Professional Documents
Culture Documents
FM 7701
FM 7701
for
Tools Used in the
Semiconductor Industry
Foreword
The FM Approvals certification mark is intended to verify that the products and services described
will meet FM Approvals stated conditions of performance, safety and quality useful to the ends of
property conservation. The purpose of Approval Standards is to present the criteria for FM Approval
of various types of products and services, as guidance for FM Approvals personnel, manufacturers,
users and authorities having jurisdiction.
Products submitted for certification by FM Approvals shall demonstrate that they meet the intent of
the Approval Standard, and that quality control in manufacturing shall ensure a consistently uniform
and reliable product. Approval Standards strive to be performance-oriented. They are intended to
facilitate technological development.
For examining equipment, materials and services, Approval Standards:
a)
TABLE OF CONTENTS
I. INTRODUCTION ...................................................................................................................................................................... 1
1.1 Purpose .............................................................................................................................................................................. 1
1.2 Scope and Application ........................................................................................................................................................ 1
1.3 Basis for FM Approvals Assessment ................................................................................................................................ 2
1.4 Basis for Continued Assessment ....................................................................................................................................... 2
1.5 Basis For Requirements ..................................................................................................................................................... 2
1.6 Effective Date .................................................................................................................................................................... 3
II. GENERAL INFORMATION .................................................................................................................................................. 3
2.1 Requirements ..................................................................................................................................................................... 3
2.2 Applicable Documents ...................................................................................................................................................... 3
2.3 Applicability of Other Standards ...................................................................................................................................... 4
2.4 Clarification Statement on the Use of the Above Referenced Standards ....................................................................... 4
2.5 Equipment and Process Protection Requirements ............................................................................................................. 4
2.5.1 Materials of Construction ............................................................................................................................................ 4
2.5.2 Electrical Systems ...................................................................................................................................................... 5
2.5.3 Liquid Supplies .......................................................................................................................................................... 7
2.5.4 Ventilation ................................................................................................................................................................... 7
2.5.5 Steppers ...................................................................................................................................................................... 7
2.5.6 Wafer Tracks ............................................................................................................................................................... 7
2.5.7 Ion Implanters .............................................................................................................................................................. 8
2.5.8 Furnaces & Reactors .................................................................................................................................................. 9
2.5.9 Fire Protection for Wet Benches and Other Processing Tools ................................................................................. 9
2.5.10 Fire Detection and Alarm Systems ......................................................................................................................... 11
2.5.11 Protection Guidelines for Processing Tools Using FM Approved Water Mist Systems (WMS) ........................ 12
2.5.12 Protection Guidelines for Processing Tools Using Carbon Dioxide (CO2) Systems .......................................... 13
2.5.13 Protection Guidelines for Processing Tools Using FM-200 Systems .................................................................. 15
2.6 Additional Specific Equipment Requirements ............................................................................................................... 16
III. MARKING AND MANUAL REQUIREMENTS ............................................................................................................. 17
IV. REQUIRED DOCUMENTATION FOR PRODUCT ASSESSMENT EXAMINATION ............................................. 17
V. EQUIPMENT TESTING ....................................................................................................................................................... 18
VI. OPERATIONS REQUIREMENTS .................................................................................................................................... 19
6.1 Demonstrated Quality Control Program ......................................................................................................................... 19
6.2 Facilities and Procedures Audit (F&PA) ......................................................................................................................... 19
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I. INTRODUCTION
1.1 Purpose
This standard is the basis for FM Approvals Assessment of manufacturing equipment (i.e., Tools) used by the
Semiconductor Industry in semiconductor cleanroom manufacturing occupancies where the processing of semiconductor components, such as microprocessors, memory components, etc., takes place. This standard provides
for listing of semiconductor manufacturing equipment as it relates to promoting the practice of property conservation and business continuity.
FM Approvals Assessment is defined as Tool products meeting the requirements of this standard.
Headcase For purposes of this standard is defined as an area directly above the working surface of a wet bench.
Minienvironment For purposes of this standard is defined as a localized environment created by an enclosure
to isolate the product from contamination and people. (www.sematech.org: SEMI E44-95)
Module For purposes of this standard is defined as an independently operable unit that is part of a tool or
system. (www.sematech.org: SEMI E21-94)
Tool For purposes of this standard is defined as any piece of semiconductor fabrication or inspection equipment
designed to process wafers delivered in cassettes or cassettes in containers intended for use with an automated
material transport system. (www.sematech.org: SEMI E15-91)
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1.5.2 These requirements are intended for the purpose of obtaining FM Approvals Assessment of the product.
These requirements are intended primarily as guides, and strict conformity is not always mandatory.
Equipment having characteristics not anticipated by this standard may be FM Approvals Assessed if
performance equal or superior to that required by this standard is demonstrated, or if the intent of the
standard is met. Alternatively, equipment which does meet all the requirements identified in this standard
may not be FM Approvals Assessed if other conditions which adversely affect performance exist, or the
intent of this standard is not met.
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3610
3611
3615
3620
6310/6330
Tool equipment for use internationally may be required to meet the local codes and standards of its end use
location. When this is the case, Assessment of the equipment to the local codes and standards will likely take
precedence, but shall meet the same intent of equipment performance.
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2. The heater system shall be provided with over-current protection, over-temperature protection,
and low/high liquid level sensor interlocked to shut off power to the dryer.
2.5.2.6 Transformers
Only dry type transformers shall be used in process equipment located in the cleanroom.
2.5.2.7 Emergency Power
Automated wet benches shall be provided with emergency power to lift boats or wafers out of the
chemical baths in the event of a fabrication facility power loss.
2.5.3 Liquid Supplies
2.5.3.1 Storage reservoirs that are supplied by a pumped system shall be equipped with high liquid level
interlocks.
2.5.3.2 Leakage detection shall be provided in the tool.
2.5.3.3 The leakage detection shall be interlocked to shut down the liquid supply.
2.5.4 Ventilation
Ventilation shall be provided for all tools handling flammable and combustible liquids. Ventilation shall
be provided to ensure the atmosphere does not exceed 25% of the LEL in the event of the largest possible
leak. Engineering calculations shall be submitted to show that an adequate ventilation rating is provided.
The equipment shall be interlocked to remove main power in the event ventilation concentration exceed
25% of the LEL. Alternatively, it is acceptable to shut down the supply of flammable and combustible
liquids if the atmosphere exceeds 25% of the LEL.
2.5.5 Steppers
2.5.5.1 FM Approved smoke detection systems (high sensitivity types) shall be provided for the stepper.
The system shall alarm to a constantly attended location and shall be interlocked to safely shut
down power to the stepper.
2.5.5.2 HEPA or ULPA filters used within the air handling system shall meet FM Approvals Class 4920
requirements.
2.5.5.3 The foam insulating material applied to air supply and return ductwork shall be noncombustible
or, as a minimum, meet FM Approvals Class 4924 requirements.
2.5.6 Wafer Tracks
2.5.6.1 The wafer track hookup duct connection shall meet FM Approvals Class 4922 requirements.
2.5.6.2 Flammable and combustible liquids used in spin coat operations shall be kept in stainless steel
containers. The containers shall be equipped with a pressure relief valve, rated at 20 psi
(137.9 kPa).
2.5.6.3 Liquid transfer by gas pressure, nitrogen or another inert gas shall be used at 15 psi (103.4 kPa)
or less.
2.5.6.4 The arrangement for in-process storage and supply of chemicals to photo resist coating and
developing track tools shall be evaluated for fire and liquid release exposures. The following
protection shall be provided:
1) Storage and distribution cabinets and the wafer track process tool shall be non-combustible and
designed to contain the minimum amount of in-process chemical storage for efficient
production.
2) Liquids in plastic or glass containers shall have liquid leak detection or vapor detection and
shall be interlocked to shut down the flow of chemicals and alarm to a constantly attended
location. Secondary containment shall be provided for the maximum expected liquid release.
3) Flammable and combustible liquids stored in plastic or glass containers that do not meet item 1
above shall be provided with a FM Approved fire suppression system.
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4) Electrical equipment shall be suitable for Class I, Division 2 or Class I, Zone 2 locations.
Alternatively, it shall be determined that adequate ventilation is provided to ensure the
atmosphere is less than 25% of the LEL, and the equipment shall be interlocked to safely
remove main power in the event the LEL exceeds 25%.
5) Cabinets used to store wafer track chemicals shall be subdivided to separate differing classes
of chemicals, e.g., flammables, corrosives, etc.
6) Metallic (stainless steel or other suitable material) piping shall be used for conveying flammable and combustible liquids from storage containers to the point of application. If the liquid
is being aspirated (pulled) from the container to the equipment, plastic tubing is satisfactory.
7) Where single walled plastic tubing is used to convey pumped corrosive chemicals from storage
containers to the point of application, secondary containment shall be provided, either through
the use of coaxial tubing or other suitable methods. Also, liquid leak detection or vapor
detection shall be provided and shall be interlocked to shut down the flow of chemical and
alarm to a constantly attended location.
8) Piping conveying pumped/flammable liquids within the wafer track process tool shall be
welded metallic. In the event of leakage, liquid leak detection or vapor detection shall be
provided and interlocked to shut down the flow of chemical and alarm to a constantly attended
location. Also a suitable method for secondary containment shall be provided.
2.5.7 Ion Implanters
2.5.7.1 Ion implanters shall be provided with cast resin dry-type transformers or motor generator sets.
Provide new cast resin transformers and power supply units with temperature monitoring devices
(e.g., thermocouples) inside the units. The devices shall be interlocked to safely shut down by
means of a shunt trip device on the implanter circuit breaker or an upstream circuit breaker to the
implanter in the event of over-temperature.
2.5.7.2 Provide optical or air sampling type smoke detection systems interlocked to de-energize highvoltage, shut off the gas supply from the gas-box, and alarm at the tool and at a constantly
attended location.
2.5.7.3 Provide an FM Approved fire suppression system if combustibles exceed 1% by weight of the total
weight of the tool. Additionally, the use of non FM Approvals Class 4910 material shall be spread
throughout the tool, i.e., no concentrations permitted.
2.5.7.4 Use sub-atmospheric gas sources instead of high pressure cylinder sources whenever process
compatibility will allow.
2.5.7.5 If sub-atmospheric gas sources are not used, high pressure gas sources shall be arranged in
accordance with the following. However, sprinkler protection is not needed within the enclosure.
Process Gas Cabinets
1) Locate process gas cylinders containing pyrophoric, flammable, corrosive and toxic materials
which supply fabrication areas in cabinets constructed of at least 16 gauge metal.
2) Cabinets containing flammable, corrosive and toxic gases shall be provided with a gas monitoring system. Activation of the monitoring system shall automatically shut off the process gas
flow at the cylinder and initiate an alarm to the emergency control system.
a) For other gases, emergency shutoff valves (ESOV) shall be as close as practical to each
cylinder CGA (threaded outlet on gas cylinder valve body) connection.
b) Provision for a remote manual actuation of ACVs and ESOVs shall be provided for use
outside of the gas distribution room and at the fabrication area exits.
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3) The emergency shutoff valves shall also automatically close upon any of the following
conditions:
activation of the gas monitoring system
sustained (> 0.15 seconds) power failure
loss of cabinet ventilation airflow
activation of cabinet fire detectors if provided
activation of an excess flow switch
seismic activity
4) All gas cylinder cabinets shall be labeled as to gases they contain and the particular gas
concentration. All gas lines and valves within the cabinet shall be labeled as to their function,
i.e., process, purge or vent.
5) Provide continuous internal ventilation inside gas cabinets and other enclosures with flammable, corrosive and toxic gases. Arrange ventilation system to prevent the formation of dead
zones near likely leakage sites. This will prevent accumulation of gas at higher concentrations.
Size the ventilation system to provide a flow rate of 100 linear ft/min (0.51 m/sec) of internal
ventilation velocity across any potential leakage points such as cylinder heads, pressure regulators and controls (other ventilation rates may be determined acceptable provided they achieve
the same result). This air flow shall be available with the cabinet doors and access window
closed, i.e., air taken from cabinet louvers only.
2.5.8 Furnaces & Reactors
2.5.8.1 Provide Uninterrupted Power Supply (UPS) power to the process menu control circuits (typically
120V power) on all furnaces and reactors [diffusion, Chemical Vapor Deposition (CVD), Low
Pressure Chemical Vapor Deposition (LPCVD), Plasma Enhanced Chemical Vapor Deposition
(PECVD), etc.]
2.5.8.2 Provide FM Approved HEPA or ULPA filters assemblies for furnaces.
2.5.8.3 All process gas handling systems shall use welded, metallic piping or metallic tubing compatible
with the gas being transported.
2.5.8.4 All process tools handling flammable, pyrophoric or toxic gases shall be equipped with a
hazardous gas detection system. This system shall be interlocked to shut down the process tool and
gas supply to the tool.
2.5.9 Fire Protection for Wet Benches and Other Processing Tools
The following applicable guidelines are for fixed fire suppression systems installed in wet benches and
other processing tools as required by recommendations for the protection of processing tools previously
stated in this standard. In open style tools, applications of these guidelines are limited to tools with air
exhaust flow rates not exceeding 150 cfm/linear ft (14 cmm/linear meter), unless the suppression system
selected is FM Approved for higher air exhaust flow rates.
2.5.9.1 Use FM Approved fixed fire suppression systems specifically evaluated for use in cleanroom
application. The fixed fire suppression system is to be designed, installed and maintained to the
manufacturers manual as identified in the listing in the Approval Guide, a publication of
FM Approvals.
Suppression systems shall be designed to discharge with the exhaust/ventilation systems in continuous operation. If there are filter units supplying air to a minienvironment, these units may be
arranged to shut down upon detector activation. However, the tool exhaust shall always remain
operational. The amount of extinguishing agent shall be calculated based on the maximum operating exhaust/ventilation rate. Calculations and exhaust rates shall be documented.
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2.5.9.2 Interlock the electrical power supply to the tool to shut down upon the fixed fire protection system
discharge, except for the electrical power necessary to keep the exhaust/ventilation system in
operation.
2.5.9.3 Total agent supply demand for each extinguishing system shall be based on a one shot discharge
of the system over the entire tool and on the recommended duration of discharge for the specific
agent used (water mist, C02 or FM-200). The duration of discharge for water mist is 2 minutes;
for CO2 it is 1 minute for total flooding applications and 30 seconds for local application; and for
FM-200 it is 10 seconds.
2.5.9.4 Each tool shall be protected by an individual fire extinguishing system. A connected reserve
supply is not needed for individual extinguishing systems provided the tool is not operated until
the agent supply is restored after a discharge.
2.5.9.5 Zoning of a fire extinguishing system protecting a processing tool (for example, one zone protecting the working surface and subsurface of a wet bench and a separate second zone protecting
the headcase and other compartments of the same bench) may be acceptable if tools exceed 8 ft
(2.4 m) in length. Each zone shall be provided with a separate agent supply and connected reserve
or the system shall be sized for the entire bench and provided with an equally sized connected
reserve. Zoning shall not allow the working surface of the wet benches or other processing tools
to be subdivided into multiple zones of discharge if the working surface is protected by gaseous
extinguishing systems. When gaseous extinguishing systems are used, there shall be a physical
barrier separating each zone.
2.5.9.6 Working Surface and Subsurface Fixed Fire Protection
1) A 30 sec. time delay prior to discharge of the extinguishing system over the working surface
(after fire detection) is acceptable where it is desirable to allow for preparation of the working
surface for the system discharge.
2) The 30 sec. time delay is acceptable in other areas of a tool (subsurface, headcase, etc.) in a
single fixed fire protection zone system.
2.5.9.7 Headcase and Other Compartments
Fixed fire protection shall be provided for the headcase and all other compartments of processing
tools. Fixed fire protection is not needed for the following cases:
1) Compartments of combustible construction inerted with N2, to a maximum oxygen
concentration of 5%, and provided with fire detection (preferably by ionization type smoke
detection or by linear heat detection) when electrical equipment is present. The inert environment inside each compartment shall be monitored by the pressure difference between the
compartment and the ambient. Loss of N2 pressure in a compartment shall sound an alarm at
the tool and at a constantly attended location. When linear heat detection is used, it shall be
placed as near as possible to electrical equipment. The detection system shall be interlocked to
shut down the electrical power to the bench upon detection.
Nitrogen inerting will prevent ignition and combustion within a compartment; however, inerting will not prevent overheating or arcing caused by faults within electrical equipment. Such
conditions can decompose and/or melt exposed plastic materials, and lead to a possible fire on
the outside wall of the compartment or even inside the compartment, if the N2 atmosphere
within the compartment is somehow compromised. Fire detection is recommended to help
provide early warning of problems within an inerted compartment containing electrical
equipment.
2) Compartments of noncombustible construction or constructed of materials which meet
Class 4910 when:
they contain no fire hazardous materials such as flammable or combustible liquids,
they contain electrical equipment, however, the contents of the compartment are
noncombustible.
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2.5.12.1 Use FM Approved systems and components specifically evaluated for this application.
Exception: Wet benches and other tools enclosed within minienvironments, or other enclosed
hazards, can be protected with standard FM Approved CO2 systems using a total flooding
application when:
The total amount of gas is sized to compensate for the maximum operating tool ventilation
rating and for gas leaks through uncloseable openings in the enclosure during the system
discharge period.
Nozzles are located away from exhaust openings and process baths, so that a gas discharge
will not be directly exhausted or cause liquid baths to splash.
A full discharge test is performed in the protected hazard with the ventilation system of the
tool in full operation to verify that a 50% gas concentration is achieved throughout the
protected volume.
Corrosive environments are properly designed with FM Approved equipment for the
application.
2.5.12.2 Protection of Tool Subsurface (Plenum)
1) Design the CO2 system on a total flooding basis to achieve a minimum concentration of 50%
within 1 minute. The quantity of CO2 required shall be adjusted to compensate for the air
exhaust flow rate of the processing equipment.
2) When the CO2 system is arranged to protect the working surface area and plenum simultaneously, the discharge rate for the plenum shall be calculated in accordance with Data
Sheet 4-11N.
3) Determine the size and the required number of nozzles based on the total required discharge
rate of CO2 and on the discharge characteristics of the nozzle selected.
4) Use discharge nozzles that are FM Approved for total flooding application.
5) Nozzles, if possible, shall be centered on the lateral side walls, arranged to discharge
longitudinally towards the center of the plenum.
6) The manufacturers manual for the FM Approved product listing for this application shall be
referenced for requirements which supersede those in paragraphs 2.5.12.2.1 through
2.5.12.2.5. This is based on the Approval testing conducted.
2.5.12.3 Protection of Working Surface
1) For open style tools, design the CO2 system on a local application basis, rate-by-volume
method, for a minimum discharge time of 30 seconds. The basic system discharge rate of
1 lb/min/ft3 (16 kg/min/m3) of assumed volume may be proportionately reduced to account
for barriers that surround the working surface, such as: side panels, back walls, and headcase, in accordance with Data Sheet 4-11N. The assumed volume enclosing the working
surface shall be determined as outlined in Data Sheet 4-11N.
2) For tools provided with minienvironment enclosures, design the CO2 system on a total
flooding basis to achieve a minimum concentration of 50% within one minute. The quantity
of CO2 required shall be adjusted to compensate for the air exhaust flow rate of the wet
bench. If there are filter units supplying air to a minienvironment these units may be
arranged to shut down upon detector activation. However, the tool exhaust shall always
remain operational. If the supply air is not interlocked to shut down, then the CO2 system
needs to be designed to compensate for the greater of the two air flows (either the exhaust
or the supply air). A sufficient number of discharge nozzles shall be used to cover the entire
protected volume. Nozzles shall be located and directed to prevent CO2 from splashing the
liquid surfaces during discharge.
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3) The manufacturers manual for the FM Approved product listing for this application shall be
referenced for requirements which supersede those in paragraphs 2.5.12.3.1 and 2.5.12.3.2.
This is based on the Approval testing conducted.
2.5.12.4 Protection of Wet Bench Headcase and Other Compartments
1) Design the CO2 system on a total flooding basis to achieve a minimum concentration of 50%
within 1 minute in each compartment.
2) Determine the size and the required number of nozzles based on the total required discharge
rate of CO2 and on the discharge characteristics of the nozzle selected.
3) Use discharge nozzles which are FM Approved for total flooding application.
4) Locate nozzles preferably centered on the lateral sidewalls.
2.5.12.5 Acceptance of CO2 Systems
1) Final acceptance tests of a CO2 system response shall be done in accordance with Data
Sheets 4-0 and 4-11N.
2) A discharge shall be conducted to verify concentration and discharge time. The discharge
test shall be conducted under simulated operating conditions.
3) Nozzle positioning shall be visually checked.
2.5.13 Protection Guidelines for Processing Tools Using FM-200 Systems
2.5.13.1 Use FM Approved systems and components specifically evaluated for this application.
2.5.13.2 FM-200 systems shall be designed, installed and maintained in accordance with Data Sheets 4-0
and 4-8N.
2.5.13.3 Protection of Tool Subsurface (Plenum)
1) Design the FM-200 system on a total flooding basis to achieve a minimum concentration of
7% within 10 seconds. The quantity of FM-200 required shall be adjusted to compensate for
the air exhaust flow rate of the tool. Air exhaust rates and calculations to determine agent
quantity shall be documented.
2) Determine the size and the required number of nozzles based on the total required discharge
rate of FM-200 and on the discharge characteristics of the nozzle selected.
3) Locate nozzles preferably centered on the lateral side walls, arranged to discharge
longitudinally towards the center of the plenum.
4) The manufacturers manual for the FM Approved product listing for this application shall be
referenced for requirements which supersede those in paragraphs 2.5.13.3.1 through
2.5.13.3.3. This is based on the Approval testing conducted.
2.5.13.4 Protection of Tool Working Surface
1) For tools provided with minienvironment enclosures, design the FM-200 system on a total
flooding basis to achieve a minimum concentration of 7% within 10 seconds. The quantity
of FM-200 required shall be adjusted to compensate for the air exhaust flow rate of the tool.
2) Determine the size and the required number of nozzles based on the total required discharge
rate of FM-200 and on the discharge characteristics of the nozzle selected.
3) The manufacturers manual for the FM Approved product listing for this application shall be
referenced for requirements which may supersede those in paragraphs 2.5.13.4.1 through
2.5.13.4.2. This is based on the Approval testing conducted.
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marketing/ordering literature showing general specifications and functions of the equipment. These are
generally very useful in determining project costs and may also be used as attachments to the final report
for equipment Assessment projects. Typically, one copy will be sufficient.
product identification or sales specification sheet for the product being assessed. The product shall have
a unique and traceable means of identification.
instruction manual(s) providing installation, operation, and maintenance instructions
quality control procedures document(s) detailing routine testing and final inspection procedures
production drawings (stating information to assess compliance; i.e. amount of non FM Approvals
Class 4910 polymeric material not to exceed 1% of the Tools total weight)
electrical schematic(s)
final assembly drawing and parts lists (i.e. wiring/cable rating including size, flammability rating, etc.)
sub-assembly drawings or piece-part drawings/assembly drawings sufficient to detail primary circuit
components, operator controls, enclosure design, and safety interlocks and limit controls
product label drawing(s) showing all required marking information. The label drawing shall show
proposed artwork indicating the manufacturers name, address, model and serial numbers, equipment
ratings, warning markings, and the FM Approvals Assessment mark
protective grounding detail drawing(s) showing the method of protective grounding provided, including
location, size, and marking
documentation control specification showing proposed method of controlling documents which may be
identified as critical documents by FM Approvals. These drawings will be identified by FM Approvals
at the conclusion of the Assessment program. FM Approvals must be notified of changes to these
documents via Form 797, FM Approved Product Revision Report
V. EQUIPMENT TESTING
Tests, as necessary, shall be conducted to verify compliance with all requirements according to the standards
listed in Section 2. These tests shall be conducted at a location mutually agreed upon by the manufacturer and
FM Approvals. A description of these tests and the results obtained will be presented in a final report to be issued
by FM Approvals to the manufacturer.
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