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Validation For Polysilicon Deposition Reactors: Validation of Barracuda Model With Experimental Data From JPL
Validation For Polysilicon Deposition Reactors: Validation of Barracuda Model With Experimental Data From JPL
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1
2
3
4
SiH4
Feed
(vol%)
20%
50%
57%
80%
Avg. Particle
Diameter (um)
Initial
Final
227
235.5
268
297.6
236
251.9
212
241.5
Deposition Reactor
Rate
Fines
(kg/hr)
(%)
1.0
3.9%
2.4
3.0
9.4%
3.5
11.1%
Experimental results from 6" reactor (Hsu et al. 1984; 1986; 1987; Rohatgi, 1986).
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