Chapter 05 Total Pressure Measurement

Total Pressure Measurement
Vacuum Gauges
Display and Control Unit
Accessories
Contents
Introduction
Page 5-3 to 5-10
Hot Cathode Ionization Vacuum Gauges
Page 5-11 to 5-13
Wide Range Gauges
Page 5-14
Cold Cathode Ionization Vacuum Gauges
Page 5-15 to 5-17
Heat Loss Vacuum Gauges
Page 5-18 to 5-25
Capacitance Diaphragm Gauges
Page 5-26 to 5-30
Relative Pressure Manometers
Page 5-31 to 5-33
Display and Control Units
Page 5-34 to 5-40
Contamination Protection
Page 5-41
Cables
Page 5-42 to 5-43
5-2
www.vacom-vacuum.com

Introduction
For all types of vacuum applications VACOM offers reliable total pressure sensors covering a wide pressure range from atmosphere
to XHV.
This catalogue introduces VACOMs own, technologically leading products that can be used out-of-the-box or adapted in a customer
specific version. The following chapter provides an overview of VACOM-selected sensors for total pressure measurement as well
as suitable controllers. Used to determine the absolute pressure in almost every application. For more detailed information about
vacuum gauges please do not hesitate to contact our technical support team.
Measuring Principles for Total Pressure Instruments and Typical Measurement Ranges
Extreme/Ultra high vacuum
High vacuum
Medium/Rough vacuum
Bourdon
Heat loss (Pirani, Thermocouple)
Membrane (capacitance, piezo)
Wide range (ionization & heat loss)
Hot Cathode Ionization
Cold Cathode Ionization
Custom made (ionization, heat loss)
10-12
10-10
10-8
10-6
10-4
10-2
100
102
Total pressure in mbar
Pressure Units
1 Pa = 0.01mbar = 0.0075Torr
1mbar = 100 Pa = 1 hPa = 0.75Torr
1Torr = 1mmHg = 133 Pa = 1.33mbar
1 micron = 1 mTorr = 0.133 Pa = 1.33E-3mbar

1 psi = 6895 Pa = 69mbar = 51.7Torr
1 atm = 760Torr = 1013 hPa = 1013mbar = 14.7 psi
Vacuum Pressure Ranges
5-3

Selection Criteria for Vacuum Gauges
Measurement
range
Measurement
principles
Measurement
accuracy
Reproducibility
Response time
Measurement
conditions
Process media
Process environment
Bakeout capability
Measurement
results
Display
Process control
Signal transmission
Measurement range
Which method offers an appropriate measurement range?
Is one single method sufficient or is it necessary to combine different methods? Are combination gauges suitable?
Accuracy, reproducibility, and response time
What accuracy does the vacuum application require?
Which method offers a sufficient precision?
Which reproducibility and response time of the sensor is necessary?
Composition of the measured process media
Are correction factors for gas-type dependent measurements relevant/known? Is the gas composition variable?
Process and environmental conditions
Which gases and conditions is the sensor exposed to?
(Gas: corrosive, hazardous, oxidizing/reductive, etc.; Conditions: contaminated areas, particle-rich environment, low/high temperatures, high voltages, strong magnetic fields, electric discharges, fast pressure rise or surge pressures, etc.)
Is a protection of the inlet port necessary, by means of a baffle, a valve, a bent tube etc.?
Which other requirements must the sensor of choice meet? (Protection against contaminants and water; mechanical strength; climatic
and geographical conditions; ionizing radiation; etc.)
Is the examined gas mixture flammable? Are explosion-proof gauges required?
Bakeout capability
What temperature limit is required for the gauge and the cable?
Need temperature sensitive parts to be removable?
Do temperature sensitive parts need to bee removable?
Display
Is a pressure display required?
If yes, is a an active sensor with integrated display useful or is a separate display unit needed?
Process control, data logging
What type of communication interface (analog, RS232, profibus, ) is needed?
How many setpoints are necessary?
Signal transmission
Which type of signal (analog/digital) needs to be transmitted over which cable length and in which quality?
5-4

Selection Criteria for Vacuum Gauges
In general, it is essential to decide if an active (also called transmitter) or a passive one should be used. The transmitter is a gauge with
integrated measuring and control electronics. It provides standardized analog voltage (e.g. 010 V), current (e.g. 420 mA) or digital
output signals (e.g., via RS232, Profibus DP). BARION atm and BARION basic are two examples of transmitters. A passive gauge
consists only of one sensor head. The power supply and data processing is provided by an external controller. The advantage of using
a passive sensor is the possibility to use higher operating temperatures in applications, where bake-outs cannot be avoided.
BARION pro and extended is an example of the passive gauge.
An exact definition of the measured value is important since most gauges measure the absolute pressure. These sensor suit well in
applications and processes dependent on the ambient pressure such as valves opening only when there is no pressure gradient.
Total pressure instruments Made by VACOM

As our partners you can benefit from our long-term experience. Our well established product line is distinguished through its high accuracy, robustness, safety, quality, and long life-time as well as through its user-friendliness in various industrial and research processes.
We are happy to customize our devices according to your specific requirements.
5-5

Product Overview
To facilitate your search for the right vacuum gauge, the sensors in this chapter are arranged according to their measurement principle. Each sensor group is introduced with a small description of the physical processes that are used for the pressure determination.
Hot cathodes
Vacuum gauges
Relative
Capacitance
Heat loss
Cold
cathodes
BARION
basic
Measurement range (10n mbar or 10n+2 Pa or10n Torr)

n=
-12
-11 -10
-9
-8
-7
-6
-5
-4
-3
-2
-1
BARION pro
BARION extended
BARION
move
BARION
atm
COLDION basic
COLDION pro
COLDION extended
PENNINGVAC PTR 90
CVG101 "Worker Bee"
CVM211 "Stinger"
CVM201 "Super Bee"
THERMOVAC TTR 101
THERMOVAC TTR 91/96
Series DV
ANYGAS
CERAVAC CTR 100*
CERAVAC CTR 101*
DVR 2
RFM
ZSE80F
P = passive
A = active
M= mechanical
* varying versions of one device where each has a measurement range of 4 decades
5-6
Capacitance
Heat loss
Cold
cathodes
Hot cathodes
Vacuum gauge
BARION
CU 100
Digital VT
VGC301
MVC-3 C
MVC-3 B
MVC-3 A
Compatible display and control units
VMG
Product Overview
n=
basic
BARION pro
BARION
extended
BARION
move
BARION atm
COLDION basic
COLDION pro
COLDION extended
PENNINGVAC PTR 90
CVG101 "Worker Bee"
CVM211 "Stinger"
CVM201 "Super Bee"
THERMOVAC TTR 101
THERMOVAC TTR 91/96
Series DV
ANYGAS
CERAVAC CTR 100*
CERAVAC CTR 101*
DVR 2
P= passive
A= active
M= mechanical
* varying versions of one device where each has a measurement range of 4 decades
5-7

Measurement Principle
With decreasing absolute pressure levels it is difficult to measure the pressure as force per area unit. The force differences become
so small that they are no longer resolvable. A very practical but indirect method of measuring high vacuum is the "counting" of gas
particles. Thus, the particle number density n (gas density) is determined, which is proportional to the gas pressure p according to the
relation p=nkT.
The idea is to ionize the gas, since ions can be easily detected with a collector electrode. Therefore, electrons are accelerated to cause
collision ionizations. This is possible in a wide pressure range from medium up to extreme high vacuum, where the particles have a
sufficiently high mean free path. Regarding the generation of ions, there are two different types of ionization vacuum gauges:
H
ot cathode: Thermal emission from a hot cathode generates electrons. Those leave the filament because their thermal energy is
higher than the characteristic work function of the filament material (or coating).
Alternative method: Gas discharge in a cold cathode, see section cold cathode ionization vacuum gauges.
The electron emission from the cathode is restricted to a constant current Ie, e.g. 1 mA. The cathode is brought to a temperature of
1500 C releasing several watt of electrical power in form of heat. This heat causes electrons to leave the metal. The electrons accelerate to an anode grid where most electrons pass through and ionize the gas inside the grid (Fig. 2). The ions are directed towards the
collector and neutralized there. The neutralization generates a current Ic, which can be measured. The collector current is proportional
to the particle number density, hence to the pressure (Fig. 3). The fundamental equation for hot cathode gauges is
p = Ic / (Ie S)
with S describing the sensitivity of the gauge (i.e. the ion detection rate). It has to be taken into account that the sensitivity depends
on the gas composition as well, due to the different ionization probabilities for different chemical species.
Fig. 2: Functional principle of a hot cathode gauge
5-8
Fig. 3: Typical Ic(p) curve of a hot cathode gauge

Physical Effects, Limiting Factors
The pressure range of a hot cathode, where the pressure is proportional to the collector current, is limited. Depending on the design
of the gauge the upper limit varies between 0.1 mbar and 10-4 mbar (Fig. 3). This constraint is imposed by space-charge effects
and a small mean free path of the electrons. The lower limit ranges between 10-8 mbar and 10-13 mbar, since the collector current
contains a residual component which cannot be totally eliminated. The residual current sums up the contribution from various effects
(Fig. 4). The so called x-ray limit is generally used as a synonym for the residual current in hot-cathode pressure gauges (Fig. 3).
Contributions to the collector current:

Measurement
1. Gas phase ion current. (The current is proportional to
the particle-number density, hence to the pressure.)
Error effects (not proportional to pressure)
2. X-ray effect
(Bremsstrahlung from an electron impact on the anode
with following photoemission at the collector)
3. Electron stimulated desorption (ESD) from particles at
the anode (local pressure increase)
4. Outgassing of heated sensor parts
(local pressure increase)
5. Inverse x-ray effect
(Bremsstrahlung generated by electron bombardment
of the anode; following photoemission of electrons from
the outer wall; electron absorption at the collector, i.e.
inverse to the x-ray effect)
Fig. 4: Physical effects in a hot cathode (schematic, plan view with cylindrical anode grid)
Application
Hot cathode gauges are available in various designs (see below). They offer high stability, accuracy, and reproducibility. However,
the sensitivity is influenced by several factors:
their changes which affect the electron trajectories (e.g. external magnetic fields, geometrical changes of the electrodes or the
surrounding wall especially for nude gauges);
c ontamination of electrodes, e.g. by material from the vacuum system
gas type (specific ionization probabilities can be considered with a gas type correction factor).
The lower range of hot cathode gauges is limited by the residual current. Therefore, the measurement has an increasingly large
uncertainty if the pressure is smaller than 3 to 4 times the x-ray limit (Fig. 3, 6).
The life time of the hot cathode gauge is usually limited by the contamination from the vacuum system or by the depletion of the
filament coating layer. For coating applications it is recommended to use a baffle in order to slow down the contamination process.
Under harsh industrial conditions (e.g. sputtering processes at relatively high pressures), problematic glow discharges or electric
flashovers between the electrodes can occur. In those cases, grids or baffles help to protect the sensor from charge carriers and
electromagnetic fields.
The established iridium-cathodes with yttrium oxide coating are stable in oxygen environments (air intrusion). In general, the filaments
have a life time of over 10000 h, which can be lowered by reductive gas species (e.g. hydrogen or halogens). In these cases tungsten
filaments have to be used, which on the other hand are unstable in an oxygen atmosphere. Most hot cathode gauges have an extra
cathode, in case the first one breaks down.
5-9

Types of Hot Cathode Gauges
Bayard-Alpert (BA)
Ionic
collector 0 V
Anode grid
+180 V
Cathode
(Filaments)
+30 V
Since 1950, gauges are built according to the BA principle with

various designs: with a stainless steel case (advantage: stable
sensitivity); as a nude gauge (disadvantage: sensitivity depends
on gauge environment) and as a glass gauge (traditional design).
Fig. 5: Bayard-Alpert hot cathode gauge
New:
Bayard-Alpert sensor with X-ray effect compensation
(BARION extended)
The new and innovative design of the Bayard-Alpert gauge reduces the residual current by two orders of magnitude. In order to
achieve this, the inverse x-ray effect is exploited and the sensor
outgassing is reduced. The advantage is a signifi-cant improvement of the reproducibility, a higher accuracy in UHV and an
extension of the covered range up to XHV (Fig. 6).
Lower limit: 5E-12 mbar
Upper limit: 1E-2 mbar.
Fig. 6: The standard Bayard-Alpert gauge with and without

x-ray compensation compared to an extractor hot
cathode gauge.
5-10

BARION basic
Passive gauge, medium vacuum to UHV
Low heat input < 6 W
Can already be used at 1E-2 mbar
Robust construction
Technical data
Measurement range
Measurement principle
Accuracy
Vacuum connection
Max. bakeout temperature
Filaments (cathodes)
Materials in vacuum
txtAbstand
Compatible displays
txtAbstand
and controllers
5E-101 Pa | 5E-121E-2 mbar | 3.8E-127.5E-3 Torr

hot cathode ionization (Bayard-Alpert) with X-ray compensation
10 % of reading (1E-101E-3 mbar)
DN40CF
200 C
2 x iridium (yttria coated)
stainless steel, glass ceramics, Y2O3 on Ir, glass, Ag coated Cu
Compatible with
Display and control units
Gauge cable
Order code
BARION-BASIC
MVC-3 B0/BM
BATLX (X: cable length in m)
Description
BARION basic
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Accessories
Order code
BATF-2YV
Description
dual replacement filament, Ir/Y2O3, V form, CU40 gasket
ATF-001-1
dual replacement filament, Ir/Y2O3, CU40 gasket
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5-11

BARION pro/extended
Passive gauge, medium vacuum to UHV
Low heat input < 6 W
Excellent reproducibility
BARION extended: Extended measuring range down to 5E-12 mbar
Technical data
Measurement range
txtAbstand
Accuracy
Reproducibility
Vacuum connection
Materials in vacuum
BARION pro: 3E-91 Pa | 3E-111E-2 mbar |

2E-117,5E-3 Torr
BARION extended: 3E-101 Pa | 5E-121E-2 mbar |
7,5E-137,5E-3 Torr
hot cathode ionization (Bayard-Alpert)
DN40CF
400 C (without plug and cable)
200 C (with plug and cable)
BARION pro: Stainless steel, W, Au, Y2O3 on Ir, glass ceramics,
Ag coated Cu
BARION extended: Stainless steel, W, Au, Y2O3 on Ir, glass
ceramics, Ag coated Cu
Compatible with
txtAbstand
Compatible displays
txtAbstand
and controllers

Gauge cable
MVC-3 B0/BM
BATLX (X: cable length in m)
Order code
Description
BARION extended
BARION-EXTENDED
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BARION pro
BAT40C
Accessories
Order code
5-12
BATF-2YV
Description
dual replacement filament, V form
ATF-001-1
dual replacement filament
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BARION extended
BARION pro

BARION move
Passive gauge, single-axle movable, custom length and travel range
Custom length and travel range
Low outgassing due to atmosphere side wiring
Easy to maintain because of individually exchangeable electrodes
Technical data
txtAbstand
Measurement range
Mounting position
Number of filaments
Materials in vacuum
Travel length
Total length
Electrical connectors
Vacuum connection
Scope of delivery
5E-91 Pa | 5E-111E-2 mbar | 3.8E-117.5E-3 Torr

hot cathode ionization (Bayard-Alpert)
220 C (with plug and cable)
any
iridium (yttria coated)
2, replaceable
stainless steel, W, Y2O3 on Ir, Ta, glass ceramics, Au,
Ag coated Cu
dependent on applied linear translator (optional accessory)
customizable,
min ca. 150 mm, max ca. 1000 mm
special plug connector
DN40CF
sensor
Compatible with
Gauge cable
Linear shift mechanism
txtAbstand
Compatible displays
txtAbstand
and controllers
MVC-3 B
type V-BX40L
type LSM-38 et al. see chapter 10 "Mechanical Feedthroughs"
Order code
Description
BARION move sensor, length 300 mm, travel length 160 mm
V-BX40-30
Other cables/travel range on request.
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Accessories
Order code
BX40F
Description
replacement filaments, Y2O3 coated Ir
BX40G
replacement gauge kit (anode, collector, dual filament)
Application
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5-13
Wide Range Gauges

BARION atm Bayard-Alpert gauge
Wide Range Gauge consisting of hot cathode and Pirani
Trouble-free process control of atmosphere up to UHV
Easy system integration through a large selection of interfaces
Compact and robust construction
Technical data
5
txtAbstand
Compatible displays
txtAbstand
and controllers
Measurement range
Accuracy
Reproducibility
Max. operating temperature
Set points
Dimensions (H x W x D)
Ionization gauge auto on/off
Available interfaces
Scope of delivery
5E-8...5 Pa | 5E-105E-2 mbar | 3.8E-103.8E-2 Torr

20 % of reading
5 % of reading
150 C at flange (without electronic)
50 C
2 30 V DC / 0.5 A, 1x floating, 1x grounded
2x 15 W
122 X 73 x 66 mm
DN40CF | DN25KF
RS232, Analog (0...10 V, 0..20 mA), Profibus, other field bus
systems on request
gauge, power supply
Compatible with
Display and measuring unit
Gauge cable
Contamination protection
Order code
MVC-3 A, VMG
Typ BAA
lamella baffle
BARION-ATM-K-R-CF40
Vacuum connection
DN40CF
BARION-ATM-K-R-KF25
DN25KF
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Accessories
Order code
BARION-ATM-PS-EU
Description
power supply
ATLPC3
RS232 cable
BAA3
5-14
Application
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adapter cable for VMG
KF25LBAFFLE3-SVCR-304
lamella baffle with DN25KF
CF40LBAFFLE3-SVCR-304
lamella baffle with DN40CF
BARION-ATM-SE-R
BARION-ATM-S-CF40
control electronics
sensor head for DN40CF
BARION-ATM-S-KF25
sensor head for DN25KF

Determination of the particle-number density of a gas through gas discharge
In a cold cathode, the gas is ionized by collisions with electrons in the measurement volume, moving in crossed electric and magnetic
fields in spiral paths. If a high voltage potential is applied between cathode and anode, all charged particles are accelerated towards
the the corresponding electrode. During this process, other molecules can be ionized through inelastic collisions and secondary
electrons can be generated. The accelerated particles initiate the gas discharge. The ionization of the residual gas is mainly achieved
via electron ionization. Therefore, it is important to preserve those electrons in order to increase the ionization probability and to
assure the discharge as long as possible, especially at low pressures. This is achieved with the additional external magnetic field.
As shown in figure 8, a Penning cell contains two parallel cathodes with a ring anode between them. A strong permanent magnet
encloses the cell. The magnetic field lines point perpendicular to the electric field vector and have typical strength of 100 up to
200mT. The voltage difference between the cathodes and the anode is around 2 kV. In this configuration the potential energy surface
reaches a saddle point in the middle of the anode ring, where all electrostatic forces are nearly cancelled out. Electrons are emitted
from the cathode and accelerate towards the ring anode. As soon as one component of the velocity vector is perpendicular to the
magnetic field, the Lorentz force holds the electron on a spiral trajectory inside the anode, where the ionization occurs.
Cathodes
N
Anode ring
Fig. 8: Schematic sketch of a cold cathode gauge (Penning type).

Positive charged ions follow the electric field to the cathode. The impact of the ions generates a discharge current that can be
measured. Ions are influenced by the magnetic field only slightly because of their high mass as compared to electrons. The correlation
between the pressure and the discharge current is described by p=constIm, where m varies between 1 and 1.4 depending on the
design of the gauge. Hence, the discharge current is proportional to the pressure over a wide range. The ionization energy and the
ionization probability are typically different for different atoms and molecules. Therefore, pressure measurement with cold cathodes
is gas-type dependent.
Typically, cold cathodes are used for pressure ranges below 10-3 mbar. Starting with this pressure the mean free path length is
sufficient to keep the recombination probability low and the power needed for their operation reasonable. The lower pressure limit is
given by the smallest detectable ion current, which is typically reached if the pressure drops to 10-11 mbar. Another physical boundary is the ceasing of the plasma-discharge in the cell, which can be to some extent prevented by improving the sensor geometry.
Another type of cold-cathode ionization vacuum gauges, are magnetrons or inverted magnetrons. For more detailed descriptions of
their principle the reader is referred to the literature, however, the physical principle of their operation is similar to the Penning cell.
5-15

COLDION basic/pro/extended
COLDION
Reliable and long term stable pressure measurement
Very short ignition times even in extreme ultra high vacuum
Extremely low magnetic field
Technical data
Measurement range
5
txtAbstand
Accuracy
Voltage in operation
current consumption
Power consumption
Materials in vacuum
Vacuum connection
Ignition time
Operating temperature
Bakeout temperature
Weight
COLDION basic: 1E-7...0,01 Pa | 1E-9...1E-4 mbar |

7,5E-10...1E-4 Torr
COLDION pro: 1E-9...0,01 Pa | 1E-11...1E-4 mbar |
7,5E-12...1E-4 Torr
COLDION extended: 5E-10 Pa...0,01 | 5E-12...1E-4 mbar |
3,8E-12...1E-4 Torr
cold cathode ionization (Penning)
30 % of reading
Max. 5 kV
Max. 200 A
Max. 1,25 W
stainless steel, Al, Al2O3, Zr
DN40CF
1 < 10 s at p > 5E-4 mbar
basic: 0...80 C, pro/extended: 0...200 C
basic: temporary 165 C
pro/extended:
Max. 200 C in operation / with cable connected
Max. 250 C without high voltage cable at gauge
Max. 400 C without iron yoke, magnets and HV-cable
2.5 kg
Compatible with
Order code
COLDION-BASIC
COLDION CU-100
Description
cold cathode for HV
COLDION-PRO
cold cathode for UHV
COLDION-EXTENDED
cold cathode for XHV
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Compatible displays
txtAbstand
and controllers
5-16

PENNINGVAC PTR 90 Combination Gauges (inverted Magnetron / Pirani)
Active gauge, analog output, ATM to UHV
Simple wide range vacuum gauge for continuous measurement between atmosphere and UHV
Permanent pressure monitoring with the Pirani gauge
Technical data
Measurement range
txtAbstand
Accuracy
Reproducibility
Analog outputs
Temperature range (operation)
Mounting position
Heat loss gauge
Materials in vacuum
Protection category
Power supply
Scope of delivery
5E-7...1E+5 Pa | 5E-91000 mbar | 3.8E-10750 Torr

cold cathode ionization (inverted magnetron);
heat loss (Pirani)
30 % of reading (1E-8...100 mbar)
log-linear, 010.5 V, 0.6 V / pressure decade
555 C
150 C (without electronics and magnet)
any
on (< 1E-2 mbar), off (> 1E-2 mbar)
tungsten, permanently active
stainless steel, ceramics, FKM 75, Mo, Ni, Au, W
IP40
1530 V DC (< 2 W)
RJ45 (DC in, analog out, status)
gauge
Compatible with
txtAbstand
Compatible displays
txtAbstand
and controllers

Gauge cable
Order code
MVC-3 AM/BM/C
type LSL
LH-230070
Description
PTR 90
Vacuum connection
DN25KF
LH-230071
PTR 90
DN40KF
LH-230072
PTR 90
DN40CF
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5-17

Use the pressure-dependent heat transfer properties of the gas for the pressure measurement
Heat conduction is another characteristic feature of gases which is closely related to the particle density. The thermal energy is
transferred by molecule collisions. The efficiency of the transfer depends on the mean free path length of the particles. At a certain
pressure range, the thermal conductivity is proportional to the pressure, but disturbing effects such as heat flow, thermal radiation,
heat conduction from the contacts, etc. are to be expected.
400 K
Heat loss
Fig. 10: Cut through a Pirani vacuum gauge
The basic concept of a Pirani vacuum gauge relies on a thin wire (Fig. 10) heated to a constant temperature, which is significantly
higher than the temperature of the surrounding gas in the vacuum. The wire (typical diameter: 5 - 25 m; length between 50 and
100 mm) transfers the heat to the gas and is simultaneously part of an electrical circuit, for example of a Wheatstone bridge. The
pressure dependent temperature can be derived from the monitored wire resistance. The actual parameter (the electric power that
is required for the temperature stabilization) is pressure-dependent due to the proportionality of the thermal conductivity of a gas to
the pressure.
With a Wheatstone bridge, which is used for temperature stabilization, the difference between the heater voltage and a defined
reference voltage can be measured at the same time. The difference between the actual and the reference voltage is adjusted to
zero at a pressure value, where heat conduction does not play a role anymore. This calibration mainly eliminates the unwanted
effects of heat radiation and thermal conduction at connector pins of the wire. In general, the reference voltage corresponds with the
heating voltage that has to be applied when the pressure in the system is far below the lower measuring limit.
Advantages of the Pirani vacuum gauge are the wide measuring range from 10-4 mbar up to atmospheric pressure, as well as the
high accuracy of 10 % in a range below 1 mbar.
5-18

Since the thermal conductivity of a gas is also a function of the average speed of the molecules and thus a function of the molar
mass of the gas, thermal conductivity vacuum gauges measure the pressure dependent on the gas type. Therefore, the display is
usually calibrated for nitrogen and air. Other gases like argon or helium will lead to a pressure reading significantly different from the
real pressure (Fig. 11). For example, chamber venting with argon can generate a slight overpressure in the chamber which cannot
be displayed by a Pirani gauge.
Fig. 11: Pressure display of a Pirani vacuum gauge with various gas types.
Furthermore, it is essential to ensure the installation of the vacuum gauge in the correct mounting position and to follow the
manufacturer's instructions. The reason for this is that in pressure ranges is 10 mbar gas convection increases and the movement
is influenced by gravitational forces. Figure 12 schematically shows the displayed pressure for different installation positions of the
Pirani sensor. Improvements in accuracy in the range of 500-1300 mbar are obtained with convection Pirani sensors in which the
housing wall temperature is also measured in a similar way as the Pirani filament. This compensates not only the variations in the
heat loss caused by varying conditions; it also improves the accuracy up to 2 % via the regulation of the convection and the defined
mounting position.
Fig. 12: The influence of the mounting position on the measuring signal in the convection range
Low-priced versions of heat-loss vacuum gauges are thermocouples. Those heat the wire with a constant power and determine its
temperature. An advantage of this setup is the simple design. However, thermocouples are limited in their measuring range and their
accuracy.
5-19

CVG101 "Worker Bee" Convection-Enhanced Pirani Gauge
Passive gauge with convection enhancement (depending on position), ATM to medium vacuum
Improved accuracy compared to standard Pirani gauges due to convection enhancement and
improved temperature compensation
Short response time
Replaceable without previous calibration
Technical data
txtAbstand
txtAbstand
Compatible displays
txtAbstand
and controllers
Measurement range
Accuracy (typically)
Mounting position
Heat loss gauge
Materials in vacuum
Housing
Scope of delivery
0.01...1.33E+5 Pa | 1E-4...1333 mbar | 1E-4...1000 Torr

heat loss (Pirani) convection enhanced
2 % of reading (500...1000 mbar)
0...50 C
150 C (without cable)
horizontal (recommended)
gold-plated tungsten wire
Au on W, stainless steel, glass, Ni, PTFE
stainless steel with plastics housing
sensor
Compatible with
Gauge cable
Order code
VGC301, GP 275, GP 307, GP 350, GP 370

see operating devices
CVG101GA
Vacuum connection
1/8 NPT / 1/2 tube
CVG101GB
CVG101GC
DN16KF
DN25KF
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25.4
33
33
CVG101GD
DN40KF
33
CVG101GE
DN16CF
27.4
CVG101GF
DN40CF
21.6
CVG101GG
1/4 VCR, female
47.2
CVG101GH
1/2 VCR, female
44.5
Accessories
Order code
CK431-01
5-20
Description
mating connector for CVG-101 without cable
Application
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CVM211 "Stinger" Convection-Enhanced Pirani Gauge
Active gauge with convection enhancement (depending on position), ATM to medium vacuum, analog
output, digital display, setpoint
Improved accuracy compared to standard Pirani gauges due to convection enhancement and
improved temperature compensation
Short response time
Setpoint and gauge adjustment programmable
Technical data
txtAbstand
Measurement range
Resolution
Units
Display
Analog outputs
txtAbstand
Compatible displays
txtAbstand
and controllers
Process control relays

Mounting position
Heat loss gauge
Materials in vacuum
Housing
Power supply
Scope of delivery
0.01...1.33E+5 Pa | 1E-4...1333 mbar | 1E-4...1000 Torr

0.01 Pa | 1E-4 mbar | 1E-4 Torr
bar / mbar (Torr version on request)
LED (red), 2-to 3-digit
a) non-linear 0.375...5.659 V, or
b) log-linear 1...8 V (1 V / pressure decade)
1 relay (SPDT), 30 V DC / 1 A
0...40 C
70 C
Au on W, stainless steel, glass, Ni, PTFE
stainless steel with plastics housing
11...30 V DC (< 5 W)
SUB-D 9-pin (DC in, analog out, relay, relay disable)
gauge
Compatible with
Gauge cable
Order code
MVC-3 AM/BM/C
type SSL
Vacuum connection
DN16KF
Analog output
log-linear
CVM211GBA-B-NL
DN16KF
non-linear
33
CVM211GEA-B-L
DN16CF
log-linear
37
CVM211GEA-B-NL
DN16CF
non-linear
37
CVM211GBA-B-L
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33
Accessories
Order code
PS-12VDC-SUBD9
PS402-A
Description
power supply 100-230 VAC(EU)/12 VDC
Application
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battery adapter for 2 x 9 V batteries
5-21

CVM201 "Super Bee" Convection-Enhanced Pirani Gauge
Active gauge with convection enhancement (depending on position), ATM to medium vacuum, analog
output, digital display, serial setpoints
Detachable electronics, replaceable gauge tube
Analog output configurable
Technical data
Measurement range
Resolution
txtAbstand
Units
Display
Analog outputs

Operating elements
Interfaces
Mounting position
Heat loss gauge
Materials in vacuum
txtAbstand
Power supply
Scope of delivery
Order code
0.01...1.33E+5 Pa | 1E-4...1333 mbar | 1E-4...1000 Torr

0.01 Pa | 1E-4 mbar | 1E-4 Torr
Pa, mbar, Torr (adjustable)
graphic LCD (i), 2 to 4 digits
adjustable:
non-linear 0.375...5.659 V
linear 0...10 V (scaleable)
log-linear 1...8 V (1 V / pressure decade)
2 relays (SPDT), 30 V DC / 1 A
4 front keys
RS232 and RS485
0...40 C
150 C (electronics demounted)
Au on W, stainless steel, glass, Ni, PTFE (polyimide instead of
PTFE on request)
11...30 V DC (< 5 W)
SUB-D 9-pin (DC in, analog1+2, relay1, relay disable),
SUB-D 15-pin (DC in, analog1, relay1+2, relay disable, RS232,
RS485)
gauge
CVM201GBA
Vacuum connection
DN16KF
CVM201GEA
DN16CF
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30
34
Accessories
txtAbstand
Order code
PS-12VDC-SUBD9
PS402-A
5-22
Description
power supply 100-230 VAC(EU)/12 VDC
Application
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battery adapter for 2 x 9 V batteries

THERMOVAC TTR 91 / TTR 96 Pirani Gauge
Active gauge, ATM to medium vacuum, analog output, optional setpoints
Robust against overpressure up to approx. 5 bar
Replaceable sensor unit
Shared push-button for adjustment of ATM and HV
Technical data
Measurement range
Resolution
Accuracy
txtAbstand
txtAbstand
Compatible displays
txtAbstand
and controllers
Reproducibility
Response time
Analog outputs
Mounting position
Heat loss gauge
Materials in vacuum
Protection category
Power supply
Scope of delivery
0.05...1E+5 Pa | 5E-41000 mbar | 4E-4750 Torr

heat loss (Pirani), temperature compensated
1 % of reading
15 % of reading (1E-3100 mbar)
50 % of reading (< 1E-3 mbar; > 100 mbar)
80 ms
log-linear, 1.910 V
2 relays, 30 V DC / 0.5 A (optional)
5...60 C
80 C at flange (horizontal position)
250 C at flange (CF with long tube only)
any
tungsten (TTR 91, 91 S), nickel (TTR 96 S)
stainless steel, glass, Ni, NiFe, W or Ni
IP40
14...30 V DC (< 1 W)
RJ45 (DC in, analog out, optional relays)
gauge
Compatible with
Connectable gauges
Gauge cable
Order code
MVC-3 AM/BM/C
type LSL
LH-230035
Description
TTR 91
Vacuum connection
DN16KF
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15
LH-230036
TTR 91
DN16CF-R
14
LH-230037
TTR 91
DN16CF-R long
115
LH-230038
TTR 91
1/8 NPT
29
LH-230040
TTR 91 S (2 setpoints)
DN16KF
15
LH-230041
LH-230042
DN16CF-R
DN16CF-R long
14
115
LH-230043
1/8 NPT
29
LH-230045
DN16KF
15
LH-230046
DN16CF-R
14
LH-230047
DN16CF-R long
115
LH-230048
1/8 NPT
29
5-23

THERMOVAC TTR 101 Combination Gauges (Pirani / Capacitance)
Active gauge, ATM to medium vacuum, analog output, optional digital display, setpoints,
profibus
Improved accuracy at rough vacuum compared to standard Pirani gauges
Gas-type independent measurement from 10 1500 mbar
Mixed output signal of Pirani and diaphragm gauge from 1 10 mbar
Replaceable sensor unit
Technical data
Measurement range
txtAbstand
Accuracy
txtAbstand
Compatible displays
txtAbstand
and controllers
Reproducibility
Units
Display
Response time
Analog outputs
Interfaces
Mounting position
Heat loss gauge
Materials in vacuum
Vacuum connection
Protection category
Power supply
Scope of delivery
0.05...1.5E+5 Pa | 5E-41500 mbar | 4E-41125 Torr

heat loss (Pirani); diaphragm (Al2O3, capacitive, absolute pressure)
(both temperature-compensated)
50 % of reading (5E-4...1E-3 mbar)
5 % of reading (100950 mbar)
2.5 % of reading (9501050 mbar)
optional mbar, Pa, torr, micron (adjustable)
optional LCD (graphic)
< 30 ms
log-linear, 0...10.23 V, 1.286 V / pressure decade
optional: 2 relays, 30 V DC/< 0.3 A
optional Profibus
10...50 C
< 80 C at flange (horizontal position)
any
tungsten, permanently active
stainless steel, W, Al2O3, glass, Ni, NiFe, SnAg
DN16KF (others on request)
IP40
15...30 V DC (< 3 W)
RJ45 (DC in, analog out, optional relays), optional SUB-D 9-pin
(Profibus)
gauge
Compatible with
Gauge cable
Order code
LH-230350V01
5-24
MVC-3 AM/BM/C
type LSL
Description
TTR 101
Optionen
LH-230354V01
TTR 101
display
LH-230352V01
TTR 101 S2
2 relays
LH-230356V01
TTR 101 S2
2 relays, display
LH-230358V01
LH-230360V01
TTR 101 PB
TTR 101 PB
Profibus, 2 relays
Profibus, 2 relays, display
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H

DV-4, DV-6 Series Thermocouple Gauges
Passive Gauge, rough to medium vacuum
Corrosion resistant
Temperature compensated
Gauges are matched and interchangeable without calibration adjustments
DV-6S: designed for outdoor use, vibration and shock applications, with protective cap
Technical data
Measurement range
Most sensitive range
txtAbstand
Accuracy
Mounting position
Heat loss gauge
Materials in vacuum
Scope of delivery
DV-4: 0.01...20 Torr

DV-6: 1...1000 mTorr
heat loss (thermocouple)
DV-4: 0.2...5 Torr
DV-6: 10...200 mTorr
see DIGITAL VT (operating devices)
550 C
any
noble metal thermocouple
steel nickel-plated, stainless steel, glass, noble metal
sensor
Compatible with
txtAbstand

Gauge cable
DIGITAL VT
LUG-8-OFV
DV-4
Order code
txtAbstand
Compatible displays
txtAbstand
and controllers
DV-4D
Description
DV-4
Vacuum connection
standard 1/8 NPT
DV-4R
DV-4
ruggedized 1/8 NPT
DV-4D-KF-16
DV-4
DN16KF
DV-4D-KF-25
DV-4
DN25KF
DV-34
DV-4
stainless steel 1/8" NPT
calibration reference DV-4
none
DB-16D
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DV-6
Order code
Description
DV-6
Vacuum connection
1/8" NPT
DV-6S
DV-6 (w. protect. cap)
1/8" NPT
DV-36
DV-6
stainless steel 1/8" NPT
DV-6-KF-16
DV-6
DN16KF
DV-6-KF-25
DV-6
DN25KF
DV-6-VCR
DV-6-CF
DV-6
DV-6
VCR
DN16CF
DV-20
DV-6
glass 3/8" O.D.
DB-20
calibration reference DV-6
none
DV-6
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5-25

Capacitively determine the deflection of an elastic membrane
Diaphragm vacuum gauges are particularly suitable for gas type independent pressure measurements from atmosphere up to high
vacuum. They measure the elastic deformation (s) of a membrane, which is a result of different forces acting on different sides of the
membrane (Fig. 13).
Fig. 13: Principle of a capacitance diaphragm vacuum gauge. The recipient has the pressure p1.
The capacitance diaphragm vacuum gauge measures the relative pressure. A reference volume in the gauge is evacuated to a defined
value p2, p2 being much smaller than the smallest pressure that has to be measured in the recipient p1. Thus, a total pressure
measurement takes place with a negligible error, given by the residual pressure p2.
In the capacitance diaphragm vacuum gauge the pressure sensible membrane acts as one of the electrodes of a capacitor. The
deformation (s) as a function of the pressure difference causes a change in its capacity, which can be directly and accurately measured. The membranes are manufactured either out of stainless steel with a small thermal expansion coefficient or out of metal coated
ceramics. In practice, ceramic based membranes have proven to be less sensitive to thermal temperature fluctuations and zero point
stable due to improved relaxivity. Furthermore, they offer improved corrosion resistance and can be used under harsh conditions.
The membrane should be insensitive to length changes triggered by temperature variations, since this could affect the measurement.
The thickness of the membrane is a crucial factor determining the smallest measurable pressure. Typically, a membrane with a given
thickness can cover a pressure range of approximately 4 decades.
The accuracy can be improved by temperature-stabilized sensors that are regulated at 45 C constantly. Thus, the influence of the temperature on the measurement results is minimized. The advantage of the capacitance diaphragm vacuum gauge is the independence
on the gas type, a high accuracy (typically 0.2 % of the measured value) as well as the resistance against corrosive gases.
5-26

ANYGAS
Gas type independent absolute pressure gauge for pressure range of 1 to 1000 mbar
Stainless steel diaphragm
Temperature compensated
Short response time
Technical data
txtAbstand
txtAbstand
Compatible displays
txtAbstand
and controllers
Pressure range
Output signal
Overall accuracy including
temperature effects
Pressure connection
Compensated temperature range
Leakage rate
Materials in vacuum
Housing material
DN16KF, G 1/8, 1/4 NPT

-20 85 C
1E-9 mbar l/s
stainless steel 316/316L
stainless steel
Compatible with
Order code
ANYGAS-16KF
ANYGAS-NPT14
ANYGAS-G18
1...1000 mbar
Compatible to VMG control unit
1,5 % FSS (higher accuracy on request)
VMG
Description
with KF connection
Optionen
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H
with 1/4 NPT connection

with G 1/8 connection
5-27

CERAVAC CTR 100 Capacitance Diaphragm Gauges, Temperature Compensated
Active gauge, ATM to medium vacuum, ceramic diaphragm, analog output, serial interface
Multi-purpose gauge with aluminum oxide diaphragm for gas-type independent measurement
Corrosion resistant, applicable for corrosive processes
Compared to metal diaphragms reduced sensor-to-sensor variation, improved long-term stability,
reduced diaphragm reset time
Technical data
Measurement range
Picture similare
txtAbstand
Resolution
Accuracy
Temperature effect on zero
Temperature effect on span
Response time
Analog outputs
Interfaces
Materials in vacuum
txtAbstand
Compatible displays
txtAbstand
and controllers
Protection category
Power supply
Scope of delivery
4 versions:
133 Pa | 1.33 mbar | 1 Torr (1E-41 Torr);
1.33E+4 Pa | 133 mbar | 100 Torr (0.01100 Torr);
1.33E+5 Pa | 1330 mbar | 1000 Torr (0.11000 Torr)
diaphragm (Al2O3, capacitive, absolute pressure, temperature
compensated)
0.003 % F.S. (Full Scale)
0.2 % of reading
0.015 % F.S. / C (for 1 Torr version)
0.005 % F.S. / C (for 10/100/1000 Torr versions)
0.01 % of reading / C
30 ms
linear, 0...10 V DC
RS232-C
5...50 C
110 C at flange
Al2O3, stainless steel 316L, glass ceramics solder, AgTiCu hard
solder, Vacon 70
IP30
1430 V DC (< 1 W)
SUB-D 15-pin (DC in, analog out, RS232)
gauge
Compatible with
Gauge cable
Order code
CC0
Vacuum connection
1/2" tube
CC1
CC2
1/2" tube
1/2" tube
10 Torr
100 Torr
1/2" tube
1000 Torr
CC3
5-28
MVC-3 AM/BM/C
type CSL et al.
Measuring rangelbl04par
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H
1 Torr
CCC0
DN16CF-R
1 Torr
CCC1
DN16CF-R
10 Torr
CCC2
DN16CF-R
100 Torr
CCC3
DN16CF-R
1000 Torr
CCK0
DN16KF
1 Torr
CCK1
CCK2
DN16KF
DN16KF
10 Torr
100 Torr
CCK3
DN16KF
1000 Torr
CCV0
VCR8
1 Torr
CCV1
VCR8
10 Torr
CCV2
VCR8
100 Torr
CCV3
VCR8
1000 Torr

CERAVAC CTR 101 Capacitance Diaphragm Gauges (45C Heated)
Active gauges, ATM to high vacuum, two setpoints, ceramic diaphragm, serial interface
Heated gauge with excellent temperature stability for gas-type independent measurement
Corrosion resistant, applicable for corrosive processes
Compared to metal diaphragms reduced sensor-to-sensor variation, improved long-term stability,
reduced diaphragm reset time
Applicable as reference gauge for the verification of other gauges corresponding to DIN ISO 9000
Technical data
Measurement range
Picture similare
txtAbstand
Resolution
Accuracy
Temperature effect on zero
Temperature effect on span
Response time
Analog outputs
Interfaces
Materials in vacuum
Power supply
Scope of delivery
5 versions:
13.3 Pa | 0.133 mbar | 0.1 Torr (1E-50.1 Torr);
1.33E+4 Pa | 133 mbar | 100 Torr (0.01100 Torr);
1.33E+5 Pa | 1330 mbar | 1000 Torr (0.11000 Torr)
diaphragm (Al2O3, capacitive, temperature compensated 45 C)
0.003 % F.S. (Full Scale)
0.15 % of reading
0.005 % F.S. / C (for 0.1 Torr); 0.0025 % F.S. / C (for 0.1 Torr)
0.01 % of reading / C
130 ms (for 0.1 Torr), 30 ms (for 1/10/100/1000 Torr)
linear, 0...10 V DC
2 relays, 30 V DC / 0.5 A
RS232C
10...40 C
110 C at flange (non-operating)
Al2O3, stainless steel 316L
+14...+30 V DC or 15 V DC (max. 12 W)
SUB-D 15-pin (DC in, analog out, RS232C, relays)
gauge
Compatible with
txtAbstand
Compatible displays
txtAbstand
and controllers

Gauge cable
Order code
MVC-3 AM/BM/C
type CSL
CTR101T-1
Vacuum connection
1/2" tube
Measuring rangelbl04par
lbl14par
lbl13par
lbl12par
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lbl10par
lbl09par
lbl08par
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lbl06par
lbl05par
H
0.1 Torr
CTR101T0
1/2" tube
1 Torr
CTR101T1
1/2" tube
10 Torr
CTR101T2
1/2" tube
100 Torr
CTR101T3
CTR101C-1
1/2" tube
DN16CF-R
1000 Torr
0.1 Torr
CTR101C0
DN16CF-R
1 Torr
CTR101C1
DN16CF-R
10 Torr
CTR101C2
DN16CF-R
100 Torr
CTR101C3
DN16CF-R
1000 Torr
CTR101K-1
DN16KF
0.1 Torr
CTR101K0
DN16KF
1 Torr
CTR101K1
CTR101K2
DN16KF
DN16KF
10 Torr
100 Torr
CTR101K3
DN16KF
1000 Torr
CTR101V-1
VCR8
0.1 Torr
CTR101V0
VCR8
1 Torr
CTR101V1
VCR8
10 Torr
CTR101V2
VCR8
100 Torr
CTR101V3
VCR8
1000 Torr
5-29

DVR 2 Capacitance Diaphragm Gauges
Battery-operated Sensor, ATM to rough vacuum, ceramic diaphragm, ATEX version on request
Gas-type independent measurement
Corrosion resistant ceramic diaphragm
Splash-proof
Technical data
txtAbstand
Measurement range
Accuracy
Temperature coefficient
Measurement rate
Units
Display
Max. media temperature
Materials in vacuum
Housing
Power supply
Vacuum connection
Scope of delivery
Order code
txtAbstand
1...1080 hPa | 1...1080 mbar | 1...810 Torr

diaphragm (Al2O3, capacitive, absolute pressure)
< 1 hPa 1 digit | < 1 mbar 1 digit | < 0.75 Torr 1 digit
< 0.07 hPa / K | < 0.07 mbar / K | < 0.05 Torr / K
automatic, 3 s, 1 s, 1/3 s
mbar, hPa, Torr (adjustable)
LCD, digital and analog
10...60 C
80 C at pressure transducer
alumina, stainless steel, chemical resistant fluorelastomer, PBT/PPS
plastics
internal lithium battery, 9 V, 1.2 Ah
flange DN16KF with screwable staged tube clip DN6/DN10
gauge, battery
VB-682902
Description
DVR 2
VB-682903
DVR 3 (ATEX version)
Measuring
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lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
H range
Accessories
Order code
VB-612220
Description
replacement battery 9 V lithium 1.2 Ah
Vacuum
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
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connection
txtAbstand
5-30
Relative Pressure Gauges

Measurement Principle Bourdon Gauge
Determination of the deformation of an elastic tube
Pressure is the force, acting on unit area. In many cases, applying a force leads to a deformation of the object under study. The
resulting deformation can be measured and is proportional to the applied force (Hooke's law). Hence, the deformation can be used to
determine the pressure. This deformation is especially significant in the upper pressure range (up to atmosphere conditions).
In the simplest case (e.g. Bourdon gauge), the deformation of a metal ring is directly displayed on a stamped scale. This type of
gauge measures the relative pressure (relative to the atmospheric pressure). Thus, the upper limit of the scale corresponds to
1000 mbar. Taking this value as the absolute pressure would yield in a high systematic error due to oscillation of the atmospheric
pressure.
Bourdon gauge
Lever system
Pointer
Fig. 14: Bourdon gauge. The mechanical deformation of a metal ring is directly
transferred to a scale via a lever system
Piezo-Resistive Diaphragm Vacuum Gauges

Piezo-resistive determination of the deflection of an elastic membrane
Piezo-resistive diaphragm vacuum gauges can achieve higher accuracy than Bourdon gauges. They work similar to the capacitive diaphragm vacuum gauges: the pressure is derived from the mechanical deformation of a membrane measured with
a piezo-resistive element. The specific resistivity of the piezo element depends on the deflection of the membrane and thus it
provides information about the pressure difference on both sides of the membrane. The accuracy of the pressure determination
is typically around 0.5 % FS, i.e. the useable measurement range is about 3 decades.
Regular piezo-resistive diaphragm vacuum gauges have a full scale deflection between 1300 and 1500 mbar (slightly above
atmospheric pressure). The long-term and temperature stability as well as the resolution are slightly lower than the ones of
capacitive diaphragm vacuum gauges. However, piezo-resistive diaphragm vacuum gauges are considerably cheaper.
5-31
Relative Pressure Manometer

Standard and stainless steel version (corrosion resistant), ATM to rough vacuum
Visual monitoring of prevacuum lines and evacuation processes
Relative pressure manometer with absolute pressure scale (1000 mbar = ATM)
Two versions: RFM (standard) and RFMC (corrosion resistant)
Technical data
Standard
txtAbstand
Measurement range
Units
Materials in vacuum
Housing
Protection category
Scope of delivery
Order code
txtAbstand
< 10...1020 mbar on absolute pressure scale

Bourdon-tube manometer, relative pressure
mbar
-40+60 C
RFM: 60 C
RFMC: 200 C
RFM: copper alloy
RFMC: stainless steel 316L
RFM: plastics (black), dimension 80 or 63 mm
RFMC: stainless steel, dimension 63 mm
RFMC: IP 65
manometer
RFMG
Description
RFM, standard
Vacuum connection lbl04par

lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
H
G 1/4 B
RFMK
RFM, standard
DN16KF
RFMCG
RFM, stainless steel
G 1/4 B
RFMCK
RFM, stainless steel
DN16KF
RFM-I Bourdon Gauge with Analog Output

Bourdon gauge, stainless steel version (corrosion resistant), rough vacuum,
linear analog output
Visual monitoring of prevacuum lines and evacuation processes
A non-contact electronic rotary position sensor converts the position of the needle into a 4 20 mA
analog output signal
Relative pressure manometer with absolute pressure scale (1000 mbar = ATM)
Technical data
Measurement range
txtAbstand
Units
Analog outputs
Materials in vacuum
Housing
Protection category
Power supply
Scope of delivery
< 10...1020 mbar on absolute pressure scale

Bourdon-tube manometer, relative pressure, with precision
swiveling angle sensor at needle shaft (contact-free)
mbar
linear, 420 mA, two-wire
-40+60 C
100 C
stainless steel 316L
stainless steel, nominal size 63 mm
IP54
1230 V DC, max. 1 W
cable, 2 m, free ends (DC in, analog output)
manometer
txtAbstand
Order code
5-32
RFM-I-063-CG
Description
RFM-I, stainless steel
RFM-I-063-CK
RFM-I, stainless steel
Vacuum connectionlbl04par
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
H
G 1/4 B
DN16KF

ZSE80F Digital Precision Pressure Switch Module
Active gauge, positive pressure to rough vacuum, stainless steel diaphragm, piezo-resistive, analog
output, two Open Collector outputs, digital display, low leak rate
Stainless steel diaphragm for gas-type independent measurement
Transistor outputs with adjustable setpoints, switchable output modes (inverted or non-inverted), and
further options "hysteresis mode" or "window comparator mode"
Auto reference is used to adjust the transistor setpoints in the case of strong fluctuations of the
pressure source
Technical data
Measurement range
Resolution
Accuracy
Reproducibility
Response time
Units
txtAbstand
Display
Analog output
Operating elements
Leakage rate
Materials in vacuum
Housing
Protection category
Power supply
Scope of delivery
-100+100 kPa | -1+1 bar (referred to air pressure)

diaphragm (stainless steel, piezo-resistive, relative pressure)
0.1 kPa | 1 mbar
display: 2 % of ultimate value max. 1 digit
analog output: 2.5 % of ultimate value
setpoints: 0.2 % of terminal value max. 1 digit
max. 2.5 ms (with deactivated anti-chattering function)
kPa, bar, psi, mmHg, inHg, kgf/cm (adjustable)
version -M: kPa (not adjustable)
LED (red), 3-digit; one status LED per switching output
linear: 420 mA, or 15 V
NPN or PNP open collector (N.C.), 2 outputs;
NPN: max. 28 V DC / 80 mA; PNP: max. 80 mA, max. 1 V
3 front keys (UP / SET / DOWN)
050 C
1E-10 Pam3/s | 1E-9 mbarl/s | 7.5E-10 Torrl/s
stainless steel 304 and ASTM630
plastics
IP65
1224 V DC, max. 45 mA (without load)
5-pin oil resistant cable (DC in, analog I/O, transistors)
pressure switch incl. connecting cable 2 m
txtAbstand
Order code
ZSE80F-A2-R
Vacuum connection
1/4" VCR
Analog output
15V
Setpoint lbl04par
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
2 x NPN N.C.
ZSE80F-A2-S
1/4" VCR
4 20 mA
2 x NPN N.C.
ZSE80F-A2-T
1/4" VCR
15V
2 x PNP N.C.
ZSE80F-A2-V
1/4" VCR
4 20 mA
2 x PNP N.C.
ZSE80F-B2-R
1/4" Swagelok
15V
2 x NPN N.C.
ZSE80F-B2-S
1/4" Swagelok
4 20 mA
2 x NPN N.C.
ZSE80F-B2-T
1/4" Swagelok
15V
2 x PNP N.C.
ZSE80F-B2-V
1/4" Swagelok
4 20 mA
2 x PNP N.C.
txtAbstand
5-33

VMG
Display and control unit for analog and digital gauges
Technical data
Number of measurement
channels
Display range
Display
Units
Power supply
Operating elements
Temperature range
Analog output
Scope of delivery
2: 1x analoge, 1x digital
1E-101E+3 mbar
graphic LCD; current value / pressure history 1 hour / 24 hours
mbar, Pa, Torr (adjustable)
RS232
2 reed setpoints (30 V DC / 1 A)
24 V DC 10 % (max. 24 W)
4 front elements
0...40 C
0..10 V oder 020 mA / 4..20 mA
instrument, power cable (EU)
txtAbstand
Compatible with
Wide rang vacuum gauge
Order code
VMG
VACOM, digital: BARION atm

VACOM, analog: ANYGAS
other: digital: SKY025, CTR100.
analog: Porter, SKY025, PSG5xx, CTR100, TTR91/96/101, CVM
211
Description
Display and control unit
Analog
Setpoint
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
output
Accessories
Order code
BAA
ATLPC3
USB-RS232-KONV
CABLE-VMG-ADAPTER
5-34
Description
measuring cable for BARION atm
Length lbl03par
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
[m]
3 ... 20
RS232 interface cable
USB 2.0/ RS232 converter
0.8
adapter for additional manometer

COLDION CU-100
Display and control unit for one cold cathode ionization gauge
Technical data
Display range
Display
txtAbstand
Measurement range
Units
Accuracy
Power supply
Voltage in operation
Power consumption
Protection category
Electromagnetic compatibility
Flammability
Set points
Operating elements
Temperature range
Analog output
Interfaces
Power supply
Scope of delivery
1E-10...0,01 Pa | 1E-12...1E-4 mbar | 7,5E-13...1E-4 Torr

graphic LCD; current value / pressure course
1 hour / 24 hours
sensor dependent
30 % of reading
cold cathode ionization (Penning)
24 V DC
Max. 5 kV
< 15 W
IP40
2004/108/EG
EN 61010-1(2011-07)
EN 55011(2011-04)
EN 61000-3-2(2010-03)
EN 61000-3-3(2009-06)
EN 61326-1(2006-10)
non-flammable
3 (configured independently) 30 V DC / 1 A
4 capactitiv front keys
0...40 C
0..10 V oder 020 mA / 4..20 mA
RS232, Profibus (optional), other fieldbus on request
24 V DC 10 % (max. 24 W)
instrument, cable gauge, power cable (EU)
Compatible with
Measuring units
COLDION basic
COLDION pro
COLDION extended
Order code
COLDION-CU-100-3M
Description
COLDION
COLDION-CU-100-5M
COLDION
COLDION-CU-100-10M
Other cable lenghts on request.
COLDION
Analog
Setpoint
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
output
5-35

MVC-3 A Controller for BARION atm
Display and control unit for one active BARION atm wide range gauge and up to two other active
gauges (CERAVAC, THERMOVAC, CVM211 and/or PENNINGVAC)
Wide range of connectable active and passive vacuum gauges
Automatic gauge identification
Intelligent emission current control
Technical data
Connectable active gauges
txtAbstand
txtAbstand
channels
Display range
Measurement range
Measurement rate
Units
Display
Analog outputs
Digital inputs
Operating elements
Interfaces
Housing
Protection category
Power supply
Scope of delivery
Order code
BARIONatm;
CERAVAC CTR 90 / 100 / 91 / 101 (optional);
THERMOVAC TTR 90 / 91 / 96 / 211 / 216 / 100 / 101 (option);
CVM211 (log-linear version only) (optional);
PENNINGVAC PTR 225 / 237 / 90 (optional)
for BARIONatm: 1
for other active sensors: 2 (optional)
1E-81.5E+5 Pa | 1E-101500 mbar | 7.5E-111125 Torr
sensor dependent
50 / s
LED (green), 1 line per channel (4-digit mantissa, 2-digit exponent),
unit, relay status, Pir/Fil1/Fil2, display rate 4/s
1 per channel, 0...10 V, sensor dependent
4 or 6, 30 V DC / 1 A
BARION atm on/off, degas on/off, PTR on/off
4 front keys
RS232 and RS485
5...50 C
aluminum, 1/4 x 19, 3 HE
IP40
100...240 VAC, 50/60 Hz (max. 60 W)
IEC plug (AC), SUB-D 15-pin, optional 2 x RJ45 (other active
sensors), SUB-D 25-pin (Rrelay), SUB-D 9-pin (RS232 and
RS485), SUB-D 15-pin (analog and digital I/O)
MVC3-A0
Description
1 channel for BARIONatm
MVC3-AM
1 ch. f. BARIONatm, 2 ch. f. CTR/TTR/CVM-211/PTR
Analog
Setpoint
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
output
txtAbstand
Accessories
Order code
ATL3
Description
measuring cable for BARION atm, 3 m
LSL3
measuring cable for TTR and PTR, 3 m
SSL3
measuring cable for CVM-211, 3 m
CSL3
measuring cable for CTR, 3 m
ATLPC3
Length
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
lbl03par
[m]
RS232 interface cable, 3 m, 2 x SUB-D 9
USB2.0/RS232 converter, USB-cable 0.8 m, driver CD

USB-RS232-KONV
Other cable lengths see section "Cables" at the end of this chapter.
5-36

MVC-3 B Controller for BARION basic and BARION pro/extended
Controller for one passive Bayard-Alpert gauge and up to two active gauges
Technical data
Connectable passive gauges
channels
Display range
Measurement range
txtAbstand
Accuracy of electrometer
Measurement rate
Units
Display
Analog outputs
txtAbstand

Digital inputs
Operating elements
Interfaces
Filament operation modes
Electron bombardment degas
Housing
Power supply
Scope of delivery
txtAbstand
Order code
BARION basic / BARION pro/extended

CERAVAC CTR 90 / 100 / 91 / 101 (optional);
THERMOVAC TTR 90 / 91 / 96 /211 / 216 / 100 / 101 (optional);
CVM211 (log-linear version only) (optional);
PENNINGVAC PTR 225 / 237 / 90 (optional)
for passive hot cathode sensor BARION: 1
for active sensors: 2 (optional)
1E-101.5E+5 Pa | 1E-121500 mbar | 7.5E-131125 Torr
electrometer (passive sensor channel):
1E-1010 Pa | 1E-120.1 mbar | 1E-120.075 Torr
1 % of reading
50 / s
LED (green), 1 line per channel (4-digit mantissa, 2-digit exponent),
unit, relay status, Fil1/Fil2, display rate 4/s
passive sensor channel:
log-linear, 010 V, 0.625 V / pressure decade
active sensor channels:
4 or 6 relays (SPDT), 30 V DC / 1 A
BARION on/off, degas on/off, PTR on/off
4 front keys
RS232 and RS485
5...50 C
BARION, PTR 225/237: optional via a Pirani sensor
automat. emission control (DC power supply), Fil1/Fil2/auto
start through front keys, digital input or PC
aluminum, 1/4 x 19, 3 HE, type of protection IP 40
100...240 VAC, 50/60 Hz (max. 60 W)
IEC plug (AC), SUB-D hermaphroditic connector (BARION),
optional 2 x RJ45 (active sensors), SUB-D 25-pin (relay), SUB-D
9-pin (RS232 and RS485), SUB-D 15-pin (analog and digital I/O)
MVC3-B0
Description
1 channel for BARION
MVC3-BM
1 ch. f. BARION, 2 ch. f. CTR/TTR/CVM-211/PTR
Analog
Setpoint
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
output
Accessories
Order code
BSL3
Description
measuring cable for BARION, up to 250 C, 3 m
LSL3
SSL3
CSL3
ATLPC3
Length
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
lbl03par
[m]

USB-RS232-KONV
5-37

MVC-3 C Two Channel Vacuum Controller
Display and control unit for two active gauges (CERAVAC, THERMOVAC, CVM-211 and/or
PENNINGVAC)
Technical data
txtAbstand
txtAbstand
channels
Display range
Measurement range
Measurement rate
Units
Display
Analog outputs
Digital inputs
Operating elements
Interfaces
Housing
Power supply
Scope of delivery
Order code
MVC3-C
CERAVAC CTR 90 / 100 / 91 / 101;

THERMOVAC TTR 90 / 91 / 96 / 211 / 216 / 100 / 101;
CVM211 (log-linear version only);
PENNINGVAC PTR 225 / 237 / 90
2
1E-81.5E+5 Pa | 1E-101500 mbar | 7.5E-111125 Torr
sensor dependent
50 / s
LED (green), 1 line per channel (mantissa 4-digit, exponent
2-digit, unit, relay status, display rate 4 / s
4 relays (SPDT), 30 V DC / 1 A
PTR on/off
4 front keys
RS232 and RS485
5...50 C
PTR 225/237: optional via Pirani sensor
aluminum, 1/4 x 19, 3 HE, type of protection IP 40
100...240 VAC, 50/60 Hz (max. 60 W)
IEC-plug (AC), 2 x RJ45 (active sensors),
SUB-D 25-pin (relay), SUB-D 9-pin (RS232 and RS485),
SUB-D 15-pin (analog and digital I/O)
Description
MVC-3 C (2 ch. for CTR / TTR / CVM-211 / PTR)
Analog
Setpoint
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
output
Accessories
Order code
txtAbstand
LSL3
Description
SSL3
CSL3
ATLPC3
Length
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
lbl03par
[m]

USB-RS232-KONV
5-38

VGC301 Convection Vacuum Gauge Controller
Vacuum controller for a passive convection-enhanced Pirani gauge CVG101
Measurement range of 7 decades
All functions and gauge adjustment programmable via 4 front keys (menu-driven)
Analog output configurable
Technical data
txtAbstand
Connectable gauges
Number of channels
Measurement range
Resolution
Units
Display
Display units
Analog outputs
txtAbstand
txtAbstand

Interfaces
Housing
Power supply
Scope of delivery
Order code
VGC301A-EU
CVG101, GP 275
1
0.01...1.33E+5 Pa | 1E-4...1333 mbar | 1E-4...1000 Torr
0.01 Pa | 1E-4 mbar | 1E-4 Torr
graphic LCD (i), 2 to 4 digits
0.5 s
adjustable:
non-linear 0.375...5.659 V
linear 0...10 V (scaleable)
log-linear 1...8 V (1 V / pressure decade)
2 relays (SPDT), 1 A max. at 30 V
RS232 and RS485
0...40 C
aluminum, 1/8 DIN, for panel installation
100...240 V AC (50/60 Hz) or 12...30 V DC (ca. 4.5 W)
IEC plug (AC), 2-pin clamp (DC in),
SUB-D 9-pin (sensor), SUB-D 9-pin (analog/serial I/O),
6-pin clamp (relay)
controller, power cable 1.5 m (EU), no power supply
(please order sensor and measuring cable separately)
Description
VGC-301
Analog
Setpoint
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
output
Accessories
Order code
CB421-1-10F
Description
measuring cable for CVG-101
CB421-1-25F
7.5
CB421-1-50F
15
power cable for CVG101
1,5
PS301-EU
Length [m]
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
lbl03par
3
5-39

DIGITAL VT Thermocouple Vacuum Gauge Meter
Device containing measurement and control for a passive thermocouple gauge (series DV-4, DV-6)
Adjustment of VAC and ATM via two potentiometers at the front panel
Calibration Reference Tubes (NIST traceable) available
Two versions with different measurement ranges (VT-4 and VT-6)
Technical data
txtAbstand
Connectable gauges
Number of channels
Measurement range
Accuracy
Temperature coefficient
txtAbstand
Units
txtAbstand
Display
Housing
Power supply
Scope of delivery
Order code
series DV-4 (20 Torr) or series DV-6 (1000 mTorr)

1
VT-4: 0.01...20 Torr
VT-6: 1...1000 mTorr
VT-4: (30 % of reading + 0.02 Torr)
VT-6: (15 % of reading + 1 mTorr)
VT-4: (1 % of reading + 2 mTorr) / C
VT-6: (1 % of reading + 0.2 mTorr) / C
VT-4: Torr
VT-6: mTorr
LED (green), 3-digit
5...50 C
plastics, 1/8 DIN, for switch panel mounting
4.5...5.3 V DC, 155 mA
clamped connection (DC in, sensor)
control unit, power supply 90...240 V AC (US) / 5 V DC,
with 2 m cable, 2.5 m measuring cable (other lengths on request),
please order sensors separately
55-288DV4
Description
DIGITAL VT-4 (20 Torr)
55-288DV6
DIGITAL VT-6 (1000 mTorr)
Analog
Setpoint
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
output
Accessories
Order code
5-40
12-01-165
Description
UK adapter for included wall power supply
12-01-164
EU plug adapter for power supply DIGITAL VT
Length
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
lbl03par
[m]
Contamination Protection
Lamella baffle
Lamella baffle
Increases the life time of hot cathode measuring cells in critical applications by many times
Protects the total pressure sensors against harmful effects from the vacuum system
Effective barrier against particles, vapor, charge carriers and electromagnetic fields
Applicable into the flange connection between sensor and chamber
Easy cleaning (demountable), thereby long-term usability
Technical data
Mounting position
Materials in vacuum
txtAbstand
stainless steel: 250 C

FKM: 150 C (short-time 200 C)
preferably vertical and above baffle
stainless steel (1.4301, 1.4310), FKM (KF versions only)
Order code
KF25LBAFFLE3-SVCR-304
Option: clean room products (= CRP) on request.
Other flange dimensions (KF or CF) on request
5
FlangeAnalog
Setpoint
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
output
DN25KF
txtAbstand
Spiral Tube
Spiral tube
Protects the total pressure sensors against pollution such as oil vapors and dusts and lengthens
thereby their life time
Application preferably in Pirani and diaphragm sensors
The impurities are carried away by the constant incline
Regular cleaning of the spiral tube is recommended
Measuring errors, caused by the increased conductance, are to be considered
Take care of low-vibration installation.
Technical data
Mounting position
Materials in vacuum
Order code
txtAbstand
vertically (sensor above)

stainless steel
LH-230082
Flange
DN16KF
LH-230083
DN25KF
Analog
Setpoint
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
output
txtAbstand
5-41
Cables
Interface Cables
Cables for RS232 communication
Order code
Description
ATLPC3
ATLPC5
USB-RS232-KON
Analog
Setpoint
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
output
Measuring Cables for Controller MVC-3, VMG (analog connections)

Type BAA, for the connection of one BARION gauge
Order code
BAA3
Description
measuring cable, 3 m (for BARION atm)
BAA5
Analog
Setpoint
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
output

BAA10
Type LSL, for the connection of one THERMOVAC TTR or PENNINGVAC PTR gauge
Order code
Description
LSL3
LSL5
LSL10
Analog
Setpoint
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
output

LSL15
Type SSL, for the connection of one CVM211 "Stinger" gauge

Order code
SSL3
Description
SSL5
SSL10
SSL20
Analog
Setpoint
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
output
Type CSL, for the connection of one CERAVAC CTR gauge

Order code
CSL3
5-42
Description
CSL5
CSL10
CSL20
Analog
Setpoint
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
output
Cables
Measuring Cables for Controller MVC-3, VMG (analog connections)
Type BATL, for the connection of one BARION gauge
Order cod
BATL03
Description
Analog
Setpoint
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
output
measuring cable, 3 m (for BARION pro/extended, up to 200 C)
BATL05
BATL10

BATL15
5-43

Chapter 05 Total Pressure Measurement

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Chapter 05 Total Pressure Measurement

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Total Pressure Measurement

Display and Control Unit

Page 5-3 to 5-10

Hot Cathode Ionization Vacuum Gauges

Page 5-11 to 5-13

Wide Range Gauges

Cold Cathode Ionization Vacuum Gauges

Page 5-15 to 5-17

Heat Loss Vacuum Gauges

Page 5-18 to 5-25

Capacitance Diaphragm Gauges

Page 5-26 to 5-30

Relative Pressure Manometers

Page 5-31 to 5-33

Display and Control Units

Page 5-34 to 5-40

Page 5-42 to 5-43

Total Pressure Measurement

Total pressure in mbar

1 micron = 1 mTorr = 0.133 Pa = 1.33E-3mbar

Vacuum Pressure Ranges

Total Pressure Measurement

Total Pressure Measurement

Total pressure instruments Made by VACOM

Total Pressure Measurement

Measurement range (10n mbar or 10n+2 Pa or10n Torr)

CVG101 "Worker Bee"

CVM201 "Super Bee"

THERMOVAC TTR 101

THERMOVAC TTR 91/96

CERAVAC CTR 100*

CERAVAC CTR 101*

Total Pressure Measurement

Compatible display and control units

CVG101 "Worker Bee"

CVM201 "Super Bee"

THERMOVAC TTR 101

THERMOVAC TTR 91/96

CERAVAC CTR 100*

CERAVAC CTR 101*

Hot Cathode Ionization Vacuum Gauges

Fig. 2: Functional principle of a hot cathode gauge

Fig. 3: Typical Ic(p) curve of a hot cathode gauge

Hot Cathode Ionization Vacuum Gauges

Contributions to the collector current:

Hot Cathode Ionization Vacuum Gauges

Since 1950, gauges are built according to the BA principle with

Fig. 5: Bayard-Alpert hot cathode gauge

Fig. 6: The standard Bayard-Alpert gauge with and without

Hot Cathode Ionization Vacuum Gauges

5E-101 Pa | 5E-121E-2 mbar | 3.8E-127.5E-3 Torr

dual replacement filament, Ir/Y2O3, CU40 gasket

Hot Cathode Ionization Vacuum Gauges

BARION pro: 3E-91 Pa | 3E-111E-2 mbar |

Display and control units

dual replacement filament

Hot Cathode Ionization Vacuum Gauges

5E-91 Pa | 5E-111E-2 mbar | 3.8E-117.5E-3 Torr