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Nanoantenna-Enhanced Gas Sensing in A Single Tailored Nanofocus
Nanoantenna-Enhanced Gas Sensing in A Single Tailored Nanofocus
1 Department
of Chemistry, University of California, Berkeley, and Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California
94720, USA, 2 4. Physikalisches Institut and Research Center SCoPE, Universitt Stuttgart, D-70569 Stuttgart, Germany. These authors contributed
equally to this work. *e-mail: APAlivisatos@lbl.gov.
NATURE MATERIALS | VOL 10 | AUGUST 2011 | www.nature.com/naturematerials
631
ARTICLES
a
10.9
Scattered intensity
0.4
(V m1)
Pd
2.2
0
0.4
Wavelength
Au
Scattered intensity
2.0
10.9
Pd
Wavelength
b
20.4
9.3
3.4
(V m1)
0
3.1
8.8
20.4
E
ARTICLES
Second exposure
Pd evaporation
First exposure
Au evaporation
Lift-off
Lift-off
20 m
100 nm
Dark-field image
SEM image
Figure 3 | Manufacturing process. a, The fabrication of a planar nanostructure with hybrid materials using double electron-beam lithography in
combination with a double lift-off procedure. The relative positions of the gold antenna and the palladium particle were accurately aligned using gold
markers, which are represented by the three small gold dots in the schematic diagram. b, Left: Dark-field image of the palladiumgold antennas. Right:
Representative SEM image of a single palladiumgold antenna.
Gap distance = 10 nm
Gap distance = 70 nm
0
636 640 644 648
Wavelength (nm)
0 torr
16
8
16 torr
0
620 624 628 632
Wavelength (nm)
16 torr
8 torr
0
616 620 624 628
Wavelength (nm)
0 torr
0 torr
d = 10 nm
Pressure (torr)
0 torr
8 torr
Cycle 2
Pressure (torr)
Cycle 2
16
16
Cycle 1
16 torr
16 torr
33
33 torr
Cycle 1
16
0 torr
0 torr
8 torr
Cycle 2
16
Cycle 1
16 torr
33
Pressure (torr)
Cycle 2
33 torr
Cycle 1
0 torr
Gap distance = 90 nm
Cycle 1
d = 70 nm
d = 90 nm
Figure 4 | Optical-scattering measurements of a single palladiumgold triangle antenna on hydrogen exposure in dependence on separation d between
the gold antenna and the palladium particle. a, d = 10 nm. b, d = 70 nm. c, d = 90 nm. In each part, the hydrogen partial pressure is raised from 0 torr to
higher pressures and driven back to 0 torr. Two cycles are shown. 33 torr corresponds approximately to a 4% hydrogen concentration. The vertical bars in
each figure are guides to the eye. The right diagram in each part shows the behaviour of the resonance peak on hydrogen cycles one and two. The lines
connecting the data points are guides to the eye. The arrow indicates the direction of measurements. Our error bar for the peak determination is estimated
to be 1 nm, as shown in a, in the case of pronounced scattering spectra with a gold nanoantenna present. The SEM image of the nanostructure is shown in
each part accordingly. The scale bar is 50 nm. At larger distances, the spectral shift substantially decreases. The spectral shift does not go back to its
original value owing to hysteresis effects of the hydrogen uptake.
633
ARTICLES
b
Gap distance = 20 nm
Gap distance = 50 nm
16 torr
Wavelength (nm)
0 torr
16 torr
8
0
Wavelength (nm)
16 torr
Pressure (torr)
0
16
16
Cycle 1
Cycle 2
Pressure (torr)
Cycle 2
16
8 torr
8 torr
8 torr
660 664 668 672
Wavelength (nm)
0 torr
0 torr
0 torr
16 torr
33
0 torr
33 torr
Cycle 1
16
0 torr
8
16 torr
Cycle 2
16
Cycle 1
Pressure (torr)
Cycle 2
33 torr
Cycle 1
0 torr
33
Gap distance = 85 nm
Cycle 1
d = 20 nm
d = 50 nm
d = 85 nm
Figure 5 | Optical scattering measurements of a single palladiumgold rod antenna on hydrogen exposure in dependence on the separation d between
the gold antenna and the palladium particle. a, d = 20 nm. b, d = 50 nm. c, d = 85 nm. In each part, the hydrogen partial pressure is raised from 0 torr to
higher pressures and driven back to 0 torr. Two cycles are shown. The vertical bars in each part are guides to the eye. The right diagram in each part shows
the behaviour of the resonance peak on hydrogen cycles one and two. The lines connecting the data points are guides to the eye. The arrow indicates the
direction of measurements. The SEM image of the nanostructure is shown in each part accordingly. The scale bar is 50 nm. At larger distances, the spectral
shift substantially decreases. Hysteresis is also clearly observable.
Methods
Gold antenna
Dark-field image
33 torr
10 m
0 torr
Pd nanoparticle
Dark-field image
ARTICLES
33 torr
10 m
0 torr
Structural fabrication. The antenna structures and alignment markers are first
defined in poly(methyl methacrylate) resist using electron-beam lithography on a
quartz substrate. The substrate is then covered with 2 nm chromium adhesion film
and 40 nm gold film using thermal evaporation followed by a lift-off procedure.
Next, the substrate is coated once more with poly(methyl methacrylate) resist.
Computer-controlled alignment at the sub-10-nm level using the gold alignment
markers is applied to ensure the accurate positioning of the single dot structure.
Subsequently, the palladium dot is generated by covering the substrate with 2 nm
chromium adhesion film and 40 nm palladium film using thermal evaporation
followed by a lift-off procedure.
Experimental set-up. Ultrahigh-purity hydrogen (UHP 5.0) and nitrogen (UHP
5.0) from Praxair were used with GFC 17 mass-flow controllers (Aalborg,
Orangeburg, NY) to control the partial pressure of hydrogen in a stainless-steel
cell. The total pressure was read by a NIST-certified diaphragm manometer gauge
(no. 902346, Vacuum Research Corp., Pittsburgh, PA). The dark-field optical
set-up consists of a 100 W tungsten lamp, a dark-field condenser and an objective.
The scattered light was analysed by a silicon CCD (charge-coupled device)
camera (1340 100 pixels) cooled by liquid nitrogen and attached to an imaging
spectrometer. The detection took place normal to the sample surface through
the objective optical axis (Zeiss dark-field objective, LC EC Epiplan Neofluar,
50, numerical aperture NA = 0.55), which is perpendicular to the illumination
polarization. The illumination took place through the dark-field condenser. The
measurements at different hydrogen concentrations were made after the system
was in equilibrium in hydrogennitrogen atmosphere for 1 h. Each spectrum
represents an average of 20 acquisitions that individually had an integration time
of 1 s at a single antenna structure. After a complete cycle, the system was purged
using nitrogen overnight. The black curves imposed on the experimental spectra in
Figs 46 were obtained using the SavitzkyGolay method by filtering the raw data
with a second-order polynomial and a frame size of 205.
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Acknowledgements
We would like to thank X. Meng for help with the metal deposition at the Microlab
Facility of the Electrical Engineering and Computer Science Department, University of
California, Berkeley. The SEM studies were supported by the Molecular Foundry at the
National Center for Electron Microscopy at Lawrence Berkeley National Laboratory. The
experimental set-up was funded by the grant A Synergistic Approach to the Development
of New Classes of Hydrogen Storage Materials from the US Department of Energy,
DE-AC03-76SF00098. We acknowledge S. Hein for his material visualizations. We thank
Th. Schumacher and M. Lippitz for discussions and comments. We thank A. Tittl and
N. Strohfeldt for help with the measurements and data analysis. N.L., M.L.T. and A.P.A.
acknowledge financial support through the Plasmonic-Enhanced Catalysis Project of
the Air Force Office of Science Research, award number FA9550-10-1-0504. M.H. and
H.G. were financially supported by Deutsche Forschungsgemeinschaft (SPP1391 and
FOR557), by BMBF (13N9048 and 13N10146) and by Landesstiftung BW.
Author contributions
All authors contributed extensively to the work presented in this paper.
Additional information
The authors declare no competing financial interests. Reprints and permissions
information is available online at http://www.nature.com/reprints. Correspondence and
requests for materials should be addressed to A.P.A.