3D Micro-EDM Using CAD/CAM

K. P. Rajurkar (2), Z. Y. Yu
Center for Nontraditional Manufacturing Research, Department of Industrial and Management Systems Engineering,
University of Nebraska-Lincoln, Lincoln, USA
Received on January 3,2000

Abstract

It is necessary to integrate CAD/CAM systems with micro-EDM to generate tool paths when simple shaped
tools are used to machine three-dimensional (3D) micro parts. Currently available CAD/CAM systems cannot
be directly used because of the continuous tool electrode wear during machining. This paper proposes an
approach to integrate CAD/CAM systems with micro-EDM while accounting for tool wear using a recently
developed uniform wear method. This approach is verified by successfully generating very complex 3D micro
cavities. Additionally, the feasibility of the approach is illustrated by generating complex macro cavities using
conventional EDM with single simple shaped electrodes.

Keywords: EDM, Micro-machining, Wear

1 INTRODUCTION position. Moreover, LlGA electrodes cannot be used to

Most microfabrication techniques such as etching,
deposition, lithography and laser etc. are suitable to
fabricate surface structures in mass production. However,
these methods, in general, lack the ability of machining
three-dimensional shapes because of poor machining
control in the Z axis. It is possible to machine a metal
micro part having a three-dimensional shape by traditional
manufacturing methods such as milling, however, the size
of the machined part will be limited by the mechanical
strength of the part and the tools used. Micro-EDM, where
work material is removed by electro-erosion and not by
mechanical contact, offers an effective solution to the
problem of tool and work deformation. Additionally, micro-
EDM can be used to machine any electrically conductive
material regardless of its hardness and strength.
However, proper compensation of tool wear should be
considered for producing micro parts by micro-EDM.
Micro-EDM has been successfully used in many
applications such as the fabrication of micro-pins with
various cross sections by Wire Electrodischarge Grinding
(WEDG) [ I ] [2] [3]. It has been used to prepare micro
tools for micro-drilling, micro-ultrasonic, micro-punching
and micro-milling machining [4] [5] [6]. It has also been
used to fabricate micro parts such as micro nozzles [7] [8].
The micro-EDM equipment has improved over the last few
years. Now, micro-EDM is capable of machining micro
holes and slots as well as 3D micro cavities [9].
Three types of electrodes (wire, simple shaped electrodes
and complex shaped electrodes) are used in micro-EDM.
Although the wire EDM (wire diameter is 20pm-30pm) can
cut the micro parts from a thin sheet, it is not suitable to
fabricate micro cavities or molds. The complex shaped
electrodes made by the LlGA technique have been used
in die sinking operations [lo]. However, making complex
shaped electrodes by the LlGA method is expensive due
to the high cost of the LlGA equipment. Additionally,
several electrodes are necessary to achieve the final
design requirements because of electrode wear during
machining. It is difficult to align electrodes at the same
machine inclined surfaces or spherical surfaces because
the LlGA technique can produce electrodes only with
straight sides. 3D micro-shaped machining is realizable
by controlling the movement of simple shaped electrodes
along designed tool paths. However, the application of
micro-EDM in generating 3D complex cavities and
therefore 3D microparts is limited due to lack of the
necessary Computer Aided Design and Manufacturing
(CADICAM) systems to generate the tool paths [ I l l .
Although some attempts on the application of CAD/CAM
in conventional die-sinking EDM were reported [12][13], a
CAD/CAM system applicable to micro-EDM that takes tool
wear into account is currently not available.
In this paper, an approach is proposed to solve the above
mentioned problems. A recently developed technique
called Uniform Wear Method was applied to account for
the electrode wear and it was integrated with a CAD/CAM
system. Using this proposed approach, some complex 3D
micro shapes were machined successfully. The feasibility
of the proposed approach in conventional EDM was also
verified in this research.
2 INTEGRATION OF UNIFORM WEAR METHOD
WITH CAD/CAM SYSTEM
The extensive functions of commercially available
CAD/CAM systems can be utilized for micro-EDM by
appropriately integrating it with the uniform wear method
to compensate for tool wear. The uniform wear method
includes the rules of generating tool paths and the
compensation equation. Generating tool paths based on
the uniform wear method assures that the shape of the
electrode tip remains unchanged even if there is electrode
wear during machining. The rules of uniform wear method
are [14]:
Machining by the bottom of the electrode, or layer-by-
layer machining with a small electrode feed for one layer.
To-and-fro scanning.
Tool paths overlapping.

Annals of the ClRP Vol. 49/7/2000 127

 CAD Module
calculating area of
each sliced surface
Figure 1: Integrating the uniform wear method with CAD/CAM system.
Machining the central part and the boundary of the
machined surface alternately.
To compensate for the electrode wear in length, the
electrode feed for each sliced layer is calculated based on
equation (1) derived from the definition of electrode
volume wear ratio and the assumption that the electrode
feed of each layer consists of two parts, the wear length
and the remaining length which equals the average
machined depth of the layer [9][14].
AZ = L, ( v SJS,+l). (1)
where
v -electrode volume wear ratio;
Se-cross section area of the electrode (X-Y plane);
S-area of the machined layer (X-Y plane);
AZ-depth of cut (electrode feed):
L-machined depth.
Figure 1 shows the structure of the integration of a
CAD/CAM system with the uniform wear method. The tool
paths are generated based on the data in the CAD
module, and then the tool paths are regenerated using the
uniform wear method followed by the compensation of
electrode wear in the NC codes. The NC codes are finally
transferred to the micro-EDM. In this way, an existing
CAD/CAM system can be integrated with the uniform
wear method to fabricate 3D micro shapes by EDM using
simple shaped electrodes.
3 EXPERIMENTS
The proposed approach has been used to produce micro
as well as macro cavities. Some sample examples are
described below.
3.1 Application in Micro-EDM
Figure 2 shows a computer generated complex micro
cavity consisting of a square cavity (480x480x40pm3)with
inclined surfaces, a cylindrical cavity (radius 200pm, depth
100pm) with a curved side surface (radius 100pm) and a
pyramid (60x60~1 20pm3) in the center. The experiment
was carried out on a commercial micro-EDM with a
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CAM Module
for machined features
and compensating
electrode wear length
based on the uniform
Post processor
Transferring NC
codes to micro-EDM
-b
- NC codes
\
Figure 2: CAD design of a complex cavity.
Pulse generator I Relaxation type
Open circuit voltage I 80V
Capacitor 1OOpF
Workpiece material Stainless Steel AlSl 304
Electrode material Tungsten
Table 1: Machining Conditions in micro-EDM.
WEDG unit. Table 1 lists the machining conditions.
A cylindrical electrode (diameter 52pm) was prepared
using the WEDG unit on the micro-EDM. When the
electrode is used to machine a complex 3D micro shape,
the generated tool paths must satisfy the rules of the
uniform wear method to keep the tip shape of the
electrode unchanged. Figure 3 (a and b) shows the
pattern of tool paths (similar to milling operation) in the X-
Y plane for each sliced surface generated by the CAD
system. The cut angle (angle between the direction of tool
paths and the X-axis) is 0" in Figure 3 (a) and is 90" in
Figure 3 (b). In each case, however, the same thickness
(machined depth) of 0.5pm has been used for slicing. In
order to assure uniform wear and complete removal of
material, the overlap between the two adjoining paths has
been set at 35pm, less than the diameter of electrode but
larger than the radius of it. In order to improve the
precision of the machined surface and to obtain a more
uniform electrode wear, the cut angle for each subsequent
layer is changed. The electrode moves along the tool path
(cut angle 0") in Figure 3 (a) to machine one layer, and
 Figure 4: SEM photograph of machined cavity.

(b) Cut angle is 90".

Figure 3: Tool paths.
then moves along the tool path (cut angle 90") shown in
Figure 3 (b) to machine the next layer.
The electrode volume wear ratio (0.012) obtained in the
preliminary experiments by slot machining and the cross
sectional area of the electrode are known before
machining. The area of the machined layer, Sw, is Figure 5: SEM photograph of electrode after machining.
obtained in the CAD module. The electrode feed for each
layer in the Z axis changes with the variation in the cross-
sectional area under the same machining conditions. The
calculated maximum electrode feed is 2.29pm and
minimum electrode feed is 1.16pm for machining this
cavity. The calculated total wear length of the electrode is
69.68pm. After regenerating the tool paths, the NC codes
are transferred to the NC controller in micro-EDM. Figure
4 and Figure 5 show the machined cavity and the
electrode (after machining the cavity), respectively. The
electrode shape after machining has been found to be the
same as the original one. Figure 6 illustrates the second
complex cavity machined by micro-EDM using a
cylindrical electrode. The radius of the spherical cavity is
Figure 6: SEM photograph of conical and spherical cavity.
150pm. The conical cavity (top diameter 240pm, bottom
diameter 120pm, depth 60pm) is connected with the 1 Machining condition I 1 1 2 1 3 1
spherical cavity by a slot with inclined surfaces. Open circuit voltage 80V
3.2 APPLICATION IN CONVENTIONAL EDM Peak current of discharge 9A 55A 7A
The proposed approach is also applied to generate 3D Discharge duration 48ps 256ps 16ps
macro cavities using a conventional EDM. A rectangular Pulse interval time 32ps 64ps 16ps
cavity (35x25~1 lmm3) with a raised % ball (radius 10mm) Workpiece material Steel 1020
in the center was machined using a cylindrical electrode Electrode material Graphite I
(diameter 6.46mm). The related machining parameters
are listed under machining conditions 1 of Table 2. The
electrode volume wear ratio is 0.013. The total electrode
wear length is 6.63mm. The machining of the cavity
(Figure 7) took 20 hours.
The machining efficiency can be improved by dividing the
machining into roughing and finishing. The major portion
of work material is eroded in rough machining. The final
design requirements are achieved in the finishing stage.
Figure 8 shows a complex cavity machined by three
electrodes for rough to finish machining operations. The
cavity consists of three features. The left portion consists
of a cylindrical cavity (diameter 38mm, depth 13mm) with
a square column (10x10x12mm3)in the center. The right
portion is a rectangular cavity (20x25x17mm3). The Figure 7: A raised A
' ball inside a rectangular cavity.
connecting channel has a rectangular cross section
(14.5x7mm2)with 15.5 mm in length. important in 3 0 shape machining by EDM using simple
The selection of electrode size and shape is very shaped electrodes. It depends not only on the size of the

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 Further investigations into the optimization of micro-EDM
parameters, process monitoring, and controlling for
improving the process performance are continuing.

5 ACKNOWLEDGMENTS
Authors are thankful for the support from the Nebraska
Research Initiative Fund (NRI) and NSF MTAMRI Grant
#DMl-9320944. Dr. K. P. Rajurkar thankfully
acknowledges the support from the U. S. National
Science Foundation under the Intergovernmental
Personnel Act program.

Figure 8: A complex cavity by rough and finishing
workpiece, shapes of features and the space between
features, but also on the desired material removal rate.
Although a square electrode is suitable to machine the left
square cavity, a cylindrical electrode (diameter 6.29mm)
was used to remove most of the material in rough
machining because its material removal rate
(0.243mm3/min) was found to be larger than that of a
square electrode with the same size (0.12 mm3/min)
under the same machining conditions 2 listed in Table 2.
The remaining thickness (2mm) of each rough machined
surface including the round corners in the left cavity can
be removed in finish machining.
In finishing, half of the size of electrode (one side of
square electrode or diameter of cylindrical electrode)
should be less than the remaining thickness of the
machined surface. A smaller electrode will result in longer
machining time. A cylindrical electrode with 3.25mm in
diameter was used to finish the left cylindrical cavity using
the machining conditions 3 listed in Table 2. A square
electrode (3.24x3.24mm2)was used to machine the right
cavity under the same machining conditions because of
its right angle corners. The connecting part can be
machined using either the cylindrical electrode or the
square electrode. Experimental results indicated the same
material removal rate for both electrodes for this case.
However, the electrode wear ratio of the cylindrical
electrode was smaller than that of the square electrode.
Therefore, a cylindrical electrode was used to machine
the connecting part. The rough and finish operations took
16.5 hours and 54.6 hours, respectively. Although the
machining time may be longer, this approach substantially
reduces the cost and time of preparing the complex
shaped electrodes and therefore, the overall productivity
may be higher.
The roughness values (Ra) of the bottom and side
surfaces in Figure 7 and Figure 8 are 8pm and 3pm,
respectively. The large roughness value of the spherical
surface in Figure 7 was caused by the tool path marks. It
seems that the use of gentle machining parameters and
adjusting the electrode feed for each layer will reduce
these marks. The dimensional errors for both cavities are
within +O.lmm. These errors may have been caused by
the eccentricities of cylindrical electrodes and the thermal
deformation of the mechanical structures of the EDM.
4 SUMMARY
[I31 Lauwers, B., Kruth, J. P., 1992, Computer Aided
This paper presents a method of integrating an existing
CAD/CAM system with the uniform wear method to
machine complex 3D micro shapes using simple shaped
electrodes. The experimental results show that the
proposed method successfully addresses the problem of
[I41 Yu, Z. Y., 1998, Three Dimensional Micro-EDM
electrode wear in generating tool paths. The feasibility of
applying this method in conventional EDM was also
verified. The proposed approach has an application
potential in micro and macro mold/die-making industries.
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