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A Finite Element Model For The Bending and Vibration of Nanoscale Plates With Surface Effect
A Finite Element Model For The Bending and Vibration of Nanoscale Plates With Surface Effect
A Finite Element Model For The Bending and Vibration of Nanoscale Plates With Surface Effect
art ic l e i nf o
a b s t r a c t
Article history:
Received 19 December 2012
Received in revised form
10 April 2013
Accepted 11 May 2013
Available online 21 June 2013
A continuum nite element model for the nanoscale plates considering the surface effect of the material
is developed. Governing equations for Kirchoff and Mindlin nanoplates are derived by using the Galerkin
nite element technique. The model is veried by comparing the results with available analytical
solutions. The results indicate that, depending on the boundary conditions, the deections and
frequencies of the plate have a dramatic dependence on the residual surface stress and surface elasticity
of the plates. The present model is an efcient tool for the analysis of the static and dynamic mechanical
behaviors of nanoscale plates with complex geometry, boundary and loading conditions and material
properties.
& 2013 Elsevier B.V. All rights reserved.
Keywords:
Nanoscale plate
Finite element method
Surface residual stress
Surface elasticity
1. Introduction
Nanoscale plates are key components of actuators and sensors
for nano-electromechanical system (NEMS) [1]. Naturally, it is
importance to understand the static and dynamic mechanical
behaviors of these advanced materials and structures for the
design and manufacture of NEMS. Due to their high surface-tovolume ratio, structures at nanoscale show signicant sizedependent behavior [24]. Therefore, the surface effect must be
considered for the analysis of materials and structures at nanoscale. Some researchers applied atomistic simulation to study the
size-dependent properties of nanostructures [57]. However, this
method is difcult to apply to the analysis of NEMS with complex
geometries, due to the limit of the available computational power.
It is essential to nd an efcient tool to analyze the mechanics
behavior of nanoscale structures. Gurtin and Murdoch [8,9]
proposed a modied continuum theory which incorporates the
surface/interface effects into the traditional continuum mechanics.
This theory has been widely used to study the mechanics response
of nanoscale structures. For examples, Lim and He [10] proposed a
continuum model to analyze the bending behaviors of thin elastic
nanoplate of nanoscale thickness. Lu et al. [11] proposed a sizedependent thin plate model by complementing Lim and He's
model. Liu and Rajapakse [12] studied the static and dynamic
response of nanoscale beams based on the GurtinMurdoch
theory. Assadi et al. [13] studied the size-dependent dynamic
0168-874X/$ - see front matter & 2013 Elsevier B.V. All rights reserved.
http://dx.doi.org/10.1016/j.nel.2013.05.007
K.F. Wang, B.L. Wang / Finite Elements in Analysis and Design 74 (2013) 2229
23
M ny ny w;y dS 0
n
6
n
2a
M n; N 3 J u
2b
R h=2
R h=2
n
M h=2
,
and
N
s
dz
and
M
s
z
dz.
ij
ij
h=2 ij
h=2 ij
According to Refs. [4,8], linear constitutive equations for the
surface are
0 C s s ;
where0 ,
C s
3 0 u3;
s
and
are the receptivity, the residual surface
stresses, the surface elastic constants and surface strains. Both 0
and C s can be obtained from atomistic calculations.
h
A T DdA A T Cs dA2A xx wxx yy wyy w dA
Z 2
Z
A qw dA V nn M nT;T w ds M nn wn ds 0
s
where
h
w;xx
w;yy
2w;xy
iT
11
where
kb A BT DBdA
12a
h2
A BT Cs BdA
ks
2
12b
24
K.F. Wang, B.L. Wang / Finite Elements in Analysis and Design 74 (2013) 2229
12c
13
MuKu
q
14
K Mu 0
15
16a
M nxy;x M ny;y V y 0
16b
16c
17
A G T kGhG dA A b T Db dA
h
A b T Cs b dA
2
2A xx w;xx yy w;yy w dA
Z
Z
Z
A qw dA V n w dS M nn n dS M nT T dS
S
where
"
G
n
M n;xx
Vx
G13
G23
M n;yy
y;y
20
21
where
kG A BG T kGhBG dA
22a
kb A Bb T DBb dA
22b
h2
A Bb T Cs Bb dA
ks
2
22c
22d
oT
Db
2
h s
C b
2
V y T kGhG
b x;x
me A INw T Nw dA JA Nx T Nx Ny T Ny dA
M n;xy
x;y y;x T
K.F. Wang, B.L. Wang / Finite Elements in Analysis and Design 74 (2013) 2229
25
24
s 2
25
26
Fig. 2. Deection of the Kirchhoff nanoplate with simply supported boundary
condition (h 10 nm).
3;5;::: 3;5;:::
2
2 2
2
2
4
4
m 1 m 1 mn Def f m=a n=b 2 0 m=a n=b
27
Eq. (27) is the solution of a plate with surface effect under a
load q0 uniformly distributed.
According to the Mindlin plate theory, for a plate of isotopic
material property, the equilibrium equation can be expressed
as [11]
Def f 2
qx; y 20 2 w
28
Def f 4 w 1
kGh
where k is the shear factor. Following the above process for the
Kirchhoff plate, we can obtain the deection of a Mindlin plate
with the surface effect under a uniformly distributed load q0 as
16q0 1 m=a2 n=b2 sin x=a sin y=b
3;5;::: 3;5;:::
m 1 m 1 mn
4D
ef f 1
29
3.2. Finite element solution for static bending
We chose a square plate whose dimension is a b200 nm.
The deections of the plate based on the Kirchhoff and Mindlin
plate theories are computed by using 14 by 14 elements. For
comparison, the classical solutions which neglect the surface
stress are also presented. Fig. 2 plots the deection of the simply
supported Kirchhoff plate under a uniformly distributed load
q0 1000 kN=m2 . It can be seen that the nite element solution
agrees well with the analytical solution. The relative error is
within 2%. Such accuracy is adequate for most practical applications. It is also found that the surface effect reduces the deection
of the plate, this means that the surface effect makes the plate
stiffer.
Fig. 3 shows the deection of the simply supported Mindlin
plate. Once again, the FEM solution agrees well with the analytical
solution. The relative error is also less than 2%.
In order to show the effect of surface elasticity and residual
surface stress on the deection of plate with different boundary
conditions, the positive surface elasticity constants 0 2:7779 N=m
and 0 4:4939 N=m and negative residual surface stress
0 0:6056 N=m are assumed for the calculation. Figs. 4, 5 and 6
show the deections of plate (at yb/2) with cantilever, simply
supported, and clamped boundary conditions, respectively. It is found
that, for a positive residual surface stress, the cantilever nanoplate
exhibits a softer elastic behavior but the simply supported and
26
K.F. Wang, B.L. Wang / Finite Elements in Analysis and Design 74 (2013) 2229
Def f 4 w20 2 w I w
30
k Ghx;x y;y 2 w 20 2 w I w
32a
K.F. Wang, B.L. Wang / Finite Elements in Analysis and Design 74 (2013) 2229
1
1
D x;xx 1x;yy 1 y;xy
2
2
2
h
2u0 0 x;xx 0 u0 y;xy u0 x;yy
2
2
k Ghx wx J x
Table 2
Variation of fundamental natural frequencies of Kirchhoff nanoplate with aspect
ratio of the plate for simply supported boundary condition (h 5 nm).
32b
Aspect
ratio
FEM
(GHz)
a/b 1
8.5889
a/b 1.25 10.132
a/b 1.5 11.956
a/b 2
16.437
1
1
D y;yy 1y;xx 1 x;xy
2
2
h
2u0 0 y;yy 0 u0 x;xy u0 y;xx
2
2
k Ghy wy J y
27
Analytical results
(GHz)
8.6501
10.215
12.061
16.591
5.1133
6.5514
8.3091
12.783
0.7
0.81
0.87
0.93
32c
Table 3
Fundamental natural frequencies of Kirchhoff nanoplate with clamped boundary
condition.
Thickness
(nm)
No surface effect
(GHz)
Different
(%)
h5
h 10
h 15
h 20
11.701
18.772
27.535
36.599
9.2290
18.458
27.687
36.916
26.79
1.7
0.55
0.86
FEM
(GHz)
Analytical results
(GHz)
h5
h 10
h 15
h 20
8.5889
11.059
15.482
20.324
8.6501
11.180
15.638
20.510
5.1133
10.227
15.340
20.453
0.7
1.0
1.0
0.9
Table 4
Fundamental natural frequencies of cantilever Kirchhoff nanoplates.
Thickness
(nm)
No surface effect
(GHz)
Different
(%)
h5
h 10
h 15
h 20
0.4552
1.5430
2.5453
3.4841
0.8965
1.7929
2.6894
3.5858
49.23
13.94
5.36
2.84
Table 5
Fundamental natural frequencies of Kirchhoff nanoplates with only consideration
of the residual surface stress (h 10 nm).
0 0:6056 N=m
0 0 N=m
0 0:6056 N=m
SS
CC
CF
11.347
10.227
8.8419
19.269
18.458
17.606
1.5924
1.7929
2.0561
2
s2
nm nm
#
2
Es h 2
2
n m 20 2n 2m
2
2
34
28
K.F. Wang, B.L. Wang / Finite Elements in Analysis and Design 74 (2013) 2229
Table 6
Fundamental natural frequencies of Mindlin nanoplate with simply supported
boundary condition.
Thickness
(nm)
FEM
(GHz)
Analytical results
(GHz)
h 25
h 30
h 35
h 40
22.176
25.296
28.197
30.358
22.362
25.505
28.232
30.577
22.312
25.494
28.237
30.588
0.83
0.82
0.12
0.72
Acknowledgments
This research was supported by National Science Foundation of
China (project ID 11172081) and Shenzhen Research Innovation
Foundation, China (project ID JCYJ20120613150312764).
Appendix A
Fig. 8. A T-shape Si nanoresonator.
Table 6 shows the fundamental frequencies of simply supported Mindlin nanoplates of various values of thickness.
Once again, the relative errors between the FEM results and the
analysis results are less than 1%. The fundamental frequencies
show a negligible dependency on the surface effect if the thickness
of the nanoplate is sufciently large (e.g., 425 nm). Note that the
inuence of surface effect on the frequencies of the Mindlin plates
is quite similar to that for the Kirchhoff plates. Therefore,
the results for the Mindlin plates are not shown here.
3
0
D11 D12
6D
0 7
D 4 21 D22
5;
0
0
D66
N N1 N2 N3 N4
s
C s 11
6 s
4 C 21
0
C s 12
C
22
0 7
5
C s 66
2
N 1 18 s1t1s2 s t 2 t2; 18 bs1t1 t 1;
N 2 18 s 1t1s2 s t 2 t2;
1
8 bs
N 3 18 s 1t 1s2 s t 2 t2;
1t12 t 1;
1
8 bs
2
1
8 as1 s
1
8 as1s
1t1
12 t1
1t1t 1 ; 18 as1s 12 t 1
2
2
N 4 18 s1t 1s2 s t 2 t2; 18 bs1t1t 1 ; 18 as1 s 1t 1
4. Conclusion
A nite element model including the inuence of surface
elastic and residual surface stress has been derived based on the
weighted residual method. With the model developed, it is
possible to investigate the size dependence of the static and
dynamic behaviors of nanoplates. Numerical results show that
Appendix B
8
N 14 s1t1s t 1
>
>
> 1
>
>
1 2
>
>
> N 2 2 s 1t1
>
>
>
>
N 3 14 t1s2 ts t 1
>
>
>
>
< N 4 1 s 1t 2 1
2
>
N 5 14 s 1t 1s t1
>
>
>
>
>
> N 6 12 s2 1t 1
>
>
>
>
> N 7 14 s1t 1st 1
>
>
>
>
: N 8 1 s1t 2 1
2
2
BG
N1
x
4 N1
y
N1
N 1
N 2
x
N 2
y
N 2
3
5
K.F. Wang, B.L. Wang / Finite Elements in Analysis and Design 74 (2013) 2229
1
N
x
6
6
Bb 6
4
N1
y
N 2
y
N1
x
1
N
y
N 2
x
7
7
7
5
fNw g N 1 0 0 N 2 :::
N 0 0 N 1 0 :::
n xo
Ny 0 N 1 0 0 :::
g 0 IJ 2
h
i
g 1 22 33 IJ 11 J 2
g 2 I 223 22 33 J 212 213 11 22 11 33
g 3 11 22 33 223 12 12 33 13 23 13 12 23 13 22
g 4 g 21 3g 0 g 2
g 5 g 1 g 2 9g 0 g 3
g 6 g 22 3g 1 g 3
g7 g1 g4
g8 g1 g4
q
3g 0 g 5 g 25 4g 4 g 6
q2
3g 0 g 5 g 25 4g 4 g 6
2
11 k Gh20 ;
2
12 12 k Gh;
2
13 31 k Gh;
(
)
2
1 2
h 2
2
2u0 0 u0 2 k Gh ;
22 D 2
2
2
"
#
2
1
h
D u0 0 ;
23 32
2
2
(
)
2
1 2
h 2
2
2
2
2u0 0 u0 k Gh :
33 D
2
2
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29