo+-pa**
voltage v
f
obtained for variou* value* of the acceleration
filter0 through periodic pa**e*0 +ith con*iderable value*0 on
+ithin the range

7 g

7
g
i* depicted b, fig 1D0 repre*enting
the other *ide of the null a-i*=
there i* a certain proportionalit, bet+een the magnitude of v
i
and the applied acceleration=
a *tatic characteri*tic The *hape of the characteri*tic come* to
certif, it* *,mmetr, +ith re*pect to the po*itive and negative
acceleration* and *ome vi*ible non-linearit, are revealed0 even
if the mea*uring domain +a* re*tricted to 7 g 7 g The
accelerometer can operate +ithin thi* range0 becau*e the
7g
1g
-2g
-2g
1g
7g
nonlinearitie* are *mall0 but if one intend* to mea*ure
acceleration* higher than 7 g 0 it i* *trictl, nece**ar, to clo*e it*
categorie* of *ignal*
&?C?&?NC?S
loop0 in order to avoid the overlapping of the t+o characteri*tic*
/13 M Carrell0 M Aarth0 The $lobal !o*itioning S,*tem and
that pre*ent *trong nonlinear feature* . V
i
=
f .a4
v
f
=
f .V
i
4 4 for a
>
7g
v
f
/E3
15
1
15
1
05
0
-05
-1
-15
-1
-15
-7g -2g -1g -1g 0 1g 1g 2g 7g
a /m/*
1
3
Cig 1D Stead, value* of the voltage v
f
and
%nertial Navigation0 Mc-$ra+-8ill0 Ne+-Nork0 1;;;
/13 C9 Tan0 B Mo*tov0 ! Earai,a0 Cea*ibilit, of a g,ro*cope-
free inertial navigation *,*tem for tracking rigid bod, motion
California !AT8 &e*earch &eport0 )CA-%TS-!&&-1000-;
/23 MC &adi-0 S,*teme* inertiel* a compo*ant* lie* OOStrap-
do+nPP Cepadue* ?dition*0 ?cole Nationale Superieure de
lKAeronauti5ue et de lK?*pace S)!KA?&'0 Toulou*e0 1;;2
/73 'S Sal,chev0 %nertial S,*tem* in Navigation and $eoph,*ic*
Aauman MST) !re**0 Mo*co+0 1;;<
/53 A #a+rence0 Modern %nertial Technolog," Navigation0
$uidance and Control Springer Eerlag0 Ne+ Nork0 1;;2
/:3 C 8ong0 A Minhang0 Q 8ai@un0 S Shao5un0 A pie6ore6i*tive
accelerometer +ith a novel vertical beam *tructure Sen*or*
and Actuator* A0 Eol A :20 .No 140 ?l*evier0 Sept 1;;D0 pp
1;-15
/D3 ?M Bruglick0 AA 9arneke0 BSM !i*ter0 CM'S 2-A-i*
Accelerometer* +ith %ntegrated Amplifier Aerkele, Sen*or
and Actuator Center0 )niver*it, of California0 Aerkele,
/<3 S Marco0 M Samitier0 ' &ui60 A 8erm*0 M Morante0 Anal,*i*
of ?lectro*tatic damped pie6ore6i*tive *ilicon accelerometer
%n order to te*t the accelerometer an*+er0 one determined the
characteri*tic from fig 1; corre*ponding to the input from fig
1< 'ne can *ee that the accelerometer trigger* the *ignal* +ith a
rapid time-variation0 but +ith *pecific time con*tant*
a /m/*
1
3
70
20
10
10
0
-10
-10
-20
0 005 01 015 01
t /*3
Cig 1< %nput *ignal for accelerometer te*ting
v
f
/E3
15
1
05
0
-05
-1
-15
Sen*or* and Actuator*0 A 2D-2<0 pp 21D-2110 1;;2
/;3 ' T*utomu0 (evelopment of !ie6oelectric Accelerometer of
Charge Shear T,pe having Temperature %ndependent
Sen*itivit, Mapane*e Mournal of Applied !hi*ic*0 !art 10 No
7A0 April 1;;<
/103 ? Ao,den0 A 8igh-!erformance Tunneling Accelerometer
Term pro@ect :DDD0 %ntroduction to Microelectro-mechanical
S,*tem* .M?MS40 Spring 1;;;
/113 T9 Benn,0 8B &ock*tad0 C8 #iu0 Micromachined
Tunneling Accelerometer http"//+++ Stan-
fordeduRchliu/MTAhtml
/113 C8 #iu0 Modeling and Control Anal,*i* for Tunneling
Sen*or* http"//cdr*tanfor d edu/((/SM-S#/Tunneling
Sen*or*/Aa*ic &e*earch/ Mode
/123 A ? Ao*er0 & T 8o+e0 Surface Micromachined
Accelerometer*0 %??? M Solid-State Circuit*0 vol SC-210 pp
2::S2D50 March 1;;:
/173 M Braft0 Clo*ed-loop accelerometer emplo,ing over*ampling
conver*ion !h( The*i*0 Coventr, )niver*it,0 1;;D
/153 M Braft0 C! #e+i*0 T$ 8e*keth0 M Tulmann0 Signal !ick-
off in micromachined accelerometer* 5
th
%??? %nternational
Conference on 'ptimi*ation of ?lectric and ?lectronic
?5uipment0 Eol %%%0 pp 2;1-2;;0 Ara*ov0 &omania0 1;;:
/1:3 M Ean !aemel0 %nterface circuit for capacitive accelerometer
Sen*or* and Actuator*0 A1D0 pp :1;-:2D0 1;<;
/1D3 T Eei@ola0 Accelerometer Model in A!#AC CT-1<0 8el*inki
)niver*it, of Technolog,0 Cebruar, 1<0 1;;7
/1<3 T Eei@ola0 8 Bui*ma0 M #ahdenpera0 M Compact #arge-
(i*place-ment Model for a Capacitive Accelerometer
!roceeding* of MSMK;;0 San Muan0 pp 11<-1110 April 1;-110
1;;;
-1
-15
0 005 01 015 01
t /*3
Cig 1; Accelerometer an*+er corre*ponding to the input from
fig 1<
Another rea*on for +hich the loop mu*t be clo*ed i* due to
the time con*tant* variation at the increa*e of a produce* the
modification of the accelerometer cutting fre5uenc,0 +hich
*ometime* leading to an unde*ired filtering or pa**ing of *ome