CSV CBUG3L0P1 TSMC

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SchemaName LIT_#{~MAMA!Container!

/Container/customerField/entry[key='Customer Mate

MaterialNo #{~MAMA!Container!/Container/customerField/entry[key='Customer Material


SupplierID 23827974
RawLotId #{~QDATA!!/qDataPack/batchId/text()}
PONo #{~MAMA!Container!/Container/customerField/entry[key='Purchase Order Num
TSMCFab #{~MAMA!CustomerPlant!/Plant/customerField/entry[key='CustPlantName']/va
InvoiceNo NA
MaterialName #{~MAMA!Material!/Material/@partName}
SupplierName Entegris
Maker Entegris
Process NA
ToolType NA
WONo NA
BarCode NA
LotQty #{~MAMA!Stock!/Stock/@qtyReceived}
ShipQty #{~CQM!Delivery!Quantity}
DeliverDate #{~CQM!Delivery!CreateDate}
SYMBOLIC VALUE

Item N MEAN SD MAX


Flow Rate
Particle_0.05um
SYMBOLIC VALUE
ry[key='Customer Material Number']/value/text()}_Filter

ey='Customer Material Number']/value/text()}

ey='Purchase Order Number']/value/text()}


ey='CustPlantName']/value/text()}

MIN VALUE DL
#{QDATA!!/qDataPack/sampleInfos[parameterName='Flow Rate at 25 deg C']/text()!Mean}
#{QDATA!!/qDataPack/sampleInfos[parameterName='.05um']/text()!Mean}
g C']/text()!Mean}

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