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WARNING !
FAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS AND/OR SYSTEMS DESCRIBED HEREIN
OR RELATED ITEMS CAN CAUSE DEATH, PERSONAL INJURY AND PROPERTY DAMAGE.
This document and other information from Parker Hannifin Corporation, its subsidiaries and authorized distributors provide product
and/or system options for further investigation by users having technical expertise. It is important that you analyze all aspects of
your application and review the information concerning the product or system in the current product catalog. Due to the variety
of operating conditions and applications for these products or systems, the user, through its own analysis and testing, is solely
responsible for making the final selection for the products and systems and assuring that all performance, safety and warning
requirements of the application are met.
INDEX
INTRODUCTION ..................................................................................................................2
PRODUCT LINE OVERVIEW .............................................................................................. 7
WET ETCH AND CLEAN
All-fluoropolymer Products
Fluoroflow ....................................................................................................................11
Fluoroflow-HSA ........................................................................................................... 13
Fluoroflow-Select......................................................................................................... 15
Fluoroflow-XF .............................................................................................................. 17
Fluoroflow-XL .............................................................................................................. 19
Fluorocap .................................................................................................................... 21
Fluorocap-Select ......................................................................................................... 23
Fluorocap-XF............................................................................................................... 25
Fluorocap-XL ............................................................................................................... 27
PTFE Membrane Products
Chemflow-PE .............................................................................................................. 29
Chemflow-XF............................................................................................................... 31
Proflow II-E ..................................................................................................................33
Proflow II-E-Select....................................................................................................... 35
Proflow II-E Mini-Cartridges ........................................................................................ 37
Proflow II-E Mini-Capsules .......................................................................................... 39
PES Membrane Products
Clariflow-WE................................................................................................................ 41
Clariflow-E ...................................................................................................................43
Clariflow-E-Select ........................................................................................................ 45
Clariflow-E Mini-Cartridges.......................................................................................... 47
Clariflow-E Mini-Capsules ........................................................................................... 49
PLATING
Clariflow-E....................................................................................................................... 53
Clariflow-E-Select ........................................................................................................... 55
Polyflow........................................................................................................................... 57
CMP
Polyflow-CMP ................................................................................................................. 61
LITHOGRAPHY
Polyflow Membrane ........................................................................................................ 65
Polyflow Membrane-Select ............................................................................................. 67
Chemflow-PE .................................................................................................................. 69
Chemflow-XF .................................................................................................................. 71
GENERAL
Proflow II-G ..................................................................................................................... 75
Clariflow-G ...................................................................................................................... 77
Polyflow........................................................................................................................... 79
Polyflow-G....................................................................................................................... 81
Polyflow Mini-Cartridge ................................................................................................... 83
Polyflow Mini-Capsule..................................................................................................... 85
HOUSINGS
Trufluor............................................................................................................................ 89
Trufluor+ ......................................................................................................................... 91
Fulflo NP ......................................................................................................................... 93
Filter Recommendations ................................................................................................. 95
Chemical Compatibility Chart.......................................................................................... 96
Parker Hannifin
Leader in process filtration, separation and purification
With sales offices in 26 countries, distribution channels active
in 63 countries, and manufacturing operations in 6 countries,
Parker specializes in providing
filtration and separation products to a wide variety of markets
including the microelectronics,
pharmaceutical, food and beverage, manufacturing, automotive,
oil and gas, and defense industries.
Manufacturing Excellence
Parker Hannifin Corporation
is committed to manufacturing
excellence.
Our state-of-the-art
manufacturing facility features:
A fully equipped laboratory and
testing center
Certified controlled cleanroom
environments
Outline History
1984
1987
1994
1994
1997
1998
2003
2005
2005
2006
2007
Quality Management
and ISO 9001
Quality is of paramount importance to Parker Advanced
Filtration. All products are
manufactured under controlled
environmental conditions and are
subjected to demanding programs of quality assurance.
Parker Hannifin Corporation
Microelectronics:
A Core Expertise
The microelectronics industry is
a rapidly growing world market
that draws upon core areas of
our filtration expertise. Included
within this market are the broad
range of electronics products that
require highly effective filtration
in their manufacturing processes.
These products include:
semiconductors
flat panel displays
hard disk drives
Through our Technical, R&D and
Customer Service teams we offer
a wide range of services to ensure total customer satisfaction.
Technical Capabilities
Our Technical Services team
is dedicated to the needs of
the microelectronics industry.
We have an extensive range of
state-of-the-art analytical instrumentation and a highly qualified
team of scientists and engineers
generating innovative solutions
to a wide variety of filtration
needs. We strive to optimize our
customers filtration applications
by offering full technical support
that includes:
process failure analyses
contamination analyses
process and cost improvement
audits
on-site testing services
Customer Service
An experienced team of professionals dedicated to respond
quickly and comprehensively
to orders - both for standard
and customized products and
ensure their on-time delivery
worldwide.
Microelectronics:
Applications
In the microelectronics Industry,
filter process fall into three
categories:
Chemical Filtration
Etching
Si etch (HF/HN03/
Acetic Acid)
SiO2 etch
(BOE/BHF-HF/NH4F)
Si3N4 etch
(Hot H3PO4 up to 180C)
Al etch
(H3PO4/HNO3/Acetic Acid)
Stripping
Hydroxy/amino based
Glycol/NH4F based
DMSO/amino based
Cleaning
Piranha (hot H2SO4/H2O2
up to 150C)
SC1 (NH4OH/H202/H2O
up to 90C)
SC2 (HCL/H2O2/H2O
up to 90C)
Bulk chemical distribution
Photochemical Filtration
Photoresist applications l-line,
g-line and DUV 248/193nm)
Anit-reflective coating
applications (BARC/TARC)
Solvent/Developing
(<3% TMAH 97%H20)
Chemical Mechanical
Planarization (CMP)
Oxide
Metal
Moores Law
40 years ago, Intel co-founder Gordon Moore
issued a famous analysis that proposed the
number of transistors on an integrated circuit (IC)
doubled every 18 months. This analysis
(often referred to as Moores law) still holds true today.
The number of transistors per chip now runs into the
billions with line-widths <100 nanometers.
Semiconductors:
The filters used in semiconductor production processes need
to provide the lowest possible
levels of metals extractables
and high particle retention
efficiencies. However, since
these processes combine the
use of aggressive chemicals and
high process temperatures, we
have developed a wide range
of fluoropolymer filters that possess high chemical and thermal
resistance and are suited for all
processes in the manufacturing
of semiconductors.
Our fluoropolymer filters are
available with the following
options:
Rinse
UPDI Water
Etch
H2O / HF
Rinse
HOT
UPDI Water
Clean B
Clean A
H2SO4 / (NH4)2S2O8
H2SO4 / H2O2
Clariflow: polyethersulfone
membrane filters that provide extremely high bath recovery rates
during disk cleaning
Clariflow SELECT: a high-flow
version of Clariflow with longer
life. All products enable high
product yields and low reject
rates, allowing for the lowest
CPU (cost per unit).
Aluminum
Substrate
Cleaning
and Rinsing
Nickel
Plating
Hard Coating
and Lubricating
Mechanical
Texturing
Polishing
and CMP
Glass
Substrate
Cleaning
Thin-film
Deposition
Etching
Exposure &
Development
Photoresist
Application
Photoresist
Stripper
Test and
Cleaning
Polyimide
Film Printing
Scribe and
Breaking
Scaling and
Assembly
Rubbing
LCD Inspection
& End-Sealing
Polarizer
Attachment
Testing of
LCD Screen
Microfiltration Products
Engineered for Microelectronic Applications
At Parker we see every
microelectronics application as an
opportunity to provide a total filtration
solution. We have this capability due
to our constant drive to be at the
leading edge of filtration technology.
Our innovative engineering teams
work closely with our dedicated
worldwide support network resulting
in unparalleled customer satisfaction.
FLUOROFLOW
100% Fluoropolymer construction
FLUOROCAP
100% Fluoropolymer capsules
CHEMFLOW PE
PTFE Membrane / High Density
Polyethylene construction
CLARIFLOW
Polyethersulfone (PES) Membrane /
Polypropylene construction
PROFLOW II
PTFE Membrane / Polypropylene construction
POLYFLOW MEMBRANE
Polypropylene Membrane /
Polypropylene construction
Parker offers a wide range of microfiltration products for critical liquid and gas
applications, with particle removal ratings from 0.02 to 40 micron.
Our products will consistently meet your exacting performance and compatibility
requirements even in processes using aggressive chemicals. Our products can
offer metal extractables <5ppb.
POLYFLOW
Polypropylene absolute and nominal-rated
depth media Polypropylene structure
A wide variety of housings is available.
Contact your Parker Filtration Sales
Representative for more details.
Microfiltration Products
Engineered for Microelectronic Applications
Available
Configurations
Product line
FLUOROFLOW
100% Fluoropolymer Construction
0.03, 0.05,
0.1, 0.2,
0.45, 1
Cartridge
FLUOROCAP
100% Fluoropolymer Construction
Capsules
CHEMFLOW PE & XF
PTFE Membrane / High Density
Polyethylene Structure
CLARIFLOW
Polyethersulfone (PES) Membrane /
Mini Polypropylene Structure
PROFLOW II
PTFE Membrane / Polypropylene /
Mini Structure
POLYFLOW MEMBRANE
Polypropylene Nominal Rated
Membrane / Polypropylene Structure
POLYFLOW
Polypropylene Absolute Rated Depth
Media / Polypropylene Structure
Filter
SELECT*
Ratings
and
Typical Applications
(microns) Ultraclean
0.03, 0.05,
0.1, 0.2
Capsule
Cartridge
0.03, 0.05,
0.1, 0.2, 1
Cartridge
Mini-Capsule
Mini-Cartridge
0.02, 0.04,
0.1, 0.2,
0.45, 0.65,
0.8
Cartridge
Mini-Capsule
Mini-Cartridge
S U XF
XL
S U XF
XL
0.03, 0.05,
0.1, 0.2,
0.45, 1
0.04, 0.07,
0.1, 0.2
Cartridge
Cartridge
Mini-Capsule
Mini-Cartridge
XF
*Patent pending
S SELECT Technology
U Ultraclean Technology
XL
XF XF Technology
XL XL Technology
XF
XF is a revolutionary membrane
technology. It provides superior flow over
traditional cartridges by utilizing an asymmetric PTFE membrane. XF cartridges
offer up to three times the flow rate and
throughput at lower differential pressure.
Parker Hannifin Corporation is committed to provide the highest quality product to our customers. To this end, our ISO 9001:2000
certified Quality System ensures that this occurs. At Parker Hannifin Corporation, we do our best to resolve all quality issues in a quick
and timely manner. In addition, we strive to eliminate problems before they are seen. By taking this continuously proactive approach to
the quality of all of our products, Parker Hannifin Corporation has the best product on the market at all times.
8
10
331
Fluoroflow
All-fluoropolymer cartridge
for aggressive applications
The Fluoroflow filter cartridge is our
standard product for aggressive wet
etch and clean applications.
It provides good flow rates and
on-stream life at an economical cost.
The all-fluoropolymer construction
provides excellent chemical resistance
for the most aggressive applications up
to 150C. It is available either ozone
DI flushed and dried or wet-packed for
quick installation.
Benefits
Applications
Economical
Wet-pack option for quick installation
All-fluoropolymer for maximum
chemical resistance
100% integrity tested for
consistent quality
Fluoroflow
Specifications
Performance Attributes
Materials of Construction
100% Fluoropolymer construction
Metals Extractables*
Standard: <20ppb (total)
Ultraclean: <5ppb (total)
*in a 10% HNO3 extraction
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
and Dry
and Dry
U
K
Specifications are subject to change without notification
Fluoroflow is a registered trademark of Parker Hannifin Corporation.
Viton and Kalrez are registered trademarks of E.I. DuPont de Nemours & Co., Inc.
Chemraz is a registered trademark of Green, Tweed Inc.
Ultraclean (pre-wet)
Kalrez
2008 Parker Hannifin
Process Advanced Filtration Inc.
All Rights Reserved
SPEC -FS-18 Rev I 03/08
333
Fluoroflow-HSA
Increased performance
all-fluoropolymer cartridge
for aggressive applications
The Fluoroflow-HSA filter cartridge
provides good flow rates and
on-stream life. The enhanced
pleating provides more than 40%
more surface area than our standard
Fluoroflow. This results in increased
bath turnover and longer filter lifetime
demanded by todays fabs. The allfluoropolymer construction provides
excellent chemical resistance for
the most aggressive applications up
to 180C. Available wet-packed for
quick installation or Ultraclean wetpacked which offers the lowest metals
extractables in the industry.
Benefits
Applications
Fluoroflow-HSA
Specifications
Performance Attributes
Materials of Construction
100% Fluoropolymer construction
Metals Extractables*
Standard: <20ppb (total)
Ultraclean: <5ppb (total)
*in a 10% HNO3 extraction
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
and dried
and dried
Ultraclean (pre-wet)
Kalrez
336
Fluoroflow-Select
High performance
all-fluoropolymer cartridge
for aggressive applications
The Fluoroflow-SELECT filter
cartridge provides exceptional flow
rates and on-stream life. It utilizes our
unique SELECT pleating technology
that increases filtration area and flow
rate by over 70% versus our standard
Fluoroflow. This results in increased
bath turnover and longer filter lifetime
demanded by todays fabs. The
all-fluoropolymer construction provides
excellent chemical resistance for
the most aggressive applications up
to 180C. Available wet-packed for
quick installation or Ultraclean wetpacked which offers the lowest metals
extractables in the industry.
Benefits
Applications
Fluoroflow-Select
Specifications
Performance Attributes
Materials of Construction
Metals Extractables*
Standard: <20ppb (total)
Ultraclean: <5ppb (total)
*in a 10% HNO3 extraction
Dry-packed
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
and dried
and dried
Ultraclean (pre-wet)
Kalrez
330
Fluoroflow-XF
Highest-flowing
all-fluoropolymer cartridge
for the most aggressive
applications
The Fluoroflow-XF filter cartridge
uses a superior asymmetric PTFE
membrane than provides unmatched
flow rates and on-stream life.
Customers using the cartridge for
viscous fluids like phosphoric acid,
have reported flow rates and lifetimes
more than twice that of the leading
competitor. The advantages of
increased bath turnover and longer
lifetime improve yields while decreasing
filtration costs. In addition, the
all-fluoropolymer construction provides
excellent chemical resistance for the
most aggressive applications up to
180C. Available dry, wet-packed for
quick installation or Ultraclean wetpacked which offers the lowest metals
extractables in the industry.
Benefits
Applications
Fluoroflow-XF
Specifications
Performance Attributes
Materials of Construction
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
K
Specifications are subject to change without notification
Fluoroflow is a registered trademark of Parker Hannifin Corporation.
Viton and Kalrez are registered trademarks of E.I. DuPont de Nemours & Co., Inc.
Chemraz is a registered trademark of Green, Tweed Inc.
(pre-wet)
Ozone Flush and
dried
Kalrez
2008 Parker Hannifin
Process Advanced Filtration Inc.
All Rights Reserved
SPEC-33-FS-XF Rev B 03/08
329
Fluoroflow-XL
Highest-performance
all-fluoropolymer cartridge
for aggressive applications
The Fluoroflow-XL filter cartridge
is setting the new standard for
exceptional flow rates and on-stream
life. It utilizes a larger diameter
cartridge (3.25) combined with our
unique SELECT pleating technology
that increases filtration area and flow
rate by over 70%. This results in
increased bath turnover and longer
filter lifetime demanded by todays
advanced 300mm fabs. The
all-fluoropolymer construction provides
excellent chemical resistance for
the most aggressive applications
up to 180C. Its integral filter design
maximizes up-time with safe and
simple change-outs. Available
wet-packed for quick installation or
Ultraclean wet-packed which offers
the lowest metals extractables in the
industry.
Benefits
Applications
Fluoroflow-XL
Specifications
Performance Attributes
Materials of Construction
10-inch (250mm)
Typical Water Flow Rate (lpm)
Metals Extractables*
Standard: <30ppb (total)
Ultraclean: <7ppb (total)
*in a 10% HNO3 extraction
0.03m
0.03
0.05
0.05m
0.03m
0.05m
0.10m
22.5ft (2.04 m)
21.5ft (1.99 m)
18.5ft (1.71 m)
0.1m
0.1
Forward
HT option: 15psid (1.0bar) @356F (180C)
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
FL
18 3
End Fitting
CODE DESCRIPTION
3
222 Flat
Nominal Length
CODE LENGTH
04
4" (100mm)
10
10" (250mm)
20
20" (500mm)
30
30" (750mm)
Filter Rating
CODE MICRON
923 0.03m
925 0.05m
031 0.10m
Options
Treatments
O-Rings
CODE MATERIAL
CODE TEMPERATURE
CODE DESCRIPTIONS
5
E
Electronic Standard Blank UPW Flush and dried
FEP-Encapsulated
W
Wet Packed
(150 C Max)
Viton*
7
H* High Temperature
U
Ultraclean (pre-wet)
Chemraz
K
F
Ozone Flush and dried
(180 C Max)
Kalrez
N
None
*H is only available in 4", 10"
and 20" lengths
151
Fluorocap
All-fluoropolymer capsule
for the most aggressive
applications
The Fluorocap encapsulated filter
cartridge is our standard product
for aggressive wet etch and clean
applications. It provides good flow
rates and on-stream life at an
economical price. The all-fluoropolymer
construction provides excellent
chemical resistance for the most
aggressive applications up to 180C.
Its integral filter design maximizes
up-time with safe and simple changeouts. Available wet-packed for quick
installation or Ultraclean wet-packed
which offers the lowest metals
extractables in the industry.
Benefits
Applications
Economical
Wide range of configurations
and ratings
Wet-pack option for quick installation
Ultraclean option for absolute
cleanliness
All-fluoropolymer for maximum
chemical resistance
100% integrity tested for
consistent quality
Fluorocap
Specifications
Performance Attributes
Materials of Construction
100% Fluoropolymer construction
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
SP 300
153
Fluorocap-Select
High performance
all-fluoropolymer capsule
for the most aggressive
applications
The Fluorocap-SELECT encapsulated
filter cartridge provides exceptional flow
rates and on-stream life. It utilizes our
unique SELECT pleating that increases
filtration area and flow by over 25%
compared to our standard Fluorocap.
This results in increased bath turnover
and longer filter lifetime demanded
by todays fabs. The all-fluoropolymer
construction provides excellent
chemical resistance for the most
aggressive applications up to 180C.
Its integral filter design maximizes
up-time with safe and simple changeouts. Available wet-packed for quick
installation or Ultraclean wet-packed
which offers the lowest metals
extractables in the industry.
Benefits
Applications
Fluorocap-Select
Specifications
Performance Attributes
Materials of Construction
100% Fluoropolymer construction
10
15
20
25
30
35
3
0.05 m
0.03 m
3
2
0.10 m
0.20 m
1
0.45 m
1.00 m
0
0
0
10
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
F
Vent Alignment4
Element Length
Style
Connections
Options
Treatment
CODE DESCRIPTION CODE DESCRIPTION CODE ALIGNMENT
CODE TEMPERATURE CODE LENGTH
CODE DESCRIPTION CODE DESCRIPTION
3/4" Buttweld
3/4" Pillar 90
K
B
4" (100mm)
S Same Side
C Flourocap-Standard 0
F1 In-Line
C
Dry Packed (STD)
3/4" MNPT
C 3/8" Parflare 90 P
1
10" (250mm)
D 180 Opposite Side
(150C max)
W Ozonated UPW
D 1/2" Parflare 90
2
20" (500mm)
H High Temperature
Flushed and
3/4" Parflare 90
E
3
30" (750mm)
(180C max)
et Packed
3
3/4" Parflare
42 10" (250mm) (Short) F
U
Ultraclean
G 3/8" Parflare
4
H 1/2" Parflare
Vent/Drain connections are 1/4" versions of the inlet/outlet fittings,
3/4" Flarelock
J
except for codes K and W which are 1/2" Pillar vent/drain fittings.
Filter Rating
CODE MICRON
923 0.03m
925 0.05m
001 0.10m
002 0.20m
004 0.45m
010 1.00m
CODE
T
L
R
Element Length
Style
Options
Treatment
CODE TEMPERATURE CODE LENGTH
DESCRIPTION CODE DESCRIPTION
0
4" (100mm)
C Flourocap-Standard
C
Dry Packed (STD)
T-Style
(150C max)
W Ozonated UPW
L-Style (Left)
1
10" (250mm)
H High Temperature
Flushed and
R-Style (Right)
(180C max)
Wet Packed
U
Ultraclean
CODE
F3
J
Connections
DESCRIPTION CODE
3/4" Parflare
W3
3/4" Flarelock
Y
Vent Alignment4
DESCRIPTION CODE ALIGNMENT
C5 Centered
3/4" Pillar
3/4" SP300
Filter Rating
CODE MICRON
923 0.03m
925 0.05m
001 0.10m
002 0.20m
004 0.45m
010 1.00m
2008 Parker Hannifin
Process Advanced Filtration Inc.
All Rights Reserved
SPEC-FCAP-SELECT Rev H 04/08
Fluorocap-XF
Highest-flowing
all-fluoropolymer capsule
for the most aggressive
applications
The Fluorocap-XF encapsulated filter
cartridge uses a superior asymmetric
PTFE membrane than provides
unmatched flow rates and on-stream
life. Customers using the capsule
for viscous fluids like phosphoric
acid, have reported flow rates and
lifetimes more than twice that of the
leading competitor. The advantages
of increased bath turnover and longer
lifetime improve yields while decreasing
filtration costs. In addition, the allfluoropolymer construction provides
excellent chemical resistance for
the most aggressive applications
up to 180C. Its integral filter design
maximizes up-time with safe and
simple change-outs. Available wetpacked for quick installation or
Ultraclean wet-packed which offers
the lowest metals extractables in the
industry.
Benefits
Applications
Fluorocap-XF
Specifications
Performance Attributes
Materials of Construction
Asymmetric PTFE membrane
100% Fluoropolymer construct
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
In-Line
SP300
156
Fluorocap-XL
Highest-performance
all-fluoropolymer capsule
for the most aggressive
applications
The Fluorocap-XL encapsulated
filter cartridge is setting the new
standard for exceptional flow rates
and on-stream life. It utilizes a larger
diameter cartridge combined with
our unique SELECT pleating that
increases filtration area by over 70%.
This results in increased bath turnover
and longer filter lifetime demanded
by todays advanced 300mm fabs.
The all-fluoropolymer construction
provides excellent chemical resistance
for the most aggressive applications
up to 180C. Its integral filter design
maximizes up-time with safe and
simple change-outs. Available wetpacked for quick installation or
Ultraclean wet-packed which offers
the lowest metals extractables in the
industry.
Benefits
Extra large filtration area for
longer life
Highest flow rates for maximum bath
turn over
Wet-pack option for quick installation
Ultraclean option for absolute
cleanliness
All-fluoropolymer for maximum
chemical resistance
100% integrity tested for
consistent quality
Applications
Wet etch and clean
Hot phosphoric acid
Sulfuric acid
Hydrofluoric acid
Nitric acid
Piranha
SC1, SC2
NMP-based solvents
Other high temperature or ozonated
processes
Fluorocap-XL
Specifications
Performance Attributes
Materials of Construction
100% Fluoropolymer construction
10-inch (250mm)
Typical Water Flow Rate (lpm)
Metals Extractables*
Standard: <30ppb (total)
Ultraclean: <7ppb (total)
0.03m
0.05m
0.1m
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
L-
Style
Treatment
CODE DESCRIPTION
F1 In-Line
CODE DESCRIPTION
C Dry Padded (STD)
W Ozonated UPW
Flushed and
Wet Packed
U Ultraclean
Element Length
CODE
0
1
2
42
DESCRIPTION
4" (100mm)
10" (250mm)
20" (500mm)
10" (250mm) (Short)
Options
CODE DESCRIPTION
C Standard
(150oC max)
H High Temperature
(180oC max)
Connections
CODE
P
H
J
Vent Alignment
DESCRIPTION
3/4" Parflare
1/2" Parflare
3/4" Flarelock
Filter Rating
CODE DESCRIPTION
Same Side
S
D 180 Opposite Side
CODE
923
925
031
MICRON
0.03m
0.05m
0.10m
L-
1
2
3
Style
Treatment
CODE DESCRIPTION
T-Style
T
L-Style (left)
L
CODE DESCRIPTION
C Dry Padded (STD)
W Ozonated UPW
Flushed and
Wet Packed
U Ultraclean
Element Length
CODE DESCRIPTION
4" (100mm)
0
10" (250mm)
1
Options
CODE DESCRIPTION
C Standard
(150oC max)
H High Temperature
(180oC max)
Connections
CODE DESCRIPTION
W3 3/4 Pillar
Y3 3/4 SP 300
Vent Alignment
CODE
S
D
C
DESCRIPTION
Same Side
180 Opposite Side
Centered
Filter Rating
CODE
923
925
031
MICRON
0.03m
0.05m
0.10m
121
Chemflow-PE
Chemically-resistant cartridge
for bulk and lower
temperature applications
The Chemflow-PE filter cartridge uses
a PTFE membrane along with HDPE
supports that provide an economical
alternative to all-fluoropolymer
cartridges. It provides a high degree
of retention and cleanliness along with
good flow and lifetime. This filter is
ideally suited for bulk chemical delivery
and lower temperature wet processes
(<60C). It is available dry or wetpacked for quick installation.
Benefits
Applications
Chemflow-PE
Specifications
Performance Attributes
Materials of Construction
Membrane
Support Layers
Structure
:
:
:
PTFE
HDPE
HDPE
10
15
20
25
30
0.05m
35
300
0.10m
200
0.20m
2
100
1
1.0m
0
0
10
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
PE
Insert Style
CODE DESCRIPTION
1
None (Std)
A
1/2" Shortened
on 222 Fitting
E
End Fitting
CODE DESCRIPTION
2
226/Flat
3
222/Flat
7
226/Fin
8
222/Fin
CODE
10
20
30
40
Length
LENGTH
10" (250mm)
20" (500mm)
30" (750mm)
40" (1000mm)
Filter Rating
CODE MICRON
925
0.05m
001
0.10m
002
0.20m
010
1.00m
O-Ring Material
CODE MATERIAL
0
Buna N
1
EPDM
2
Silicone
4
Viton
FEP Encapsulated
5
Viton
Options
CODE TREATMENT
Blank Standard
W
Wet Packed
Chemflow-XF
Benefits
Applications
Chemflow-XF
Specifications
Performance Attributes
Materials of Construction
Membrane
:
PTFE (Asymmetric)
Support Layers :
HDPE
Structure
:
HDPE
10-inch (250mm)
Typical Water Flow Rate (lpm)
SELECT:
11.0ft2 (0.99m2) per nominal 10"
(250mm) cartridge
12
16
20
1.40
Standard:
5.7ft2 (0.51m2) per nominal 10"
(250mm) cartridge
50
40
Metals Extractables*
Standard: <70ppb (total)
*in a 10% HNO3 extraction
1.00
ar
d
tan
30
0.80
0.60
20
CT
ELE
0.40
10
0.20
0
0
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
Pleat Technology
Insert Style
End Fitting
Length
CODE DESCRIPTION CODE DESCRIPTION CODE DESCRIPTION CODE LENGTH
ES
SELECT
1
None (Std)
2
226/Flat
10
10" (250mm)
PE
Standard
A
1/2" Shortened
3
222/Flat
20
20" (500mm)
on 222 Fitting
7
226/Fin
30
30" (750mm)
8
222/Fin
40
40" (1000mm)
Filter Rating
Options
O-Ring Material
CODE MICRON
CODE TREATMENT
CODE MATERIAL
031 0.10m XF
Blank Standard Dry
0
Buna N
W
Wet Packed
1
EPDM
2
Silicone
4
Viton
FEP Encapsulated
5
Viton
2008 Parker Hannifin
Process Advanced Filtration Inc.
All Rights Reserved
SPEC-PE-XF Rev. B 03/08
1.20
351
Proflow II-E
Chemically-resistant cartridge
for ultrapure microelectronics
fluids and gases
The ProflowII-E filter cartridge uses
a PTFE membrane along with highpurity polypropylene supports that
provide an economical alternative
to all-fluoropolymer cartridges. It
provides a high degree of retention
and cleanliness along with good flow
and lifetime. This filter is ideally suited
for ultrapure microelectronics fluids
and gases. The hydrophobic PTFE
membrane serves as a highly efficient
barrier to insure low moisture content
of gases. It is available dry or wetpacked for quick installation and lower
extractables.
Benefits
Applications
Proflow II-E
Specifications
Performance Attributes
Materials of Construction
Membrane
Support layers
Structure
:
:
:
PTFE
Polypropylene
Polypropylene
0.03
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
923
0.03
353
Proflow II-E-Select
High-performance cartridge
for ultrapure microelectronics
fluids and gases
The ProflowII-E-SELECT filter
cartridge provides exceptional flow
rates and on-stream life. It uses a
PTFE membrane along with highpurity polypropylene supports that
provide an economical alternative to
all fluoropolymer cartridges. With its
unique SELECT pleating technology,
the liquid flow rates are increased
by up to 50% verses our standard
ProflowII-E. This filter is ideally suited
for ultrapure microelectronics fluids
and gases. It is available dry or wetpacked for quick installation and lower
extractables.
Benefits
Applications
Proflow II-E-Select
Specifications
Performance Attributes
Materials of Construction
:
:
:
PTFE
Polypropylene
Polypropylene
Reverse:
16
24
400
Forward:
0.05 m
0.03 m
300
200
0.10 m
2
0.20 m
100
0
0
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
PS
Insert Style
CODE DESCRIPTION
1
None (Std)
5
Encapsulated
Stainless Steel
Encapsulated
6
Polysulfone
1/2" Shortened
A
on 222 Fitting
CODE
2
3
7
8
E
End Fitting
DESCRIPTION
226/Flat
222/Flat
226/Fin
222/Fin
CODE
10
20
30
40
Length
LENGTH
10" (250mm)
20" (500mm)
30" (750mm)
40" (1000mm)
Filter Rating
CODE MICRON
923 0.03m
925 0.05m
001 0.10m
002 0.20m
CODE
1
2
4
5
6
N
O-Rings
MATERIAL
EPDM
Silicone
Viton
FEP-Encapsulated
Viton
FEP-Encapsulated
Silicone
None
Options
CODE TREATMENT
Blank Standard
W
Wet Packed
Membrane
Support layers
Structure
346
Benefits
Applications
Performance Attributes
Materials of Construction
Membrane
:
PTFE
Support layers
:
Polypropylene
Structure
:
Polypropylene
12
16
Resistivity Rinse-up
The rinse-up volume required for
Proflow-E mini-cartridges to reach
18megohm-cm resistivity is approximately
12gal (45.4 liters).
0.10m
200
0.20m
2
100
1
0
0
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
34
M M
Filter Rating
CODE MICRON
001
0.1m
002
0.2m
923
0.03m
925
0.05m
004
0.45m
010
1.0m
CODE
0
1
2
4
N
0-Ring
MATERIALS
Buna N
EPDM
Silicone
Viton
None
300
343
Benefits
Applications
Performance Attributes
Materials of Construction
:
:
:
:
PTFE
Polypropylene
Polypropylene
Polypropylene
12
300
Half
4
S = Standardsize
H = Half-size
Standard
3
200
Double
2
100
1
Membrane
Support layers
Structure
Housing
0
0
12
16
Resistivity Rinse-up
4
Half
Standard
3
200
Double
2
100
1
300
0
0
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
34
E
Size
CODE
H
S
D
DESCRIPTION
Half Size
Standard Size
Double Size
Filter Rating
Inlet/Outlet
CODE
B
H
S
D
P
J
K
G
CONNECTION
1/4" Hose Barb
1/2" Hose Barb
1 1/2" Sanitary Flange
Quick Disconnect
1/4" NPT (Male)
1/2" NPT (Male)
3/8" NPT (Female)
Swagelok 1/2"
CODE
001
002
923
925
004
010
MICRON
0.10 m
0.20 m
0.03 m
0.05 m
0.45 m
1.0 m
Vent 0-Ring
CODE
0
1
2
4
N
Z
MATERIAL
Buna N
EPDM
Silicone
Viton
None
No vents
Clariflow-WE
Economical hydrophilic
PES membrane cartridges
for aqueous applications
Clariflow -WE cartridges provide an
economical way to filter fluids used in
microelectronics such as DI water and
aqueous-based chemicals. Constructed
of the same high-quality materials
as Clariflow-E or E-SELECT, these
cartridges are suited to less demanding
applications with respect to flow and
lifetime.
The combination of hydrophilic PES
membrane and a high-purity, allpolypropylene support structure
results in a very low level of ionic and
organic extractables, broad chemical
compatibility, and resistance to
particle shedding.
Every cartridge is fabricated in a clean
room environment, pre-flushed with
18 megohm-cm ultrapure DI water,
and 100% integrity tested in an ISOcertified facility.
Benefits
Applications
Economical filtration
High-retention hydrophilic membrane
Broad chemical compatibility for
multiple applications
100% integrity tested
BOE
Dilute HF
POU DI rinse
Bulk DI water systems
Copper plating
Ni plating
Hard disk wash processes
Other dilute acids and bases
Clariflow-WE
Specifications
Performance Attributes
Materials of Construction
Membrane
Support layers
Structure
:
:
:
Polyethersulfone
Polypropylene
Polypropylene
16
24
32
Bulk Packaging
300
0.04m
0.10m
3
200
0.20m
0.45m
100
1
0
0
10
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
25
CODE
1
5
6
A
0
Insert Style
DESCRIPTION
No Insert
(standard)
Encapsulated
316 SS Insert
Encapsulated
Polysulfone Insert
1/2" Shortened
on 222 Fitting
W
End Fittings
Filter Rating
Nominal Length
CODE DESCRIPTION
CODE MICRON
CODE LENGTH
0
DOE (CUNO)
0.04m
924
10" (250mm)
10
1
DOE
0.10m
001
20" (500mm)
20
2
226\Flat
0.20m
002
30" (750mm)
30
3
222\Flat
0.45m
40" (1,000mm) 004
40
6
020/Internal/Flat
0.65m
006
7
226\Fin
All
cartridges
are
2.75"
8
222\Fin
(69
mm)
in
diameter.
G
120/Internal/Recessed
H
End cap 213/Recessed
R
End cap (Ametek)
222/Recessed End cap
Gasket/O-Rings
CODE MATERIAL
0
Buna N
1
EPDM
2
Silicone
4
Viton
5*
Encapsulated
Viton
6*
Encapsulated
Silicone
N
None
Thickness
(Gaskets Only)
CODE THICKNESS
1
0.200" (5mm)
2
0.125" (3mm)
4
(1) 0.200" (5mm) &
(1) 0.125" (3mm)
N
None
*O-rings only
261
Clariflow-E
Benefits
Applications
BOE
Dilute HF
POU DI rinse
Bulk DI water systems
Copper plating
Ni plating
Hard disk wash processes
Other dilute acids and bases
Clariflow-E
Specifications
Performance Attributes
Materials of Construction
:
:
:
Polyethersulfone
Polypropylene
Polypropylene
20
25
30
35
0.02m
0.04m
Resistivity Rinse-up
15
400
10
0.10m
300
200
0.20m
2
0.45m
100
0.65m
Membrane
Support layers
Structure
0.80m
0
0
0
10
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
25
End Fitting
CODE DESCRIPTION
0
DOE (CUNO)
1
DOE
2* 226/Flat
3* 222/Flat
6
020/Internal/Flat
7* 226/Fin
8* 222/Fin
G
120/Internal/Recessed Endcap
H
213/Recessed Endcap (Ametek)
R
222/Recessed Endcap
* 5" cartridges are available in these configurations
2
5" cartridges are available in 0.04 through 0.8 m ratings.
3 O-rings only.
Insert Style
CODE DESCRIPTION
1 None (STD)
5 Encapsulated 316L
Stainless Steel
6 Encapsulated
Polysulfone
A 1/2" Shortened
on 222 Fitting
Nominal Length
CODE LENGTH
052 5" (130mm)
10 10" (250mm)
20 20" (500mm)
30 30" (750mm)
40 40" (1,000mm)
Filter Rating
CODE MICRON
922 0.02m
924 0.04m
001 0.10m
002 0.20m
004 0.45m
006 0.65m
008 0.80m
Gasket/O-Rings
CODE MATERIAL
0
Buna N
1
EPDM
2
Silicone
4
Viton
53 FEP Encapsulated
Viton
63 FEP Encapsulated
Silicone
N
None
THICKNESS
0.200" (5mm)
0.125" (3mm)
(1) 0.200" (5mm) &
(1) 0.125" (3mm)
No Gasket
262
Clariflow-E-Select
High-performance hydrophilic
PES membrane cartridges for
aqueous applications
Clariflow -E-SELECT cartridges are
optimized for use in microelectronics
applications such as DI water and aqueousbased chemicals. The unique mirroredanisotropic PES (Polyethersulfone)
membrane has exceptionally high flow
rates and on-stream lifetime while providing
consistent removal of both organic and
inorganic particulates.
The innovative SELECT pleating provides
increased performance over competitive
cartridges. Membrane area is increased by
over 50% while flows are 40% higher within
the same footprint. The result is one of the
longest lasting cartridges on the market.
The combination of hydrophilic PES
membrane and a high-purity,
all-polypropylene support structure results
in a very low level of ionic and organic
extractables, broad chemical compatibility,
and resistance to particle shedding.
Every cartridge is fabricated in a
clean room environment, pre-flushed with
18 megohm-cm ultrapure DI water, and
100% integrity tested in an ISO-certified
facility.
Benefits
Applications
BOE
Dilute HF
POU DI rinse
Bulk DI water systems
Copper plating
Ni plating
Hard disk wash processes
Other dilute acids and bases
Clariflow-E-Select
Specifications
Performance Attributes
Materials of Construction
Membrane
Support Layers
Structure
:
:
:
Polyethersulfone
Polypropylene
Polypropylene
Resistivity Rinse-up
Resistivity rinse-up to background minus
0.2megohm-cm of feed after 20gal @
1gpm.
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
257
Clariflow-E Mini-Cartridges
Small-volume Hydrophilic
PES membrane cartridges for
aqueous applications
Clariflow-E mini-cartridges are
optimized for use in small-volume
microelectronics applications such
as DI water and aqueous-based
chemicals. The unique mirroredanisotropic PES (Polyethersulfone)
membrane has exceptionally high flow
rates and on-stream lifetime while
providing consistent removal of both
organic and inorganic particulates
The combination of hydrophilic PES
membrane and a high-purity,
all-polypropylene support structure
results in a very low level of ionic and
organic extractables, broad chemical
compatibility, and resistance to particle
shedding.
Its design uses an internal 116 O-ring
available in several materials.
Benefits
Applications
Clariflow-E Mini-Cartridges
Specifications
Performance Attributes
Materials of Construction
:
:
:
Polyethersulfone
Polypropylene
Polypropylene
12
16
0.02m
300
0.10m
0.04m
3
200
0.20m
0.45m
2
100
1
0
0
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
25
M M
Filter Rating
CODE MICRON
001
0.1m
002
0.2m
992
0.02m
924
0.04m
004
0.45m
0-Ring
CODE MATERIAL
0
Buna N
1
EPDM
2
Silicone
4
Viton
N
None
2008 Parker Hannifin
Process Advanced Filtration Inc.
All Rights Reserved
SPEC -25 E-MC Rev G 04/08
Membrane
Support Layers
Structure
Clariflow-E Mini-Capsules
Benefits
Applications
Clariflow-E Mini-Capsules
Specifications
Performance Attributes
Materials of Construction
Polyethersulfone
Polypropylene
Polypropylene
Polypropylene
0.10m Clariflow-E
Water Flow Rate (lpm)
0
12
250
Half
200
Standard
Double
150
2
100
:
:
:
:
Membrane
Support layers
Structure
Housing
50
0
0
0.20m Clariflow-E
Water Flow Rate (lpm)
12
Half
3
200
Standard
Double
150
100
Resistivity Rinse-up
250
0
4
50
0
0
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
25
E
Size
CODE
H
S
D
DESCRIPTION
Half Size
Standard Size
Double Size
Filter Rating
Inlet/Outlet
CODE
B
H
S
D
P
J
K
G
CONNECTION
1/4" Hose Barb
1/2" Hose Barb
1 1/2" Sanitary Flange
Quick Disconnect
1/4" NPT (Male)
1/2" NPT (Male)
3/8" NPT (Female)
Swagelok 1/2"
CODE
001
002
MICRON
0.10 m
0.20 m
Vent 0-Ring
CODE
0
1
2
4
N
Z
MATERIAL
Buna N
EPDM
Silicone
Viton
None
No vents
Plating
51
52
261
Clariflow-E
Benefits
Applications
BOE
Dilute HF
POU DI rinse
Bulk DI water systems
Copper plating
Ni plating
Hard disk wash processes
Other dilute acids and bases
Clariflow-E
Specifications
Performance Attributes
Materials of Construction
:
:
:
Polyethersulfone
Polypropylene
Polypropylene
20
25
30
35
0.02m
0.04m
Resistivity Rinse-up
15
400
10
0.10m
300
200
0.20m
2
0.45m
100
0.65m
Membrane
Support layers
Structure
0.80m
0
0
0
10
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
25
End Fitting
CODE DESCRIPTION
0
DOE (CUNO)
1
DOE
2* 226/Flat
3* 222/Flat
6
020/Internal/Flat
7* 226/Fin
8* 222/Fin
G
120/Internal/Recessed Endcap
H
213/Recessed Endcap (Ametek)
R
222/Recessed Endcap
* 5" cartridges are available in these configurations
2
5" cartridges are available in 0.04 through 0.8 m ratings.
3 O-rings only.
Insert Style
CODE DESCRIPTION
1 None (STD)
5 Encapsulated 316L
Stainless Steel
6 Encapsulated
Polysulfone
A 1/2" Shortened
on 222 Fitting
Nominal Length
CODE LENGTH
052 5" (130mm)
10 10" (250mm)
20 20" (500mm)
30 30" (750mm)
40 40" (1,000mm)
Filter Rating
CODE MICRON
922 0.02m
924 0.04m
001 0.10m
002 0.20m
004 0.45m
006 0.65m
008 0.80m
Gasket/O-Rings
CODE MATERIAL
0
Buna N
1
EPDM
2
Silicone
4
Viton
53 FEP Encapsulated
Viton
63 FEP Encapsulated
Silicone
N
None
THICKNESS
0.200" (5mm)
0.125" (3mm)
(1) 0.200" (5mm) &
(1) 0.125" (3mm)
No Gasket
262
Clariflow-E-Select
High-performance hydrophilic
PES membrane cartridges for
aqueous applications
Clariflow -E-SELECT cartridges are
optimized for use in microelectronics
applications such as DI water and aqueousbased chemicals. The unique mirroredanisotropic PES (Polyethersulfone)
membrane has exceptionally high flow
rates and on-stream lifetime while providing
consistent removal of both organic and
inorganic particulates.
The innovative SELECT pleating provides
increased performance over competitive
cartridges. Membrane area is increased by
over 50% while flows are 40% higher within
the same footprint. The result is one of the
longest lasting cartridges on the market.
The combination of hydrophilic PES
membrane and a high-purity,
all-polypropylene support structure results
in a very low level of ionic and organic
extractables, broad chemical compatibility,
and resistance to particle shedding.
Every cartridge is fabricated in a
clean room environment, pre-flushed with
18 megohm-cm ultrapure DI water, and
100% integrity tested in an ISO-certified
facility.
Benefits
Applications
BOE
Dilute HF
POU DI rinse
Bulk DI water systems
Copper plating
Ni plating
Hard disk wash processes
Other dilute acids and bases
Clariflow-E-Select
Specifications
Performance Attributes
Materials of Construction
Membrane
Support Layers
Structure
:
:
:
Polyethersulfone
Polypropylene
Polypropylene
Resistivity Rinse-up
Resistivity rinse-up to background minus
0.2megohm-cm of feed after 20gal @
1gpm.
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
223
Polyflow
Absolute-rated polypropylene
depth cartridges for
electronics applications
Polyflow cartridges are optimized for
use in electronics applications. They
feature a random-fiber polypropylene
depth matrix that provides excellent
retention efficiencies and onstream
life. The unique calendering process
produces depth media with an absolute
rating and superior dirt-holding
capacity.
These cartridges are thermally bonded
from 100% virgin polypropylene to
ensure a high level of cleanliness and
chemical compatibility.
Benefits
Applications
Solder plating
Prefiltration of electronics-grade
chemicals
DI water
Polyflow
Specifications
Performance Attributes
Materials of Construction
:
:
:
Polypropylene
Polypropylene
Polypropylene
Filtration Efficiency
12
16
20
24
28
80
0.6m
1.2m
70
1.0
Cartridge Extractables
1.2
60
0.8
50
0.6
40
2.5m
30
0.4
10.0m
20.0m
10
40.0m
0.0
0
0
160F (71C)
20
5.0m
0.2
Depth media
Support layers
Structure
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
22
Insert Style
CODE DESCRIPTION
1 None (STD)
5 Encapsulated 316L
Stainless Steel
6 Encapsulated
Polysulfone
A 1/2" Shortened on
222 Fitting
0
CODE
0
1
2
3
6
7
8
G
H
R
Nominal Length
Filter Rating
End Fitting
DESCRIPTION
CODE LENGTH
CODE MICRON
DOE (CUNO)
05 5" (125mm)
006 0.6m
DOE
10 10" (250mm)
012 1.2m
226/Flat
20 20" (500mm)
025 2.5m
222/Flat
30 30" (750mm)
050 5.0m
020/Internal/Flat
40 40" (1,000mm) 100 10.0m
226/Fin
200 20.0m
222/Fin
400 40.0m
120/Internal/Recessed
Endcap
213/Recessed Endcap
(Ametek)
222/Recessed Endcap
Gasket/O-Rings
CODE MATERIAL
Buna N
0
EPDM
1
Silicone
2
Viton
4
FEP Encapsulated
5*
Viton
FEP Encapsulated
6*
Silicone
N
None
*O-rings only
Thickness
(Gaskets Only)
CODE THICKNESS
1
0.200" (5mm)
2
0.125" (3mm)
4
(1) 0.200" (5mm) &
(1) 0.125" (3mm)
N No Gasket
CMP
59
60
Polyflow-CMP
Benefits
Applications
Polyflow-CMP
Specifications
Performance Attributes
Materials of Construction
Polypropylene
Polypropylene
Polypropylene
160F (71C)
60
1.0 m
0.5 m
3.0 m
50
5.0 m
0.0
0.5
1.0
1.5
2.0
2.5
12
16
20
24
28
80
0.2m
1
0.2 m
1.2
70
Reverse:
80
Filter Rating
90
40
Forward:
100
60
0.8
0.5m
0.6
40
0.4
1.0m
20
:
:
:
Retention Efficiency in %
Depth media
Support layers
Structure
Retention Efficiency
0.2
3, 5, 10 & 30m
0
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
CMP
Style
End Fitting
Filter Rating
Nominal Length
CODE DESCRIPTION CODE DESCRIPTION
CODE LENGTH
CODE MICRON
None
1
0
DOE (CUNO)
05 5" (125mm)
002 0.2m
A 1/2" Shortened
1
DOE
10 10" (250mm)
005 0.5m
on 222 Fitting
2
226/Flat
20 20" (500mm)
010 1.0m
3
222/Flat
30 30" (750mm)
030 3.0m
6
020/Internal/Flat
40 40" (1,000mm) 050 5.0m
7
226/Fin
100 10.0m
8
222/Fin
300 30.0m
G 120/Internal/Recessed End cap
H 213/RecessedEnd cap (Ametek)
R 222/Recessed End cap
Specifications are subject to change without notification.
Polyflow is a registered trademark of Parker Hannifin Corporation.
Viton is registered trademark of E.I. DuPont de Nemours & Co., Inc.
Cuno is a registered trademark of Cuno Inc.
Gasket/O-Rings
Gasket Thickness
CODE MATERIAL
CODE DESCRIPTION
Buna N
0
1
0.200" (5mm)
(Standard)
2
0.125" (3mm)
EPDM
1
4
(1) 0.200" (5mm) &
Silicone
2
(1) 0.125" (3mm)
Viton
4
None
5*
FEP Encapsulated N
Viton
6*
FEP Encapsulated
Silicone
N
None
*O-Rings only
2008 Parker Hannifin
Process Advanced Filtration Inc.
All Rights Reserved
SPEC -PCMP Rev B 04/08
Lithography
224
Polyflow Membrane
Polypropylene
membrane cartridges for
microelectronics
Polyflow Membrane cartridges are
optimized for use in microelectronics
applications such as bulk chemicals
and photoresists. The all-polypropylene
construction is an economical
alternative to fluoropolymer-based
cartridges.
Every cartridge is fabricated in a clean
room environment, pre-flushed with
18 megohm-cm ultrapure DI water,
and 100% integrity tested in an ISOcertified facility.
Benefits
Applications
High-retention membrane
Wide range of configurations
and ratings
100% integrity tested
Bulk photoresist
Bulk electronics grade chemicals
Polyflow Membrane
Specifications
Performance Attributes
Materials of Construction
:
:
:
Polypropylene
Polypropylene
Polypropylene
Metals Extractables*
<50ppb (total)
*in a 10% HNO3 extraction
Maximum Differential Pressure/
Temperature
10
15
20
25
30
500
0.07 m
0.04 m
0.10 m
400
300
0.20 m
200
2
Membrane
Support layers
Structure
100
0
0
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
24
Nominal Length
Insert Style
End Fitting
CODE DESCRIPTION CODE DESCRIPTION CODE LENGTH
10 10" (250mm)
DOE (CUNO)
1
No Insert
0
20 20" (500mm)
DOE
(Standard)
1
30 30" (750mm)
226\Flat
5
Encapsulated
2
40 40" (1000mm)
222\Flat
Stainless Steel
3
226\Fin
6
Encapsulated
7
222\Fin
Polysulfone
8
A
1/2" Shortened
on 222 Fitting
Filter Rating
CODE MICRON
924 0.04m
001 0.10m
002 0.20m
101 0.07m
Options
Gasket/O-Rings
Thickness
(Gaskets Only)
CODE MATERIAL
CODE TREATMENT
Buna N
0
Blank Standard
CODE THICKNESS
EPDM
1
EW Wet Packed
1
0.200" (5mm)
Silicone
2
2
0.125" (3mm)
Viton
4
4
(1) 0.200" (5mm) &
5* FEP-Encapsulated
(1) 0.125" (3mm)
Viton
N
None
None
N
* O-rings only
225
Polyflow Membrane-Select
High-performance
polypropylene
membrane cartridges for
microelectronics
Polyflow MEMBRANE-SELECT
cartridges are optimized for use in
microelectronics applications such
as bulk chemicals and photoresists.
The all-polypropylene construction
is an economical alternative to
fluoropolymer-based cartridges.
The innovative SELECT pleating
provides increased performance over
competitive cartridges. Membrane area
is increased by about 30% while flows
are more than 50% higher within the
same footprint. The result is one of
the longest-lasting cartridges on the
market.
Every cartridge is fabricated in a clean
room environment, pre-flushed with
18 megohm-cm ultrapure DI water,
and 100% integrity tested in an ISOcertified facility.
Benefits
Applications
Bulk photoresist
Bulk electronics grade chemicals
High-retention membrane
Unique SELECT pleating technology
High flow rates
Wide range of configurations
and ratings
100% integrity tested
Polyflow Membrane-Select
Specifications
Performance Attributes
Materials of Construction
Membrane
:
Polypropylene
Support layers
:
Polypropylene
Structure
:
Polypropylene
16
24
8
500
Metals Extractables*
<50ppb (total)
*in a 10% HNO3 extraction
Maximum Differential Pressure/
Temperature
Forward: 70psid (4.8bar) @ 68F (20C)*
40psid (2.8bar) @ 158F (70C)
Reverse: 30psid (2.1bar) @ 68F (20C)
0.04 m
0.07 m
400
0.10 m
300
4
200
2
0.20 m
100
0
0
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
MS
Insert Style
CODE DESCRIPTION
1
No Insert (Std.)
5
Encapsulated
Stainless Steel
6
Encapsulated
Polysulfone
A
1/2" Shortened
on 222 Fitting
0
End Fitting
CODE DESCRIPTION
2
226/Flat
3
222/Flat
7
226/Fin
8
222/Fin
CODE
10
20
30
40
Length
LENGTH
10" (250mm)
20" (500mm)
30" (750mm)
40" (1000mm)
Filter Rating
CODE MICRON
924 0.04m
001 0.10m
002 0.20m
101 0.07m
CODE
0
1
2
4
5
N
O-Rings
MATERIAL
Buna
EPDM
Silicone
Viton
FEP-Encapsulated
Viton
None
Options
CODE TREAMENT
Blank Standard
W Wet Pack
121
Chemflow-PE
Chemically-resistant cartridge
for bulk and lower
temperature applications
The Chemflow-PE filter cartridge uses
a PTFE membrane along with HDPE
supports that provide an economical
alternative to all-fluoropolymer
cartridges. It provides a high degree
of retention and cleanliness along with
good flow and lifetime. This filter is
ideally suited for bulk chemical delivery
and lower temperature wet processes
(<60C). It is available dry or wetpacked for quick installation.
Benefits
Applications
Chemflow-PE
Specifications
Performance Attributes
Materials of Construction
Membrane
Support Layers
Structure
:
:
:
PTFE
HDPE
HDPE
10
15
20
25
30
0.05m
35
300
0.10m
200
0.20m
2
100
1
1.0m
0
0
10
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
PE
Insert Style
CODE DESCRIPTION
1
None (Std)
A
1/2" Shortened
on 222 Fitting
E
End Fitting
CODE DESCRIPTION
2
226/Flat
3
222/Flat
7
226/Fin
8
222/Fin
CODE
10
20
30
40
Length
LENGTH
10" (250mm)
20" (500mm)
30" (750mm)
40" (1000mm)
Filter Rating
CODE MICRON
925
0.05m
001
0.10m
002
0.20m
010
1.00m
O-Ring Material
CODE MATERIAL
0
Buna N
1
EPDM
2
Silicone
4
Viton
FEP Encapsulated
5
Viton
Options
CODE TREATMENT
Blank Standard
W
Wet Packed
Chemflow-XF
Benefits
Applications
Chemflow-XF
Specifications
Performance Attributes
Materials of Construction
Membrane
:
PTFE (Asymmetric)
Support Layers :
HDPE
Structure
:
HDPE
10-inch (250mm)
Typical Water Flow Rate (lpm)
SELECT:
11.0ft2 (0.99m2) per nominal 10"
(250mm) cartridge
12
16
20
1.40
Standard:
5.7ft2 (0.51m2) per nominal 10"
(250mm) cartridge
50
40
Metals Extractables*
Standard: <70ppb (total)
*in a 10% HNO3 extraction
1.00
ar
d
tan
30
0.80
0.60
20
CT
ELE
0.40
10
0.20
0
0
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
Pleat Technology
Insert Style
End Fitting
Length
CODE DESCRIPTION CODE DESCRIPTION CODE DESCRIPTION CODE LENGTH
ES
SELECT
1
None (Std)
2
226/Flat
10
10" (250mm)
PE
Standard
A
1/2" Shortened
3
222/Flat
20
20" (500mm)
on 222 Fitting
7
226/Fin
30
30" (750mm)
8
222/Fin
40
40" (1000mm)
Filter Rating
Options
O-Ring Material
CODE MICRON
CODE TREATMENT
CODE MATERIAL
031 0.10m XF
Blank Standard Dry
0
Buna N
W
Wet Packed
1
EPDM
2
Silicone
4
Viton
FEP Encapsulated
5
Viton
2008 Parker Hannifin
Process Advanced Filtration Inc.
All Rights Reserved
SPEC-PE-XF Rev. B 03/08
1.20
General
73
74
354
Proflow II-G
Benefits
Applications
Photoresists
Compressed gas
Non-sterile venting
Electronic grade solvents
Hot deionized water (less than 80C)
Proflow II-G
Specifications
Performance Attributes
Materials of Construction
Membrane
Support layers
Structure
:
:
:
PTFE
Polypropylene
Polypropylene
12
16
0.05m
0.10m
0.20m
100
0.45m
50
1.00m
0
0
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
Application
CODE TREATMENT
4
Standard
6
Flushed with 18
Megohm DI Water
Insert Style
DESCRIPTION
No Insert
(Standard)
Encapsulated
6
Stainless Steel
Encapsulated
Polysulfone
A
1/2" Shortened
on 222 Fitting
CODE
1
5
G
CODE
0
1
2
3
6
7
8
G
H
R
End Fitting
DESCRIPTION
DOE (Cuno)
DOE
226/Flat
222/Flat
020/Internal/Flat
226/Fin
222/Fin
120/Internal/
Recessed End cap
213/Recessed
Endcap (Ametek)
222/Recessed
End cap
Filter Rating
CODE MICRON
925
0.05m
001
0.10m
002
0.20m
004
0.45m
010
1.00m
Nominal Length
CODE LENGTH
10
10" (250mm)
20
20" (500mm)
30
30" (750mm)
40
40" (1000mm)
Gasket/O-Rings
CODE MATERIAL
0
Buna N
1
EPDM
2
Silicone
4
Viton
5*
FEP-Encapsulated
Viton
6*
FEP-Encapsulated
Silicone
N
None
Gaskets
THICKNESS
0.200" (5mm)
0.125" (3mm)
(1) 0.200" (5mm) &
(1) 0.125" (3mm)
N No Gasket
CODE
1
2
4
*O-Rings only
263
Clariflow-G
Hydrophilic Polyethersulfone
(PES) membrane for aqueous
liquid filtration applications
Clariflow-G cartridges are designed
for general-purpose use in the filtration
of high-purity liquids and aqueous
chemicals.
The mirrored-anisotropic
Polyethersulfone (PES) membrane is
inherently hydrophilic and has a pore
morphology that delivers exceptionally
high flow rates.
Because there are no added
surfactants or wetting agents, and
the support layers and structure are
all-polypropylene, the filter exhibits
low extractables, broad chemical
compatibility and good resistance to
hydrolysis.
Benefits
Applications
Chemical filtration
Liquid clarification
Recirculating fluids
General use water filtration
Deionized water systems
Clariflow-G
Specifications
Performance Attributes
Materials of Construction
Membrane
Support layers
Structure
:
:
:
Polyethersulfone
Polypropylene
Polypropylene
Reverse:
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
223
Polyflow
Absolute-rated polypropylene
depth cartridges for
electronics applications
Polyflow cartridges are optimized for
use in electronics applications. They
feature a random-fiber polypropylene
depth matrix that provides excellent
retention efficiencies and onstream
life. The unique calendering process
produces depth media with an absolute
rating and superior dirt-holding
capacity.
These cartridges are thermally bonded
from 100% virgin polypropylene to
ensure a high level of cleanliness and
chemical compatibility.
Benefits
Applications
Solder plating
Prefiltration of electronics-grade
chemicals
DI water
Polyflow
Specifications
Performance Attributes
Materials of Construction
:
:
:
Polypropylene
Polypropylene
Polypropylene
Filtration Efficiency
12
16
20
24
28
80
0.6m
1.2m
70
1.0
Cartridge Extractables
1.2
60
0.8
50
0.6
40
2.5m
30
0.4
10.0m
20.0m
10
40.0m
0.0
0
0
160F (71C)
20
5.0m
0.2
Depth media
Support layers
Structure
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
22
Insert Style
CODE DESCRIPTION
1 None (STD)
5 Encapsulated 316L
Stainless Steel
6 Encapsulated
Polysulfone
A 1/2" Shortened on
222 Fitting
0
CODE
0
1
2
3
6
7
8
G
H
R
Nominal Length
Filter Rating
End Fitting
DESCRIPTION
CODE LENGTH
CODE MICRON
DOE (CUNO)
05 5" (125mm)
006 0.6m
DOE
10 10" (250mm)
012 1.2m
226/Flat
20 20" (500mm)
025 2.5m
222/Flat
30 30" (750mm)
050 5.0m
020/Internal/Flat
40 40" (1,000mm) 100 10.0m
226/Fin
200 20.0m
222/Fin
400 40.0m
120/Internal/Recessed
Endcap
213/Recessed Endcap
(Ametek)
222/Recessed Endcap
Gasket/O-Rings
CODE MATERIAL
Buna N
0
EPDM
1
Silicone
2
Viton
4
FEP Encapsulated
5*
Viton
FEP Encapsulated
6*
Silicone
N
None
*O-rings only
Thickness
(Gaskets Only)
CODE THICKNESS
1
0.200" (5mm)
2
0.125" (3mm)
4
(1) 0.200" (5mm) &
(1) 0.125" (3mm)
N No Gasket
Polyflow-G
Benefits
Applications
Solvent filtration
Liquid clarification
Recirculating liquids
General water filtration
Reagent grade chemicals
RO/DI prefiltration
Waste water
Polyflow-G
Specifications
Performance Attributes
Materials of Construction
:
:
:
Polypropylene
Polypropylene
Polypropylene
Forward:
Reverse:
12
16
20
24
28
80
0.2m
1
1.2
Cartridge Extractables
NVR < 35mg per 10" (250mm) cartridge
Biological Safety
All components meet USP specifications for
Class VI-121C Plastics criteria.
60
0.8
0.5m
0.6
40
0.4
20
1.0m
0.2
3, 5, 10 & 30m
0
0
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
PG
Style
End Fitting
Filter Rating
Nominal Length
CODE DESCRIPTION CODE DESCRIPTION
CODE LENGTH
CODE MICRON
None
1
0
DOE (CUNO)
05 5" (125mm)
002 0.2m
A 1/2" Shortened
1
DOE
10 10" (250mm)
005 0.5m
on 222 Fitting
2
226/Flat
20 20" (500mm)
010 1.0m
3
222/Flat
30 30" (750mm)
030 3.0m
6
020/Internal/Flat
40 40" (1,000mm) 050 5.0m
7
226/Fin
100 10.0m
8
222/Fin
300 30.0m
G 120/Internal/Recessed End cap
H 213/RecessedEnd cap (Ametek)
R 222/Recessed End cap
Polyflow is a registered trademark of Parker Hannifin Corporation.
Viton is registered trademark of E.I. DuPont de Nemours & Co., Inc.
Cuno is a registered trademark of Cuno Inc.
Gasket/O-Rings
Gasket Thickness
CODE MATERIAL
CODE DESCRIPTION
0
Buna N
1
0.200" (5mm)
(Standard)
2
0.125" (3mm)
1
EPDM
4
(1) 0.200" (5mm) &
2
Silicone
(1) 0.125" (3mm)
4
Viton
None
5*
FEP Encapsulated N
Viton
6*
FEP Encapsulated
Silicone
N
None
*O-Rings only
2008 Parker Hannifin
Process Advanced Filtration Inc.
All Rights Reserved
SPEC -PG Rev H 04/08
Depth media
Support layers
Structure
222
Polyflow Mini-Cartridges
Small-volume polypropylene
depth cartridges for
electronics applications
Polyflow mini-cartridges are optimized
for use in small-volume applications
such as DI water and aqueous-based
chemicals. They feature a randomfiber polypropylene depth matrix
that provides excellent retention
efficiencies. The unique calendering
process produces depth media with
superior dirt-holding capacity that
extends useful life.
Its design uses an internal 116 O-ring
that is available in several materials.
Benefits
Applications
Prefiltration of electronics-grade
chemicals
Small-volume lab systems
DI water
Polyflow Mini-Cartridges
Specifications
Performance Attributes
Materials of Construction
Depth Media
Support Layers
Structure
:
:
:
Polypropylene
Polypropylene
Polypropylene
FILTER
RATING
NOMINAL
EFA
TYPICAL
WATER FLOW RATE*
TYPICAL
AIR FLOW RATE
ft2
cm2
gpm/psid
lpm/100mbar
scfm/psid
0.60m
0.9
836
1.0
5.5
7.6
18.8
1.20m
1.6
1486
2.1
11.5
12.0
24.0
2.50m
2.0
1858
3.3
18.1
15.4
38.1
5.00m
2.1
1950
6.0
32.9
20.0
49.5
10.00m
2.1
1950
6.5
35.7
26.6
65.7
20.00m
2.1
1950
25
137
90
221.7
40.00m
2.1
1950
40
219.5
220
541.86
Filtration Efficiency
The 0.6m offers typical retention efficiency
of up to 97-99%.1.2m, 2.5m, 5.0m, and
10.0m are 99.9% efficient at the specified
pore size.
Cartridge Extractables
NVR < 3mg per 10" (250mm) cartridge
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
22
M M
Filter Rating
CODE MICRON
006
0.60m
012
1.20m
025
2.50m
050
5.00m
100
10.00m
200
20.00m
400
40.00m
CODE
0
1
2
4
6
N
0-Ring
MATERIAL
Buna N
EPDM
Silicone
Viton
FEP Encap Silcone
None
221
Polyflow Mini-Capsules
Benefits
High flow rate reduces processing
time
Long service life minimizes change
out frequency
Broad chemical compatibility enables
use in most applications
High retention efficiency provides
excellent protection for downstream
filters
Applications
Solvent and reagent grade chemicals
Lab scale RO/DI pre-filtration
Recirculating liquids
General water filtration
Vent filtration
Polyflow Mini-Capsules
Specifications
Performance Attributes
Materials of Construction
Depth media
Support layers
Structure
Housing
:
:
:
:
Polypropylene
Polypropylene
Polypropylene
Polypropylene
FILTER
RATING
CAPSULE
SIZE
0.6m
NOMINAL
EFA
TYPICAL
WATER FLOW RATE*
TYPICAL
AIR FLOW RATE
ft2
cm2
gpm/psid
lpm/100mbar
scfm/psid
Nm3/hr/100mbar
Half
Standard
Double
0.4
0.7
0.9
371
650
836
0.4
0.8
1.0
2.2
4.4
5.5
3.4
5.9
7.6
8.4
14.6
18.8
1.2m
Half
Standard
Double
0.6
1.1
1.6
371
1021
1486
0.8
1.4
2.1
4.4
7.7
11.5
4.5
8.3
12.0
11.1
20.5
24.0
2.5m
Half
Standard
Double
0.8
1.5
2.0
743
1393
1858
1.3
2.5
3.3
7.1
13.7
18.1
6.2
11.6
15.4
15.3
28.7
38.1
5m
Half
Standard
Double
0.8
1.6
2.1
743
1486
1950
2.3
4.5
6.0
12.6
24.7
32.9
7.6
15.2
20.0
18.8
37.6
49.5
10m
Half
Standard
Double
0.9
1.6
2.1
836
1486
1950
2.8
5.0
6.5
15.3
27.5
35.7
8.7
20.3
26.6
21.4
50.0
65.7
*For fluids with viscosity of 1 cP, and capsules with sanitary fittings.
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
22
C
Size
CODE
H
S
D
DESCRIPTION
Half Size
Standard Size
Double Size
Style
CODE
B
E
DESCRIPTION
Biological
Electronics
Filter Rating
Inlet/Outlet
CODE
B
H
S
D
P
J
K
G
CONNECTION
1/4" Hose Barb
1/2" Hose Barb
1 1/2" Sanitary Flange
Quick Disconnect
1/4" NPT (Male)
1/2" NPT (Male)
3/8" NPT (Female)
Swagelok 1/2"
CODE
006
012
025
050
100
MICRON
0.60 m
1.20 m
2.50 m
5.00 m
10.00 m
Vent 0-Ring
CODE
0
1
2
4
N
Z
MATERIAL
Buna N
EPDM
Silicone
Viton
None
No vents
Housings
Trufluor
Benefits
Applications
Trufluor
Specifications
Materials of Construction
:
:
Mounting
Bracket Adapter2 :
10
20
40
30
50
1
60
0.9
0.8
Connections
Inlet/Outlet: " NPT or Butt-Weld
Vent and Drain: " NPT
50
NPT Plugs
Threaded Head
Inserts
:
:
0.7
40
0.6
0.5
30
0.4
20
0.3
0.2
10
0.1
0
0
10
12
14
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
TFH
Model
CODE
TFH
TVH
DESCRIPTION
TruFluor
TruFluor PVDF
04
Bowl Length
CODE
04
10
DESCRIPTION
4"
10"
08
N
Connection Type
CODE
N
W
DESCRIPTION
NPT
Butt Weld
Connection Size
CODE
08
DESCRIPTION
3/4"
N
Drain/Vent Type
CODE
N
W
DESCRIPTION
NPT
Butt Weld
02
Drain/Vent Size
CODE
02
DESCRIPTION
1/4"
T
Seal Material
CODE
T
DESCRIPTION
FEP
Encapsulated
Viton
3052
Trufluor +
Benefits
Applications
Trufluor +
Dimensional Data
Specifications
10" Filter
:
:
Locking Ring
16.0" / 40.6 cm
19.5" / 49.5 cm
16.0" / 40.6 cm
19.5" / 49.5
OVERALL WIDTH
HOUSING STYLE
OVERALL LENGTH
9.0" / 22.9 cm
10.5" / 26.7 cm
9.0" / 22.9 cm
11.0" / 27.9 cm
20" Filter
Connections
Vent/Drain
OVERALL WIDTH
HOUSING STYLE
Materials of Construction
OVERALL LENGTH
12.0" / 30.5 cm
10.5" / 26.7 cm
9.0" / 22.9 cm
11.0" / 27.9 cm
25.7" / 65.3 cm
29.3" / 74.4 cm
25.7" / 65.3 cm
29.3" / 74.4
30" Filter
OVERALL WIDTH
HOUSING STYLE
OVERALL LENGTH
12.0" / 30.5 cm
10.5" / 26.7 cm
9.0" / 22.9 cm
11.0" / 27.9 cm
35.5" / 90.2 cm
39.1" / 99.3 cm
35.5" / 90.2 cm
39.1" / 99.3
25
50
75
100
10
20"
30"
10"
600
500
7
400
6
5
3/4 Port
300
4
200
3
1 Port
100
1
0
0
0
10
15
20
25
30
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
TFP
Bowl Length
CODE
10
20
30
DESCRIPTION
10 (254mm)
20 (508mm)
30 (762mm)
Connection Type
CODE
F
W
DESCRIPTION
Flare
Buttweld
Drain/Vent Type
Connection
CODE
08
10
LENGTH
3/4" (19.05mm)
1 (25.40mm)
CODE
C
F
W
N
DESCRIPTION
Closed
Flare
Butt-Weld
NPTF
Drain/Vent Size
CODE
02
Seal Material
DESCRIPTION
1/4 (6.35mm)
CODE
T
DESCRIPTION
FEP
Encapsulated
Viton
C-3055
Fulflo NP
Benefits
Applications
High-purity construction
Versatile design
Economical
Good flow rates
Fulflo NP
Specifications
Materials of Construction
Vessel 100% natural FDA grade
polypropylene
Head-to-shell 2-240 O-Ring:
Standard (Industrial Grade): Viton*
Optional (FDA Grade): Buna-N, EPDM,
Silicone, FEP encapsulated silicone
Pressure Relief Button O-Ring: Buna-N only
Maximum Recommended Operating
Conditions:
Temperature:
125F (52C) @ 100 psi (6.9 bar)
Pressure:
150 psi (10.3 bar) @ 75OF (22OC)
Flow Rate:
6 gpm (23 lpm) for 10 in vessel
12 gpm (45 lpm) for 20 in vessel
Recommended Cartridge Dimensions:
NP10:
2-3/8 in to 2-3/4 in O.D. x 1 in I.D.
x 9-5/8 in to 9-13/16 in long
NP20:
2-3/8 in to 2-3/4 in O.D. x 1 in I.D.
x 19-7/8 in to 20-1/16 in long
Connection Dimensions:
Inlet/Outlet: 3/4 in (19 mm) NPTF
Vent/Drain: 1/4 in (6.4 mm) NPTF
Cartridge Seal Designs:
TC: Single-Open-End with 222 O-ring
receptacle
DO: Double-Open-End with knife edge
seal; also accepts 213 O-ring seal
cartridge (PR code)
Vessel with
pressure relief button
Vessel without
pressure relief button
Compatible
Chemicals (125F max. temp.)
Acetic Acid
Acetone
Ammonium Fluoride
Ammonium Hydroxide
Hydrochloric Acid
Hydrofluoric Acid
Nitric Acid
Phosphoric Acid
Potassium Hydroxide
Sodium Hydroxide
Tetrachloroethylene
Vessel with
1/4 NPT vent and drain
50%
99.5%
40%
10%
37%
49%, 52%
10%
85%
45%
50%
99.0%
NP10-DO-N-V
NP10-DO-R-V
NP10-D0-DV-V
NP10-TC-N-V
NP10-TC-R-V
NP10-TC-DV-V
NP20-DO-N-V
NP20-DO-R-V
NP20-DO-DV-V
NP20-TC-N-V
NP20-TC-R-V
NP20-TC-DV-V
Ordering Information
Each cartridge is identified with a product number, pore size and lot number for traceability.
Vessel Type
Shell Length
NP
10 = 10
20 = 20
Cartridge Seal
Design
Vent/Drain
Options
DO = Double-Open-End
(gasket seal)
TC = Single-Open-End
(222 O-ring)
Head-to-Shell
240 O-Ring
E=
L=
N=
S=
V=
Etching
Residue
Removal
Cleaning
Photochemical
Filtration
Filter Family
Chemicals
Primary Choice
Secondary Choice
Si etch
HF/HNO3/acetic acid
Chemflow
Proflow
SiO2 etch
BOE/BHF-HF/NH4F
Clariflow
Fluoroflow
Si3N4 etch
H3PO4
Fluorocap
Fluoroflow XF
AI etch
H3PO4/HNO3/acetic acid
Fluoroflow
Hydroxy/amine based
Chemflow (<60C),
Fluoroflow (>60C)
Proflow-E (<60C)
Fluoroflow (>60C)
Glycol/NH4F based
Glycol, NH4F
Chemflow (<60C),
Fluoroflow (>60C)
Proflow-E (<60C)
Fluoroflow (>60C)
DMSO/amine based
DMSO/amine,
EL/2 pentamone
Proflow (<60C),
Fluoroflow (>60C)
Chemflow-E (<60C)
Fluoroflow (>60C)
Pirahha
H2SO4/H2O2
Fluorocap
Fluoroflow XF
SC1
NH4OH/H2O2/H2O
Fluoroflow
SC2
HCI/H2O2/H2O
Fluoroflow
Metal compound/acid
or base/buffer
Clariflow (<60C),
Fluoroflow (>60C)
Polyflow M (<60C)
Fluoroflow (>60C)
Photoresist
Polyflow M
Chemflow
Chemflow PE
Developing
Fluoroflow
Proflow
CMP
Oxide
Polyflow G
Copper
Polyflow G
DI
Rinsing
H 2O
Clariflow (<60C),
Fluoroflow (>60C)
Ozonatde DI
Rinsing
H2O/O3
Fluoroflow
SELECT
Ultraclean
Pleating Technology
SELECT-Pleating
guard
core
standard pleating
Clariflow
Chemrez
Viton
EPR
Silicone
Buna
PFA
Acetone (Dimethylketone)
Ammonium Fluoride
Ammonium Hydroxide
Aqua Regia
BOE; NH4F:HF
Carbon Tetrachloride
Citric Acid
Coating Aquator AZ
Copper Sulfate
EGMEA
Ethanol
Freon TF
Hexamethyldisilazane (HMDS)
Methanol
Methylene Chloride
Negative Resist
96
PVC
Polyflow
Stainless Steel
Chemflow PE
A = Recommended
B = Conditionally recommended
C = Non-critical applications at ambient
F = Do not use
Polyflow Membrane
Proflow II
HOUSINGS
FluoroCap
O-RINGS
Fluoroflow
FILTERS
Piranha; (H2SO4:H2O2)
PMMA Developer
PMMA Rinse
Positive Resist
PVC
Stainless Steel
Buna
Silicone
EPR
Viton
Chemrez
Clariflow
Petroleum Ether
Polyflow
PEGMEA
Proflow II
PFA
HOUSINGS
FluoroCap
Polyflow Membrane
O-RINGS
Fluoroflow
A = Recommended
B = Conditionally recommended
C = Non-critical applications at ambient
F = Do not use
Chemflow PE
FILTERS
Sodium Hydroxide 5%
Water, Ozonated
Xylene (Xylol)
97
98
WARNING !
FAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS AND/OR SYSTEMS DESCRIBED HEREIN
OR RELATED ITEMS CAN CAUSE DEATH, PERSONAL INJURY AND PROPERTY DAMAGE.
This document and other information from Parker Hannifin Corporation, its subsidiaries and authorized distributors provide product
and/or system options for further investigation by users having technical expertise. It is important that you analyze all aspects of
your application and review the information concerning the product or system in the current product catalog. Due to the variety
of operating conditions and applications for these products or systems, the user, through its own analysis and testing, is solely
responsible for making the final selection for the products and systems and assuring that all performance, safety and warning
requirements of the application are met.