DEFINITION OF

POLYCRYSTALLINE

In between the single

crystal and
amorphous, exist

polycrystalline
, which is
made up of a number of
smaller crystals
known as
crystallites.

LEARNING
OUTCOMES
2
. SILICON FORMATION
At the end of this topic, student
should be able to:

Explain how silicon is formed from

the raw material.

Draw the block diagram of ultra

pure
polysilicon
formation

process from sand and write the

chemical equation.

State the rate of silicon purity in

each step.

Define rate of silicon purity.

State the reasons why high rate of

silicon purity is important
in IC fabrication.

LEARNING
OUTCOMES
3

. SINGLE CRYSTAL
FORMATION PROCESS
At the end of this topic,
student should be able to:

Explain two methods of

crystalline growth :
Czochralski
and float zone.

Compare between the two

method in terms of
crystal size, impurities
density, crystal structure and
electrical resistivity.

CZOCHRALSKI
METHOD

Start with crucible of

molten silicon (EGS)
(
1425
o

C)

Insert
crystal seed
in

melt.

Slowly rotate / raise

seed to form single
crystal
boule
/ingot

After cooling, slice

boule
/ingot into wafers
& polish
.
Crucible

Molten
Silicon