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Surface Acoustic Waves and SAW Materials
Surface Acoustic Waves and SAW Materials
Absfracf-Materialparametersnecessaryforoptimumdesign
of surface-acoustic-wave (SAW) devices are reviewed. Velocity, coupling
coefficient, powerflowangle,temperature
coefficients, propagation
loss (including air loading, diffraction, and beam steering), and equivalent circuit parameters are considered. A brief introduction to the nature of surface waves is followed by suffEient theoretical information
to allow fullunderstandingandderivation
oftheproperties and paA convenient tabularsummary of important
rameters citedabove.
SAW material propertiesis included.
DELAYED
ELECTROMAGNETIC
OUTPUT
ELECTROMAGNETIC
INPUT
MATERIAL
I/
PIEZOELECTRIC
INTRODUCTION
INTERDIGITALTYPE
ACOUSTIC
SURFACEWAVE
and propagation o f
SAW PROPAGATION
ON ANISOTROPIC CRYSTALS
Introduction
The purpose of this section is to review the complete theoreticalsolution
of acoustic-wave propagationonarbitrary
anisotropicpiezoelectricmediaasoriginallydevelopedby
Jones etal. [ 3 ] , [ 4 ] . This is accomplishedbysolving
the
continuum equations of motion together with Maxwell's equations under the quasi-static assumption, the strain-mechanical
displacement relations, the piezoelectric constitutive relations,
and theappropriateboundaryconditions.
Theseare all, of
course, in tensor form [ 5 1 but, since onedimensional propagation is assumed, several simplificationswill be possible.
General Equations
The set of linear equations describingacoustic-wave propagationinanarbitraryanisotropicpiezoelectricmedium
is, in
standard tensor notation,as follows [ 5 ] :
aT..
aZui
equation of motion
pat?
v=
axi
582
ski = 2
(- ) :
strain-mechanical
linear
placementrelations
auk
ax,
dis-
(2 1
aD,_
-0
axi
E,.
=--
acp
axi
q=p
's - '
vkl
eniiEn
kl
D~ = e;kl
skl+ ,$"En
linear
piezoelectric
constitutiverelations
(4)
where T is the stress, p the mass density, u the mechanical displacement, S thestrain, D the electricdisplacement, E the
electric field, and cp the electric potential. The primed quantities, that is the elastic constants (cjjkl), the piezoelectric con,
to arostants ( e ; k ) , and the dielectric constants ( ~ k ) refer
tatedcoordinatesystemthroughtheEulertransformation
matrix [ 6 ] inwhich wave propagation will alwaysbealong
the 1 direction. Note that the summation convention (over 1,
2, 3) for repeated indices is employed.
By substitution, (1) through (4) can be reducedto
Ckkll(k,li + e i i i P , k i = pui,
e:kluk,li- Ei'kV,ki
= 0.
j = 1,
2,
(5)
selected. However, if for a given velocity four such roots cannot be found the possibility of degenerate surface waves must
be pursued. Upon obtaining the admissible values
of a from
(lo), correspondingvalues of (to withinaconstantfactor)
can be found for each a from the linear homogeneous system
cited above.
Thetotalfields(mechanicaldisplacementandpotential)
of the fields
may now be expressed as a linear combination
associated with the admissible values of a. For x3 > 0
(6)
Thedotnotation
refers to differentiationwithrespect to
time, while anindexprecededbyacommadenotesdifferentiation with respect to a space coordinate.
Equations (1) through (6) are, of course, valid only within
the crystalline substrate, i.e., for x3 > 0 as defined in Fig. 3.
This figure also defines the geometry under consideration and
illustrates the meaning of o h = 0, and wh = 00 corresponding
to ashortedsurfaceandafreesurface,
respectively. For
- h Q x3 < 0 Laplace's equation describes the electric potential
Q'cp = 0.
i=1,2,3
4
cp=
of
(7)
Surface-Wave Solutions
Solutions of (5) and ( 6 ) are assumed to be of the standard
complex traveling-wave form ip which us is the wave velocity,
a the exponential decay into the crystal, and
w the steadystate angular frequency.
exp [ j w ( t - xl/us)],
-h
< x3 < 0.
(13)
Mechanical andelectricalboundaryconditions
[ 3 ] , [4]
must also be satisfied by substituting the waveforms (1 1)-( 13)
intotheappropriateexpressionsfortheseconditions.This
yields a set of homogenous equations for the so-called partial
ui = & exp [-awx3/us] exp bw(t - x1/us)], i = 1, 2, 3 (8) field amplitudes B('). Thetranscendentalequationobtained
of thematrix of coefficients of
by settingthedeterminant
cp=& exp [-awx3/usl exp [jw(r- x1/us)1.
( 9 ) thissystemequal
to zerodeterminesthe
surface-wave veThe displacements and potentials are considered to be inde- locities for agiven set of a(').
Once (IO) and the set of B(') equations havebeensimulpendent of the x2 coordinate.
taneously
solved by computer iterative techniques [4] for the
Substituting (8) and (9) into (5) and ( 6 ) yieldsalinear
actual
set
of a(') (with associated 0;')) and the actual surface
homogeneous system of four equations in the unknowns 0 1 ,
&,f 1 3 , and p 4 . The determinant of the coefficients of the un- wave velocity, the partial field amplitudes B('), = 1 , 2 , 3 , 4
may be calculated to within a constant factor.
knowns in these equations must be zero in order that a nonTheseamplitudesare
useddirectly t o evaluate thecomtrivial solution exist, i.e.,
ponents of the mechanical displacement of (1 1) and the elecA 8 a 8 + j A l a 7 + A 6 a 6 + j A s a 5 + A4a4 + j A 3 d
tric potential of (12). The components
of the electricfield,
strain,
electric
displacement,
and
stress
as
functions
of a x 3
+ A 2 a 2 + j A l a + A o = O (10)
follow from (3), (2), and (4), respectively. Finally, the comwhere the coefficients A , , n = 0 , 1, * . , 8 , are purely real and ponents of total time averageelectromechanicalpowerflow
aparticularvalue
of us hasbeenassumed.Since
the fields are given by
must be bounded, orgo to zero as x3 + 30, only the roots with
nonnegative real parts are allowed. In addition, these roots are
Re [ Tiu? J dxg + Time Average Power = - either pure imaginary or occur in pairs with positive and negativerealparts.
In general, roots occur such that four (three
Re [cpbrl dx3 (14)
for nonpiezoelectric crystals) with positive
real parts can be
:km
583
where thetwotermsare,
respectively, thetotalcomplex
mechanical and electrical power components.
Considerable simplifications of the basic surface-wave equations, (1 l ) and (12), result in the
case of isotropic or other
degeneratematerials.Thereader
is referred to the literature
for these expressions [ 7 1 .
Applications o f the Theory
TEMPERATURE
COEFFICIENTS
OF VELOCITY AND
3.6 x
-3
2.8a10
1.2 a IO
-3
0.4 a 10
DELAY
Introduction
Another important parameter in many applications is temperature sensitivity. For example, Carr et al. [ 121 have shown
that the principal limitation on the application of surface wave
encodersanddecoders to multiple-access securecommunications systems is the degradation of the peak-tosidelobe ratio
of theautocorrelationfunctionduetotemperaturedifferences. This is illustrated in Fig. 6 . Additionally, the temperature stability of the center frequency of
surface-wave bandpass
filters is a direct function of the temperature coefficients
of
the material and orientation being used.
54
I8
WOPAGATlOh
90
126
162
3(RECTlON,B(DEGREESI
Fig. 4. Velocity, Au/u, and power flow angle curves for Y-cut LiTaO,.
ar
I
1
1 av,
1 au,
1 a7
Temperature Coefficient Computations
;E=(;)
--=a- v, aT (15)
Thetemperaturecoefficients
of surface-wave velocityand
delay [ 131 have previously been tabulated [ 141 for piezoelec- where l/v,avs/aT is the velocity temperature coefficient, 7 =
tricmaterials of interest.The mainresults of thisstudyare
[/Us is the delaytime, I is thedistancebetweentwomaterial
summarized in Fig. 7 along with Av/v information. The tern- points, and (Y is the coefficient of thermal expansion.
peraturecoefficient
of velocity is readilycalculated
using
Temperature Coefficient,
Tradeoffs
available data
on
the
temperature
coefficients
of
the
elastic,
piezoelectric,anddielectricconstantsplusthedensity
to com-Ideally,onedesireszerotemperaturecoefficient
of delay
pute velocities atvarioustemperatures,obtaintheslopeat
a and high coupling. At presentthis is not possible (asillus-
z(L)=Ts-<aT
IEEE,PROCEEDINGS OF THE
584
MAY 1976
Fig. 5. Schematic representation of the profilesof a propagating acoustic surface waveon a crystalline substrate. Angle 0 defines direction of propagation with respect to reference crystalline axis, and angle@ defines deviation o f power flow from phase velocity direction.
i----"""""'""
0.07000
LINb03
0.04000
4,+*
0.02000
1%:.
0.01000
0.00700
2yo
0.00400
<
0.02-
0.001000.000700.00040
0.00020-
OUARTZ ST
yxA
x L'Nb03
0
LITa03
0 . 0 0 0 ~ ~A-QUARTZ
0.00007
A + IRAMANS)
Fig. 6 . Correlation
peak
and
maximum
sidelobe
amplitudes
(left
ordinate)
and
correlation
peak-to-maximum-sidelobe
ratio
(right
ordinate) asa function of
PHASE DIFFERENCE,
0.ooow 0.00002
80
60
40
20ppm
tratedin
Fig. 7),thusrequiring
design tradeoffs. ST-cut
quartz [ 131has theadvantage of zerotemperaturecoefficient, low-cost, and the ready availability of large substrates.
Its coupling is, however, quite low. The 41.5' orientation [ 151
of LiNb03 appears to have excellent properties for that material. In fact, additional investigations near this
cut have resultedinfurtherimprovements
[ 161.
Telluriumdioxide
(TeOz) hastw,o orientations with zero temperature coefficients
of delay.Unfortunately,both
havelowcoupling
together
with extremely poor beam steering and diffraction properties.
LiTa03 seems to offer the best current compromise between
585
cj"= C
overlap) nonperiodic transducers. Since, however, the material
parameters necessary as input to these more powerful models
are generally the same as those used in simpler approaches,we
shall confineourattentiontotheequivalent
crossed-field
circuit model of a periodic uniformaverlap interdigital transducer operated in a matched transmission line system as illustrated in Fig. 8.
Here VG and RG represent the equivalent circuit of the generator; RL represents the loss associated with the inductor, L ;
& represents the conduction lossin thetransducerfingers;
C, the parasitic shunt capacitance; and CT is the usual static
capacitance of thetransducer fingers. Note thatboththe
acoustic radiation susceptance BJf) and the acoustic radiation
conductance Ca(f) are functions of frequency as given [ 181,
[ 2 11 by the following expressions:
F F ~ -~ ~ITCFFV,.?N
V ~
fo
WO
Theparameter
stant given by [ 23 I
is the relativeequivalentdielectriccon-
where e l l , 33, and 13 are actual dielectric constants at constant stress with the I direction being the direction of propagation of the surface wave. Finally, the ratio Dx/Lx is the finger
width to center-to<enter spacing ratio as illustrated in Fig. 9.
Coupling Constant k 2
and
( f - fo)
x=nN-
fo
wherebidirectionalityhasbeenaccountedforwithanadditional factor of
IT can be determined in terms of circuit
parameters and VG using standard network analysis.
a.
PROPAGATIONLoss
One of the major sources of overall device insertion loss at
microwave frequencies is propagation loss or attenuation. Not
only is the magnitude of this phenomena important for predicting absolute insertion loss and dynamic range, but its frequency dependence is equally important [ 251.
Total propagation loss is a superposition of three different
mechanisms [26]. 1) Interaction with thermally excited elastic waves. 2)Scatteringbycrystallinedefectsandsurface
scratches. 3) Energy lost to air adjacent to the surface.The
first mechanism is an inherent crystalline property, the magnitude of which can be predicted using viscosity theories
[27].
The second is, of course, highly undesirable and, fortunately,
can be made negligible by proper crystal growth and polishing
techniques [26]. Thefinalmechanism is causedby the surface wave being phase matched to a longitudinal bulk wave in
the air which results in a leaky-wave phenomena [ 281. This
5 86
f 2
g+
20
07
0.4
DIFFRACTIONAND BEAM
W
V
0.2
In
STEERING
(26)
200
400 700
2000
4000
in
FREQUENCY (MHz)
0
V
A
4
where y = &$/a6 and Bo is the angular orientation of the puremode axis. By comparingthesespproximations
to an exact
solutionforelectromagneticdiffractioninuniaxially
anisotropicmedia,Cohenshowed
that the diffraction integral
reduces to Fresnel's integral with the following change
0.4
z
0
2a
0.2-
z
W
+
+
4
w
>
4
0.1
LiNbO,
B i,,Gc020
:
2
D:
3
u)
500
lo00
1500
2000
F R E Q U E N C Y (MH+)
so-called air loading can be eliminated by vacuum encapsulation or minimized by the use of a light gas.
Propagationlossescanbedeterminedbydirectlyprobing
[ 261. In this method, the
the acousticenergywithalaser
surface wave deflectsasmallfraction
of theincidentlight,
which is detected with a photomultiplier tube and measured
with a lock-in amplifier. The deflected light is directly proportional to the acoustic power of the surface wave.
Air loadingcanbedeterminedbyplacingdelay
lines ina
vacuum system and reducing the pressure below 1 torr while
monitoring the change in insertion loss. Vacuum attenuation
is, of course,. the difference between the total propagation loss
in air and the air loading component.
Frequency dependence of vacuum attenuation and air loading for three of the most popular SAW substrates [261, [291,
z^'=z^ll + y l .
(28)
sin K L / 2
.~xPI{(K~X+KJ(K~)IZI))~K~.
(29)
Here K3 and K l are the projections of the wave-vector K along
the Z and X axes, respectively, or in general, along directions
581
THEORY
e = o . 8.0
-40
8=064b = O
EXPERIMENT
e=o60. 8 = 5 3
2~66
..
4~66
__
2:s
_.
2:66
?:I242
_.
2.1242
..
?:I242
..
5.1242
+40
-40
*40
TRANSVERSE
DIMENSION
-40
140
-40
*40
(WAVELENGTHS)
(30)
e,)
588
DIFFRACTION LOSS rn S U E D
11+y1
.01
a4
.I
.4
\i
H
Y
(t,izyl+rl
Fig. 13. Univecsa! diffraction loss curve for all parabolic materials as a
11 + yl . To convert t o theactual distance in wavefunction of (Z/L2)
lengths on horizontal scale simply insert i,width of your transducer
in wavelengths, and y (from Table I) appropriate t o your material.
141
lor
6
2
-40 -20
20
40
-40 -20
20
40
-40 -20
20
40
Fig. 14. Illustration of the two orders of magnitude diffraction suppression achieved using the 40.04 Bi,, GeO,, minimal diffraction cut. An
acoustic aperture of L = 40.56 wavelengths was used.
5 89
BEAU
STEERING
LL
0.4
0 BEAUSTEERING
;0.2
v)
rrJ
0
-I
0.I
-1.5
-1.0
-0.5
t 0.5
-1
0
-1.5
'
d+/d8
Fig. 15. Loss due to diffraction and beam steeringp a function of slope
of powerflowangleforparabolicmaterials.
L representswidth of
transducerinwavelengths,
2 thedistancebetween
transducersin
wavelengths, and BS Q the beam steering angle (defined
as misalignment of centerlinebetweentransducersfromdesiredpure-mode
axis).
exactlywiththe
beamsteeringlosscurve.Thosematerials
having 7 = 0 correspond to locally isotropic casesandbeam
steeringgoes to 0. Here,diffractionaccountsforthetotal
loss. Diffraction loss alone is symmetric about 7 = - 1.O and
beam steering loss about 7 = 0, while the combined curve is
clearly nonsymmetric. Universal beam steering plus diffraction
loss curves are not possible.
The results illustrated in Fig. 15 are of major importance in
choosing a material for a particular application. For example,
where diffraction is potentially a very serious problem, as in
highlyapodized fzlters, amaterialhaving
7 - 1.0 wouldbe
most desirable.
Fig. 16 illustrates [ 351 combined beam steering andAdiffraction loss versus the time-delay-frequencyparameter Z. It is
of interest to point out that the loss is very h g h for the .?=
75 000 curvenear 7 = - 1.0. Forthis largedistancebeam
steering is very important, especially for narrow undiffracted
beams, and some beam spreading is to be desired. (The same
is trueAifinaccurate X-ray orientationmust be tolerated.)
Since Z is proportional to frequency (for fixed time delay),
Fig. 16 also illustrates why beam steering and diffraction are
consideredUHFandmicrowavefrequencydesignproblems.
Significantlossesandmaterialtradeoffconsiderationsexist
at the higherfrequenciesand, of course, also for verylong
time delays.
SA W Filter Synthesis in the Presence o f Diffraction
Since an interdigital transducer can be made to be an excellent transversal filter,
Fourier-transform-pair
and
digital
filter [361 design procedures can beused to synthesize SAW
filterfrequencyresponses;atleastthis
is trueintheory.
Unfortunately,finger overlap apodizationresults in diffraction variations which destroy the Fourier transform relation
-0 5
-I 0
0
i
-.
+os
a.
T(2j = c dE
where C depends on other physicalandgeometricalAparameters of the delay line [ 191 but is independent of L. This
is an important result as it means that the C associated with
a given individualfingerpairin
a2 apodized.transducer is
independent of the finger overlap LN and, therefore, is the
same for all gaps (for periodic transducers).
Equation (35) can thus be rewritten as
i12
S= C
Ji12
A (x) dx
(37)
590
INPUT
OUTPUT
?.
7=n F
Fig. 17. Illustration of apodized(right)andunapodized(left)interdigital transducers with definition of terms used in diffraction correction derivations.
iN/2
A ( 0 )dx
-iN/2
= -E N ,
2 0
A ( 0 )dx
(38)
-io/2
Note that each finger pair is treated separately and superposition used to generate the total result.
In order to synthesize the desired frequency response in the
presence of diffraction it is necessary to achieve this same
ratio, i.e.,
In these equations, Lb is the unknown aperture in the presence of diffraction of theNth finger pair. It is locateda
distance of ?b fromthelaunchingaperture
asimpliedin
Fig. 17.Forthepresent
analysis, we havearbitrarilyset
the widestoverlap
(Eo) inthe presence of diffraction to
be equal to tHe widest overlap if no diffraction were present
and,inaddition,
have taken it to belocatedadistance
of
20 from the launching transducer.
Since (40) is complex it actually represents
two equations
f& and 2&, thecorrectedapertureand
intwounknowns
distance, respectively, of the Nth fiiger pair in the presence
of diffraction. In theory then, the problem issolved. However,
in pra2ice an approximation is moreconvenient [ 391.Set
2h = ZN and solve for LA Nt using a computer iterative solution
h
2, transducers}.
(41)
Onceamplitudecorrection is achievedasdescribedabove,
phase correction is oitained where necessary [ 391 by analyzing
the new filter with Lh placed at 2~ to determine the relative
phase, {(N), at each finger pair. Then by setting
APPLICATIONS
OF MATERIAL DESIGNDATA
Optimum Transducer Design
Assume thatanoptimum,
i.e., minimuminsertionloss,
periodicunapodized
SAW delay line havingonlyasingle
tuning inductor (see Fig. 8) is t o be designed and fabricated.
Afterconsideration of velocity,couplingconstant,temperature coefficient, and loss factors; ST quartz is chosen as the
substrate.
After this choice the number
of interdigital periods N and
the optimum acoustic aperture must be determined.
In practical
design situations dealingwithlosses
and real elements,and
particularlywherebandwidth
is alsoa
consideration,the
choices of these parameters are interdependent. Thus optimum
apertures should be determined for severalvalues of N and
theabsoluteoptimumfinallychosen.Areasonablestarting
value for N is [ 181
n
N>= (43)
4k2
Once N is fixed, the best value of acoustic aperture depends
on transducer and tuning element
losses, parasiticelements,
and beam steering and diffractionlosses.
Inordertominimize
beamsteeringanddiffractionlosses
it is necessary to use the widestpossibleacoustic
aperture.
Unfortunately,electricalmatchingconsiderationslimitthe
extent to which increased finger overlap can be used to reduce
overall device insertion loss. To demonstrate this effect and to
develop optimum delay line design procedures, let us investigatetransducerinsertion
loss as afunction of thevarious
design parameters, particularly acoustic aperture.
Neglecting propagationeffects,insertion lossversus L can
be directly determined using (2 1). Curve 3 in Fig. 18 illustrates
of
this basic informationfor ST quartzandaspecificset
h
591
40
1 I l : I
= 6600
B S 4 : o I.
cE= 0 I pF
INCLUDING
ATTENUATION
LOSS,BEAM
STEERING, AND
vr
VI
INCLUDING
ATTENUATION
00
eo
40
l l ! l
70
100
200
300
(WAVELENGTHS)
Fig. 1 8 . Delay line insertion loss versus acoustic aperture curves used to choose optimum (minimum insertion loss) acoustic aperture. Curve 1 includes real transducer effects (Q = 30, p / t = 0.345 f l p , and CE = 0.1 pF), attenuation loss, beam steering, and diffraction. Curve 2 includes real
transducer effects and attenuation loss. Curve 3 includes only transducer effects. Curve 4 is the ideal case corresponding t o Q = -, p/r = 0 , and
CE = 0 with zero propagation, beam steering, and diffraction losses.
a.
592
J. 6.00
3p0.00
3F.00
3,lO.OO
3!5.00
3FO.JO
~ 2 ~ R ~ ~ U E , N ! C o l b 0 n H 2 3 3 5 ~ 3!0.W
00
3?6.00
3S0.00
3SS.00
360.00
91
5.00
Fig. 2 0 . Insertion loss versus frequency characteristics of a SAW filter illustrating how mass loading can cause filter distortion and the ability
double electrodes tosuppress these effects.
of
593
SAW
AND
TABLE 1
INTERDIGITAL TRANSDUCER
DESIGN
D.4~4
z .Y
0. 0504
0.045
4. 6438
0. OS62
0.048
4 . 6 4 3 8 X IO-"
0.0578
0.057
6. 1857
0. 0140
0.015
0. 0169
0.017
0.0054
.....
0.0121
7,0003
x 10'Io
x 10'Iu
9.3246
x IO""
4.04522
x IO-"
6. 0979
x IO-"
4.04522
6. 0979 X
0.00233
.. ...
.....
0.0007S
IO-'"
4 . 4 305.2030x9 3
0 0. 04. 0. 40637854 2 3
Y.S
7.0003 X
10-l'
x 10-1"
x lo-'
11
4 7 . !I
6. 6859 x IO-''
41. $3
6.6859
x IO-'
3.170.
11. tl117ir
0. 0154
.. . , .
4.4352 x
3159.
0.0009
0.0022
0.0023
5.00664 x IO-''
7.54722
3158.
0.L)OUTrX
0.0014
0.001ti
5.03385 x 10."
7.58824 x IO-'
IO-''
43.
6 . 6 8 5 9 x IO-''
.....
4 . 7 l(i4 x
4.4352
14. (1!119
51
41.9
6.6859 x IO-'"
10-1
Ik
18.5
22.0
)uutz
Note: All quantities are defined in the text. CFF is capacitance per unit length for an IDT period and is twice
that for an IDT finger pair.
*Indicates experimental data.
representstheoptimum
design information. Beam steering
anddiffraction loss have beenincluded.
Overall minimum
insertion loss is obtained using an acoustic aperture ofL = 100
wavelengths. The optimum apertures were determined graphically. as this has been found
t o be the most convenient method
inactualpractice.
A curve fortheideal case corresponding
to the original Stanford design procedure [ 181 is also presented
in Fig. 18 for comparison. Here RL = 0, C , = 0, BS Q = 0,
andattenuationanddiffraction
losses areneglected.The
594
ACKNOWLEDGMENT
or the modelused to predict performance. Material parameters
must
always
be
evaluated
and
tradeoffs
considered.
For
In compiling this survey the author has drawn heavily from
example, insertion loss can be reduced up to a point by using the work of his colleagues atthe Air Force Cambridge Research
material
a
with
increased
coupling
coefficient.
However,
Laboratories. Particular credit must
go to T. L. Szabo, P. H.
distortioncan also result;asshown in Fig. 19 for a cosine- Carr, and A. J. Budreau without whom this paper could never
squared-on-a-pedestal (inthetimedomain)apodized
SAW have been written.
filter. If a particular material must be used for external reasons,
design techniques such as thinning [43] can be used to avoid
REFERENCES
distortion at the expense of spurious frequency responses. It
Lord Rayleigh, On waves propagated along the plane surface of
should be noted that complicating second-order effects have
an elasticsolid, Proc. LondonMath.SOC., vol 17,pp.4-11,
1885.
been suppressed in the examples of Fig. 19 by the use of both
R. M. White and F. W. Voltmer, Direct piezoelectric couplingt o
double electrodes [ 441 , [4S] and dummy electrodes [ 461 .
7 , pp.314-316,
surfaceelastic waves, Appl.Phys.Lett.,vol.
1965.
The reader is referred to the cited literature for information
J.J.Campbelland
W. R.Jones,Amethodforestimating
of design techon these techniques. In fact, a large number
optimalcrystalcutsandpropagationdirectionsforexcitation
of problems.
niqueshaveevolved
to coverawidevariety
ofpiezoelectricsurfacewaves,
IEEE Trans. SonicsUltrason.,
VOI. SU-15, PP. 209-218, Oct. 1968.
Many of thesearediscussedinotherpapersinthis
special
W. R. Jones, J.J. Campbell,and S . L. Veilleux,Theoretical
issue.
analysis of acoustic surface waves, Hughes Aircraft Co., Fullerton,
The Effect of
Mass Loading on Bandpass Filter Design
where ut istheperturbedvelocityincludingbothelectrical
and mass loading effects.
Following thenotation of Penunuriand Lakin1471
using a strictly MKS system) u can be approximated as
U=CC+B(WT)+A(OT)~
(44)
131
(but
141
(45)
SUMMARY
AND CONCLUSIONS
I121
1191
In this paper we have attempted to provide a brief introduction to the natureof surface acoustic waves, and have reviewed
some of the various material design parameters which must be
consideredinorder to obtain optimum
SAW device performance.
A convenient summary of some of the basic data for many of
thepopularsurface
wave orientations isgiven inTable I . 1231
Definitions of each quantity canbe found in the text. It is
1 a79
-,
,.
hopedthissummary
of available information will providea
[ 2 4 ] F. S. Hickernell, Zinc-oxide thin-film surface-wave transducers,
unified source of basic design data as well as alist of references
this issue, pp. 631-635.
[ 2 5 ] L.A. Coldren and H. J. Shaw, Surface-wave long delay lines,
to be consulted whenever additional information is needed.
595
IEEE Trans. Sonics Ultrason., vol. SU-2 1 , pp. 12-22, Jan. 1974.
T. L. Szabo and A. J. Slobodnik, Jr., Diffraction compensation
in periodic apodized acoustic surface wave filters,
ZEEE Trans.
Sonics Ultrason., vol. SU-2 1,pp. 114-1 19, Apr. 1974.
R. A. Waldron, Power transfer factors for nonuniformly irradiatedinterdigitalpiezoelectrictransducers,
ZEEE Trans. Sonics
Ultrason., vol. SU-19, pp. 448-453, Oct. 1972.
T. L. Szabo, private communication, 1975.
R. S. Wagers,Spuriousacousticresponse
in SAW devices,
this issue, pp. 699-702.
R. D. Weglein and E.D.Wolf, The microwave realization of a
simplesurfacewavefilterfunction,in
Znt. Microwave Symp.
Dig., pp. 120-122, June 1973.
A. J.Slobodnik, Jr., UHFandmicrowavefrequencyacoustic
surface
wave
delay
lines:
Design,
AFCRL,
Hanscom
AFB,
MA 01731, TR-73-0538.
A. J. Budreau, P. H. Carr, and K. R. Laker, Frequency synthesis
using acoustic surface-wave Wters, MicrowaveJ . , vol. 17, pp. 6569, Mar. 1974.
T. W. Bristol, W. R. Jones, P. B. Snow, and W. R. Smith, Applicationsofdoubleelectrodesinacousticsurfacewavedevice
design, in U l m o n i c s S y m p . P r o c . ,pp. 343-345, 1972.
P. H. Carr, Reduction of reflections in surface-wave delay lines
with quarter-wave taps, Proc. ZEEE ( L e n . ) , vol. 6 0 , pp. 11031104, Sept. 1972.
R. H. Tancrelland R. C. Williamson,Wavefrontdistortionof
acousticsurface waves fromapodizedinterdigitaltransducers,
Appl. Phys. Len.,vol. 19, pp. 456-459, 1971.
D. Penunuri and K. M. Lakin, Surface acoustic wave velocities
of isotropic metal films on selected cuts of Bi,,GeO,,, Quartz,
0, , and LiNbO, , IEEE Trans. Sonics Ultrason., vol. SU-2 1 ,
pp. 293-295, Oct. 1974.
Al,
Abstract-The existence of a new suppression cut to the most obstructive spurious component consistingof the slower shev wave propagatating in a crystal has been experimentally found out for acousticsurface-wavepropagation on LiNbO3. Theplate is a 127.86 rotated
Ycut X-propagating plate and has a large electromechanical coupling
coefficient.
INTRODUCTION
AND
TOSHIYASU MEGURO
EXPERIMENT
IEZOELECTRIC
substrates
for, acoustic-surface-wave
filtersanddelay
lines with131rotated
Y c u t X-prop[ 11, [ 2 ] are
agatingcrystallinelithiumniobateplates
widelyused.
This is because of theirsuperiorityinelectromechanical coupling to Rayleigh waves and low beam steering
comparedwithothercuts.However,
an unknownspurious
signal generated on the substrate frequently prevents successful experiments. For filters, this leads to phenomena inwhich
the attenuation in the stopband cannot be guaranteed to be
sufficiently large.