ARTICLE IN PRESS

Mechanical Systems and Signal Processing 23 (2009) 957978

Contents lists available at ScienceDirect

Mechanical Systems and Signal Processing

journal homepage: www.elsevier.com/locate/jnlabr/ymssp

Development and dynamic modelling of a exure-based

ScottRussell mechanism for nano-manipulation
Yanling Tian a,b,, Bijan Shirinzadeh a, Dawei Zhang b, Gursel Alici c
a
b
c

Robotics and Mechatronics Research Laboratory, Department of Mechanical and Aerospace Engineering, Monash University, Clayton, Vic. 3800, Australia
School of Mechanical Engineering, Tianjin University, Tianjin 300072, China
School of Mechanical, Materials and Mechatronic Engineering, University of Wollongong, NSW 2522, Australia

a r t i c l e in fo

abstract

Article history:
Received 21 February 2008
Received in revised form
16 May 2008
Accepted 25 June 2008
Available online 28 June 2008

This paper presents the design methodology and dynamic modelling of a piezo-driven
exure-based ScottRussell mechanism for nano-manipulations. Based on nite
element analysis, the ScottRussell mechanism is monolithically constructed to provide
high positioning accuracy and long-term repeatability. With consideration for the effect
of the driving circuit, the dynamic model of the exure-based ScottRussell mechanism
is established. The inuence of the time constant RC on the dynamic response is
investigated. The transient responses of the exure-based ScottRussell mechanism to
three typical signals are derived based on the Laplace transform method. It is noted that
the cycloidal command signal can generate vibration-free motion, and thus improve the
dynamic performance of the exure-based mechanism. Experimental tests have been
carried out to verify the developed ScottRussell mechanism and the established
models.
& 2008 Elsevier Ltd. All rights reserved.

Keywords:
Flexure hinge
Piezoelectric actuator
ScottRussell mechanism
Dynamic modelling

1. Introduction
Ultra-precision manipulation is one of the key techniques for many modern nanotechnology applications [13], such as
scanning tunnel microscope, X-ray lithography, nanoimprint, mask alignment, and micromanufacture. In order to obtain
high accuracy and quality, the position of the tool tip relative to the target must be exactly controlled. The typical
conguration of conventional ultra-precision positioning mechanism consists of sliding/rolling guides and servomotors,
where ball-screw is always utilized to change the rotation of the motor to linear motion [4,5]. To improve the dynamic
characteristics of the ultra-precision positioning mechanisms, the linear servomotor and voice coil motor (VCM) are also
involved [69]. Whereas, these mechanical kinematic pairs have a number of disadvantages such as backlash, stick-slip,
noise, and slow response. These make it difcult to meet with the requirements of the modern nanotechnology.
To overcome these problems, the exure-based mechanisms and piezoelectric actuators have been utilized to
implement ultra-precision manipulation with high performance [1014]. Compared with conventional mechanisms,
exure-based systems have the inherent advantages of no backlash, negligible friction, no lubrication, and free of thermal
generation. In addition, it can be monolithically manufactured to reduce the assembly errors and guarantee the machining
accuracy. Based on the applied voltage, piezoelectric actuator can generate continuous expansion and retraction motions
with innite resolution, zero backlash, and wide dynamic response range. Thus, the piezo-driven exure-based mechanism

 Corresponding author at: Robotics and Mechatronics Research Laboratory, Department of Mechanical and Aerospace Engineering, Monash University,
Clayton, Vic. 3800, Australia. Tel.: +61 3 9905 3510; fax: +61 3 9905 1825.
E-mail address: yanling.tian@eng.monash.edu.au (Y. Tian).

0888-3270/$ - see front matter & 2008 Elsevier Ltd. All rights reserved.
doi:10.1016/j.ymssp.2008.06.007

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becomes one of the best choices for ultra-precision manipulation. Due to the small displacement of piezoelectric actuator, a
lever mechanism is usually involved to achieve the desired working space in numerous applications. The ScottRussell
mechanism is the simple structure with the main feature of displacement amplication and straight-line motion with right
angle direction change of the input motion [15,16].
A number of previous researches have been done to deal with the design and dynamic modelling of the piezo-driven
exure-based mechanism. Ryu et al. [17] described the optimal design of a exure-based XYy wafer stage with large yaw
motion, which utilized three piezoelectric actuators and a monolithic compliant mechanism. A mathematical formulation
of the optimization problem has been given and solved using an SQP method. Choi et al. [18] presented an approach for
designing a precision magnication mechanism featuring exure hinges and piezoelectric actuators. The governing
equations of motion were derived using Lagrangian equation and a two-step amplication mechanism was optimally
designed and fabricated. Wu and Zhou [19] designed a novel XYy mechanism with only one actuator. A symmetric
monolithic exure-based mechanism was utilized to obtain excellent guide motion. The kinematic characteristics have
been experimentally investigated. Yang et al. [20] discussed the design and characterization of a new low prole piezodriven micropositioning mechanism for laser welding applications. A exure hinge lever has been used to obtain the
desired motion range. The analytical models for static and dynamic behaviours were presented. Yi et al. [21] developed a
planar micropositioning mechanism with intention of accurate exure hinge modelling. The kinematic analysis including
inverse kinematics, internal kinematics and analytic stiffness modelling was obtained. Elmustafa and Lagally [22] studied
the behaviour of exure-guided nano-positioning stages for precision machining by the nite element method. Both static
and modal frequency analysis was carried out, and an optimal procedure was developed to improve the dynamic
performance of the mechanism. Gao et al. [23] discussed the design and the characteristics of a piezo-driven
micropositioning mechanism with exure hinges. A two-step amplifying lever was adopted to enlarge the working range
of the mechanism. An analytical model including the static and dynamic behaviour was given. Gao et al. [24] presented the
mechanical design and dynamic modelling of a micropositioning table utilizing piezoelectric actuator. The design of the
micropositioning table was given with considerations to achieve the high dynamic characteristics. The dynamic models of
the piezoelectric actuator and the micropositioning table have been established. Zhang et al. [25] designed a exure-based
mechanism driven by three piezoelectric actuators, which can implement three DOF motions, i.e., one translation and two
rotations. The kinematic and dynamic models for the micropositioning mechanism have been developed, and the
performance of the mechanism has been experimentally investigated. Min et al. [26] developed a nano-positioning exurebased stage with a exible lever mechanism. With consideration of the lever deformation, the analytic model of the stage
has been established. The inuence of lever and hinge deformation on the amplifying ratio has been presented. Chang and
Li [27] designed a large travel range micropositioning stage. The stage combines a piezoelectric actuator, a exure pivoted
multiple ScottRussell linkage, and a parallel guiding spring. The conguration of the device was optimized by use of
quality engineering techniques in order to achieve the maximum displacement gain and the minimum angular deviation.
Wang and Chang [28] developed a piezoelectric actuated precise rotary positioner with the ScottRussell mechanism. The
nite element and Taguchi optimization method were extensively conducted to analyze the displacement, stress, and
vibration behaviour for optimal design. Alici and Shirinzadeh [29] focused on the vibration aspects of the piezoelectric
actuators and compliant mechanisms. The analytic model of the piezo-driven ScottRussell mechanism was established
and the effect of the vibration problem on the accuracy of the piezo-actuated exure-based mechanism was investigated by
the numerical method.
This paper presents the mechanical design methodology and dynamic modelling of a piezo-driven exure-based
ScottRussell mechanism. In order to investigate the dynamic performance of the piezo-driven exure-based ScottRussell
mechanism, a lumped parameter model including the piezoelectric actuator dynamics is established using Lagrangian
equation method. From the dynamic point of view, the interaction between the piezoelectric actuator and the exurebased mechanism is systematically investigated. The inuences of the time constant RC on the dynamics of the entire
system are examined. For the mechanical structures are typically second-order dynamic systems with small damping ratio,
there will be an overshoot and oscillation problems when implementing a step control signal. To overcome this problem,
three typical signals are used to demonstrate the relationships between the input control signals and the positioning
accuracy of the piezo-driven exure-based mechanism. Using direct Laplace transform and inverse Laplace transform
methods, the analytic solutions of the exure-based mechanism to three typical control signals are derived. Experimental
results show that the shape of input signals can signicantly affect the dynamic response of the exure-based mechanism,
and the cycloidal input signal can be employed to reduce residual vibration of the moving part after the termination of
motion.

2. Mechanical design
The exure-based ScottRussell mechanism is shown in Fig. 1. The entire system is monolithic manufactured using
WEDM (wire electro-discharge machining) technique, and the geometric size and tolerance of the links and exure hinges
are exactly controlled to guarantee motion accuracy. The ScottRussell mechanism is supported by a stationary rectangular
frame which is used to connect with other equipments or mount on the ground. For the merit of high rotational accuracy,
circular exure hinges are used as revolute joints to connect the moving linkages and the stationary frame. A piezoelectric

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Frame
B
B
Hinge
C

A
Hinge

Actuator

O
Hinge

Fig. 1. ScottRussell mechanism.

actuator (PI P-843.10) is secured between the stationary frame and one end of the moving linkage. The piezoelectric
actuator can generate a displacement up to 15 mm, has an axial stiffness 19 N/mm, and can deliver a maximum driving force
of 800 N. Due to brittleness of the piezoelectric ceramic, the piezoelectric actuator is strong for compressive force, but weak
against shear force and bending torque. In order to prevent the piezoelectric actuator from bending torque, a exure hinge
is added between the moving linkage and the block connected with piezoelectric actuator. In general, the piezoelectric
actuator pushes against the driving point through preload. During the expansion process of the piezoelectric actuator, the
driving point will be pushed to move forward, but when the piezoelectric actuator retracts from large displacement to
small one, the driving point must follow the piezoelectric actuator with the aid of external force. This external force should
large enough to overcome the inertia of the moving parts of the mechanism and make the driving point connect the
piezoelectric actuator tightly. In the exure-based ScottRussell mechanism, the external force is generated by the exure
hinges C and O. The exure hinge A can hardly generate preload force, for the piezoelectric actuator has a ball tip to avoid
the bending torque, and thus the driving block cannot provide the torque. The magnitude of preload is determined by two
aspects: one is the equivalent stiffness of the exure-based mechanism. In the ScottRussell mechanism, the equivalent
stiffness is calculated at the driving point A mainly due to the exure hinges O and C connected in series, it should be kept
in mind that the stiffness of the exure hinge O must be equal to that of the exure hinge C, and the equivalent stiffness is
nearly half of one exure. The other one is the initial preload displacement at the assembly process. Based on the Hookes
law, the larger the exure-based mechanism is compressed, the bigger the piezoelectric actuator is subjected to preload. On
the other hand, the high stiffness of the exure hinge and large preload can reduce the working range of the exure-based
ScottRussell mechanism. The reason is that piezoelectric actuator has nite stiffness and the actual displacement is less
than the nominal displacement under the spring preload condition. Thus, the mechanical design of the exure hinge is
crucial for the exure-based ScottRussell mechanism.
There are numbers of literatures on the design of the exure hinge [3034]. The landmark work has been done by Paros
and Weisbord [30] in 1965. The exact and simplied formulae have been presented. For an angular deection az about zaxis due to an application of moment tz, the angular stiffness of a right circular exure hinge can be approximately
expressed as
ktz az

2Ebt2:5
;
9pr 0:5

tr

(1)

where E is the elastic modulus of the exure hinge material; b, t, and r are, respectively, the dimensions as shown in Fig. 2.
The material of the exure-based ScottRussell mechanism is chosen as 7000 series aluminium alloy with elastic modulus
E 72 GPa. The geometric parameters of the mechanism is designed as width b 10 mm, radius r 5 mm, and minimum
thickness t 1.5 mm. Thus, the equivalent linear stiffness kSR of the exure-based mechanism can be calculated by the
following equation:
kSR 

1
2
2lAB

ktz az

Ebt2:5
2

9pr 0:5 lAB

tr

(2)

By using Eq. (2), the equivalent linear stiffness of the exure-based mechanism is estimated as kSR 1.93 N/mm, which is
approximately 10% of the nominal stiffness of the piezoelectric actuator. The reduction of displacement the piezoelectric

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r
h
t

Fig. 2. Circular notch exure hinge.

Fig. 3. FEM model and deformation pattern of the ScottRussell mechanism.

actuator due to load of the exure-based mechanism can be given as

xpztred

kSR
xpztnom xpreload
kSR kpzt

(3)

where xpztred is the reduction of the piezoelectric actuator, kpzt is the stiffness of the piezoelectric actuator, xpztnom is the
nominal displacement of the piezoelectric actuator, and xpreload is the initial displacement for the preload.
The exure-based ScottRussell mechanism can be simplied as four bar mechanism and shown in Fig. 1(b), where the
condition that the motion of the point B follows a vertical motion when the driving point A moves along horizontal
direction is that the links AC BC OC. The design criteria of the ScottRussell mechanism are to achieve large
amplication factor and minimum motion deviation. According to the translation theorem of force, the driving force will
generate force and bending moment simultaneously at the locations of the exure hinges. The exure hinge subjected to
force and moment will generate stretching and bending deformation. The stretching deformation of the exure hinge
should be limited in the range as small as possible to improve the positioning accuracy of the exure-based mechanism. In
order to examine the performance of the exure-based ScottRussell mechanism described above, the nite element
analysis is carried out using the ANSYS software package. The displacement and the maximum stress of the exure-based
mechanism are investigated in the mechanical design. The nite element model (Fig. 3) is based on the physical model as
shown in Fig. 1(a). A three-dimensional 20 node solid element named Solid 95 is used to mesh the exure-based
mechanism. This kind of element has quadratic displacement behaviour and is well suitable to model irregular shapes such
as exure hinge. Each node has three degrees of freedom which are translations in the x, y, and z directions, respectively. In
order to improve the computational accuracy, the mapping mesh method is used and the element sizes are different for
each part of the exure-based mechanism and about quintile of the minimum dimension of the local region. The surfaces of
the stationary frame are xed and constrained all degrees of freedom. The excitation source is the displacement applied on
the end of the piezoelectric actuator. The displacement of the output point B, as well as the moving linkages and exure
hinges, is carefully examined. The computational results ensure that the maximum stresses occurring in exure hinges

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Fig. 4. Photo of the exure-based ScottRussell mechanism.

does not exceed the allowable stress of the material, the magnication in the ScottRussell mechanism matches design
criteria, the shift of the rotation centres of the exure hinge and the bending deformation of the linkage are within the
limitation. The lateral deviation of the output point B is also minimized to satisfy the requirements. Based on the nite
element analysis, the length of the linkage and the position of the exure hinges are determined to improve the static and
dynamic characteristics of the exure-based ScottRussell mechanism.
The photo of the exure-based ScottRussell mechanism is shown in Fig. 4. A numerical computer is utilized to generate
the command signals and the human-machine interface by a C-language programme. Through a 16-bit D/A converter, the
control signal is supplied to the piezoelectric amplier where the voltage has been modulated and amplied into the
working voltage of the piezoelectric actuator. The piezoelectric amplier module has a nominal amplication factor 1070.1
and can output and sink a peak current of 2000 mA and an average current of 300 mA. When the piezoelectric actuator is
subjected the control voltage wave from the piezoelectric amplier, it will generate corresponding expansion or retraction,
and thus the displacement of the moving point B can be enlarged through the exure-based ScottRussell mechanism. To
overcome the hysteresis of the piezoelectric actuator, the strain gauge sensor bonded to the piezoelectric stack is used to
measure the position of the piezoelectric actuator and form the closed-loop control. The measured positioning signal is
sent to the sensor and position servo-control module E-509.x3 with an integrated position servo-controller.
3. Kinematics of the ScottRussell mechanism
The Cartesian coordinate system is established as shown in Fig. 5. The origin of the coordinate is located at the point O,
and the x- and y-axes are along OA and OB, respectively. The distance from the point A to the point O (origin of the
coordinate) is xA0, and the initial position of the point B is (0, yB0). Assume that the linkages AC BC OC L, the angle
between the links AC and AO is y. Based on the geometric relationship of the ScottRussell mechanism, the following
equation is obtained:
q
(4)
yB0 2L2  x2A0
When the point A moves along x direction with displacement of xA, the point B will generate a linear motion yB along the
y-axis. The relationship between the displacement of the points A and B is given as follows:
x2A0 y2B0 xA0 xA 2 yB0 yB 2

(5)

To obtain the displacement of the point B, Eq. (5) can be simplied and rewritten as
y2B 2yB0 yB 2xA0 xA x2A 0
The solution of Eq. (6) is given as follows:
q
yB yB0  y2B0  2xA0 xA  x2A

(6)

(7)

Based on the geometric relationship of the ScottRussell mechanism, the displacement of the point B is obtained as
follows:
q
yB yB0 y2B0  2xA0 xA  x2A
(8)

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Y. Tian et al. / Mechanical Systems and Signal Processing 23 (2009) 957978

y


yB0

L
L

vc
C

L

x
xA0

Fig. 5. Kinematic model of the ScottRussell mechanism.

It can be seen from Eq. (8) that the relationship between the displacement of the points A and B is nonlinear. For the
displacement of the point A is small and within the micrometer level, the relationship between the points A and B can be
expressed as
yB
dy
xA0
x
 A0 cot y
B0  q
xA
dxA0
yB0
2
2
2L  x

(9)

A0

It is noted that when the point A moves a small displacement xA along the x-axis, the point B will move along the y-axis a
displacement yB xA cot y. The negative sign indicates that a decreasing xA results in an increasing yB. From the
displacement relationship, the ScottRussell mechanism can be considered as an ideal straight-line mechanism with a
constant amplication factor in the precision positioning applications. Actually, the relationship of the displacements of the
points A and B is expressed by that of the velocities of the points A and B within the small displacement
range.
In order to calculate the instantaneous angular velocity of the link AB, the instantaneous velocity centre O0 of the link
should be determined as shown in Fig. 5. The instantaneous centre of the link AB is located at the intersection of the
perpendicular lines of the velocity directions of the points A and B. Thus, the instantaneous angular velocity of the link AB
is given as

oAB

x_ A
x_ A
x_ A

O0 A yB 2L sin y

(10)

Thus, the linear velocity of the point C is obtained:

vC oAB O0 C

(11)
0

For the length of the link OC is equal to that of the link O C, and thus the instantaneous angular velocity of the link OC is
given as

oOC oAB 

x_ A
2L sin y

(12)

The negative sign indicates that the rotation direction of the link OC is opposite to that of the link AB.
4. Dynamic modelling
4.1. Modelling of the piezoelectric actuator
From the electric point of view, a piezoelectric actuator can be considered as a capacitor with an equivalent capacitance
of C. The piezoelectric drive amplier can be considered as an operational amplier with the coefcient of kamp. Thus, the
driving circuit of the piezoelectric actuator can be simplied and shown in Fig. 6, where vpzt(t) is the actual voltage applied
on the piezoelectric actuator, vd(t) is the control voltage to the drive amplier, R is the equivalent resistance.
Based on the Kirchhoffs current law, the following relationship can be obtained:
RC

dvpzt t
vpzt t kamp vd t
dt

(13)

Assume that vd(t) is the following typical signals:

 Step signal:
vd t v0

(14a)

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963

xpzt(t)
kamp

Drive
amplifier

vpzt(t)

vd(t)

Piezoelectric actuator
Fig. 6. Circuit of the piezoelectric actuator.

 Slope signal:
(v

t;

tpt r

v0 ;

t4t r

tr

vd t

(14b)

 Cycloidal signal:
8 


< v t  1 sin 2p t ;
0 tr
2p
tr
vd t
: v0 ;

tpt r

(14c)

t4t r

Utilizing Laplace transform method, the actual voltage applied to the piezoelectric actuator can be, respectively, obtained
as follows:

 For step signal:

vpzt t kamp v0 1  et=RC

(15a)

 For slope signal:

vpzt t

8
< kamp vt0 t  RC1  et=RC ;

tpt r

: kamp vtr0 t r  RCettr =RC  et=RC ;

t4t r

(15b)

 For cycloidal signal:

8
kamp vt0r t  RC1  et=RC   kamp 2vp0 12p1RC=t 2
>
>
>
>



i r
>
< h2pRC  t=RC
t
t

sin
2
;

e

cos
2
p
p
tr
tr
tr
vpzt t
>
>
h

i
>
>
>
 RC ;
: kamp vtr0 t r ettr =RC  et=RC 12pRC
RC=t 2
r

tpt r
(15c)
t4t r

Based on Eqs. (15a)(15c), the responses of the piezoelectric actuator can be given as follows:

 For step signal:

xpzt nd33 kamp v0 1  et=RC

(16a)

 For slope signal:

xpzt

8
< nd33 kamp vt0 t  RC1  et=RC ;

tpt r

: nd33 kamp vtr0 t r  RCettr =RC  et=RC ;

t4t r

(16b)

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 For cycloidal signal:

8
nd33 kamp vt0r t  RC1  et=RC   nd33 kamp 2vp0 12p1RC=t 2
>
>
r
>
>



i
>
< h2pRC  t=RC
t
t
sin 2p tr ;
tr e
 cos 2p tr
xpzt t
>
>
h

i
>
>
>
;
: kamp vtr0 t r ettr =RC  et=RC 12pRC
2  RC
RC=t
r

tpt r
(16c)
t4t r

where n is the number of layers in the piezoelectric actuator and d33 is the piezoelectric constant.
Due to the compassion effect of the exure-based mechanism on the piezoelectric actuator, the actual displacement of
the piezoelectric actuator can be given as follows:
xpzt a t

kpzt
xpzt t
kpzt kfh cot y

(17)

where kpzt and kfh are the stiffness of piezoelectric actuator and exure hinges, respectively.
Thus, the equivalent forces applied on the moving part can be given as follows:

 For step signal:

F pzt kpzt d33 nkamp v0 1  et=RC

(18a)

 For slope signal:

F pzt

8
< kpzt nd33 kamp vt 0 t  RC1  et=RC ;

tpt r

: kpzt nd33 kamp vtr0

ttr =RC

t r  RCe

t=RC

e

;

(18b)

t4t r

 For cycloidal signal:

8
kpzt nd33 kamp vt0r t  RC1  et=RC   kpzt nd33 kamp 2vp0 12p1RC=t 2
>
>
r
>
>



i
>
< h2pRC  t=RC
t
t

sin
2
;

e

cos
2
p
p
tr
tr
tr
F pzt t
>
>
h

i
>
>
v0
ttr =RC
t=RC
>
e
12pRC
 RC ;
: kpzt nd33 kamp tr t r e
RC=t 2
r

tpt r
(18c)
t4t r

4.2. Modelling the exure-based mechanism

From the mechanics point of view, the piezoelectric actuator can be considered as a single mass and spring system with
a damping coefcient cpzt. The rotational stiffness of the exure hinges for the ScottRussell mechanism can be equivalent
to a spring acting on the moving point B. With the inertia of the moving part and damping effect of the exure hinges also
being considered, the dynamic model of the exure-based ScottRussell mechanism can be obtained and shown in Fig. 7.
Where Fpzt is the force generated by the piezoelectric actuator, cfh is the equivalent damping coefcient of the exure
hinges.

cfh

Kfh

B
L
C

Fpzt

Kpzt

cpzt

Fig. 7. Dynamic model of the exure-based ScottRussell mechanism.

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The kinetic energy of the exure-based ScottRussell mechanism is given as follows:

T

1
1
1
1
mA mpzt x_ 2A mB y_ 2B IAB o2AB IOC o2OC
2
2
2
2

Substituting Eqs. (10)(12) into Eq. (19), the kinetic energy can be rewritten as


1
3 mL
mA mpzt mB cot2 y
T
x_ 2
2
2
4 sin y A

(19)

(20)

where mpzt, mA, and mB are the mass of the piezoelectric actuator and the moving parts A and B, respectively.
IAB and IOC are, respectively, the moment of inertia of the linkages AB and OC and given by IAB 8=3mL L2 and
IOC 1=3mL L2 , 1=2mA mpzt x_ 2A is the kinetic energy of the moving part A and piezoelectric actuator. 1=2mB y_ 2B
is the kinetic energy of the moving part B, 1=2IAB o2AB is the kinetic energy of the linkage AB, 1=2IOC o2OC is the kinetic
energy of the linkage OC, mL is the mass of the linkage OC, and xA and yB are the displacement of the points A and B,
respectively.
The potential energy of the exure-based ScottRussell mechanism is given as
U

1
1
1
K pzt x2A kfh y2B kpzt kfh cot2 yx2A
2
2
2

(21)

where 1=2K pzt x2A is the potential energy of piezoelectric actuator and 1=2K fh y2B is the potential energy of the exure
hinges.
The Rayleigh energy of the exure-based ScottRussell mechanism is given as
D

1
1
1
cpzt x_ 2A cfh y_ 2B cpzt cfh cot2 yx_ 2A
2
2
2

(22)

where 1=2cpzt x2A is the Rayleigh energy of piezoelectric actuator and 1=2cfh y2B is the Rayleigh energy of the exure hinges.
By using of Lagrangian equation,


d qT  U
qT  U qD

Qi

dt
qq_ i
qqi
qq_ i

(23)

the govern equation of the exure-based ScottRussell mechanism is given as follows:

M x A C x_ A KxA F pzt

(24)

where
M mA mpzt mB cot2 y
C cpzt cfh cot2 y

and

3 mL
,
4 sin2 y

K kpzt kfh cot2 y.

The natural frequency of the exure-based ScottRussell mechanism is given as follows:

on

s
kpzt kfh cot2 y
mA mpzt mB cot2 y 3=4mL =sin2 y

(25)

It is noted that the angle y between the links AO and AB will affect the natural frequency of the exure-based
ScottRussell mechanism.
In order to examine the dynamic responses of the exure-based ScottRussell mechanism to three typical command
signals, Eq. (24) can be rewritten as
x A 2xon x_ A o2n xA

F pzt
M

(26)

where x is the damping factor, on is the natural frequency, and 2xon C=M, o2n K=M.
Based on the Laplace transform and the inverse Laplace transform methods, the transient responses of exure-based
ScottRussell mechanism can be derived as

 Step response:
0

E B
exon t
exon t
EG exon t
C
q sinod t  EH et=RC
xt 2 @1  q sinod t fA EF q sinod t  f 
on
on
2
2
2
1x
1x
1x

(27a)

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 Slope response:

xt

8
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
<




2
xon t
2x
2x
1
to
e on
2x cosod t p
 RC
sinod t
2
tr
n
1x
 

xon t
xon t
e
e
sinod t f EF p
sinod t  f
oE2 1  p
n
1x2
1x2

EG xon t
e
sinod t  EH et=RC ;
o
d



2
xon t
xon tt r
2x
1
E
sinod t  e on
t r e on
2x cosod t p
2
o2n tr
1x


2
2x
1
2x cosod t  t r p
o
t

t

 RC
sin
r
d
tr
1x2

xon t
xon t
e
e
 oE2 p
sinod t f EF p
sinod t  f  EH et=RC
2
2
E

o2n tr

>
>
>
>
>
>
>
>
>
>
>
>
>
>
n
1x
1x
>
>
>
xon ttr
>
r
EG xon t
tt
E e
>
RC
p
sinod t  t r f
>
e
sin
o
t

EH
e

d
>
od
o2n
>
1x2
>
>

>
>
>
xon tt r
>
EG xon tt r
>
EF ep2 sinod t  t r  f o
e
sinod t  t r ;
>
d
>
1x
:

tpt r

(27b)

t4t r

 Cycloidal response:

xt

8
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
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>
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>
>
>
>
>
>
>
>
>
>
>
>
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>
>
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>
>
>
>
>
>
<
>
>
>
>
>
>
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>
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:




2
2x
2x
1
exon t
p
t


2
x
cos
o
t

o
t
 ERC
sin
d
d
on
on
tr
o2n tr
1x2
 

xon t
xon t
e
e
sinod t f F p
sinod t  f  oG exon t
o12 1  p
d
n
1x2
1x2


t

x
o
n
ERC=t
r
M p
e
sinod tH et=RC  12pRC=t
I  F  RC
sinod t  f
2
2
r
1x

i

P

exon t sinod t H et=RC RC
 K cos 2tpr t
GJN=RC
od

  
Q
 L sin 2tpr t ;
2tpr RC



2
xon tt r
2x
1
E
exon t
p
t

2
x
cos
o
t

o
t
 e on
sin
r
2
d
d
on
on t r
1x2


2
2x
1
2x cosod t  t r p
sinod t  t r
2
1x

xon t
xon t
RC
E p
e
e
sinod t f EF p
sinod t  f  EH et=RC
 t r  o2
2
2
E

1x

EG

sinod t EH ettr =RC oE2 ep2 sinod t  t r f

 od e

1x

xon tt r

EG xon ttr
EF ep2 sinod t  t r  f o
e
sinod t  t r
d
1x




exon t
xon tt r
r
M
p2 sinod t  f  ep
sinod t  t r  f
 12ERC=t
I

F

2
RC
2
pRC=t
1x

1x

GJN=RC
exon t sinod t  exon ttr sinod t  t r Het=RC  ettr =RC ;
od

where
E

kpzt nd33 kamp

v0 ;
M

2RC xon  1
2xon  o2n RC  1=RC

J
L

RC
; H F,
2xon  o2n RC  1=RC
q
q
2
1x
2
; f arctan
; od on 1  x ,

2p=t r  o

2
n

o2n  2p=t r 2 2 4x o2n 2p=t r 2

2xo3n
o  2p=t r 2 2 4x o2n 2p=t r 2
2
n

(27c)

1x

xon tt r

xon t

tpt r

2xon 2p=t r 2
2

o2n  2p=t r 2 2 4x o2n 2p=t r 2

K I,

t4t r

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Y. Tian et al. / Mechanical Systems and Signal Processing 23 (2009) 957978

2xon

967

o2n  2p=t r 2 2 4x o2n 2p=t r 2

2

N
Q

4x o2n  o2n 2p=t r 2

2

o  2p=t r 2 2 4x o2n 2p=t r 2

2
n

P M,

o2n  2p=tr 2
K.
2
o2n  2p=t r 2 2 4x o2n 2p=t r 2

In Eqs. (27a)(27c), the rst term denotes the dynamic response to a pure typical command inputs as
if applied directly to the mass-spring system of the exure-based ScottRussell mechanism, and the last terms
denotes the effects of the time constant RC in addition to the parameters such as the damping ratio x, the
natural frequency on, and the rising time tr. Thus, from the intuition viewpoint, the dynamic characteristics of the
exure-based ScottRussell mechanism can be adjusted by changing the time constant RC and the rising time of
the command signals.

5. Experimental tests
In order to verify the performance of the developed exure-based ScottRussell mechanism and the established models,
experimental tests have been carried out. The schematic diagram of the experimental setup is shown in Fig. 8, where a

PI E-505

Retroreflector

Computer

Interferometer
Laser head

Scott-Russell
mechanism

Daeil System optical table with

pneumatic isolator

ZMI 1000 Software

ZMI Chassis

Fig. 8. Schematic diagram of the experimental tests.

3.0
2.0

5 nm

Displacement (nm)

1.0
0
-1.0
-2.0
-3.0
0

0.5

1.0

1.5
Time (s)

2.0

2.5

Fig. 9. Environmental noise of the experimental system.

3.0

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laser-based sensing and measurement system is utilized to record the displacement of the exure-based ScottRussell
mechanism. To reduce the external disturbance such as ground vibration, the experimental tests have been carried out on a
Daeil System vibration isolation optical table with pneumatic isolator supports. The environmental noise after vibration
isolation is measured and shown in Fig. 9, it is noted that the noise is approximately 5 nm.
In order to measure the resolution of the exure-based ScottRussell mechanism, through the D/A converter board, the
digital computer generates a stair-step signal and supplies to the actuator to drive the mechanism. The duration of one step
is set as 1 s. The displacement of the moving point is measured with laser interferometer and shown in Fig. 10. It can be
seen that the resolution of the exure-based mechanism can reach up to 6 nm. If the external noise of the experimental
environment can be reduced, the higher resolution can be obtained.
To examine the effect of hysteresis of the piezoelectric actuator on exure-based ScottRussell mechanism, the
corresponding steady state positions of the moving point B are recorded for a number of command signal voltage values as
shown in Fig. 11, where the lower curve is for the expansion stage and the upper curve is for the retraction discharge) stage,
and when a 10 V command signal is applied the translator extended 15 mm. It can be seen that under the open loop system

28
24

Displacement (nm)

20
16
12
8
4
0
-4
0

10

Time (s)
Fig. 10. Resolution of the exure-based ScottRussell mechanism.

15.0
Open loop
Closed-loop

Displacement (m)

12.5

10.0

7.5

5.0

2.5

0
0

4
6
Voltage (V)

x(t)e = 0.0061 + 0.1167v + 0.9458v2 0.0201v3

x(t)r = 0.0021 0.0226v + 1.8849v2 + 0.5449v3

Fig. 11. Hysteresis of the exure-based ScottRussell mechanism.

10

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969

30

Displacement (m)

25

20

15

10

0
0

0.1

0.2

0.3

0.4

0.5

Time (s)

15.0

12.5

Amplitude (m)

10.0

7.5

5.0

2.5

0
0

50

100

150
200
Frequency (Hz)

250

300

Fig. 12. Step response of the exure-based ScottRussell mechanism.

condition, the difference between the two stages could be as large as 2.35 mm. The data obtained (Fig. 11) will be used to
determine the theoretical transient responses. The closed-loop control can eliminate the hysteresis and improve the
linearity of the exure-based ScottRussell mechanism.
To determine the dynamic parameters of the exure-based ScottRussell mechanism, a step command signal is
generated and sent to the piezoelectric actuator, the response of the mechanism is recorded by the Zygo interferometer and
shown in Fig. 12, where the frequency domain response is also calculated using FFT (Fast Fourier Transform) technique. The
damped natural frequency of the ScottRussell mechanism can be obtained from the frequency domain response. The
damping ratio can be estimated using the peak values of the transient step response and the following equation:
2px
1
A
q ln i
n Ain
2
1x

(28)

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Voltage v

15
10
5
0
0

0.2

0.4

0.6

0.8

1.2

1.4

1.6

1.8

x 104
2
Step
Slope
Cycloid

dv/ dt

1.5
1
0.5
0
0

0.2

0.4

0.6

0.8

0.4

0.6

0.8

1.2

1.4

1.6

1.8

1
1.2
Time (ms)

1.4

1.6

1.8

x 108
1
d2v / dt2

0.5
0
-0.5
-1
0

0.2

Fig. 13. Three typical command signals and their rst (middle plot) and second derivatives (bottom plot).

where Ai is the amplitude of the ith peak in the transient step response, and Ai+n is the amplitude of the peak i+n in the step
2
response. Using Eq. (28), the damping factor was estimated as x 0.02. By using the equation o2d o2n 1  x , the
undamped natural frequency can be calculated as onE515 rad/s.
For the characteristics of the input signal play an important role in the dynamic responses of the exure-based
ScottRussell mechanism, let v0 10 V, tr 1 ms and according to Eqs. (14a)(14c), the command signals as well as their
rst and second deviations have been calculated and shown in Fig. 13. It is noted that the cycloidal command signal has the
continuous rst and second derivatives, whereas the other signals do not have. These indicate that the cycloidal command
signal can generate smooth motion at the beginning and the end of the command, and the other signals will excite high
frequency dynamics of the exure-based ScottRussell mechanism and generate vibrations, which will cause signicant
positioning inaccuracies.
From the data supplied with the piezoelectric actuator, the time constant is given as RC 0.2 ms. Using the obtained
parameters and Eqs. (15a)(15c), the actual voltages applied on the piezoelectric actuator corresponding to the three
typical command control conditions are shown in Fig. 14. It is noted that the actual voltages applied on the piezoelectric
actuator become smoother than the command signals (Fig. 13), due to the effect of the time constant RC. This makes the
three typical signals have nite rst and second derivatives, indicating that the motion of the piezoelectric actuator has a
limited velocity and acceleration. On the other hand, the increment of the time constant RC will reduce the response speed
of the system. It is necessary to trade off between the smoothness and the rapidity of the motion, which is mainly
determined by the usage of the applications. In the exure-based mechanism, the rapidity is the main merit for the
application of piezoelectric actuator, and thus the choice of the time constant should be limited into a suitable small range
with consideration of the motion stability. The time constant is mainly determined by the product of the equivalent
capacitance of the piezoelectric actuator and the resistance of the driving circuit. In order to obtain relative small time
constant, it is necessary to reduce the resistance of the driving circuit and the capacitance of the piezoelectric actuator.
Thus, the small resistance is one of the criteria in the driving circuit design for the piezoelectric actuator. For the
capacitance is proportional to the area of the parallel plates and reciprocal of the distance between the two parallel plates.
To achieve small capacitance, it is essential to reduce the area of the piezoelectric stacks and increase the thickness of the
piezoelectric piece. Due to the small displacement of single piece of the piezoelectric ceramic, the commercial piezoelectric
is usually used in multi-stack conguration to achieve enough working range. Under this condition, the piezoelectric pieces
are connected in parallel and thus the area of the plates is increased. This is another factor need to trade off during the

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Voltage v

100

50

0
0

0.2

0.4

0.6

0.8

1.2

1.4

1.6

1.8

x 105
6

Step
Slope
Cycloid

dv/ dt

4
2
0
0

0.2

0.4

0.6

0.8

1.2

1.4

1.6

1.8

0.4

0.6

0.8
1
1.2
Time (ms)

1.4

1.6

1.8

x 109
1
d2v / dt2

0
-1
-2
-3
0

0.2

Fig. 14. Effective voltages and their rst derivative (middle plot) and second derivative (bottom plot).

30

Displacement (m)

25

20

15

10

0
0

0.05

0.1

0.15

0.2
0.25
Time (s)

0.3

0.35

0.4

Fig. 15. Theoretical step response of the exure-based ScottRussell mechanism.

selection of the piezoelectric actuator. In the design of the exure-based ScottRussell mechanism, the commercial
piezoelectric actuator PI P-844.10 is chosen with consideration to balance the displacement and the capacitance. This type
of piezoelectric actuator has the nominal capacitance of 4.5 F with the deviation less than 720%, and the equivalent mass is
approximately 0.004 kg. The piezoelectric constant is given as d33 635 1012 m/V.

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The equivalent mass of the exure-based ScottRussell mechanism can be estimated from the mechanical
design and the density of the mechanical material, the parameters of the exure-based ScottRussell mechanism are
given as mA 0.1 kg, mB 0.1 kg, mL 0.6 kg. Using the obtained parameters and Eqs. (27a)(27c), the theoretical
responses of the exure-based ScottRussell mechanism to the step, slope and cycloidal command signals are
obtained and shown in Figs. 1517. Due to small damping ratio, there is severe oscillation in the step response of
the ScottRussell mechanism, where the overshoot is approximately up to 93% of the destination, and the settling
time of the step response is estimated as 0.35 s. The exure-based ScottRussell mechanism with the mentioned
performance cannot be used for actual applications, due to the poor positioning accuracy and slow response speed.
The slope command signal can improve the dynamic performance of the exure-based ScottRussell mechanism
as shown in Fig. 16. The oscillation is almost eliminated when the rising time is set as 0.2 s, and the overshoot is less
than 0.1% of the nominal displacement. When the rising time still reduces up to 0.02 s, there exists obvious oscillation at
the beginning of the destination with the maximum overshoot up to 2.0% of the displacement. Compared with the other
command signals, the cycloidal command signal is the best choice to improve the performance of the exure-based
ScottRussell mechanism as shown in Fig. 17. No overshoot occurs during the cycloidal motion of the mechanism
when the rising time of the command signal is chosen as 0.2 s. The overshoot is only 0.5% of the nominal displacement

16
14

Displacement (m)

12
10
8
6
4
2
0
0

0.05

0.1

0.15

0.2
0.25
Time (s)

0.3

0.35

0.4

0.05

0.1

0.15

0.2
0.25
Time (s)

0.3

0.35

0.4

16
14

Displacement (m)

12
10
8
6
4
2
0

Fig. 16. Theoretical slope responses of the exure-based ScottRussell mechanism.

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16
14

Displacement (m)

12
10
8
6
4
2
0
0

0.05

0.1

0.15

0.2
0.25
Time (s)

0.3

0.35

0.4

0.05

0.1

0.15

0.2
0.25
Time (s)

0.3

0.35

0.4

16
14

Displacement (m)

12
10
8
6
4
2
0

Fig. 17. Theoretical cycloidal responses of the exure-based ScottRussell mechanism.

when the rising time further reduces to 0.02 s. The dynamic performance of the exure-based ScottRussell
mechanism is sufcient for the critical demands of micropositioning and manipulation. The reason can be deduced
from Figs. 13 and 14, it is noted that the cycloidal command signal has the smallest acceleration at the beginning
and the end of the signal, and thus the transient inertial force of the moving part of the exure-based ScottRussell
mechanism is zero according to the Newtons second motion law. Whereas, the other command signals have the
larger or innite acceleration, which induce the relative large inertial force and the severe oscillation at the balance
position.
The experimental slope responses of the exure-based ScottRussell mechanism are shown in Fig. 18 corresponding to the theoretical slope responses as shown in Fig. 16, where the rising times are set as 0.02 and 0.2 s, respectively.
The experimental results are in good agreement with the theoretical results, indicating that the models for the
slope command signal is correct and the slope command input can improve the dynamic performance of the
exure-based ScottRussell mechanism to a certain extent. The experimental cycloidal responses of the exure-based
ScottRussell mechanism are shown in Fig. 19 corresponding to the theoretical cycloidal responses as shown
in Fig. 17. The rising times for the cycloidal command signal are also chosen as 0.02 and 0.2 s, respectively. The
experimental results show a close correspondence to the theoretical results. Meanwhile, the overshoot and the

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Y. Tian et al. / Mechanical Systems and Signal Processing 23 (2009) 957978

16
14

Displacement (m)

12
10
8
6
4
2
0
0

0.05

0.1

0.15

0.2
0.25
Time (s)

0.3

0.35

0.4

0.05

0.1

0.15

0.2
0.25
Time (s)

0.3

0.35

0.4

16
14

Displacement (m)

12
10
8
6
4
2
0

Fig. 18. Experimental slope responses of the exure-based ScottRussell mechanism.

settling time reduce signicantly compared with the other command signals. This indicates that the cycloidal command
signal can effectively improve the performance of the exure-based ScottRussell mechanism. The coincidence of the
theoretical and experimental results veries that the dynamic models for the exure-based ScottRussell mechanism
are correct.
Under closed-loop control condition, the step response of the exure-based ScottRussell mechanism is shown
in Fig. 20. The traditional PID controller is utilized to improve the dynamic performance of the entire system. Due to the
small damping ratio, large overshoot and oscillation occur in the step response under open loop control condition. In order
to eliminate the overshoot, small proportional gain is adopted, and this enlarges the rising time of the response. Compared
with closed-loop step response, the cycloidal command signal obtains the similar positioning accuracy (Fig. 19).
Furthermore, the cycloidal command signal can also be used in the closed-loop control condition, and further improve the
positioning accuracy of the exure-based mechanism.
The angle y between the links AB and AO can affect the dynamic characteristics such as frequency as indicated in
Eq. (25). The detail inuence is calculated and shown in Fig. 21, it should be pointed out that the curve is obtained under
the current conguration of the exure-based ScottRussell mechanism. It can be seen that the nature frequency of the
exure-based ScottRussell mechanism will increase gradually with the increment of the angle y. In order to improve the

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Y. Tian et al. / Mechanical Systems and Signal Processing 23 (2009) 957978

975

16
14

Displacement (m)

12
10
8
6
4
2
0
0

0.05

0.1

0.15

0.2
0.25
Time (s)

0.3

0.35

0.4

0.05

0.1

0.15

0.2
0.25
Time (s)

0.3

0.35

0.4

16
14

Displacement (m)

12
10
8
6
4
2
0

Fig. 19. Experimental cycloidal responses of the exure-based ScottRussell mechanism.

dynamic performance of the ScottRussell mechanism, the angle between the links AB and AO should be as large as
possible. The limitation for the angle y is that the amplication factor of the ScottRussell mechanism, that is, the
enlargement of the angle y should not reduce the amplication factor signicantly.
During the step response of the exure-based mechanism, the inuences of the time constant RC on the settling time
and the overshoot are obtained and shown in Fig. 22. It is noted that when the value of the time constant RC is located in
the region I, the overshoot occurs during the step response, and the settling time of the exure-based mechanism will
reduce with the increment of the time constant RC. In the region II, the overshoot will also occur, but the settling time of the
exure-based mechanism will increase with the increment of the time constant RC. In the region III, there is no overshoot
occurring, and the settling time of the exure-based mechanism increases with the increment of the time constant RC.

6. Conclusions
A exure-based ScottRussell mechanism has been developed and investigated for the application of nanomanipulation. A piezoelectric actuator is used to driven the micropositioning ScottRussell mechanism to improve the

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Y. Tian et al. / Mechanical Systems and Signal Processing 23 (2009) 957978

16
14

Displacement (m)

12
10
8
6
4
2
0
0

0.05

0.10
0.15
Times (s)

0.20

0.25

Fig. 20. Step response of the exure-based mechanism under closed-loop control.

800

Natural Frequency n (rad/sec)

700
600
500
400
300
200
100
0
0

0.2

0.4

0.6
0.8
1
Angle  (rad)

1.2

1.4

1.6

Fig. 21. Relationship between angle y and natural frequency on.

static and dynamic performance. By using of the nite element analysis, the mechanical structure of the ScottRussell
mechanism has been analyzed and constructed with consideration of the amplication factor and the positioning
accuracy.
A lumped parameter dynamic model of the exure-based ScottRussell mechanism has been developed to investigate
the vibration and dynamic responses. Based on the established model and Laplace transform method, the analytical solutions of the exure-based ScottRussell mechanism are obtained corresponding to three typical command
signals, i.e., step, slope, and cycloidal inputs. The inuence of the time constant RC, as well as the shape of the
command signals on the dynamic characteristics of the exure-based ScottRussell mechanism has been examined. It is
noted that the cycloidal command signal can improve the dynamic performance of the exure-based ScottRussell
mechanism.

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977

80

Settling time (ms)

60

40

20

0
0

0.020
I

0.040

II

0.060

0.080

0.060

0.080

III
Time constant (s)

8
7

Overshoot (m)

6
5
4
3
2
1
0
0

0.020
I

II

0.040
III
Time constant (s)

Fig. 22. The inuence of RC on dynamic performance.

Acknowledgements
This research is supported in part by Australian Research Council (ARC) Discovery (Grant nos. DP 0450944, DP 0668052),
ARC Linkage Infrastructure, Equipment and Facilities (Grant nos. LE 0347024, LE 0668508), and National Natural Science
Foundation of China (Grant no. 50705064).
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