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  • Oxide Thickness

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    Jatjedi
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    The document shows oxide thickness measurements from wafers that underwent different amounts of RTX (a reduction process) prior to measurement. There are 3 wafers measured for each of 9 splits across 3 different RTX conditions: control, 2/3 reduction, and 1/3 reduction. The oxide thickness is reported for each wafer and split.

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    random texturization processs

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    The document shows oxide thickness measurements from wafers that underwent different amounts of RTX (a reduction process) prior to measurement. There are 3 wafers measured for each of 9 splits across 3 different RTX conditions: control, 2/3 reduction, and 1/3 reduction. The oxide thickness is reported for each wafer and split.

    Copyright:

    © All Rights Reserved
    Download as XLSX, PDF, TXT or read online from Scribd
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    Download as xlsx, pdf, or txt
    24 views1 page

    Oxide Thickness

    Uploaded by

    Jatjedi
    The document shows oxide thickness measurements from wafers that underwent different amounts of RTX (a reduction process) prior to measurement. There are 3 wafers measured for each of 9 splits across 3 different RTX conditions: control, 2/3 reduction, and 1/3 reduction. The oxide thickness is reported for each wafer and split.

    Copyright:

    © All Rights Reserved
    Download as XLSX, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    Download as xlsx, pdf, or txt
    of 1

    Prior RTX Oxide Thickness

    Wafer#
    Split Side
    1 2 3
    2 2659 2755 2698
    4 2873 2744 2751
    Control 6 2636 2684 2696
    8 2719 2748 2758
    9 2698 2666 2782
    2 2524 2873 2706
    4 2719 2755 2728
    2/3 Reduction 6 2748 2772 2817
    8 2782 2735 2739
    9 2703 2714 2796
    2 2800 2533 2754
    4 2798 2689 2773
    1/3 Reduction 6 2738 2769 2770
    8 2733 2723 2719
    9 2778 2621 2767

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