PILine® Ceramic Motor Drives for Automation

Ultrasonic Piezomotors for High-Speed Actuation and Positioning

Updated 12/2008
 Piezo • Nano • Positioning
Nanometer-Precision Actuators
Piezoelectric / Motorized Actuator Solutions
PI is the leading manufacturer
of ultra-high-precision actua-
tors for nanopositioning and
micropositioning applications
in industries such as Semi-
conductors; Biotechnology and
Medicine; Lasers, Optics, Micros-
copy; Aerospace Engineering;
Precision Machining; Astronomy
and Microsystems Technology.
NEXLINE® Nanopositioning
Actuators
 PiezoWalk® Drive
 High-Dynamics Operation
Mode
 Forces to 600 N
 <0.1 nm Resolution
 Self-Locking at Rest
 Travel to 20 mm (Basically
Unlimited)
 High Reliability and Long
Lifetime
 Non-Magnetic
Motorized Actuators
 DC & Stepper Motors
 Forces to 400 N
 Travel to 50 mm
 Resolution to 50 nm
2
NEXACT® Nano Positioning
Actuators
 PiezoWalk® Drive
 Compact Dimensions
 Forces to 10 N
 <0.1 nm Resolution
 Self-Locking at Rest
 Travel to 25 mm (Basically
Unlimited)
 Velocity to 10 mm/s
 Non-Magnetic
Flexure-Guided Piezo
Actuators
 PICMA® Piezoceramic
Multilayer Actuators
 Sub-Nanometer Resolution
 Fast Response (Millisecond-
Range)
 Excellent Guiding Precision
 Travel to 2 mm
PILine® Linear Actuators /
Motors
 Ultrasonic Piezomotors and
Drives
 Velocity to 500 mm/s
 Compact Dimensions
 Travel to 150 mm (Basically
Unlimited)
 Forces to 7 N
 Self-Locking at Rest
 Resolution to 50 nm
 Non-Magnetic
Piezo Stack Actuators
 PICMA® Multilayer and
PICA™ Stack Actuators
 Forces to 100 kN
 Sub-Nanometer Resolution
 Fast Response (to
Microsecond-Range)
 High Reliability and Long
Lifetime
 Travel to 200 µm
 Piezo • Nano • Positioning

High-Speed Precision Actuators

PILine® Ultrasonic Piezomotors – Working Principle
PILine® linear piezomotors are
based on a novel, patented
ultrasonic drive developed by
PI. Ultrasonic oscillations of a
piezoceramic actuator are
transferred to linear motion
along a friction bar, which is
attached to the moving part of
a mechanical setup.
At the heart of the system is a
monolithic piezoceramic plate,
segmented by two electrodes.
Ultrasonic motors cannot pro-
vide the unlimited resolution of
linear piezo actuators and flex-
ure-guided piezo positioning
stages. These motors transfer
motion through friction, which
is why their repeatability is
limited to about 50 nm.
Much higher resolution and
holding forces can be achieved
with PiezoWalk® piezomotors /
drives, see main catalog. State-of-the-art PILine® ultrasonic motors are based on a simple con-
struction allowing for the design of low-cost drive units and extremely

Depending on the desired PILine® Levels of Integration compact, high-speed micro-positioning stages smaller than a matchbox

direction of motion, the left or PILine® ultrasonic drive prod-

right electrode of the piezoce-
ramic plate is excited to pro-
duce high-frequency eigen-
mode oscillations at tens to
hundreds of kilohertz. An alu-
minum friction tip (pusher)
attached to the plate moves
along an inclined linear path at
the eigenmode frequency.
The pusher is preloaded
against the friction bar which
is attached to the slider, turn-
table, etc. Through its oscilla-
tions, it provides micro-impul-
ses that drive the moving part
forward or backwards.
ucts are offered in three differ-
ent levels of integration. The
drive electronics and controller
can be chosen accordingly.
 P-661 and P-664 OEM motors
require the greatest amount
of care at the customer’s site.
Motor and friction bar – the
length depends on the
desired travel range – have
to be integrated into a
mechanical setup. Operation
requires preload of the
motor against the friction
bar, guiding and, if neces-
sary, the servo-loop.

With each oscillatory cycle, the  M-674 RodDrives can replace

mechanics executes a step of a
few nanometers; the macro-
scopic result is smooth motion
with a virtually unlimited travel
range. State-of-the-art ultra-
sonic motors can produce
accelerations to 5 g and veloci-
ties to 500 mm/s.
classical drive elements like
rotary motor / leadscrew
assemblies, or magnetic lin-
ear drives integrated into a
micropositioner or handling
device. Integration requires
guiding and – if necessary –
the servo-loop.
 Linear positioning stages
represent the highest level of
manufacturer integration.
The piezomotor is integrated
completely in a high-quality
mechanical setup including
the servo-loop with direct-
metrology linear encoders.

PILine® levels of integration: OEM motor, RodDrive, linear positioning stage

3
 Piezo • Nano • Positioning

Features and Advantages of a leadscrew means no

of PILine ® Ultrasonic
Piezomotors
 Compact Size: the direct-
drive principle allows the de-
sign of ultra-compact trans-
lation stages. The M-662, for
example, provides 20 mm
travel in a 28 x 28 x 8 mm
package.
 Low Inertia, High Accelera-
tion, Speed and Resolution:
PILine® drives achieve veloc-
ities to 500 mm/s and accel-
erations to 5 g. They are also
very stiff, a prerequisite for
their fast step-and-settle
times – on the order of a few
milliseconds – and provide
resolution to 10 nm. The lack
lubricant flow or material Custom high-force ultrasonic
piezo motors can provide
relaxation to cause submi- forces to 50 N
cron creep. There is also no
rotational inertia to limit
acceleration and decelera-
tion.
 Excellent Power-to-Weight
Ratio: PILine® drives are opti-
mized for high performance
in a minimum package. No
comparable drive can offer
the same combination of
acceleration, speed and pre-
cision.
 Safe: The minimum inertia of
the moving platform togeth-
er with the “slip clutch”
effect of the drive provide

better protection of precision  Custom Solutions / Flexibili-

fixtures / devices than lead-
screw-driven stages. Despite
the high speeds and acceler-
ations, there is a much lower
risk of pinching fingers or
other injuries than with
conventional drives. This
means users may not need
interlocks, light curtains or
other measures to keep
them safe.
 Self-Locking Feature: PILine®
drives create a braking force
Settling behavior of a PILine® M-663 linear stage, 100 µm step. A stable position to
within 0.1 µm can be reached in only 10 ms
when not energized without
the position shift common
with conventional mechani-
cal brakes. Other benefits of
the self-locking are the elimi-
nation of servo dither and
steady-state heat dissipa-
tion.
 Vacuum Compatibility: Vacu-
um compatible versions of
PILine® drives are available.
 Negligible EMI: PILine® dri-
ves do not create magnetic
fields nor are they influenced
by them, a decisive advanta-
ge in many applications.
ty for OEMs: PILine® drives
are available in open-loop
and closed-loop translation
stages and as OEM compo-
nents. PI develops and ma-
nufactures all piezo ceramic
components in-house. This
gives us the flexibility to
provide custom motors
(size, force, environmental
conditions) for OEM and
research applications.
 Quality, Lifetime, Experien-
ce: Based on PI’s 4 decades
of experience with piezo
nanopositioning technolo-
gy, PILine® drives offer
exceptional precision and
reliability with an MTBF of
>20,000 hours. Rotating
components such as gears,
shafts and moving cables
that are prone to failure in
conventional motion sys-
tems, are not part of the
PILine® design.

Principle design of a PILine® ultrasonic piezomotor-driven translation stage

4
 Piezo • Nano • Positioning

Selection Guide
High Speed Ceramic Linear Motors, Actuators and Suitable Controllers
PILine® Ultrasonic Motors
Models Description Push Force [N] Travel [mm] Page
P-661, P-664 Compact PILine® piezo linear drives for OEMs 2, 5 Unlimited 6
M-674 RodDrive ultrasonic piezo linear motor pusher for OEMs 7 to 100 8
P-653 PILine® miniature linear motor / slide: 8 mm length, PCB-mounted 0.15 2 10
P-653K Miniature rotary and linear motors 0.15 50 see main catalog
M-674KCPP High precision, for bio automation 7 50 26
M-664KCEP Stackable vertical drive 5 50 26
All linear drives and motors are intended for integration into a customer’s system and feature no guidance. If off-axis motion cannot be tolerated external guidance is required.

P-653 Miniature linear motor / M-674 RodDrive piezo linear P-661, P-664 OEM piezo P-653K Miniature rotary and M-674KCPP High precision, M-664KCEP Stackable vertical
slide motor pusher for OEMs motors linear motors for bio automation drive

Translation Stages Driven by integrated PIline® Linear Motors

Models* Description Max. Speed Load Capacity Travel Page
[mm/s] [kg] [mm]
M-661, M-662 Piezo motor driven stage speed to 400 mm/s, 0.1 µm resolution 400 0.5 19 12
M-663 Smallest stage with linear motor and linear encoder, speed to 400 mm/s, 400 0.5 19 14
0.1 µm linear encoder. XY-combinations possible
M-664 Low-profile, high speed stage, piezo linear motor, 0.1 µm linear encoder 400 0.5 25 16
M-682 Low-profile, high speed stage, piezo linear motor, 0.1 µm linear encoder 400 5 50 18
M-686 Linear motor-driven low profile XY stage, linear encoder, 0.1 µm resolution, very fast 100 5 25 x 25 20

M-661, M-662 Very small & M-663 Small, fast; linear M-664 Linear motor & linear M-682 Low-profile, high M-682KNMS Non-magnetic M-686 Linear motor-driven
fast, piezo linear motor motor & linear encoder encoder, fast speed piezo linear motor translation stage, see page 26 XY stage

Drivers / Controllers for PILine® Ultrasonic Piezo Linear Motors

Models Description Channels Interfaces Page
C-184, C-185 Drivers for PILine® ultrasonic piezo linear motors 1 analog 22
C-867 High-speed, closed-loop controller/driver for closed-loop PILine® piezomotors 1 USB, RS-232 24

C-184, C-185 PILine® C-867 High-speed, closed-loop

driver electronics controller/driver

Notes on specifications see main catalog.

5
 Piezo • Nano • Positioning
P-661 · P-664 PILine® Piezo Linear Drive
High-Speed, Compact, Ultrasonic Piezo Drives for OEMs
PILine® P-661 and P-664 OEM piezo linear motors with C-184 drive electronics
 Patented Principle Features Very Compact Dimensions and
High Force
 Max. Velocity 500 mm/s
 Acceleration to 5 g
 Min. Incremental Motion to 0.05 µm
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
 Self-Locking to 3 N
 No Electromagnetic Fields
 MTBF 20,000 h
 Integrated Actuators & Positioning Systems Also Available
The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18
PILine® Linear Motors –
Smaller, Faster, More Effective
Despite their small size, PILine
linear motors generate higher
driving and holding forces than
conventional ultrasonic piezo-
motors.
Application Examples
 Biotechnology
 R&D
 Semiconductor testing
 Mass storage device
testing
 Metrology
 Micromanipulation
 Microscopy
 Photonics packaging
 Quality assurance testing
6
PILine® motors have a new,
patented, ultrasonic drive de-
veloped by PI. The core piece
®
of the system is a piezoceram-
ic plate, which is excited to
produce high-frequency eigen-
mode oscillations. A friction tip
attached to the plate moves
along an inclined linear path at
the eigenmode frequency.
Through its contact with the
friction bar, the moving part of
the mechanics drives forward Ordering Information
or backwards. With each oscil-
latory cycle, the mechanics P-661.P01
PILine® Miniature Linear
executes a step of a few nano- Piezomotor, 2 N
meters; the macroscopic result
P-664.P01
is smooth motion with a virtu-
PILine® Miniature Linear
ally unlimited travel range. Piezomotor, 4 N
Accessories:
High Speed and Acceleration
PILine® piezomotor drives can P-661.B01
Friction Bar for P-661 PILine®
provide accelerations of up to Miniature Linear Piezomotor,
5 g and speeds of up to 15 mm
500 mm/s, together with high
P-661.B02
resolution and high holding Friction Bar for P-661 PILine®
force. Because the ceramic sta- Miniature Linear Piezomotor,
tor is pressed against the slid- 25 mm
er, holding forces are generat- P-661.B05
ed when the motor ist powered Friction Bar for P-661 PILine®
down. The result is very high Miniature Linear Piezomotor,
position stability without the 55 mm
heat dissipation common in
P-664.B01
conventional linear motors. Friction Bar for P-664 PILine®
Miniature Linear Piezomotor,
Accessories for Easy
15 mm
Integration P-664.B02
PILine piezomotors require a
®
Friction Bar for P-664 PILine®
Miniature Linear Piezomotor,
drive electronics for exciting 25 mm
the ultrasonic oscillations. The
P-664.B05
drive electronics is available as Friction Bar for P-664 PILine®
OEM board, stand-alone Miniature Linear Piezomotor,
device or integrated inside a 55 mm
controller and therefore not C-184.161
included in the delivery. PI Analog OEM Driver Board for
PILine® P-661 Motors
offers friction bars with differ-
ent lengths. C-185.161
Analog Stand-Alone Drive
Long Lifetime Electronics with Power Supply for
PILine® P-661 Motors
PI has over 30 years experience
with piezo technology and C-184.164
Analog OEM Driver Board for
nanopositioning. PILine® drives PILine® P-664 Motors
offer high precision and relia-
C-185.164
bility, with over 20,000 hours
Analog Stand-Alone Drive
Electronics with Power Supply for
PILine® P-664 Motors
Controller for closed-loop operation
are available as C-867 see page 24.
MTBF. This is because PILine®
piezo linear motor drives have
no mechanical components
such as shafts and gears which
can cause failures in conven-
Dimensions of the P-664 in mm
tional motors.
 Piezo • Nano • Positioning

Note
The products described in this
document are in part protected
by the following patents:
US Pat. No. 6,765,335
German Patent No. 10154526

Dimensions of the P-661 in mm

The powerful and compact M-674

RodDrives include 2 x P-664
motors. The C-185 bench-top drive
electronics is shown in the
background
0.3 µm steps performed by P-661 piezomotor integrated in an M-662 translation stage

Technical Data
Model P-661.P01 P-664.P01 Units Tolerance
Motion and positioning
Travel range No limit* No limit* mm
Minimum incremental motion, open-loop 0.05** 0.05** µm typ.
Max. velocity 500 500 mm/s2
Mechanical properties
Stiffness when powered down 0.7 3 N/µm ±10 %
Holding force when powered down 1.5 3 N max.
Push / pull force 2 4 N max.
Preload on friction bar 9 9 N ±10 %
Drive properties
Resonant frequency 210 155 kHz typ.
Motor voltage range 120 (peak-peak) 168 (peak-peak) V
42 (RMS) 60 (RMS)
Operating voltage drive electronics 12 12 V
Electrical power drive electronics 5 10 W
Miscellaneous
Operating temperature range -20 to +50 -20 to +50 °C
Body material Al (black anodized) Al (black anodized)
Mass 0.01 0.02 kg ±5 %
Cable length 1.6 1.6 m ±10 mm
Connector Open leads Open leads
Recommended controller/driver C-184.161 OEM board C-184.164 OEM board
C-185.161 in box C-185.164 in box
Dimensions 14 x 35 x 6 22 x 42 x 7 mm
MTBF >20,000 >20,000 h
*The travel range of piezo linear motors is virtually unlimited and depends on the length of the friction bar, which is available separately.
**The minimum incremental motion is a typical value that can be achieved in the open-loop mode of a piezomotor stage. To reach the specs it is important to
follow the mounting guidelines of the OEM-motors.

7
 Piezo • Nano • Positioning
M-674 PILine® RodDrive Piezo Linear Drive
Integrated Fast Ultrasonic Piezo Drives
 Drive-Component for Integration into Micropositioning
Systems
 Travel Ranges to 150 mm
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
 Push/Pull Forces to 7 N
 Min. Incremental Motion to 0.05 µm
 Velocity to 450 mm/s
 Self-Locking at Rest
The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18
M-674 PILine® RodDrives repre-
sent a level of integration be-
tween PILine® OEM piezo linear
motors such as P-664 see page 6
and guided micropositioning
systems such as the M-682 see
page 18 series stages.
RodDrives may replace classi-
cal drive elements like rotary
motor/leadscrew assemblies,
or magnetic linear drives inte-
grated into a micropositioner.
Application Examples
 System Integration for
Micropositioning Products
 Automation
 Handling
 Micromanipulation
 Biotechnology
 Metrology
8
The M-674 PILine® RodDrive,
shown with C-184 OEM and
C-185 bench-top driver elec-
tronics, provides 7 N pushing
force and travel ranges of 50,
100 and 150 mm
They consist of a rod which is
preloaded by piezo linear mo-
tors from two sides. Depend-
ing on the way of integration,
either the rod or the motor
block is coupled to the moving
platform.
Advantages of PILine®
Micropositioning Systems
The ultrasonic piezoceramic
drives used in PILine® micro-
positioners have a number
of advantages over classical
drives:
 Higher Accelerations, up to
10 g
 Speeds up to 500 mm/s
 Small Form Factor
 Self-Locking When Powered
Down
 No Shafts, Gears or Other
Rotating Parts
 Non-Magnetic and Vacuum
Compatible Drive Principle
Working Principle
RodDrives employ a patented
ultrasonic drive developed by
PI. The highly compact, inte-
grated P-664 piezomotors can
provide velocities of 450 mm/s,
together with high resolution
and holding force. The maxi-
mum travel is determined by
the length of the rod and
is basically unlimited. Cus-
tomized adaptations in terms
of operating and holding force
are feasible by varying type
and number of motors used.
Because the integrated ceramic
motors are preloaded against
the rod, RodDrives resist
motion with an intrinsic hold-
ing force when at rest. The
result is very high position sta-
bility without the heat dissipa-
tion common with convention-
al linear motors. Furthermore,
there are no gears, leadscrews
or other mechanical compo-
nents to contribute play or
backlash.
Variety of Drivers / Controllers
PILine® piezomotors require a
drive electronics for exciting
the ultrasonic oscillations. The
drive electronics is available as
OEM board, stand-alone device
or integrated inside a closed-
loop motion controller and
therefore not included in the
delivery.
Constancy of closed-loop velocity at 200 mm/s of an integrated M-674 RodDrive
Ordering Information
M-674.164
PILine® RodDrive, 50 mm, 7 N
M-674.264
PILine® RodDrive, 100 mm, 7 N
M-674.364
PILine® RodDrive, 150 mm, 7 N
Accessories:
C-184.D64
Analog OEM Driver Board for
PILine® RodDrive M-674
C-185.164
Analog Stand-Alone Drive
Electronics with Power Supply for
PILine® P-664 Motors
C-867.D64
Piezomotor Controller with Drive
Electronics, 1 Channel, for PILine®
Systems with M-674 RodDrive
Closed-Loop Operation:
Optimized for High Velocity
and Rapid Step/Settling
Together with a position sen-
sor, RodDrives can be operat-
ed in closed-loop with the
C-867.D64 see page 24 piezo
motor controller. This special-
ized servo-controller also inte-
grats the motor drive electron-
ics and enables highly constant
speeds up to 350 mm/s with
very short settling times (tens
of milliseconds). RodDrives
can also be operated with con-
ventional servo-controllers. In
this case, the C-185 see page 22
 Piezo • Nano • Positioning

(to be ordered separately) exter-

nal drive electronics is required
which accepts a ±10 V analog
signal from the controller.

Note
The products described in this
document are in part protected
by the following patents:
US-Pat. No. 6,765,335
German Patent No. 10154526

The M-674 integrated into a

Micropositioning Stage
Dimensions of the M-674 RodDrive in mm

Technical Data
Model M-674.164 M-674.264 M-674.364 Units Tolerance
Motion and positioning
Travel range 50 100 150 mm x
Minimum incremental motion, open-loop 0.05* 0.05* 0.05* µm typ.
Max. velocity 450 450 450 mm/s
Max. acceleration 10 10 10 m/s2
Mechanical properties
Stiffness when powered down 5** 5** 5** N/µm ±10 %
Holding force when powered down 7 7 7 N max.
Push / pull force 7 7 7 N max.
Drive properties
Resonant frequency 155 155 155 kHz, typ.
Integrated piezo motor 2 x PILine® P-664 2 x PILine® P-664 2 x PILine® P-664
(Dual Motor) (Dual Motor) (Dual Motor)
Motor voltage range 190 (peak-peak)*** 190 (peak-peak)*** 190 (peak-peak)*** V
67 (RMS)*** 67 (RMS)*** 67 (RMS)***
Operating voltage drive electronics 12 12 12 V
Max. elec. power consumption 15 15 15 W
drive electronics
Miscellaneous
Operating temperature range -20 to +50 -20 to +50 -20 to +50 °C
Body material PEEK-PTFE PEEK-PTFE PEEK-PTFE
Mass 0.1 0.12 0.14 kg ±5 %
Cable length 1.5 1.5 1.5 m ±10 mm
Connector LEMO connector LEMO connector LEMO connector LEMO connector
Recommended controller/driver C-184.D64 OEM drive C-184.D64 OEM drive C-184.D64 OEM drive
electronics board electronics board electronics board
C-185.D64 driver C-185.D64 driver C-185.D64 driver
****C-867.D64 Controller ****C-867.D64 Controller ****C-867.D64 Controller
for closed-loop operation for closed-loop operation for closed-loop operation
*The minimum incremental motion is a typical value that can be achieved in the open-loop mode of a piezomotor stage.
To reach the specs it is important to follow the mounting guidelines of the OEM-drives.
**Stiffness at 25 °C.
***The operating voltage is supplied by the drive electronics.
****MDR 14-connector for closed-loop systems separate required

9
 Piezo • Nano • Positioning

P-653 PILine® Miniature Linear Motor / Slide

OEM Drive for High Volume Applications
Working Principle
Order Information
P-653 drives employ a new,
P-653.01
patented, ultrasonic piezomo- Miniatur PILine® OEM Drive,
tor drive developed by PI. The 2 mm Travel Range, 0.15 N,
highly compact, integrated mounted on PCB board
piezomotor can attain veloci- P-653.01D
ties of up to 200 mm/s together Miniature PILine® OEM Drive,
with high position resolution 2 mm Travel Range, 0.15 N,
and—considering its length of Demo Sample Kit with USB
Interface
only 8 mm—a high holding
force. Because the ceramic sta- Ask about custom designs
The P-653 miniature tor is pressed against the slider,
drive including the
drive electronics piezomotor drives resist
measures only 11 mm motion with an intrinsic hold-
featuring 2 mm Note
travel range. Side view ing force when the unit is at
of slider (bottom) rest. The result is very high The products described in this
position stability, without the document are in part protected
heat dissipation common with by the following patents:
 True Linear Motor Slide / No Rotary Conversion Losses conventional linear motors. German Patent
 Cost-Effective OEM Drive for High Quantity-Applications During operation, the oscillat- No. 102004059429
ing piezoceramic propels the International Patent
 Preassembled and Mounted on a PCB Board
slider over the length of the No. WO2006/027031A1
 Very Compact: Piezomotor Drive is Only 8 mm Long
motor. There are no gears,
 Fast Response: Full Stroke in <50 ms leadscrews or other mechani-
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.

 Force Generation to 0.15 N cal components to contribute

 Self Locking at Rest play or backlash.
 Travel Range 2 mm, Velocity up to 200 mm/s
Simple Control
The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18

The high-frequency, nanometer

P-653 PILine® OEM piezomotor
drives are ideal for OEM appli-
cations where space is limited
and moved masses are small.
These tiny linear positioners
can be used to replace classical
drive elements like miniatur-
ized motor/spindle systems or
other linear motors, which
P-653 outclasses with its speed
of up to 200 mm/s. PILine® piezo
linear motors offer a number of
advantages over classical
drives:
Application Examples
 Consumer electronics
 Miniature mechatronics
level oscillations (~500 kHz)
needed by the PILine® motors
 High velocities are created by driver electron-
 Compact design ics, which self-adjusts to the
 High push/pull and holding resonant frequency of the
forces relative to the drive motor ceramic, meaning that
size no individual tuning is neces-
sary. The driver electronics can
Integration of the P-653 in an in turn be controlled by short
application is simple because voltage pulses.
the moving slider and the piezo
actuator are delivered assem-
bled as a unit and already
mounted on a PCB board. Drive
electronics is included on the
same board and requires a sup-
ply voltage of only 5 VDC.
Mechanical mounting is thus
facilitated as well: All that
remains is to affix the payload
to the slider.

 Micromanipulation
The motors are designed for
 Micropositioning moving small objects such as Included in the P-653.01D demo sample there
optical fibers, optics, micro- or is the P-653.01 OEM drive together with additional
electronics featuring an USB interface
 Toys electro-mechanical elements
fast and precisely.
10
 Piezo • Nano • Positioning

P-653.01 dimensions in mm: top view, view from drive

side, end view along axis of motion (from left)

Technical Data
Model P-653.01
Motion and positioning
Travel range 2 mm
Step size at 0.25 ms ON time 5 to 15 µm
Step size at 1.0 ms ON time 20 to 120 µm
Max. velocity* 100 to 200 mm/s
Typ. velocity** 50 to 90 mm/s
Mechanical properties
Holding force when powered down 0.3 N
Max. push / pull force 0.15 N
Drive properties
Resonant frequency (typ.) 515 kHz
Integrated piezo motor PILine® P-653
Operating voltage (drive electronics) 5 VDC
Current consumption incl. drive electronics 0.1 A
Control voltage 5 V TTL
Miscellaneous
Operating temperature range -40 to 85 °C
Mass 1 g ±5 %
Connectors Header pin sockets
Recommended driver Piezomotor drive electronics included
Dimensions 15 x 11 x 8 mm incl. drive electronics
Lifetime >5,000,000 cycles
All data refer to 100 % duty cycle.
*without load. @ 5 g: 80 to 140 mm/s; @ 10 g: 50 to 100 mm/s
**without load.

11
 Piezo • Nano • Positioning
M-661 · M-662 PILine® Miniature Linear Motor Stage
With Ultrasonic Piezo Linear Drives
PILine® M-662 (left side) and M-661 stages are the smallest piezo-motor-driven trans-
lation stages available on the market that achieve speeds of up to 500 mm/s
 Smallest Translation Stages with Linear Motor Drive
 Travel Ranges to 20 mm
 Max. Velocity 500 mm/s
 Acceleration to 5 g
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
 Incremental Motion to 50 nm
 Self Locking at Rest
 XY-Combination Possible
 MTBF 20.000 h
The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18
 Vacuum Versions to 10-7 hPa
M-661 and M-662 PILine® trans-
lation stages offer acceler-
ations to 10 g with millisecond
response and velocities to
500 mm/sec in an extremely
compact package. Providing
travel ranges to 20 mm, they
Application Examples
 Biotechnology
 Micromanipulation
 Microscopy
 Quality assurance testing
 Semiconductor testing
 Metrology
 Mass storage device
testing
 R&D
 Photonics packaging
12
are among the smallest motor-
ized translation stages current-
ly on the market. Both models
are designed for open-loop
operation (a similar closed-
loop stage with linear encoder
is available as model M-663.
The M-662, with its square
footprint, is also suitable for
use in XY configurations. For
applications where the small-
est dimensions are essential,
the P-652 micro stage is
offered.
Working Principle
PILine® piezo motors use a
new, patented, ultrasonic drive
developed by PI. A the heart of
the system is a piezo ceramic
plate, which is excited with
high-frequency eigenmode
oscillations. A friction tip
attached to the plate moves
along an inclined linear path at
the eigenmode frequency.
Through its contact with the
friction bar, the moving part of
the mechanics drives forward
or backwards. With each oscil-
latory cycle, the mechanics
execute a step of a few
nanometers; the macroscopic
result is smooth motion with a
virtually unlimited travel
range.
Advantages of PILine®
Micropositioning Systems
The ultrasonic piezoceramic
drives used in PILine® micro-
positioners have a number of
advantages over classical
drives:
 Higher Accelerations,
up to 5 g
 Speeds up to 500 mm/s
 Small Form Factor
 Self-Locking When Powered
Down
 No Shafts, Gears or Other
Rotating Parts
 Non-Magnetic and Vacuum-
Compatible Drive Principle
Choice of Drive Electronics
Special driver electronics are
required to create the ultrason-
ic oscillations for PILine® piezo-
M-662 dimensions in mm
Ordering Information
M-661.370
PILine® Translation Stage, 18 mm,
Open-Loop
M-662.470
PILine® Translation Stage, 20 mm,
Open-Loop, XY Mountable
Accessories:
C-184.161
Analog OEM Driver Board for
PILine® P-661 Motors
C-185.161
Analog Stand-Alone Drive
Electronics with Power Supply for
PILine® P-661 Motors
motors. The driver controls the
motor speed as a function of
an analog ±10 V signal. The
driver is not included, as it is
available in different versions,
from the low-priced C-184.161
OEM-board to the C-185.161
bench-top unit. The stage and
the driver electronics, how-
ever, must be ordered together,
so that they can be tuned to
one-another for optimum per-
formance.
Notes
The products described in this
document are in part protected
by the following patents:
US Pat. No. 6,765,335
German Patent No. 10154526
 Piezo • Nano • Positioning

50 nm steps created with a system incorporating an M-662.470

M-661 dimensions in mm open-loop piezo linear motor stage

Technical Data
Model M-661.370 M-662.470 Units Tolerance
Motion and positioning
Travel range 18 20 mm
Min. incremental motion 0.05* 0.05* µm typ.
Max. velocity 500 500 mm/s
Mechanical properties
Max. load 5 5 N
Max. push/pull force 1 1 N
Max. holding force 2 2 N
Drive properties
Motor type P-661 PILine® P-661 PILine®
ultrasonic piezomotor drive ultrasonic piezomotor drive
Operating voltage 120 (Peak-Peak)** 120 (Peak-Peak)** V
42 (RMS)** 42 (RMS)**
Electrical power 5*** 5*** W nominal
Current 400*** 400*** mA
Miscellaneous
Operating temperature range -20 to +50 -20 to +50 ˚C
Material AI (black anodized) AI (black anodized)
Dimensions 30 x 23 x 10 28 x 28 x 8
Mass 0.03 0.03 kg ±5 %
Cable length 1.5 1.5 m ±10 mm
Connector LEMO connector LEMO connector
Recommended controller/driver C-184.161 OEM board C-184.161 OEM board
C-185.161 Bench-top C-185.161 Bench-top
*The minimum incremental motion is a typical value that can be achieved in the open-loop mode of a piezomotor stage.
To obtain it, it is important to follow the mounting guidelines in the motor documentation.
**The stage supply power is drawn from the drive electronics, which runs on 12 VDC.
***For drive electronics.

13
 Piezo • Nano • Positioning

M-663 PILine® Linear Motor Stage

Compact, Fast, with Ultrasonic Piezo Linear Drives, Direct Position Measurement
With each oscillatory cycle, the
mechanics executes a step of a
few nanometers; the macro-
scopic result is smooth motion
with a virtually unlimited travel
range.
Advantages of PILine®
Micropositioning Systems
The ultrasonic piezoceramic
drives used in PILine® micropo-
sitioners have a number of ad-
vantages over classical drives:
Ordering Information
M-663.465
PILine® Translation Stage, 19 mm,
Linear Encoder, 0.1 µm Resolution
M-663.Y65
PILine® Translation Stage, 19 mm,
Linear Encoder, 0.1 µm Resolution,
turned cable outlet, XY mountable
M-663.46V
PILine® Translation Stage, 19 mm,
Linear Encoder, 0.1 µm Resolution,
Vacuum Compatible to 10-6 hPa
Accessories:

 Higher Accelerations, C-867.161

up to 10 g Piezomotor Controller with Drive
 Speeds up to 500 mm/s Electronics, 1 Channel, for PILine®
Systems with P-661 Motors
 Small Form Factor

PILine® M-663 micropositioning stages with integrated linear encoder and C-867
Self-Locking When Powered Driver for use with separate con-
controller/driver in the background
troller:
Down
 No Shafts, Gears or Other C-185.161
Rotating Parts Analog Stand-Alone Drive
 Smallest Translation Stage with Closed-Loop Linear Motor  Non-Magnetic and Vacuum- Electronics with Power Supply for
and Encoder PILine® P-661 Motors
Compatible Drive Principle

© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.

Travel Range 19 mm
 Max. Velocity 400 mm/s
Optimized Controller and
 Acceleration up to 10 g
Drive Electronics
 Direct Metrology Linear Encoder
PILine® motors require a spe- an analog ±10 V signal. For

The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18

0.1 µm Resolution optimum performance the

 XY Combination Possible
 Vacuum-Compatible Versions Available
PILine® M-663 microposition-
ing systems offer high veloci-
ties of up to 400 mm/s and
travel ranges of 19 mm in a
compact package. The M-663 is
the smallest closed-loop trans-
Application Examples
 Biotechnology
 Micromanipulation
 Microscopy
 Quality assurance testing
 Metrology
 Mass storage device
testing
 R&D
 Photonics packaging
14
lation stage with piezomotor
drives currently on the market.
Its square footprint makes it
suitable for use in compact XY
configurations.
Working Principle
PILine® motors have a new,
patented, ultrasonic drive
developed by PI. The core
piece of the system is a piezo-
ceramic plate, which is excited
to produce high-frequency
eigenmode oscillations. A fric-
tion tip attached to the plate
moves along an inclined linear
path at the eigenmode fre-
quency. Through its contact
with the friction bar, the mov-
ing part of the mechanics
drives forward or backwards.
cial drive electronics to gener-
ate the ultrasonic oscillations driver must be tuned together
for piezoceramic element. For with the mechanics and should
optimum performance the be ordered at the same time as
highly specialized C-867 mo- the motor/stage.
tion controller is recommend-
ed. This sophisticated con- Note
troller also inte-grates the drive The products described in this
electronics. Furthermore, the document are in part protected
controller has a number of by the following patents:
special features, including US Pat. No. 6,765,335
dynamic parameter switching German Patent No. 10154526
for an optimized high-speed
motion and settling behavior
to take into account the motion
characteristics typical of
piezomotors. The broad-band
encoder input (35 MHz) sup-
ports the outstanding high
accelerations and velocities of
PILine® drives at high resolu-
tions.
Optionally, for use with third
party servo controllers, the
C-185 analog drive electronics
(stand-alone unit) is available.
It controls the motor speed by
 Piezo • Nano • Positioning

A 1 mm step performed by an M-663 stage with 300 g load control- An M-663 with 100 g load settles to 0.1 µm accuracy in 10 ms after a
led by a C-867 controller/driver reaches the end position in less than 100 µm step, measured with C-867 controller/driver
40 ms

Technical Data
[ 
Model M-663.465 Units Tolerance
Active axes X
Motion and positioning


Travel range 19 mm


Integrated sensor Linear encoder


Sensor resolution 0.1 µm [  [ 0
Min. incremental motion 0.1 µm typ.
Bidirectional repatability ±0.3 µm typ. 

Unidirectional repeatability 0.2 µm typ.
Pitch 300 µrad typ.


Yaw 300 µrad typ.

[ 0

Max. velocity 400 mm/s

Reference switch repeatability 1 µm typ.



Mechanical properties  +

[ 0

Max. load 5 N 
Max. push/pull force 2 N
Max. holding force 2 N
Drive properties
[ƒ
Motor type P-661 PILine®
ultrasonic piezomotor
Motor voltage range 120 (peak-peak)* M-663
42 (RMS)* V dimensions in mm

Electrical power 5** W nominal

Current 400** mA
Reference switch Hall-effect
Miscellaneous
Operating temperature range -20 to +50 °C
Material Al (black anodized)
Dimensions 35 x 35 x 15 mm
Mass 40 g ±5 %
Cable length 1.5 m ±10 mm
Connector MDR, 14-pin
Recommended controller/driver C-867.161 Single-axis
controller/driver
C-185.161 Drive electronics
XY combination of two M-663s; CD for size comparison
*Power is supplied by the drive electronics which runs on 12 V DC
**For drive electronics

15
 Piezo • Nano • Positioning

M-664 PILine® Linear Motor Stage

Low-Profile High-Speed with Ultrasonic Piezo Linear Drives & Direct Position Measurement

 Self-Locking When Powered Ordering Information

Down
 No Shafts, Gears or Other
Rotating Parts
 Non-Magnetic and Vacuum-
Compatible Drive Principle
M-664.164
PILine® Micro Positioning Stage
with P-664 Piezo Linear Motor,
25 mm, 4 N
Ask about custom designs!

Optimized Controller and accelerations and velocities of

Drive Electronics
PILine® motors require a spe-
cial drive electronics to gener-
ate the ultrasonic oscillations
for the piezoceramic element.
For optimum performance the
highly specialized C-867 mo-
tion controller see page 24 is
Fast and compact M-664 piezo translation stage with linear encoder
recommended. This sophisti-
cated controller also integrates
the drive electronics. Further-
 Travel Range 25 mm more, the controller has a
 Max. Velocity 400 mm/s number of special features,
 Ultra-Low Profile, 15 mm including dynamic parameter
switching for an optimized
 Direct Metrology Linear Encoder with 0.1 µm Resolution
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
PILine® drives at high resolu-
tions.
Optionally, for use with third
party servo controllers, the
C-185 analog drive electronics
(stand-alone unit) see page 22
is available. It controls the
motor speed by an analog ±10
V signal. For optimum per-
formance this driver must be
tuned together with the stage
and should be ordered at the
same time as the motor/stage.
Notes

high-speed motion and settling

 High Guiding Accuracy with Crossed Roller Bearings
behavior to take into account The products described in this
 Compact XY Combinations the motion characteristics typi- document are in part protected
 Piezo Linear Motor with 4 N Drive Force cal of piezomotors. The broad- by the following patents:
 Self Locking at Rest band encoder input (50 MHz) US Pat. No. 6,765,335
The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18

supports the outstanding high German Patent No. 10154526

M-664 micropositioning sys- page 14 is the smallest. For

tems are low-profile, high-
accuracy translation stages
with linear encoders. The
M-664 stage is next-larger in
the series of piezomotor-driven
stages of which the M-663 see
Application Examples
 Biotechnology
 Micromanipulation
 Microscopy
 Quality assurance testing
 Metrology
 Mass storage device
testing
 R&D
 Photonics packaging
improved guiding accuracy,
the M-664 uses two crossed
roller bearings mounted on
ground aluminum profiles. The
integrated P-664 PILine® linear
motor can generate forces up
to 4 N and maximum closed-
loop velocities to 400 mm/s
over a 25 mm travel range.
Advantages of PILine®
Micropositioning Systems
The ultrasonic piezoceramic
drives used in PILine® micro-
positioners have a number
of advantages over classical
drives:
 Higher Accelerations,
up to 5 g
 Speeds up to 500 mm/s
 Small Form Factor M-664 dimensions in mm

16
 Piezo • Nano • Positioning

PILine® Micropositioning stages: M-682, M-664 and M-663 (from left)

Technical Data
Model M-664.164 Tolerance
Active axes X
Motion and positioning
Travel range 25 mm
Integrated sensor Linear encoder
Sensor resolution 0.1 µm
Min. incremental motion 0.3 µm typ.
Bidirectional repeatability 0.2 µm typ.
Unidirectional repeatability 0.2 µm typ.
Pitch ±50 µrad typ.
Yaw ±50 µrad typ.
Max. velocity 400 mm/s
Reference switch repeatability 1 µm typ.
Mechanical properties
Max. load 25 N
Max. push/pull force 4N
Max. holding force 3N
Drive properties
Motor type P-664 PILine® ultrasonic piezo drive
Operating voltage 168 V (peak-to-peak)*
60 V (RMS)*
Electrical power 10 W** nominal
Current 800 mA**
Limit and reference switches Hall-effect
Miscellaneous
Operating temperature range -20 to +50 °C
Material Al (black anodized)
Dimensions 90 x 60 x 15 mm
Mass 0.190 kg ±5 %
Cable length 1.5 m ±10 mm
Connector MDR, 14-pin
Recommended controller/driver C-867.164 single-axis controller/driver
C-185.164 drive electronics
*The stage supply power is drawn from the drive electronics, which runs on 12 V.
**For drive electronics

17
 Piezo • Nano • Positioning
M-682 PILine® Linear Motor Stage
Compact, Fast, with High-Force Piezomotor, Direct Position Measurement
 Integration of the Powerful PILine® RodDrive
 Low Profile, Compact Dimensions
 Max. Velocity 350 mm/s
 Up to 7 N Pushing Force
 Direct Metrology Linear Encoder, 0.1 µm Resolution

© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
Non-Magnetic and Vacuum-Compatible Versions Available
The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18
M-682 translation stages are
low-profile, high-accuracy po-
sitioning systems based on the
M-674 RodDrive ultrasonic line-
ar motor actuator.
The M-682 positioner com-
bines the advantages of its
high-performance, high-speed
drive with a high-precision
guiding system and the superi-
or accuracy of a direct-metrolo-
Application Examples

Microscopy
 Metrology

Quality assurance testing
 Semiconductor testing
 R&D
 Mass storage device
testing
18
M-682 Translation stage
gy linear encoder providing
0.1 µm resolution.
In addition to the standard,
50 mm model, custom M-682
versions with different travel
ranges as well as vacuum-
compatible and non-magnetic
designs are feasible and
available on request.
RodDrive Replaces Classical
Motor/Leadscrew Systems
The M-682 is an example of
how an M-674 RodDrive linear
motor actuator can
employed to design a very
compact positioning system.
The RodDrive represents a
higher level of integration than
OEM piezo motors motors
such as the P-664 see page 6
and significantly simplifies the
stage design because preload-
ing and alignment of motor
and friction bar are taken care
of inside the actuator.
Advantages of PILine®
Micropositioning Systems
The ultrasonic piezoceramic
drives used in PILine® micro-
positioners have a number of
advantages over classical
drives:
 Higher Accelerations,
up to 5 g
 Speeds up to 500 mm/s
 Small Form Factor
 Self-Locking When Powered
Down
 No Shafts, Gears or Other
Rotating Parts
 Non-Magnetic and Vacuum-
Compatible Drive Principle
Optimized Controller and
Drive Electronics
PILine® motors require a spe-
cial drive electronics to gener-
ate the ultrasonic oscillations
for piezoceramic element. For
optimum performance the
highly specialized C-867 see
page 24 motion controller is
recommended. This sophisti-
cated controller also integrates
the drive electronics. Further-
more, the controller has a
number of special features,
including dynamic parameter
switching for an optimized
85
50
be
85
75
50
110
Ordering Information
M-682.174
PILine® High-Speed Linear Stage
with RodDrive
Ask about custom designs
high-speed motion and settling
behavior to take into account
the motion characteristics typi-
cal of piezomotors. The broad-
band encoder input (50 MHz)
supports the outstanding high
accelerations and velocities of
PILine® drives at high resolu-
tions.
Optionally, for use with third
party servo controllers, the
C-185 see page 22 analog drive
electronic (stand-alone unit) is
available. It controls the motor
speed by an analog ±10 V sig-
nal. For optimum performance
this driver must be tuned
together with the stage and
should be ordered at the same
time as the motor/stage.
Notes
The products described in this
document are in part protected
by the following patents:
US Pat. No. 6,765,335
German Patent No. 10154526
20
5x45¡
7
10,2
110
30
8xM4 4
8
4,5
3
M-682 dimensions in mm
 Piezo • Nano • Positioning

M-674 PILine® RodDrive with 7 N generated force Custom non-magnetic M-682 version with custom
and travel ranges of 50, 100 and 150 mm dimensions containing non-magnetic RodDrive

Technical Data
Model M-682.174 Units
Active axes X
Motion and positioning
Travel range 50 mm
Integrated sensor Linear encoder
Sensor resolution 0.1 µm
Design resolution 0.1 µm typ.
Min. incremental motion 0.1 µm typ.
Bidirectional repeatability ±0.2 µm typ.
Unidirectional repeatability 0.2 µm typ.
Pitch ±50 µrad typ.
Yaw ±50 µrad typ.
Max. speed 350 mm/s
Reference switch repeatability 1 µm typ.
Mechanical properties
Max. load 50 N
Max. push/pull force 7N
Max. Holding force 7N
Drive properties
Motor type M-674 RodDrive PILine®
ultrasonic piezomotor
Operating voltage 200 V (Peak-Peak)*
70 V (RMS)*
Electrical power 15 W** nominal
Current 1.5 A**
Limit and reference switches Hall-effect
Miscellaneous
Operating temperature range -20 to +50 °C
Material Al (black anodized)
Dimensions 110 x 110 x 20 mm
Mass 0.57 kg ±5%
Cable length 1.5 m ±10 mm
Connector MDR, 14-pin
Recommended controller/driver C-867.D64 Single-axis Controller / Driver
C-185.D64 driver
*Motor power is supplied by the drive electronics, which runs on 12 VDC
**For drive electronics

19
 Piezo • Nano • Positioning

M-686 PILine® XY Piezo Linear-Motor Stage

Fast, Low Profile and Large Aperture with Direct Position Measurement
frame stage. Depending on
Ordering Information
the application, these highly
specialized, ultra-precise nano- M-686.D64
XY Open-Frame Stage with
positioning systems are avail- Closed-Loop PILine® Piezomotor
able as fast XY scanners (for Drives, 25 x 25 mm, 7 N, 0.1 µm
fluorescence microscopy), as Linear Encoder
vertical Z positioners (3D imag- Ask about custom designs!
ing), or with up to 6 degrees of
freedom.

Limit and Reference Switches

For the protection of your
equipment, non-contact Hall-
effect limit and reference
The M-686.D64 open-frame stage with closed-loop
piezo motors provides 25 x 25 mm travel range
switches are installed. The
direction-sensing reference
switch supports advanced
automation applications with
 Integrated Closed-Loop Piezomotor Drives Provide High high precision.
Speed to 100 mm/s
 Travel Ranges 25 x 25 mm Advantages of PILine®
 Integrated Linear Encoders with 0.1 µm Resolution Micropositioning Systems Notes
 Compact Design: The ultrasonic piezoceramic Nanopositioning stages that fit
32 mm Profile Height, 170 x 170 mm Footprint drives used in PIline® micro- directly on the M-686:
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.

 Clear Aperture 78 x 78 mm, 66 x 66 mm positioners have a number

in Extreme Position of advantages over classical P-561 to P-563
drives: PIMars™ XYZ Nanoposition-
 Self-Locking at Rest
ing systems with up to
 Compatible with PI Piezo Nanopositioning /  Higher Accelerations,
The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18

Scanning Stages
M-686 open-frame piezomotor
stages are mainly designed for
automated positioning applica-
tions in microscopy. The opti-
mized form factor with a low
profile height of only 32 mm
and the standardized mount-
ing pattern allows the combi-
nation with many PI standard
nanopositioning systems.
Application Examples
 Biotechnology
 Microscopy
 Scanning microscopy
 Confocal microscopy
 Semiconductor testing
 Handling
20
300 µm travel
up to 5 g
 Speeds up to 500 mm/s P-541.2 to P-542.2
 Small Form Factor Low-profile microscopy XY
 Self-Locking When scanners
Space Saving Piezomotors Powered Down
Compared to conventional  No Shafts, Gears or Other P-541.Z
motorized translation stages, Rotating Parts Low-profile Z/tip/tilt piezo
the M-686 provides a lower  Non-Magnetic and Vacuum- nanopositioning stages for
profile and smaller footprint. Compatible Drive Principle microscopy
The compact PILine® piezoelec-
tric linear motors and high-res-
olution linear encoders make Customized M-686 stage with a bigger footprint, to sink
the piezo Z scanner. The system height together with
both, the lead screw duct and the P-541 piezo scanner is reduced to only 33 mm
the flanged, bulky stepper
motor employed in traditional
stages obsolete. In addition,
the piezomotors are self-lock-
ing at rest and hold the stage in
a stable position without heat-
ing up.
Compatibility to PI Nanopo-
sitioning and Scanning Stages
A number of standard PI piezo
flexure stages (150 x 150 mm
footprint) can be mounted
directly on the M-686 open-
 Piezo • Nano • Positioning

M-686.D64, dimensions in mm. The minimum aperture is 66 x 66 mm

with both axes at the maximum position

Technical Data
Model M-686.D64
Active axes XY
Motion and positioning
Travel range 25 x 25 mm
Integrated sensor Linear encoder
Sensor resolution 0.1 µm
Design resolution 0.1 µm
Min. incremental motion 0.3 µm
Bidirectional repeatability 0.3 µm
Pitch / yaw ±50 µrad
Max. velocity 100 mm/s
Mechanical properties
Load Capacity* 50 N
Max. push/pull force 7N M-686 open-frame stage with P-541.2DD piezo scan-
Max. lateral force 4N ner on top, providing a resolution of 0.1 nm and a
scanning range of 30 x 30 µm. The system height
Drive properties of the combination with the P-541 XY (or Z) piezo
Motor type 2 x PILine® P-664 per axis scanner is only 48 mm

Operating voltage 190 V (Peak-Peak)**

67 V (RMS)**
Electrical power 10 W / axis***
Miscellaneous
Operating temperature range -20 to +50 °C
Material Aluminium (black anodized)
Mass 1.2 kg
Cable length 1.5 m
Connector 2 x MDR connector, 14-pin
Recommended controller/driver 2 x C-867.D64 single-axis controller / driver
2 x C-185.D64 single-axis drive electronics
for external servo-controllers
*10 N for max. velocity
**The operating voltage or the piezomotor is supplied by the drive electronics which
requires 12 VDC 0.3 µm steps performed by M-686
***For drive electronics

21
 Piezo • Nano • Positioning
C-184 · C-185 PILine® Drive Electronics
OEM Boards and Stand-Alone Units fot Ultrasonic Piezomotors
 For PILine Ultrasonic OEM Motors and Positioners
® document are in part protected
 Accepts Analog Drive Signal from Standard Controller
 Available as Cost-Effective OEM board and Plug-and-Play
Desktop Unit
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18
The C-184 OEM-board and the
C-185 stand-alone unit are sin-
gle-channel drive electronics
for PILine® ultrasonic piezomo-
tors and PILine® stages. Piezo-
motor drive electronics convert
analog input signals into the
high-frequency drive signals
necessary to excite the
required oscillations in the
piezomotor stator which cause
the motion. Both the C-184 and
C-185 are available in three
versions, for use with different
motors and translation stages.
OEM and Integrated
Electronics
The philosophy behind the
design of PILine® ultrasonic
drives dictates that they be
easily adaptable to customer
requirements. This includes
making the drive electronics
both independent of control
signal type and available either
as an OEM board or as a stand-
alone unit in its own case.
22
sitioners have a number of
Ordering Information
advantages over classical
drives: C-184.161
Analog OEM Driver Board
for PILine® P-661 Motors
 Higher Accelerations,
up to 5 g C-185.161
Analog Stand-Alone Drive
 Speeds up to 500 mm/s Electronics with Power Supply
 Small Form Factor for PILine® P-661 Motors
 Self-Locking When Powered C-184.164
Down Analog OEM Driver Board
for PILine® P-664 Motors
 No Shafts, Gears or Other
C-185.164
Rotating Parts
Analog Stand-Alone Drive

C-185.D64 single-channel bench-top
driver electronics with PILine® M-674 Non-Magnetic and Vacuum- Electronics with Power Supply
RodDrive featuring travel ranges Compatible Drive Principle for PILine® P-664 Motors
up to 150 mm and 7 N drive
force at 450 mm/s C-184.D64
Note Analog OEM Driver Board
for PILine® RodDrive M-674
The products described in this
C-185.D64
Analog Stand-Alone Drive
by the following patents: Electronics with Power Supply
US Pat. No. 6,765,335
for PILine® RodDrive M-674
German Patent No. 10154526
While the OEM boards are the
most economic solution for
large quantities, the stand-
alone units make it possible to
plug a system with PILine®
stages together and put it into
operation quickly and easily,
for example for system evalua-
tion purposes.
Analog Control
Both drivers control the motor
speed based on an analog sig-
nal from 0 to 10 V. With an
external position sensor and a
servo controller, it is possible
to set up a very fast, closed-
loop system.
For optimum closed-loop sys-
tem performance, the C-867
piezo servo-controller is recom-
mended.
Advantages of PILine®
Micropositioning Systems
The ultrasonic piezoceramic C-184.164 OEM driver board with PILine® P-664 OEM motor
drives used in PILine® micropo-
 Piezo • Nano • Positioning

104,2

49,1

0
6
11

10
0

8
0

174

Dimensions of single-channel
bench-top C-185 in mm

Technical Data

Model C-184 C-185

Function Analog drive electronics (OEM board) for PILine® Analog single-channel driver box for PILine®
C-184.161: P-661 Motors & Positioners C-185.161: P-661 Motors & Positioners
C-184.164: P-664 Motors & Positioners C-185.164: P-664 Motors & Positioners
C-184.D64: M-674 RodDrive C-185.D64: M-674 RodDrive
Channels 1 1
Electrical properties
Control in Differential, -10 V up to +10 V, polarity controls direction Differential, -10 V up to +10 V, polarity controls direction
Operating voltage 12 V, ±10 % 12 VDC external power supply (included)
Output power / channel Model dependent: Model dependent:
C-184.161: 5 W C-185.161: 5 W
C-184.164: 10 W C-185.164: 10 W
C-184.D64: 15 W C-185.D64: 15 W
Output voltage / channel Model dependent: Model dependent:
C-184.161: 120 VPP / 42 VRMS, 210 kHz C-185.161: 120 VPP / 42 VRMS, 210 kHz
C-184.164: 168 VPP / 60 VRMS, 155 kHz C-185.164: 168 VPP / 60 VRMS, 155 kHz
C-184.D64: 190 VPP / 67 VRMS, 155 kHz C-185.D64: 190 VPP / 67 VRMS, 155 kHz
Interfaces and operation
Motor connector Solder pads LEMO connector or MDR connector, 14-pin
I/O ports Solder pads Sub-D connector, 15-pin
Miscellaneous
Operating temperature range +5 to +40 °C +5 to +40 °C
Mass C-184.161, C-184.164: 15 g 690 g
C-184.D64: 24 g
Dimensions 65 x 38 mm 174 x 104 x 49 mm (without ground connection,
pads and fitting panel)
182 x 104 x 49 mm (with ground connection)

23
 Piezo • Nano • Positioning

C-867 Controller for PILine® Piezo Linear Drives

Servo-Controller with Integrated Driver for High-Speed Ultrasonic Piezo Motors
ter adaption. By automatically
switching between gainsets for
dynamic and static operation
optimized settling behavior of a
couple of 10 milliseconds is
achieved. The broadband enco-
der input (50 MHz) allows the
use of high resolution encoders
with the outstanding high acce-
lerations and velocities PILine®
drives deliver.
Integrated Piezomotor Drivers
To reduce the number of com-
The C-867 piezo motor controller and the
M-664 low-profile positioner with ponents in PILine® positioning
integrated PILine® ceramic linear drive systems, the piezomotor drive
electronics has been integrated
in the controller. Various con-
 Optimized for PILine Ultrasonic Piezo Linear Motors
® troller versions are available,
 High-Bandwidth Encoder Inputs Allow High Speed and each optimized for the piezo-
motor type used. The C-867.161
Resolution
version, for example, contains
 PID Servo-Control with Dynamic Parameter Switching the drive electronics for the
Ordering Information
C-867.161
Piezomotor Controller with Drive
Electronics, Networkable, for
PILine® Systems with P-661 Motors
C-867.164
Piezomotor Controller with Drive
Electronics, Networkable, for
PILine® Systems with P-664 Motors
C-867.D64
Piezomotor Controller with Drive
Electronics, Networkable, for
PILine® Systems with M-674
RodDrive
Accessories:
C-819.20
2-Axis Analog Joystick
C-819.20Y
Y-Cable for Connecting
2 Controllers to C-819.20
C-170.PB
Push Button Box, 4 Buttons and
4 LEDs

 Integrated Piezo Motor Power Driver M-663 see page 14 linear stages. Ask about custom designs!
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.

 USB, RS-232 and Analog Interfaces (e. g. for Joystick)

 4 + 4 Programmable TTL-I/Os for Flexible Automation The integrated drivers are fine-
 Data Recorder tuned to the connected drives  High acceleration up to 5 g
 Daisy-Chain Networking for up to 16 Axes before delivery in order to pro-  High velocity up to 500 mm/s
The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18

vide optimal system perfor-

 Powerful Macro Programming Language, e. g. for Stand-Alone
Operation
 Extensive Software Support, LabVIEW, DLL, ...
The C-867 controller was espe-
cially designed for closed-loop
positioning systems equipped
with PILine® piezo linear motor
drives. In addition to the digital
servo-controller, the compact
case also contains the driver
electronics for the piezo cera-
mic motors.
Application Examples
 Biotechnology
 Fiber positioning
 Automation
 Photonics / integrated
optics
 Quality assurance testing
 Testing equipment
24
The controller can be operated
by a host PC either via a USB
port or an RS-232 interface.
Alternatively, stand-alone ope-
ration is possible by uploading
macro command sequences to
the internal non-volatile memo-
ry, or through a joystick or a
push-button box.
Highly Specialized PID
Servo-Controller
The C-867 is based on a highly
specialized DSP (Digital Signal
Processor) to handle the PID
servo-control algorithm as well
as other system functions. Be-
cause of the motion properties
typical for ultrasonic piezomo-
tors, the controller has a num-
ber of advanced features, inclu-
ding dynamic control parame-
 No leadscrews, gears or
mance.
other mechanical compo-
nents, no wear or mainte-
Software / Programming nance
In addition to the user software  No lubricants
for setup, system optimization
 Non-magnetic and vacuum
and operation, comprehensive
compatible operating
LabVIEW and DLL libraries are
principle
provided.
The PIMikroMove™ user soft-
ware provides the PITuningTool
for system performance opti-
mization. Graphic displays
show the system's behaviour
and facilitate parameter set-
ting.
Advantages of PILine® Micro
Positioning Systems
PILine® ultrasonic ceramic dri-
ves provide several advantages
over classical motors and dri-
vers:
 Smaller dimensions
 Self-locking when powered
down; no holding current
 Piezo • Nano • Positioning

Technical Data
Model C-867.161 C-867.164 C-867.D64
Function Controller and drive electronics for Controller and drive electronics for Controller and drive electronics for
PILine® piezomotors / systems PILine® piezomotors / systems PILine® piezomotors / systems
Drive type PILine® P-661 motors PILine® P-664 motors PILine® RodDrive M-674, 2 x P-664
Channels 1 1 1
Motion and control
Servo characteristics Programmable PID V-ff filter, Programmable PID V-ff filter, Programmable PID V-ff filter,
parameter changes on the fly parameter changes on the fly parameter changes on the fly
Trajectory profile modes Trapezoidal Trapezoidal Trapezoidal
Encoder input A/B differential signals, A/B differential signals, A/B differential signals,
50 x 106 impulse/s 50 x 106 impulse/s 50 x 106 impulse/s
Stall detection Servo off, triggered by Servo off, triggered by Servo off, triggered by
programmable position error programmable position error programmable position error
Limit switch 2 TTL (programmable) 2 TTL (programmable) 2 TTL (programmable)
Reference switch 1 TTL (active high/low, programmable) 1 TTL (active high/low, programmable) 1 TTL (active high/low, programmable)
Electrical properties
Output power 5W 10 W 15 W
Output voltage 120 Vpp, 42 Vrms 168 Vpp, 60 Vrms 190 Vpp, 67 Vrms
Interfaces and operation
Communication interfaces USB, RS-232 USB, RS-232 USB, RS-232
Motor connector MDR14 MDR14 MDR14
Controller network Up to 16 units on single interface Up to 16 units on single interface Up to 16 units on single interface
I/O ports 4 analog/digital in, 4 digital out on 4 analog/digital in, 4 digital out on 4 analog/digital in, 4 digital out on
mini DIN 9-pin mini DIN 9-pin mini DIN 9-pin
digital: TTL digital: TTL digital: TTL
analog: 0 to 5 V analog: 0 to 5 V analog: 0 to 5 V
Command set PI General Command Set (GCS) PI General Command Set (GCS) PI General Command Set (GCS)
User software PIMikroMoveTM PIMikroMoveTM PIMikroMoveTM
Software drivers GCS-DLL, LabVIEW drivers GCS-DLL, LabVIEW drivers GCS-DLL, LabVIEW drivers
Supported functionality Start-up macro; macro; Start-up macro; macro; Start-up macro; macro;
data recorder for recording data recorder for recording data recorder for recording
parameters as motor input voltage, parameters as motor input voltage, parameters as motor input voltage,
velocity, position or position error velocity, position or position error velocity, position or position error
Manual control Pushbutton box, joystick (for 2 axes), Pushbutton box, joystick (for 2 axes), Pushbutton box, joystick (for 2 axes),
Y-cable for 2D motion Y-cable for 2D motion Y-cable for 2D motion
Miscellaneous
Operating Voltage 12 VDC from external power supply 12 VDC from external power supply 12 VDC from external power supply
(included) (included) (included)
Current consumption 300 mA without motor 300 mA without motor 300 mA without motor
Operating temperature range +5 to +40 °C +5 to +40 °C +5 to +40 °C
Mass 950 g 950 g 950 g
Dimensions 174 x 104 x 63 mm (without ground 174 x 104 x 63 mm (without ground 174 x 104 x 63 mm (without ground
connection, rubber feet) connection, rubber feet) connection, rubber feet)
182 x 104 x 74 mm 182 x 104 x 74 mm 182 x 104 x 74 mm

25
 Piezo • Nano • Positioning

M-674K High-Precision Z Actuator for Bio-Automation

Ceramic PILine® Motor and Linear Encoder for High Speed & Precision
 High Speed to 100 mm/sec
 High Push/Pull Force to 7 N
 Extremely Slim Design, Matched with Standard
Multiwell Plates
 Stackable
 Integrated Linear Encoder for Highest Accuracy
 Self Locking at Rest
 Non-Magnetic and Vacuum-Compatible Working Principle

Equipped with two ultrasonic piezo-motors,

the slim M-674KCPP offers up to 7 N push
Model Travel Push/pull force Velocity Resolution Dimensions
and pull force. The 9 mm width is matched
to standard multiwell plate sizes, ideally M-674KCPP 50 mm 7N 100 mm/s 0.1 µm 120 x 40 x 9 mm
suited to automation tasks in biotechnology Compact
PILine®
Positioner

M-664K Vertical Drive for Bio-Automation

High-Speed, Compact, Cost-Effective, Stackable PILine® Actuator
 High Speed to 100 mm/sec
 Slim Design, Matched with Standard Multiwell Plates
 Travel range 50 mm
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.

 Cost-Effective Design
 Stackable
 Non-Magnetic and Vacuum-Compatible Working Principle
 Self Locking at Rest
The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18

Stack of 8 M-664KCEP linear actuators,

shown with well plate. The integrated
ceramic piezomotor provides high Model Travel Push/pull Max. closed-loop Resolution Dimensions
speeds to 100 mm/sec. The low-profile
force velocity
design with only 9 mm width allows
stacking for multi-channel dispensing M-664KCEP 50 mm 5N 100 mm/s 5 µm 120 x 40 x 9 mm
in bio-automation tasks Compact
PILine®
Positioner

M-682K Non-Magnetic Translation Stage

Low-Profile, High-Speed with Piezo Ceramic Motor
 Integrated Non-Magnetic PILine® RodDrive
 Travel Range 50 mm
 Integrated Linear Encoders with 0.1 µm Resolution
 Up to 6 N Force Generation
 Closed-Loop Velocity up to 100 mm/s
 Low Profile, Small Footprint

Model Travel Load capacity Max. push/ Dimensions

pull force
Custom non-magnetic M-682KNMS linear stage with
M-682KNMS 50 mm 50 N 6N 110 x 110 x 20 mm
integrated RodDrive linear motor
PILine®
Positioner

26

Moving the Nanoworld
NanoAutomation®: Precision Positioning for Science and Industry
Future Technology Solutions
Today PI delivers micro- and
nanopositioning solutions for all
important high-tech markets:
 Semiconductor Technology
 Optical Metrology, Microscopy
 Biotechnology and Medical Devices
 Precision Automation and Handling
 Precision Machining
 Data Storage
 Photonics, Fiber Optics, Telecom
 Nano Technology
 Microsystems Technology
 Aerospace Engineering
 Astronomy
PI Ceramic in Lederhose
Piezo • Nano • Positioning
PI is market and technological
leader for precision position-
ing systems with accuracies
well under one nanometer.
Nanometer-range motion con-
trol is the key to worlds where
millions of transistors fit on
one square millimeter, where
molecules are manipulated,
where thousands of “virtual
slices” are made in the obser-
vation of living cells, or where
optical fiber bundles no larger
than a human hair are aligned
in six degrees of freedom.
Worlds We Call NanoWorlds
Continuous innovation and
reinvestment of profits over
the decades has allowed PI to
attain its present market
status. This status is also
based on long-term customer
relationships and on the free-
dom to transform ideas into
reality.
Over 30 Years Experience
When PI introduced piezo-
electric nanopositioning tech-
nology more than 30 years
ago, typical customers were
research labs and universities
working on laser cavity tuning,
Fabry-Perot interferometers
and filters. Few foresaw that
PI headquarters in Karlsruhe
whole industrial sectors like
semiconductor manufacturing
or biotechnology would be-
come dependent on progress
in nanopositioning. Today, not
even the precision machining
industry can do without
nanometer-level positioning
systems.
Key Technologies In-House
PI follows a vertical integration
strategy designed to develop
and maintain all key technolo-
gies in-house. We supervise
each and every step from
design to delivery in the
following areas: software,
precision mechanics, digital
and analog control electronics,
sub-nanometer capacitive
position sensors, piezo ceram-
ics and piezo actuators. This
assures the highest quality and
reduces cost.
27
 Piezo • Nano • Positioning
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Piezo Nano Positioning
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Inspirations 2009
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Nanopositioning
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