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A Position Sensor For A Micro-Actuator
A Position Sensor For A Micro-Actuator
Summary: A position sensor for a micro-actuator is being developed. The sensor operates by sensing the change
in inductance and coupling factor between two coils, as the piston moves in the actuator. The presented sensor is
extremely small; it only adds 0.4 mm to the diameter of a φ 1.6 mm actuator. The sensor can measure the
position of the invar core with an accuracy of ± 10 µm over a stroke that equals the total length of the actuator.
References
1. C u r t i s D . J o h n s o n , Process Control
Instrumentation Technology, Prentice-Hall
International, 2000, pp 214-222.
2. National Instruments, Measuring Position and
Displacement with LVDTs, NI Developer Zone,
2004.
3. H. Sumali, E. Bystrom, G. Krutz, IEEE sens J,
vol 3, no 6, Dec 2003, pp 818-826.
Fig. 3. Sensitvity of the sensor as a function of frequency.