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VGScienta Pressure Measurement
VGScienta Pressure Measurement
VGScienta Pressure Measurement
Item
Page
397
Pressure Measurement
Introduction to Pressure Measurement
Vacuum pressure measurement is broadly divided into two categories: high and low vacuum.
Many of the different techniques used to measure these categories have an overlap at some
point in the pressure range. By combining
several different types of gauge it is possible
measure system pressure from 10 mbar down
to 10-11 mbar.
Pressure
Measurement
398
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The VG Scienta range of Pirani gauges is divided into two types: constant current, and constant
resistance. The name refers to how the electrical
measurement of the wire is controlled.
The constant current type has a power supply that gives a constant current all the time to
the filament. Therefore the filament resistance
changes are measured.
The constant resistance type has a power supply that changes the current supplied to keep
the resistance of the filament the same. It has a
slightly larger pressure range but requires more
complicated electronics to control it.
Pressure
Measurement
399
IMPORTANTPRODUCTINFORMATION
The head control electronics are mounted directly on
top of the Pirani head in the non-bakeable versions.
The electronics are located at the end of a bakeable
lead assembly in the case of the bakeable heads. These
electronics are NOT bakeable and must be mounted
away from all heat sources.
ZPVGM5KF
Pressure
Measurement
ZPVG92
ZPVGM2
400
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Bakeout
Connector
Temperature, C Detail
Pressure
mbar
Dimension
A
Control
Unit
Order Code
KF10
50
DIN
3 to 1x10-3
93 mm
IPGC2(1)
ZPVGM5KF
34 1.33
250
DIN
3 to 1x10-3
117 mm
IPGC2(1)
ZPVGM92
70 2.75
250
DIN
3 to 1x10-3
117 mm
IPGC2(1)
ZPVGM2
KF10
50
4 Flat Pin
3 to 1x10-3
93 mm
IGC/PIR1(2)
ZPVG5KF
34 1.33
250
4 Flat Pin
3 to 1x10-3
117 mm
IGC/PIR1(2)
70 2.75
250
4 Flat Pin
3 to 1x10-3
117 mm
IGC/PIR1(2)
ZPVG2
ZPVGEKF
ZPVG92
KF10
50
Mini DIN
3 to 1x10-3
93 mm
IGC3(3)
ZPVGI5KF
34 1.33
250
Mini DIN
3 to 1x10-3
117 mm
IGC3(3)
ZPVGI92
70 2.75
250
Mini DIN
3 to 1x10-3
117 mm
IGC3(3)
ZPVGI2
(1) If Pirani is run with another type of controller, full pressure range may not be possible.
(2) Controller is no longer available, included for information only.
(3) Full specifications for the IGC3 controller can be found on pages 406 to 409.
Gauge Head
Order Code
KF10 to Edwards " inch
Sealing
Gasket
Mounting
Kit
ZPVGM5KF
ZPVGEKF
ZPVGM92
ZCU19
ZPVGM2
ZCU38
ZPVG5KF
ZPVGEKF
ZPVG92
ZCU19
ZM4B20
ZPVG2
ZCU38
ZM6B35
ZPVGI5KF
ZPVGEKF
ZPVGI92
ZCU19
ZM4B20
ZPVGI2
ZCU38
ZM6B35
ZKK10VCS
ZKKF16CA
ZM4B20
ZKK10VCS
ZM6B35
ZKKF16CA
ZKK10VCS
ZKKF16CA
Pressure
Measurement
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401
Ion Gauges
electrons away from the filament; they circulate
around the grid passing through the fine structure many times until eventually they collide with
the grid. Gas molecules inside the grid may collide with circulating electrons. The collision can
result in the gas molecule being ionised. The collector inside the grid is negatively charged and
attracts these positively charged ions. Likewise
they are repelled from the positive grid at the
same time. The number of ions collected by the
collector is directly proportional to the number
of molecules inside the vacuum system. By this
method, measuring the collected ion current
gives a direct reading of the pressure.
The above is a simplification of what happens.
The design of the gauge head affects how efficiently electrons are produced, how long they
survive, and how likely they are to collide with
a molecule. These factors combine together to
result in the gauge sensitivity. As a general rule,
the higher the sensitivity, the more efficient the
operation of the gauge.
Pressure
Measurement
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VIG1x Series
The VIG1x series of heads (VIG17 and VIG18)
have the same construction as the VIG22 series.
Again a ceramic feedthrough base is used but
with an even more highly insulated collector pin
than the 2x series. The grid is made from very
thin molybdenum and is made to be as large as
possible (to maximise area of possible electron/
molecule collision volume) but also to have an
even smaller surface area than the 22 series (to
minimise the chance of electrons being collected by the grid). The grid also has a top and
bottom which ensures that the field produced
is as uniform as possible (no end effects). The
collector wire is even thinner tungsten to further
minimise the risk of x-ray formation whilst still
allowing the collection of positive ions.
Pressure
Measurement
Gauge
X-ray
Bakeout
Filament Sensi- Pressure
Limit
Dimensions in mm
Temp(1), C Materials(2) tivity Range mbar in mbar A B C D E F G H Order Code
400 (250)
2 x W
19
10-3 to 10-11
-3
-11
3 x 10-11 83 28 35 24 16 34 70 34
ZVIG17
70 2.75
400 (250)
2 x Th Ir
19
10 to 10
3 x 10-11 83 28 35 24 16 34 70 34
ZVIG18
70 2.75
400 (250)
2 x W
17
10-3 to 10-10
3 x 10-10 72 28 35 21 14 34 70 34
ZVIG22
70 2.75
400 (250)
2 x Th Ir
17
10-3 to 10-10
3 x 10-10 72 28 35 21 14 34 70 34
ZVIG24
(1) Number in brackets is maximum temperature attainable whilst connected to appropriate bakeable lead assembly.
(2) W = tungsten, Th Ir = thoriated iridium.
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403
Pressure
Measurement
Tungsten Filaments
Tungsten has the ability to take a lot of power;
this meant that in the days of dirty vacuum systems (untrapped diffusion pumps etc.) the gauge
heads could be degassed at powers of up to 100
watts to remove oil contamination. Tungsten
has the disadvantage of becoming very brittle
(due to crystal growth) when it is heated, which
means that it is easily broken by vibration. In
addition it will instantly oxidise if let up to air
whilst hot. The hot filament also generates CO
and CO2 inside the vacuum system and causes
larger gas molecules to be split into fragments.
IMPORTANTPRODUCTINFORMATION
Thoriated iridium must not be degassed at more than
30 Watts power as the thoria coating may evaporate.
Thoria dust must not be inhaled.
Gauge Head
Bakeable Lead Assembly(2)
Order
Spare
IGC
IGCI 1+2
Code
Filaments
Series
Series
ZVIG17
ZWW17
ZLIGB3
ZIPGB3
ZMGLIGB3
ZLIGNB3
ZIPGC204 (4m)
ZMGLIGN3
ZVIG18
ZTIR23
ZLIGB3
ZIPGB3
ZMGLIGB3
ZLIGNB3
ZIPGC204 (4m)
ZMGLIGN3
ZVIG22
ZWW17
ZLIGB3
ZIPGB3
ZMGLIGB3
ZLIGNB3
ZIPGC204 (4m)
ZMGLIGN3
ZVIG24
ZTIR23
ZLIGB3
ZIPGB3
ZMGLIGB3
ZLIGNB3
ZIPGC204 (4m)
ZMGLIGN3
ZHWW
ZWW17
ZVIG10
ZWW17
ZVIG10A(1)
ZWW17
ZVIG20(1)
ZWW
ZVIG21(1)
ZTTCIR
ZVIG30(1)
ZVIG23(1)
ZWIR23
ZLIGB3
ZIPGB3
ZMGLIGB3
ZLIGNB3
ZIPGC204 (4m)
ZMGLIGN3
ZVIG17M(1)
ZWW17
ZLIGMB3
ZVIG18M(1)
ZTIR23
ZLIGMB3
ZVIG24M(1)
ZTIR23
ZLIGMB3
ZVIG8
ZIR23
ZLIG8NB3
ZIPGC803
ZMGLG8N3
ZVIG8KF
ZIR23
ZLIG8NB3
ZIPGC803
ZMGLG8N3
(1) These gauge heads are no longer available and are included for reference only.
(2) All leads are 3 metre lengths as standard unless otherwise indicated.
404
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Gauge Heads
ZVIG17, 18, 22 and 24
ZVIG17, 18, 22 and 24
ZVIG17, 18, 22 and 24
ZVIG17, 18, 22 and 24
ZVIG17, 18, 22 and 24
ZVIG17, 18, 22 and 24
ZVIG17, 18, 22 and 24
Controller
Type
IGC3
IGC3
IGC3
IGC3
IGC3
IPGC Series
IPGC Series
Spare Ion
Gauge Head
Connector
ZVIGSK
ZVIGSK
ZVIGSK
ZVIGSK
ZVIGSK
ZVIGSK
ZVIGSK
Bakeout
Temperature, C
250
250
250
250
250
250
250
Length
in m
1
2
3
5
10
3
5
IGC Series
ZVIGSK
250
IGC Series
ZVIGSK
250
IGC-M Series
ZVIGSK
250
Order Code
ZIPGB1
ZIPGB2
ZIPGB3
ZIPGB5
ZIPGB10
ZIPGB3
ZIPGB5
ZLIGB3
ZLIGB5
ZLIGMB3
IMPORTANTPRODUCTINFORMATION
Pressure
Measurement
ZLIGB3.
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ZIPGB3.
405
406
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Option Slots
IGC3 is has two user-configurable option slots
which can accommodate:
Communication
All aspects of IGC3 can be controlled manually
from the front panel or using serial communications (e.g. from process control software).
Pressure
Measurement
ZPVGI5KF (50 C)
VIG17
ZIPGB1 (1 m)
ZPVGI92 (250 C)
VIG18
ZIPGB2 (2 m)
ZPVGI2 (250 C)
VIG22
ZIPGB3 (3 m)
(bakeout)
VIG24
ZIPGB5 (5 m)
ZIPGB10 (10 m)
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407
IGC3 Controller
Item
Controller
Notes
Order Code
NB:will only run one ion gauge 110/120 VAC or 220/240 VAC
ZIGC3
Item
Notes
Order Code
K Type only
ZIGMTC
ZIGMPVG
Pirani Board
IMPORTANTPRODUCTINFORMATION
IMPORTANTPRODUCTINFORMATION
Order Code
Fully Bakeable
ZIPGB1
Fully Bakeable
ZIPGB2
Fully Bakeable
ZIPGB3
Fully Bakeable
ZIPGB5
Fully Bakeable
ZIPGB10
Ion Gauge
ZVIG17
Ion Gauge
ZVIG18
Ion Gauge
ZVIG22
Ion Gauge
ZVIG24
ZPVGI5KF
Pirani Gauge
ZPVGI92
Pirani Gauge
ZPVGI2
Pressure
Measurement
Order Code
ZIGMACC
ZIGMPCAB
ZTIR23
ZWW1
ZIGDB25C
408
Notes
One set supplied with ZIGC3
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IMPORTANTPRODUCTINFORMATION
Please see the questionnaire on our website for a stepby-step guide to configuring and ordering your IGC3.
Item
Order Code
5 m Thermocouple
ZIGTCC05
10 m Thermocouple
ZIGTCC10
Communication Cables
Up to eight ZIGC3's can be controlled directly
from each PC serial port. These options provide
cabling from the PC to the first ZIGC3, and
between ZIGC3 for daisy-chaining purposes.
Cable
Order Code
RS232 Communications cable from PC to first ZIGC3 in a daisy chain DB9 PC serial connector, 3m long
ZIGDBC09
ZIGDB25C
ZIGDCC01
ZIGDCC03
IGC3 Software
VACTool: Software Configuration/Data
Monitoring Tool
This stand-alone Win32 programme allows any
number of ZIGC3's to be controlled and monitored from the PC. Features include: access to
all parameters, parameter file sets for ZIGC3
configuration, monitoring and logging of all
data with graphical callback.
Software Package
Order Code
ZIGVACXP
ZIGCOMDP
Win32 DLL with Header parameter values and MODBUS data string
ZIGWIN32
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Pressure
Measurement
409
Pressure
Measurement
410
Order Code
ZWPGC110
ZWPGC220
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KF version.
KF Flange Version
Measuring Range
Standard 1000-10-8 mbar
Compact 1000-10-8 mbar
Bakeout Temperature
Standard 180 C on the front flange
Compact 180 C on the front flange
Replacement filaments
Housing tube changeable
Conflat version.
Pressure
Measurement
Order Code
Compact Wide Range Disposable Gauge Head with a KF25 Mounting Flange
ZPGCH25K
Description
Order Code
ZPGSH40K
ZPGSH25K
ZPGSU2C
Standard Replacement Twin Yttria coated Iridium Filaments for the ZPGSH40K,
ZPGSH25K and ZPGSH2C Wide Range Standard Gauge Heads
ZPGSF
Description
Order Code
KF 25
ZWPGHCC
70 mm OD Conflat
ZWPGUCC
KF 25
ZWPGHCCL
70 mm OD Conflat
ZWPGUCCL
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411
Order Code
Cable Length
3 metres
ZPGCC3
5 metres
ZPGCC5
7 metres
ZPGCC7
10 metres
ZPGCC10
Pressure
Measurement
412
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