Caling and Scaling Effect: Quan Zhou

HELSINKI UNIVERSITY OF TECHNOLOGY
Scaling and Scaling Effect

Introduction to Micro System Technology
Lecture 4
Quan Zhou
MICRO AND NANO SYSTEMS RESEARCH GROUP
Control Engineering Laboratory
Outline
Scale and scaling effects
The physics in the microworld
The effects and application of scaling effect
Table of Contents, Slide 2
Scale I
Scale II
Microsystem technology
nanotechnology
precision engineering
die
IC lines
mist/fog
smog
smoke
virus
bacteria
10-10
sand
hair
cells
molecules
particles
macrom
macropart
nm
10-9
10-8
PCBs
rain
dust
proteins
ions
spray
IC chip
10-7
10-6
mm
10-5
10-4
10-3
cm
10-2
m
10-1
100
km
101
102
103
Adapted from A. van den Bergs lecture
Scaling laws
Length, l
Area, l2
Volume, I3
10
1000
100
1 1
Scaling of dimensions
Area vs. Volume

Length 10X, volume/area = 10
length 10X
surface tension 10X
mass 1000X
Surface Tension
Scaling Effects in Nature I

5-10
5-10m
m
Scaling Effects in Nature II

v ~ E (volume of muscle) l3
R ~ S (area of skin) l2
0wvVb2 Breakdown voltage

Ee,m =
Vb ~ d
2d
v
w
(1 )(1 )(1 )(1 ) = (1 )

=
(1 )
0
x
y
Ee,m
Fx =
1 2
() ( )
()
Ee
V 2 C 13
=
= 1 = 12
x
2 x 1
l1 = 0.1l0 E1 = 0.001E0 and F1 = 0.01F0
Scaling in Electrostatics
11
12
11.5
12.5
2
1
1
1
1
1
1
1
P
F = 3 a = 0 t = 0.5 = 0.5
1
1
1 V0 1
4
1
0
2
1
1
1
1
Note: a = F/m; t = (2x/a)1/2; P = Fx/t
Trimmers Vertical Bracket Notation

to Present Scaling Laws
Time: I0
van der Waals: I1/4
Diffusion: I1/2
Distance: I1
Velocity: I1
Surface tension: I1
Electrostatic force: I2
Muscle force: I2
Friction: I2
Thermal Losses: I2
Piezo-electricity: I2
Shape memory alloy: I2
Mass: I3
Gravity: I3
Magnetic: I3
Torque: I3
Power: I3
Scaling Laws
Scaling of Some Forces

Other Effects
Other effects became significant in the micro world
surface adhesions
contact electrification
micro/nano friction
break down of continuum assumption
Adhesion Force Between Solid

Particles
2
1/ 3
JKR: a0 = (12R s / K ) Fs = 3R s as = 0.63a0
F 4L cos
Effect of Capillary Condensation on Adhesion
Charge will be obtained after two

different material contacts each
other
The amount of charge depends
material properties
Surface potential
contact area
+ +
- - - -
+ +
- - - -
Contact Electrification
The Coulomb friction law may not be

valid in the micro world
Micro/Nano Friction
The field in the nonisiotriopic

region scale more like l-1/2,
force scale like l1.
Breakdown of Continuum Theory

for Electrostatics Paschen Curve
The Impact of Scaling Effect in

Micromanipulation
What is scaling effect?

The change of dominant physical quantities between different scales is
called scaling effect
gravitational, inertial forces become less effective

van der Waals forces, electrostatic forces, surface tension forces become more
important
other effects
Summary of Scaling Effect
Strong and weak interactions

act between neutrons, protons, electrons and other elementary particles.
5
range of action: < 10 nm
Electromagnetic and gravitational interactions

act between atoms and molecules as well as between elementary particles
range of action: subatomic to practically infinite distance
Four Forces in Nature
Intermolecular Forces
All intermolecular forces are essentially electrostatic in origin
Hellman-Feynman theorem, solving the Schrdinter equation
It is useful to classify intermolecular interactions into categories:

purely electrostatic in origin
interactions between charges, permanent dipoles and quadrupoles
polarization forces arisen from the dipole moments
interactions in solvent medium
quantum mechanical in nature
covalent or chemical bonding; repulsive steric or exchange interactions
other interactions
van der Waals force, magnetic force
1
rn
In general, the intermolecular force potentials decay at the speed

where n > 3 for potentials and n > 4 for forces
The effective range of intermolecular forces rarely exceeds 100 nm
Range of Intermolecular Interactions
Common Types of Interactions

Strong Intermolecular
Interactions
Covalent interactions
Coulomb interactions
Covalent forces
strong strength: 100-300 kT/bond
(200-800 kJ/mol)
forces that tightly bind the atoms
together within the molecule

short range: 0.1-0.2nm
Related properties
valency
Covalent bonds
directionality
the inter-atomic bonds formed by
the covalent forces
Covalent Interaction
The free energy for Coulomb interaction:

w(r) =
Q1Q2
40r
where e is the relative permittivity or
dielectric constant of the media
Q1
Q2
The Coulomb force is:

F =
dw(r )
QQ
= 1 22
dr
40r
The strongest of the physical forces we

should consider - stronger even than
most chemical binding forces
Range of Coulomb forces
The Coulomb interactions decay more
rapidly then the 1/r due to the

screened electric filed
Coulomb Forces
Polar Molecules
electric dipole
dipole moment
l
-q
u = ql
where l is the distance between the
two charge +q and -q
permanent dipole
HCL
zwitterion
dipolar ions
+q
Weak Intermolecular Interactions

Interactions between
charge - dipole
charge - non-polar
dipole - dipole
dipole - non-dipolar
two non-polar molecules
The total energy of ion-dipole

interaction
let w(r ) = Qq 1 1
40 AB AC
we have
1
AB r l cos
2
1
AC r + l cos
2
where E(r) is the electric field

w(r, ) = uE(r ) cos
E(r) = Q / 40r 2
Ion-Dipole Interactions
All atoms and molecules are

polarizable
The polarizability a is defined as:
uind = E
where uind is the strength of the

induced dipole moment, E is the field.
Macroscopic dielectric constant of a
medium is a reflection of the
polarization of the the medium
molecules by local electric field.
Polarization of Molecules
Londons force or dispersion force

caused by a momentary dipole
moment between atoms

the moment exist even for atoms
which do not contain a permanent
polarization
the interaction energy E:
-e
l
-e
+e l
+e
u=le
+e
l
-e
l
-e
u=le
+e
E (r ) =
r6
where is a constant depending on
temperature and material properties
such as distortion polarization,
permanent dipole moment and
ionization energy.
Londons Force
long range force, can be effective from large distances ( >

10nm) down to interatomic spacing (about 0.2 nm)
may be repulsive or attractive, and in general does not follow a
simple power law
not only bring molecules together but also tend to mutually align
or orient them, though this orienting effect is usually weak
the dispersion interaction of two bodies is affected by the
presence of other bodies nearby (non-additivity of an interaction)
retardation effects, dispersion energy between two atoms decay
faster than the n=6.
Features of Dispersion Forces
van der Waals forces

van der Waals force originates from dipole-dipole interactions, it is
contributed by three important parts
the Keeson interaction or orientation interaction
angle averaged interaction between two permanent dipoles
decay rate 1/r6
the Debye interaction or induction interaction
angle averaged interaction between dipole and dipole-induce dipole
decay rate 1/r6
the Londons forces or dispersion forces
momentary dipole moment between atoms
always exist
decay rate 1/r6
van der Waals Forces
van der Waals forces

van der Waals force originates from dipole-dipole interactions, it is
contributed by three important parts
the Keeson interaction or orientation interaction
angle averaged interaction between two permanent dipoles
decay rate 1/r6
the Debye interaction or induction interaction
angle averaged interaction between dipole and dipole-induce dipole
decay rate 1/r6
the Londons forces or dispersion forces
momentary dipole moment between atoms
always exist
decay rate 1/r6
van
vander
derWaals
Waalsforces
forces
between
two
molecules:
between two molecules:
6
w(r)=-C/r
w(r)=-C/r6
van der Waals Forces
Non-additivity
screen of surrounding molecules. This property normally reduce a small
amount of the pair-wise total energy (less than 20%).
Retardation effects
the time taken for the electric field of the first atom to reach the second and
return can become comparable with the period of the fluctuating dipole
itself
Properties of van der Waals forces
Calculation of van der Waals forces

Lifshitz Model
Accurate
Computational intensive
Difficult to calculate for complicated shapes
Pair-wise addition of potential

Less accurate
non-additivity, retardation effects
Easy to calculate
Lifshitz-van der Waals Force Model

Lifshitz proposed a model of van der
Waals interactions between a sphere
particle and a planar substrate.
The term
is referred to as the
Lifshitz-van der Waals constants
dz
dx
Ring volume
Potential between a molecule located
distance D from the substrate
r=(z2+x2)1/2
x
x
Z
R
Potential between a sphere and the

substrate
Force
dz
Z=0
A: Hamaker coefficient
Calculation of van der Waals forces

based on addition of pair potential
van der Waals Forces Between Bodies

Van der Waals force is very sensitive

to surface roughness
Effects of surface roughness
Repulsive van der Waals Forces

Retardation Effects of van der Waals Forces

Forces between charges bodies (Coulomb forces)

Forces between charges and a grounded conducting substrate
Other electrostatic force models
Q1
Q2
+q
-q
d
Electrostatic forces
The free energy for Coulomb interaction:

w(r) =
Q1Q2
40r
where e is the relative permittivity or
dielectric constant of the media
Q1
Q2
The Coulomb force is:

F =
dw(r )
QQ
= 1 22
dr
40r
The strongest of the physical forces we

should consider - stronger even than
most chemical binding forces
Range of Coulomb forces
The Coulomb interactions decay more
rapidly then the 1/r due to the

screened electric filed
Coulomb Forces
+q
Equivalent to the case of Image
-q
d
charge
Electrostatic forces between a charged

particle and a grounded conducting
substrate
The forces is more complicated when

the particle is also conductive, or is
dielectric
Electrostatic forces between charges

and a grounded conducting substrate
Electrostatic forces caused by contact charge of uncharged bodie
Electrostatic forces between charged body and uncharged wall
Models of other cases of electrostatic forces
Capillary condensation of water

around surface contact sites
The meniscus curvature is related
to relative humidity, and can be
calculated by the Kelvin equation
Then the capillary force can be

calculated from the difference
between surface energies
The maximum force is when D=0
F 4L cos
Capillary forces between solid bodies
Fisher modeled capillary force

between a particle and a planar
surface as following:
where is the liquid surface tension
Fisher Capillary Force Model
Self Assembly based on Capillary forces

Surface and Interfacial Energies

Contact Angle
Surface Tension and More

Size of Atoms, Molecules and Ions

Radii of Molecules Deduced from

Different Methods
Intermolecular Pair Potential

Microworld Forces and

Operations in the Microworld
Methods to reduce and utilize the microworld forces
tool treatment
operation techniques
To reduce van der Waals forces
To reduce surface tension
To remove water molecules reduce to surface tension
To reduce van der Waals forces
To eliminate static charges
Pressure generation
Techniques to Reduce the Adhesion
van der Waals Force in Micro

Operation I
van der Waals Force in Micro

Operation II
Electrostatic Force in Micro Operation I

Electrostatic Force in Micro Operation II

Fta
Fta
Fta
Fta
Fg
Fg + Fsa
Fg + Fsa
Fg + Fsa
Fg + Fsa
Fg + Fsa
Pick and Place Technique
Dynamic modeling of micro operation

to develop a virtual micro
environment to study micro-scale

operations
Benefits
gives virtual force reflection that
aids the development of force

control methods for
microtelemanipulation
provides a way for planning
automatic assembly tasks that will
be required in the near future
Modeling of Micro Operations
Pushing
Force (nano Newton)
0
-0.1
-0.2
-0.3
-0.4
50
100
150
200
Time (milli second)
250
300
350
50
100
150
200
Time (milli second)
250
300
350
Distance (microns)
0.3
0.2
0.1
0
-0.1
Sphere: (r = 20 microns); Tool: (r = 10 microns); Separation: 1 nm
Pushing
Force (micro Newton)
0.1
0.05
-0.05
-0.1
50
100
150
200
Time (milli second)
250
300
350
50
100
150
200
Time (milli second)
250
300
350
Distance (microns)
0.3
0.2
0.1
-0.1
A Test Case
Atoms Force Microscope

Typical Force between Tip and Sample in AFM

Example of Nano Pattern Construction

Due to the scaling down, there is so called scaling effect which must
be taken into account in the micro world
The physical laws are the same, but dominant laws are different
When operating in the microworld, we should utilize the knowledge of
the scaling effect
Summary

Caling and Scaling Effect: Quan Zhou

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HELSINKI UNIVERSITY OF TECHNOLOGY

Scaling and Scaling Effect

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Control Engineering Laboratory

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Table of Contents, Slide 2

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

MICRO AND NANO SYSTEMS RESEARCH GROUP

Table of Contents, Slide 3

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Adapted from A. van den Bergs lecture

Table of Contents, Slide 4

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

Table of Contents, Slide 5

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Area vs. Volume

Table of Contents, Slide 6

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

Table of Contents, Slide 7

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

Scaling Effects in Nature I

MICRO AND NANO SYSTEMS RESEARCH GROUP

Table of Contents, Slide 8

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Scaling Effects in Nature II

Table of Contents, Slide 9

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

0wvVb2 Breakdown voltage

(1 )(1 )(1 )(1 ) = (1 )

l1 = 0.1l0 E1 = 0.001E0 and F1 = 0.01F0

Table of Contents, Slide 10

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Table of Contents, Slide 11

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Trimmers Vertical Bracket Notation

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

Table of Contents, Slide 12