Register No:

M.TECH SECOND SEMESTER DEGREE EXAMINATION APRIL 2017

COCHIN UNIVERSITY OF SCIENCE AND TECHNOLOGY
DEPARTMENT OF ELECTRONICS

ELE3211 RF MEMS TOTAL MARKS: 40

TOTAL TIME: 2 HOURS
All Sections are Compulsory
PART A
(Answer any five) ( 5 X 2 = 10 )

I. The switching speed of a MEMS switch is in the range of __seconds and Voltage range is __V
a) ~ 10-6, 3-30 b) ~10-12 ,20-160
-9
c) ~10 ,1-5 d) ~10-15 ,10-250
II. Which type of printed inductor has the disadvantage of lowest inductance and Lowest SRF but
has the advantage of low eddy current resistance
a) Spiral Inductor b) Meander Line Inductor
c) Solenoid Inductor d) Octagonal Printed Inductor
III. The following figure shows a micro machined folded beam comb-drive resonator
3
1 2 4

Identify the parts in the correct order

a) 1 Electrostatic Comb Actuator 2 Shuttle Plate b) 1 Anchor 2 Electrostatic Sense Comb
3 Spring Beam 4 Electrostatic Sense Comb Structure 3 Shuttle Plate 4 Spring Beam 5
Structure 5 Anchor Electrostatic Comb Actuator
c) 1 Shuttle Plate 2 Spring Beam 3 Electrostatic d) 1 Electrostatic Sense Comb Structure 2
Comb Actuator 4 Anchor 5 Electrostatic Anchor 3 Electrostatic Comb Actuator 4
Sense Comb Structure Shuttle Plate 5 Spring Beam
IV. Reflect band Phase shifters can be designed accurately up to __GHz for two bit designs and upto
X band frequencies for __bit designs on Si or _____
a) 15, 3, Si3N4 b) 33, 6, Teflon
c) 40, 4, GaAs d) 68, 8, FR-4
V. The figure shows a ___frequency reconfigurable dipole antenna with MEMS switches on a
___m thick Teflon Substrate with r =___with no ground plane. The frequency is extended from
0.1 to 3 GHz when using FET/PIN diodes/switches to ___GHz when using MEMS switches.
 a) One, 550, 4.3, 24 b) Four, 689, 3.2, 32
c) Three, 750, 2.2, 120 d) Two, 750, 2.2, 200
VI. A phase shifters maximum frequency of operation is given by the following equation. Name the
equation and write down the equation in the answer sheet.
a) Hertz Equation b) Lange Equation
c) Braggs Equation d) Schwarz Equation

PART B
(Answer Any Five Questions) ( 5 X 6 = 30 )

VII. An axially loaded silicon beam of length 500m and square cross section of 10m which is fixed
on one end is given with a Youngs modulus of Silicon = 160GPa.
a. Find the spring constant K.
b. Find the spring constant when the beam is bent at maximum deflection.
c. Find the maximum stress that can act on the beam if a force of 0.4N/m acts on the tip
radially at an angle of 450.
d. How large a force would be required to produce a beam deflection of 1m at the tip?
VIII. Discuss in detail the numerous methods for enhancing the Q-point in micro-machined Inductors.
IX.
a. Write a detailed note on the RF Phase shifters fundamentals.
b. Briefly describe the Specifications, Topology and Working of an X-band RF MEMS phase
shifter for phased array application
X. Discuss in detail the effects of material properties, dimensions, and parasitic effects, when
designing micro-machined inductors.
XI.
a. Enumerate on the design procedure for a Coplanar Waveguide with relevant equations.
b. Design a micro-machined CPW with the following dimensions S = width of gap = 522m,
W = width of the conductor = 0.828m, r = 4.4.
XII.
a. Enumerate and illustrate the Rectangular Patch Transmission Line model. Give a brief
description on the Design Procedure along with the equations.
b. Give a brief description about the Reconfigurable Microstrip patch antenna as well as the
array using MEMS switches.
c. Design a patch antenna using the substrate FR-4 with r = 4.3 with a height of h = 0.525 cm
so as to resonate at 8.75GHz

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GOOD LUCK