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Nanometer Accuracy Positioning System: Akio Nakajima
Nanometer Accuracy Positioning System: Akio Nakajima
722004
[ Technical Article ]
Akio NAKAJIMA*
This paper describes two types of very high precision positioning systems. One is the linear positioning stage that is
capable of one nanometer accuracy. This stage consists of an Air Slide, Linear Motor, and Laserscale. The other is
the rotational positioning Air Spindle that has a resolution of 151-million increments per revolution. We recently
completed development of an exclusive controller system, the Nanoscale Controller.
1. Introduction
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12
10
Aerostatic table
10
190
430
130
4
2.7
130
2.7
Linear scale
2
1
'94
'95
'96
'97
'98
'99
0.86
'00
0.27
0.07
'01
'02
80
Resolution nm
8.6
8
Guide
10
Year
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Speed mm/s
Fluctuation nm
-1
-2
-3
0.08
0.1
0.2
0.05
0.3
0.06
0.35
0.02
Elapsed time s
0.04
0.4
0.02
1.05
0.6
0.2
0.8
0.1
Elapsed time s
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0.08
0.4
Spindle
Thrust bearing
Journal bearing
Rotating shaft
Thrust bearing
AC servo motor
Rotary encoder
Head
Laser beam
Scale
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Error s
60
50
40
30
20
10
-0
-10
-20
-30
-40
-50
-60
60
120
180
240
300
6. Control method
The control method for the servo unit is the popular
PID control for both the spindle and the slide. The
controller uses the same specifications of the
previously mentioned nano-scale controller for super
precision positioning slides that is capable of stopping
at 1nm. Like the trends in the recent controllers, the
scale directly receives the scale signals without
multiplying equipment, hence achieving high-speed
operation even though it accomplished high accuracy.
With switching elements becoming more popular in
recent years, PWM (Pulse Width Modulation)
amplifiers are often used to power motors. However,
these amplifiers produce much noise and torque
fluctuation among other issues. They also use
constant voltage, and therefore they are not suitable
for powering fine movement. The newly developed
device uses a sinusoidal wave linear amplifier to avoid
harming the hard disk head that handles very small
signals, and it has proven to show good results. Fig.
10 illustrates the main components of the amplifier.
In the positioning controller, the direction of micro
current reverses at high speeds when the device is
stationary. For this reason, the amplifier demands
close attention to the crossover distortion, which, in
continuous rotation, would not become an issue. Fig.
11 shows an example of crossover. In general,
occurrence of crossover distortion creates dead
zones, affecting the servo unit and impairing accuracy.
For this reason, proper bias voltage is applied to the
FET drive or the final stage to prevent crossover
distortion from occurring. Photo 3 is the developed
special controller and the driver.
360
+V
Angle
Current
detection
Command
V
current
0.3
-V
U-Channel amplifier
Deviation s
0.2
V-Channel amplifier
0.1
W-Channel amplifier
0.0
-0.1
-0.2
-0.3
0
0.02
0.04
0.06
0.08
0.1
Elapsed time s
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Motor
10
7. Conclusion
Output A
4
2
0
Dead zone
-2
-4
-6
-8
-10
-1
-0.8
-0.6 -0.4
-0.2
0.2
0.4
0.6
0.8
Input V
Photo 3
Reference
1) Motohiro Takaya, Kayoko Taniguchi and Tadahiko
Shiman, Nanometetr Controlled Stage, digitalscale
international workshop, Tsukuba, (2001-11)
2) Hiroshi Saitou, high precision , high resolution Linear
encoder, Fuji, Technosystem, highly accuracy
presision positioning technology, (2000) 419
3) Akiko Hirai, Lijiang ZENG and Hirokazu Matumoto,
Heterogyne Fourier Transform Spectroscopy using
Moving Diffraction Grating, Jpn. J. Appl. Phys. Vol.40
(2001) 6138 Part 1, No.10 Oct. 2001
4) Akio Nakajima, Nanometer accuracy positioning
technology to practical, optical disk's mejor field at
application, engineering society, high accuracy
precision positioning special committees, No.2002-4
(4) 27 2002.11.15. NTN corp.
5) Yoshimi Fujikawa, The Tribology 3 (2003), 44
6) Yukihiro Uematu, Masanori Fukushi, and Kayoko
TaniguchiDevelopment of the Pushpin free STW
IEEE TRANSACTIONS ON MAGNETICS 37, NO.2,
MARCH 200
7) Air Spindle Unit NTN Catalog No.5403-III/J
Photos of author
Akio NAKAJIMA
Precision Equipment Division
Product Engineering Dept.
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