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ATHENA>
ATHENA>
ATHENA>
ATHENA>
ATHENA>
ATHENA>
ATHENA>
ATHENA>
ATHENA>
ATHENA>
ATHENA>
ATHENA>

model file 'C:\sedatools\lib\athena\5.21.2.R\common\athenamod'... done.

ATHENA> line x loc=0 spac=0.1
line x loc=0.3 spac=0.02
line x loc=1 spac=0.1
#
line y loc=0 spac=0.03
line y loc=0.2 spac=0.02
line y loc=100 spac=0.1
#
init silicon phosphorus resistivity=6 orientation=100
method fermi
#Load sample at 500C, ramp up to 900 and pre dep
diff temperature=500 t.final=900 t.rate=15 f.n2=5
errors detected in diffuse temperature=500 t.final=900 t.rate=15 f.n2=5
command
Initial temperature must be specified or temperature rate is alr
eady specified.
Initial temperature must be specified or t.final is already spec
ified.
ATHENA> diff time=2 temperature=900 f.n2=5
Solving time (hh:mm:ss.t) 00:00:00.0 + [1.e-05 sec] [100. %] [np 4882]
Solving time (hh:mm:ss.t) 00:00:00.0 + [9.e-04 sec] [9900 %] [np 4882]
Solving time (hh:mm:ss.t) 00:00:00.0 + [0.1
sec] [1.e+04%] [np 4882]
Solving time (hh:mm:ss.t) 00:00:00.1 + [30.
sec] [3.e+04%] [np 4882]
Solving time (hh:mm:ss.t) 00:00:30.1 + [30.
sec] [100. %] [np 4882]
Solving time (hh:mm:ss.t) 00:01:00.1 + [30.
sec] [100. %] [np 4882]
Solving time (hh:mm:ss.t) 00:01:30.1 + [29.9 sec] [99.66 %] [np 4882]
Solving time (hh:mm:ss.t) 00:02:00.0
ATHENA> diff time=10 temp=900 c.boron=9e+021 f.n2=5 f.o2=0
Solving time (hh:mm:ss.t) 00:00:00.0 + [1.e-05 sec] [100. %] [np 4882]
Solving time (hh:mm:ss.t) 00:00:00.0 + [6.e-05 sec] [618.7 %] [np 4882]
Solving time (hh:mm:ss.t) 00:00:00.0 + [6.e-05 sec] [100. %] [np 4882] *
Solving time (hh:mm:ss.t) 00:00:00.0 + [8.e-04 sec] [1400 %] [np 4882]
Solving time (hh:mm:ss.t) 00:00:00.0 + [6.e-03 sec] [721.5 %] [np 4882]
Solving time (hh:mm:ss.t) 00:00:00.0 + [6.e-03 sec] [100. %] [np 4882] *
Solving time (hh:mm:ss.t) 00:00:00.0 + [6.e-02 sec] [1038 %] [np 4882]
Solving time (hh:mm:ss.t) 00:00:00.0 + [6.e-02 sec] [100. %] [np 4882] *
Solving time (hh:mm:ss.t) 00:00:00.1 + [0.4565 sec] [703.6 %] [np 4882]
Solving time (hh:mm:ss.t) 00:00:00.5 + [0.4565 sec] [100. %] [np 4882] *
Solving time (hh:mm:ss.t) 00:00:01.0 + [2.202 sec] [482.4 %] [np 4882]
Solving time (hh:mm:ss.t) 00:00:03.2 + [2.202 sec] [100. %] [np 4882] *
Solving time (hh:mm:ss.t) 00:00:05.4 + [9.628 sec] [437.2 %] [np 4882]
Solving time (hh:mm:ss.t) 00:00:15.0 + [9.628 sec] [100. %] [np 4882] *
Solving time (hh:mm:ss.t) 00:00:24.7 + [26.55 sec] [275.8 %] [np 4882]
Solving time (hh:mm:ss.t) 00:00:51.2 + [26.55 sec] [100. %] [np 4882] *
Solving time (hh:mm:ss.t) 00:01:17.8 + [36.92 sec] [139. %] [np 4882]
Solving time (hh:mm:ss.t) 00:01:54.7 + [36.92 sec] [100. %] [np 4882] *
Solving time (hh:mm:ss.t) 00:02:31.6 + [75.
sec] [203.2 %] [np 4882]
Solving time (hh:mm:ss.t) 00:03:46.6 + [75.
sec] [100. %] [np 4882] *
Solving time (hh:mm:ss.t) 00:05:01.6 + [150. sec] [200. %] [np 4882]
Solving time (hh:mm:ss.t) 00:07:31.6 + [148.3 sec] [98.89 %] [np 4882]
Solving time (hh:mm:ss.t) 00:10:00.0
ATHENA> #diff time=15 temp=850 f.n2=4 f.o2=0.2 f.n2(pocl3)=0.5 pressure=???
ATHENA> #ramp up to 950 and drive in
ATHENA> diff temperature=900 t.final=1000 t.rate=15 f.n2=5
errors detected in diffuse temperature=900 t.final=1000 t.rate=15 f.n2=
5 command
Initial temperature must be specified or temperature rate is alr

eady specified.
Initial temperature must be specified or t.final is already spec
ified.
ATHENA>
Solving
Solving
Solving
Solving
Solving
Solving
Solving
Solving
Solving
Solving
ATHENA>
Solving
Solving
Solving
Solving
Solving
Solving
Solving
Solving
Solving
Solving
Solving
Solving
Solving
Solving
Solving
Solving
Solving
ATHENA>
ATHENA>

diff time=2 temperature=1000 f.n2=5

time (hh:mm:ss.t) 00:00:00.0 + [1.e-05 sec] [100. %] [np 4882]
time (hh:mm:ss.t) 00:00:00.0 + [9.e-04 sec] [9900 %] [np 4882]
time (hh:mm:ss.t) 00:00:00.0 + [0.1
sec] [1.e+04%] [np 4882]
time (hh:mm:ss.t) 00:00:00.1 + [15.
sec] [1.e+04%] [np 4882]
time (hh:mm:ss.t) 00:00:15.1 + [15.
sec] [100. %] [np 4882] *
time (hh:mm:ss.t) 00:00:30.1 + [15.
sec] [100. %] [np 4882]
time (hh:mm:ss.t) 00:00:45.1 + [15.
sec] [100. %] [np 4882] *
time (hh:mm:ss.t) 00:01:00.1 + [30.
sec] [200. %] [np 4882]
time (hh:mm:ss.t) 00:01:30.1 + [29.9 sec] [99.66 %] [np 4882]
time (hh:mm:ss.t) 00:02:00.0
diff time=15 temperature=1000 f.n2=5
time (hh:mm:ss.t) 00:00:00.0 + [1.e-05 sec] [100. %] [np 4882]
time (hh:mm:ss.t) 00:00:00.0 + [9.e-04 sec] [9900 %] [np 4882]
time (hh:mm:ss.t) 00:00:00.0 + [0.1
sec] [1.e+04%] [np 4882]
time (hh:mm:ss.t) 00:00:00.1 + [30.14 sec] [3.e+04%] [np 4882]
time (hh:mm:ss.t) 00:00:30.2 + [28.26 sec] [93.76 %] [np 4882]
time (hh:mm:ss.t) 00:00:58.4 + [28.26 sec] [100. %] [np 4882] *
time (hh:mm:ss.t) 00:01:26.7 + [33.72 sec] [119.3 %] [np 4882]
time (hh:mm:ss.t) 00:02:00.4 + [33.72 sec] [100. %] [np 4882] *
time (hh:mm:ss.t) 00:02:34.2 + [38.9 sec] [115.3 %] [np 4882]
time (hh:mm:ss.t) 00:03:13.1 + [38.9 sec] [100. %] [np 4882] *
time (hh:mm:ss.t) 00:03:52.0 + [46.41 sec] [119.3 %] [np 4882]
time (hh:mm:ss.t) 00:04:38.4 + [46.41 sec] [100. %] [np 4882] *
time (hh:mm:ss.t) 00:05:24.8 + [109.3 sec] [235.5 %] [np 4882]
time (hh:mm:ss.t) 00:07:14.1 + [137.5 sec] [125.8 %] [np 4882]
time (hh:mm:ss.t) 00:09:31.5 + [176.7 sec] [128.6 %] [np 4882]
time (hh:mm:ss.t) 00:12:28.3 + [151.7 sec] [85.82 %] [np 4882]
time (hh:mm:ss.t) 00:15:00.0
#ramp down to 700 and anneal
diff temp=1000 t.final=500 t.rate=5 f.n2=5
errors detected in diffuse temp=1000 t.final=500 t.rate=5 f.n2=5 comman

d
Initial temperature must be specified or temperature rate is alr
eady specified.
Initial temperature must be specified or t.final is already spec
ified.
ATHENA> #diff time=15 temperature=500 f.n2=5
ATHENA> #diff time=60 temp=700 f.n2=5
ATHENA> struct outfile=AIa04012
ATHENA>
EXTRACT> init infile="AIa04012"
EXTRACT> extract name="Tox" thickness oxide mat.occno=1 x.val=0
Extracted results: N/A
Check cut line and/or selected quantities
EXTRACT> extract name="xj" xj material="Silicon" mat.occno=1 x.val=0 junc.occno=
1
xj=0.521092 um from top of first Silicon layer X.val=0
EXTRACT> extract name="rho" sheet.res material="Silicon" mat.occno=1 x.val=0.000
5 region.occno=1
rho=30.6974 ohm/square X.val=0.0005
EXTRACT> quit

#=========================================
#
2D boron predeposition
#=========================================
go athena
#the
line
line
line

x
x
x
x

dimension
loc = 0.0
loc = 0.6
loc = 1.0

definition
spacing=0.05
spacing=0.01
spacing=0.05

#the vertical definition

line y loc = 0
spacing = 0.1
line y loc = 100 spacing = 0.2
#initialize the mesh
init silicon phosphorus resistivity=6 orientation=100
method fermi
#perform diffusion
#diff temperature=500 t.rate=15 time=26.666 f.n2=5
#diff time=2 temperature=900 f.n2=5
diffuse time=10 temperature=900 c.boron=9e20 f.n2=5
#ramp up to 950 and drive in
#diff temperature=900 t.rate=15 time=6.666 f.n2=5
diff time=2 temperature=1000 f.n2=5
diff time=15 temperature=1000 f.n2=5
#ramp
#diff
#diff
#diff

down to 700 and anneal

temp=1000 t.rate=-5 time=100 f.n2=5
time=15 temperature=500 f.n2=5
time=60 temp=700 f.n2=5

extract name="Tox" thickness oxide mat.occno=1 x.val=0

extract name="xj" xj material="Silicon" mat.occno=1 x.val=0 junc.occno=1
extract name="rho" sheet.res material="Silicon" mat.occno=1 x.val=0.0005 region.
occno=1

structure outfile=advdifex08_end.str
tonyplot advdifex08_end.str
quit