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A Basic Introduction To Clean Rooms PDF
A Basic Introduction To Clean Rooms PDF
The only way to control contamination is to control the total environment. Air flow
rates and direction, pressurization, temperature, humidity and specialized filtration all need
to be tightly controlled. And the sources of these particles need to controlled or eliminated
whenever possible. There is more to a clean room than air filters. Cleanrooms are planned
and manufactured using strict protocol and methods. They are frequently found in
electronics, pharmaceutical, biopharmaceutical, medical device industries and other critical
manufacturing environments.
It only takes a quick monitor of the air in a cleanroom compared to a typical office
building to see the difference. Typical office building air contains from 500,000 to 1,000,000
particles (0.5 microns or larger) per cubic foot of air. A Class 100 cleanroom is designed to
never allow more than 100 particles (0.5 microns or larger) per cubic foot of air. Class 1000
and Class 10,000 cleanrooms are designed to limit particles to 1000 and 10,000
respectively.
A human hair is about 75-100 microns in diameter. A particle 200 times smaller (0.5
micron) than the human hair can cause major disaster in a cleanroom. Contamination can
lead to expensive downtime and increased production costs. In fact, the billion dollar NASA
Hubble Space Telescope was damaged and did not perform as designed because of a
particle smaller than 0.5 microns.
Once a cleanroom is built it must be maintained and cleaned to the same high
standards. This handbook has been prepared to give professional cleaning staff information
about how to clean the cleanroom.
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A Basic Introduction to Clean Rooms 6/16/10 9:45 AM
What is Contamination?
Contamination is a process or act that causes materials or surfaces to be soiled with
contaminating substances. There are two broad categories of surface contaminants: film
type and particulates. These contaminants can produce a killer defect in a miniature
circuit. Film contaminants of only 10 nm (nanometers) can drastically reduce coating
adhesion on a wafer or chip. It is widely accepted that particles of 0.5 microns or larger are
the target. However, some industries are now targeting smaller particles.
A partial list of contaminants is found below. Any of these can be the source for killing
a circuit. Preventing these contaminants from entering the cleanroom environment is the
objective. It requires a commitment by everyone entering the cleanroom to make it happen.
Professional cleaning personnel need to be aware of the importance of controlling
contaminants. Strict procedures should be followed whenever entering or cleaning a
cleanroom. Compromise is not acceptable when cleaning in a cleanroom.
Sources of Contamination
This is a partial list of some of the commonly known contaminants that can cause
problems in some cleanroom environments. It has been found that many of these
contaminants are generated from five basic sources. The facilities, people, tools, fluids and
the product being manufactured can all contribute to contamination. Review this list to gain a
better understanding of where contamination originates.
1. Facilities
2. People
Spittle
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A Basic Introduction to Clean Rooms 6/16/10 9:45 AM
Hair
3. Tool Generated
Vibrations
4. Fluids
Cleaning chemicals
Plasticizers (outgasses)
Deionized water
5. Product generated
Silicon chips
Quartz flakes
Cleanroom debris
Aluminum particles
We will look at several areas of concern to get a better idea of the overall picture of
contamination control. These are the things that need to be considered when providing an
effective contamination control program.
HEPA (High Efficiency Particulate Air Filter) - These filters are extremely important for
maintaining contamination control. They filter particles as small as 0.3 microns with a
99.97% minimum particle-collective efficiency.
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velocity along parellel flow lines. This air flow is called laminar flow. The more restriction of
air flow the more turbulence. Turbulence can cause particle movement.
FILTRATION - In addition to the HEPA filters commonly used in cleanrooms, there are a
number of other filtration mechanisms used to remove particles from gases and liquids.
These filters are essential for providing effective contamination control.
1. What is clean?
CLEANROOM GARMENTS - The requirements for cleanroom garments will vary from
location to location. It is important to know the local garment requirements of the cleanroom
management. Gloves, face masks and head covers are standard in nearly every cleanroom
environment. Smocks are being used more and more. Jump suits are required in very clean
environments.
HUMANS IN CLEANROOMS - There are both physical and psychological concerns when
humans are present in cleanrooms. Physical behavior like fast motion and horseplay can
increase contamination. Psychological concerns like room temperature, humidity,
claustrophobia, odors and workplace attitude are important. Below are several ways people
produce contamination:
People are a major source of contamination in the cleanroom. Look at the people
activies listed below. Notice the number of particles produced per minute during these
activities.
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COMMODITIES - Care is taken when selecting and using commodity items in cleanrooms.
Wipers, cleanroom paper and pencils and other supplies that service the cleanroom should
be carefully screened and selected. Review of the local cleanroom requirements for
approving and taking these items into the cleanroom are essential. In fact, many cleanroom
managers will have approval lists of these types of items.
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the cleanroom can lead to contamination and a loss in end user product quality. Proper
selection of equipment and materials is important for proper cleaning. Only products that
have proven cleanroom performance records should be considered for use in cleanrooms.
These products should be listed and all vendors should be informed about the strict policies
of how products are qualified. All procedures should be strictly enforced. Below are some
examples of how to organize the cleaning to be done in a cleanroom. These are NOT
schedules or exact procedures. They are guidelines for preparing work procedures and
schedules. Local requirements must be included in any cleaning program.
2. Cleanroom mops
4. Cleanroom wipers
Below is a sample of a cleaning program in a Class 1000 Cleanroom. This is only a sample
of a program. Local standards and requirements must be followed.
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The list above is a sample of some of the common tasks that need to be performed in a
Class 1000 cleanroom. The list is not exhaustive. But gives some ideas of how to prepare
work schedules and procedures. An assessment of the cleanroom in conjunction with
cleanroom management will help define these tasks and frequencies.
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A Basic Introduction to Clean Rooms 6/16/10 9:45 AM
The list above is a sample of some of the common tasks that need to be performed in a
Class 100 cleanroom. The list is not exhaustive. But gives some ideas of how to prepare
work schedules and procedures. An assessment of the cleanroom in conjunction with
cleanroom management will help define these tasks and frequencies.
1. All personal items such as keys, watches, rings, matches, lighters and cigarettes should
be stored in the personal locker outside the gowning room.
2. Valuable personal Items such as wallets may be permitted in the cleanroom provided
they are NEVER removed from beneath the cleanroom garments.
4. Only garments approved for the cleanroom should be worn when entering.
5. NO cosmetics shall be worn in the cleanrooms. This includes: rouge, lipstick, eye
shadow, eyebrow pencil, mascara, eye liner, false eye lashes, fingernail polish, hair spray,
mousse, or the heavy use of aerosols, after shaves and perfumes.
7. Approved ball point pens shall be the only writing tool used.
8. Use of paper or fabric towels are prohibited. Use of hand dryers equipped with HEPA
filters are suggested.
9. Gloves or finger cots should not be allowed to touch any item or surface that has not
been thoroughly cleaned.
10. Only approved gloves, finger cots (powder-free), pliers, tweezers should be used to
handle product. Finger prints can be a major source of contamination on some products.
11. Solvent contact with the bare skin should be avoided. They can remove skin oils and
increase skin flaking.
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12. Approved skin lotions or lanolin based soaps are sometimes allowed. These can
reduce skin flaking.
13. All tools, containers and fixtures used in the cleaning process should be cleaned to the
same degree as the cleanroom surfaces. All of these items are a source of contamination.
14. NO tool should be allowed to rest on the surface of a bench or table. It should be place
on a cleanroom wiper.
15. Only cleanroom approved wipers are allowed to be used. The wipers must be
approved for the Class of cleanroom being cleaned.
16. ALL equipment, materials and containers introduced into a sterile facility must be
subjected to stringent sterilization prior to entrance.
17. NO ONE who is physically ill, especially with respiratory or stomach disorders, may
enter a sterile room. This is a good practice in any cleanroom environment.
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