Capacitive Sensor Interfaces

Bernhard E. Boser
Berkeley Sensor & Actuator Center
Dept. of Electrical Engineering and Computer Sciences
University of California, Berkeley

Capacitive Sensor Interfaces 1996 B. Boser 1

Example: Vibratory Gyroscope
Electrostatic Interfaces for:

vibration (about z-axis)

x/y-axis tilt
x/y-axis force feedback
x/y-axis frequency tuning
quadrature error cancellation
...

Ref: T. Juneau et al., Micromachined Dual Input

Axis Angular Rate Sensor, Solid-State Sensor
and Actuator Workshop, Hilton Head, SC, June
1996.

Capacitive Sensor Interfaces 1996 B. Boser 2

 Outline
Capacitor Basics
MEMS Capacitor Configurations
parallel plate
transverse comb
lateral comb
Simulation
Summary

Capacitive Sensor Interfaces 1996 B. Boser 3

 Capacitor Basics
Q
Definition: C=
V
1
Energy: E= CV 2
2
E 1 C 2
Force: F= = V
x 2 x
F
Spring Constant: k=
x
C
FM = x
Figure of Merit (for sensing): C

Capacitive Sensor Interfaces 1996 B. Boser 4

 Capacitors in MEMS
always present
no special fabrication steps required
must deal with in any case
versatile
sensor & actuator
negligible temperature coefficient
high accuracy: position measurements < 0.01
demonstrated
challenges
small signals, parasitics
undesired electrostatic actuation

Capacitive Sensor Interfaces 1996 B. Boser 5

 Outline
Capacitor Basics
MEMS Capacitor Configurations
parallel plate
transverse comb
lateral comb
Simulation
Summary

Capacitive Sensor Interfaces 1996 B. Boser 6

 Parallel Plate Capacitor
x

Area A x0
V

200 m
MEMS Applications
accelerometers
gyroscopes
actuators
Ref: D. Young et al., A Micromachined Variable
Capacitor for Monolithic Low-Noise VCOs, varactor replacement
Solid-State Sensor and Actuator Workshop,
Hilton Head, SC, June 1996.

Capacitive Sensor Interfaces 1996 B. Boser 7

Parallel Plate Capacitor (cont.)
Example
0 A
Capacitance C= 1400 fF
x0 + x
C C
Sensitivity = -1400 fF/m
x x0 + x
1 CV 2
Force F=
2 x0 + x
-18 N
CV 2
Spring Constant k= 35 N/m
( x 0 + x )2
1
Figure of Merit FM = -1m-1
x0 + x
(for x0 = 1 m, A = (400 m)2, V = 5 V (constant), 0 = 8.85 aF/m)

large capacitance & force (large area)

nonlinear electrostatic spring

Capacitive Sensor Interfaces 1996 B. Boser 8

 Application: Position Sensing
A
,
+ V sin t 0 C
0 Cs = C xx
x +x 0 x
0
Cx=0 ( x << x )
Cs 0
Vout C =C
ref 0
C
ref Buffer
V C C
ref

 + C
FM x 0
Vout 0
V sin t
0
2 signal

0

offset

minimize offset: match Cref to C0

output proportional to x (x << x0)
sense voltage V0: parasitic force

Capacitive Sensor Interfaces 1996 B. Boser 9

 Matching Cref to C0
parallel plate capacitor
anchor (top view)
stiff suspension

suspension

sense capacitor Cs reference capacitor Cref

Ref.: W. Yun et al., Surface micromachined, digitally force-balanced accelerometer with integrated
CMOS detection circuitry, Solid-State Sensor and Actuator Workshop, Hilton Head, 1992, pp. 21-
25.

Capacitive Sensor Interfaces 1996 B. Boser 10

 Pull-In Voltage
F el -k el /k m e c h

1
F m e c h = -k m e c h x
x 0 +x V0

0
-x/x 0
1/3

2k x(x + x)
F =F V2 = mech 0
el mech 0 C

2x
k = k
el mech x + x
0

Capacitive Sensor Interfaces 1996 B. Boser 11

 Pull-In Voltage (cont.)
electrostatic force always positive, Fel 0
pull-in occurs when kel > k mech
x0
x >
3

2 x0 km
V0 >
3 15
. C0

e.g. x0 = 1m, C0 = 1pF, km = 1N/m |V0| < 0.54 V to avoid pull-in

Capacitive Sensor Interfaces 1996 B. Boser 12

 Voltage versus Charge
constant voltage constant charge

V = const
C C

1 1 Q2
E = CV 2 E=
2 2 C
1 CV 2 1 Q2
F= F=
2 x0 + x 2 0 A
CV 2
k= k=0
( x 0 + x )2
force dependent on x force independent of x, no pull-in
(quadratic in V) (quadratic in Q)

Capacitive Sensor Interfaces 1996 B. Boser 13

 Outline
Capacitor Basics
MEMS Capacitor Configurations
parallel plate
transverse comb
lateral comb
Simulation
Summary

Capacitive Sensor Interfaces 1996 B. Boser 14

 Transverse Comb
flexture

anchor

N Unit Cells
Fixed Plates

Ref: Analog Devices ADXL-50

Capacitive Sensor Interfaces 1996 B. Boser 15

 Transverse Comb (cont.)
x

N movable fingers

L
Cs1 Cs2

A A
0 Lt
C s1 = N + C fringe
Anchor 0
x + x
x 0+ x
A A
t x=0

x>0 0 Lt
Cs2 = N + C fringe
x0 x

Capacitive Sensor Interfaces 1996 B. Boser 16

 Transverse Comb (cont.)
C C
C s1 C x = 0 x Cs 2 = C x = 0 + x
x x

Example
0 NLt
Capacitance C x=0 = + C fringe 125 fF
x0


C
0
C C0
Sensitivity 105 fF/m
x x0

1 C fringe
Figure of Merit FM 1 0.8m-1
x0 C0

for x0 = 1 m, L = 150 m, t = 2 m, N = 40, V = 5 V (constant), Cfringe/C0 = 0.2

Capacitive Sensor Interfaces 1996 B. Boser 17

 Differential Force (x=0)
x=0
F1 F2 F = F F
1 2
C  2   2 "##
1
x0 V Vx  V + Vx  #
2 0  0   0  #
C s1 C s2 ! $
2C V Vx
0 0
x
+V0 Vx -V 0 0

e.g. F/Vx = 1.25N/V for V0 = 5V, C0 = 125fF, x0 = 1m

linear voltage-force relationship

Capacitive Sensor Interfaces 1996 B. Boser 18

 Electrostatic Spring (Vx = 0)
x kel =
d
(F F2 )
dx 1
F1 F2

d 0 AV02 1 1
= 2

dx 2 ( x + x ) ( x x )
2
C s1 C s2 0 0

+V0 V x =0 -V 0 2C0 V02

x << x 0
x 02

e.g. kel = - 0.1 N/m for V0 = 1V, C0 = 100fF, x0 = 1m

Capacitive Sensor Interfaces 1996 B. Boser 19

 Resonant Frequency Shift
linear second order mechanical system:
k 0 = 50 krad/sec
r = e.g.
m
m = 0.1 g
kmech + kel kmech = m 02 = 0.25 N/m
=
m kel = -0.1 N/m
kel
= 0 1+
kmech r/0 = 0.78

substantially reduced resonance

negative r possible

Capacitive Sensor Interfaces 1996 B. Boser 20

 Differential Position Sensing
+ V sin t
0
C
C Vout V x x = V FM x
s1 0 C 0
Vout 0

C
s2
Buffer
Vout/x = Vo x FM = 4V/m = 400V/
V sin t
0

output proportional to x for x << x0

sense force almost canceled: F1 F2

Capacitive Sensor Interfaces 1996 B. Boser 21

 Outline
Capacitor Basics
MEMS Capacitor Configurations
parallel plate
transverse comb
lateral comb
Simulation
Summary

Capacitive Sensor Interfaces 1996 B. Boser 22

 Lateral Comb

resonator
lateral comb
drive

Ref.: W. Tang, Electrostatic comb drive for resonant sensor and

actuator applications, Ph.D. Thesis, UC Berkeley, EECS,
1990.

Capacitive Sensor Interfaces 1996 B. Boser 23

 Lateral Comb Geometry

rotor Cp
(movable)
x0
top view x
C

stator (anchored)

cross-section t x
d

Capacitive Sensor Interfaces 1996 B. Boser 24

 Capacitance per Finger
= x0

0 t(x0 + x )
Mutual Capacitance: C=N + NC p
d ,
parasitic

Capacitive Sensor Interfaces 1996 B. Boser 25

 Lateral Comb
Example

Capacitance C=N
0t ( x0 + x )
d
[
+ Cp ] 9 fF
C t
Sensitivity N 0 1.8 fF/m
x d
1 N 0t 2
Force F= V 22 fN
2 d

Spring Constant k=0 0

1
Figure of Merit FM 0.2m-1
x0 + x

(for x0 = 5 m, t = 2 m , d = 1 m, N = 100, V = 5V, Cp = 0)

Capacitive Sensor Interfaces 1996 B. Boser 26

 Lateral Comb Characteristics
linear: C proportional to x

no electrostatic spring

main application:
linear forcer, e.g. in resonator
(use differential setup to cancel nonlinearity in voltage)

challenges:
parasitics introduce nonlinearity
poor sensitivity dC/dx
small forces for standard supply voltages (5V)

Capacitive Sensor Interfaces 1996 B. Boser 27

Exact Analysis of Lateral Force
W.A. Johnson et al., Electrophysics of Micromechanical Comb
Actuators, IEEE J. Electromech. Systems, pp. 49-59, March
1995. (includes fringing field effects)

G. Fedder, Simulation of Microelectromechanical Systems,

Ph.D. thesis, UC Berkeley, EECS, 1994.

Capacitive Sensor Interfaces 1996 B. Boser 28

 Levitation Effects
Fz

Ref: W. Tang, Electrostatic Comb Drive for Resonant Sensor and

Actuator Applications, Ph.D. thesis, UC Berkeley, EECS, 1990.

Capacitive Sensor Interfaces 1996 B. Boser 29

 Levitation Force

Capacitive Sensor Interfaces 1996 B. Boser 30

 Levitation Suppression

sliced ground-plane reduces levitation force by order-of-magnitude

Capacitive Sensor Interfaces 1996 B. Boser 31

Lateral Comb Resonator

Ref: C. Nguyen, Micromechanical Signal Processors, Ph.D.

thesis, UC Berkeley, EECS, 1994.

Capacitive Sensor Interfaces 1996 B. Boser 32

 Simulation
Electrostatic Solvers:
Fastcap http://rle-vlsi.mit.edu/projects.html
Maxwell Ansoft, Pittsburgh, Pennsylvania, 1991.
General Text H. H. Woodsen and J. R. Melcher:
Electromechanical Dynamics, Part I: Discrete
Systems,
R. E. Krieger Publishing, Malabar, Florida 32950, 1990.
Reprinted from J. Wiley edition of 1968.

Self-Consistent Electromechanical Simulation:

Simultaneous solution of electrostatic and mechanical equations
required for large displacements x:
MEMCAD 2.0 http://www-mems.mit.edu/groups/SenturiaGroup.html

Capacitive Sensor Interfaces 1996 B. Boser 34

 Fastcap Example: Transverse Comb
x
V sense
C s-sub C sense

Vpm C 12

C fb

V fb
proof mass
Vpm C f-sub

substrate
GND

feedback tines
Vfb sense tines
Vsense

Capacitive Sensor Interfaces 1996 B. Boser 35

Boundary Element (BEM) Generation

cubegen -n1 -xo0 -yo0 -zo0 -xh4 -yh115 -zh2 -natine_pm > tine_pm.qui
cubegen -n1 -xo0 -yo0 -zo0 -xh4 -yh144 -zh2 -natine_sense > tine_sense.qui
cubegen -n1 -xo0 -yo0 -zo0 -xh4 -yh124 -zh2 -natine_drive > tine_drive.qui
cubegen -n1 -xo0 -yo0 -zo0 -xh8 -yh10 -zh2 -naendtine > endtine.qui

cubegen -n1 -xo0 -yo0 -zo0 -xh34 -yh20 -zh2 -naproofmass > proofmass.qui
capgen -p1 -n20 -w45 -nasubstrate > subst.qui

Capacitive Sensor Interfaces 1996 B. Boser 36

 BEM Assembly
* PROOF MASS
C tine_pm.qui 1 0.020000 0 0+
C tine_pm.qui 1 15.020000 0 0+
C tine_pm.qui 1 30.020000 0 0+
C proofmass.qui 1 0.020000 -19.99 0
*
* SENSE TINES
C tine_sense.qui 1 10 5 0 +
C tine_sense.qui 1 25 5 0 + File lsensor_0.020000.bem
C
C
endtine.qui 1 10
endtine.qui 1 25
148.99
148.99
0 +
0
x = 0.02 m
* (one file for each x)
* FEEDBACK TINES
C tine_drive.qui 1 5 5 0 +
C tine_drive.qui 1 20 5 0 +
C endtine.qui 1 1 128.99 0 +
C endtine.qui 1 16 128.99 0
*
* SUBSTRATE
C subst.qui 1 -5.5 -20 -1.6 +
C subst.qui 1 -5.5 25 -1.6 +
C subst.qui 1 -5.5 70 -1.6

Capacitive Sensor Interfaces 1996 B. Boser 37

 Run Fastcap
One simulation run for each x = -0.05m to +0.05m:

fastcap -lsensor_-0.050000.bem > out-0.050000

fastcap -lsensor_-0.040000.bem > out-0.040000
fastcap -lsensor_-0.030000.bem > out-0.030000
fastcap -lsensor_-0.020000.bem > out-0.020000
fastcap -lsensor_-0.010000.bem > out-0.010000
fastcap -lsensor_0.000000.bem > out0.000000
fastcap -lsensor_0.010000.bem > out0.010000
fastcap -lsensor_0.020000.bem > out0.020000
fastcap -lsensor_0.030000.bem > out0.030000
fastcap -lsensor_0.040000.bem > out0.040000
fastcap -lsensor_0.050000.bem > out0.050000

Capacitive Sensor Interfaces 1996 B. Boser 38

 Fastcap Output
out0.020000 (x = 0.02m)
Running fastcap 2.0 (15Jul92) V sense
Input: sensor_-0.020000.lst C s-sub C sense
Input surfaces:
5.986fF 6.026fF
GROUP1 C 12
tine_pm.qui, conductor Vpm
7.071fF
title: `4mX115mX2m cube (n=1 e=0.1)' C fb
outer permittivity: 1 5.548fF
number of panels: 174
V fb
number of extra evaluation points: 0
translation: (0.02 0 0)
C f-sub
tine_pm.qui, conductor 6.263fF
title: `4mX115mX2m

CAPACITANCE MATRIX, femtofarads

Vpm Vsense Vfb GND
Vpm 28.81 -6.026 -5.548 -16.54
Vsense -6.026 19.9 -7.071 -5.896
Vfb -5.548 -7.071 19.29 -6.263
GND -16.54 -5.896 -6.263 30.58

Capacitive Sensor Interfaces 1996 B. Boser 39

 BEM Analysis Summary (Matlab)
C12
Capacitnace [fF]

Cs-sub (levitation!)
Csense
Csense 4.1 fF / m
x

Proof Mass Displacement x [m]

Capacitive Sensor Interfaces 1996 B. Boser 40

 Summary
capacitive interfaces:
position sensing
electrostatic forcer

interface types:
parallel plate: large C, negative spring, asymmetric
transverse comb: symmetric, good position sense, r tuning
lateral comb: linear forcer, small dC/dx

Capacitive Sensor Interfaces 1996 B. Boser 41