Professional Documents
Culture Documents
Physical Principles of Electron Microscopy An Introduction To TEM, SEM, and AEM
Physical Principles of Electron Microscopy An Introduction To TEM, SEM, and AEM
Egerton
Ray F. Egerton
D
e
p
a
r
t
m
e
n
t
o
f
P
h
y
s
i
c
s
,
U
n
i
v
e
r
s
i
t
y
o
f
A
l
b
e
r
t
a
4
1
2
A
v
a
d
h
B
h
a
t
i
a
P
h
y
s
i
c
s
L
a
b
o
r
a
t
o
r
y
E
d
m
o
n
t
o
n
.
A
l
b
e
r
t
a
.
C
a
n
a
d
a
T
6
G
2
R
3
ISBN-10: 0-387-25800-0
paper.
Printed on acid-free
ISBN-13:
978-0387-25800-0
Science+Business Media, Inc.
2005
Springer
9 8 7 6 5 4 3 2 1
Contents
springeronline.com
Preface
xi
1.
An Introduction to Microscopy
1.1
1.2
1.3
1.4
11
1.5
17
1.6
19
2.
1.7
21
1.8
Scanning-Probe Microscopes
21
Electron Optics
27
2.1
27
2.2
30
2.3
34
2.4
41
2.5
43
2.6
44
3.
57
3.1
58
3.2
Electron Acceleration
67Condenser-Lens System
70
3.3
75
3.4
78
3.5
Vacuum System
88
4.
93
4.1
94
4.2
Electron-Electron Scattering
96
4.3
97
4.4
101
4.5
106
4.6
Dark-Field Images
108
4.7
Electron-Diffraction Patterns
108
4.8
112
4.9
5.
Electron Microscope
115
119
The Scanning
125
5.1
125
5.2
129
5.3
Secondary-Electron Images
131
5.4
Backscattcrcd-Electron Images
137
5.5
139
5.6
143
5.7
147
5.8
149
5.9
Electron-Beam Lithography
151
6.
Electron Microscopy
Analytical
155
6.1
155
6.2
158
6.3
161
6.4
165
6.5
167
6.6
167
6.7
169
6.8
171