Precision positioning systems are fundamental comp nents and significantly

important to many industrial applications such as machine tools, measuring

machines and
semiconductor manufacturing systems to optical instruments
and medical application equipment. The demands of high
precision performance have drastically increased in recent
years. In conventional, designers often improve mechanism
features for high motion control performance and its proved
onerous and costly. For this account, a practical control
which has simple and transparency design and structure,
produces fast response, nearly zero overshoot, high robust
performance and excellent accuracy is required as solution,
especially in industry.
Industry has favored classical controllers such as PID
and/or lead-lag elements, due to their structure simplicity
and well-known characteristics. With its three-term functionality covering treatment to both transient and steady-state
responses, proportional-integral-derivative (PID) control offers the simplest and yet most efficient solution to many
real-world control problems [1]. However, it does not satisfy
the recent demanding requirements.
Much research has been devoted to the solution of this
problem. For example, many kinds of robust controllers
which are different with regard to the disturbance compensation law, have been developed under the matching condition. Control with disturbance observer [2], time-optimal
control [3], adaptive robust control [4] and internal model
control with enhanced robustness [5] are good examples of
these robust methods. Besides, a number of studies have

examined sliding mode controllers for high robust precision positioning [6] recently. Even though those advanced
controllers are capable to gain performances satisfied in
robustness of precision positioning, determination of known
model parameters of the plant and sufficient knowledge
of control theory in their design procedure are necessary.
The performance of these controllers are based on how
accurate the known model and known parameters are used
in their design procedures. Their design processes are timeconsuming and much labor is needed to identify its parameters. It is difficult task for operators who are unfamiliar with
advanced controllers. In industry application, these advanced
controllers are often impracticable.