x-act SDD 10 mm (Silicon Drift Detector)

Datasheet

Analytical SDD with PentaFET precision

X-AC T
x-act detector resolution guaranteed on customers SEM

Sensor Size At C K (20,000 cps) At F K (20,000 cps) At Mn K(20,000 cps)

10 mm x-act Premium
2
50 eV or better 60 eV or better 125 eV or better

Sensor Size At C K (50,000 cps) At F K (50,000 cps) At Mn K(50,000 cps)

10mm2 x-act Standard 57 eV or better 67 eV or better 129 eV or better

Resolution is guaranteed and tested on installation using an x-stream2 pulse processor, between 10 C and 25 C.
x-act is only compatible with an x-stream2 pulse processor.

Detector stability
Peak position is guaranteed to change by no more than 1 eV between 1,000 cps and 100,000 cps (measured at process
time 3 on Mn K)

Low energy performance

Guaranteed detection of elements from Z=4 (beryllium)

x-act EDS detectors

As Standard:

Silicon Drift Detector 10 mm 2

Flange mount to suit the microscope with O ring vacuum
Low noise external FET with unique new PentaFET precision seals to the chamber and vacuum bellows seal to the detector
inside, ensuring accurate results at higher count rates. probe

Pulsed restore for performance at high throughput and a Manufactured under ISO9001 standard
stable response with changing count rate Geometry design which is specific to each microscope, with
SATW ultra thin polymer window optimal take off angle and solid angle

Collimator assembly incorporating electron trap. EMC Approved

x-act must be fitted with an electron trap and the warranty Vacuum sensor which shuts-off the detector when the
requires the electron trap to be in place at all times in the chamber is vented
microscope chamber

1
Liquid nitrogen free cooling using thermoelectric (Peltier) cooling:

Requires only electrical supply Detector cools automatically when SEM column is pumped
No external compressor, gas lines or chiller Detector cools down in seconds and is ready for stable
Vibration free no moving parts analysis in seconds

Cool on Demand Capability x-act only needs to be cooled

as required:

x-stream2 pulse processor

x-stream2 is the latest generation of pulse processors capable of handling very high
count rates. IEEE1394 plug and play high speed communications with the analyser PC
and Microscope Image Capture (MIC) electronics enable digital control and digital pulse
processing.

Effective pile-up discrimination when working at very high count rates

Simple automatic system calibration
Using a single pure element standard (e.g. Si, Co, Cu) at a single process time
High precision energy scale under any conditions
Six process times to provide full control of count rate and resolution
x-act environmental specification
These requirements are necessary for the installation and operation of the system and
are the responsibility of the purchaser.

Operating temperature: 10C to 30C

Operating humidity: <80% relative humidity, non-condensing
Operating altitude range: Sea level to 1,500m

Please visit www.oxford-instruments.com for more information

This publication is the copyright of Oxford Instruments plc and provides outline information only, which (unless agreed by the company in
writing) may not be used, applied or reproduced for any purpose or form part of any order or contract or regarded as the representation
relating to the products or services concerned. Oxford Instruments policy is one of continued improvement. The company reserves the
right to alter, without notice the specification, design or conditions of supply of any product or service. Oxford Instruments acknowledges
all trademarks and registrations. Oxford Instruments plc, 2012. All rights reserved. Part no: OINA/TDS/x-act /0812

As part of Oxford Instruments environmental policy this brochure has been printed on FSC paper
SC7620
Mini Sputter Coater/Glow Discharge System
A compact, dual purpose rotary pumped
sputter coater/TEM glow discharge system

The SC7620 features:

Simple operation Carbon bre evaporation option
For noble (non-oxidising) metals Adjustable height specimen stage
Suitable for W-SEM sputtering applications Small footprint
Glow discharge capability Robust and reliable

Q u o r um Technologies
+44 (0)1233 646332
Quor u
www.quorumtech.com
SC7620
Mini Sputter Coater and
Glow Discharge System
The SC7620 is a compact scanning electron microscope
(SEM) sputter coater, which when combined with the optional
carbon attachment makes the ideal low cost SEM sputtering
and carbon coating package. Additionally, the SC7620 is
tted as standard with a glow discharge function, allowing
the hydrophilisation (wetting) of carbon coated TEM grids and
other surface modications. A panel-mounted switch allows the
system to be easily changed between sputter coating and glow
discharge modes.

The SC7620 is primarily designed for coating specimens

prior to examination with tungsten lament SEMs. For extra
ne grain coating required for most FE-SEM applications, high
vacuum coating is required see models Q150T and Q300T T.
Typical sputtering rates for gold are in the region of 10nm/m
and normal cycle times are less than ve minutes.
 Main features
The SC7620 is ideally suited to the budget-conscious user who also demands
reproducible results in an easy-to-use instrument. The SC7620 uses a basic magnetron
sputtering head with a simple to replace disc target (gold/palladium as standard). The
sputtering head is hinged for easy operation and tted with electrical safety interlocks.
The plasma current is variable by adjustment of the vacuum level using an argon leak
valve with the plasma voltage pre-set.

Fast cycle times

The compact 100mm/4 diameter Pyrex work chamber is mounted on an aluminium
collar and the small volume helps to ensure rapid pump-down and cycle times.
Adjustable height specimen stage and chamber
The 90mm diameter specimen stage is height-adjustable and can easily be removed
to accommodate larger specimens (the maximum target to stage distance is 65mm).
Sputtering is controlled manually by a 180 second timer and gas pressure and plasma
current are monitored by analogue meters.

Carbon coating option

For SEM X-ray microanalysis applications the standard SC7620 can be converted to
deposit carbon by the addition of an optional carbon evaporation attachment, consisting
of a power supply and a carbon bre evaporation head (SC7620-CF). The carbon
attachment includes an additional, taller glass cylinder to ensure that the source to
specimen distance is optimal for carbon coating. A manually operated source shutter
Optional carbon fibre evaporation attachment
protects specimens during the carbon bre out-gassing stage.

Glow discharge mode

Freshly-made transmission electron microscopy (TEM) carbon support lms tend to
have a hydrophobic surface. This hinders the collection of TEM sections from the
surface of a water bath and prevents the spreading of suspensions of particles in
negative staining solutions. However, after glow discharge treatment with air, carbon
lms can be made hydrophilic and negatively-charged, allowing the collection of
TEM sections and the easy spreading of aqueous suspensions.

Pumping
A 50L/m two-stage rotary pump with oil mist lter is recommended (see EK3175).
SC7620 and optional carbon evaporation attachment

Switch to change between sputtering and glow

discharge modes
Ordering Information SC7620 Specication
NB: For a full quotation, contact us or our local distributor Instrument case: 340mm W x 310mm D x 330mm H,
SC7620 Mini Sputter Coater/Glow Discharge System including chamber (unpacked). Weight: 20kg
Supplied with: SC502-314B gold/palladium (Au/Pd) target, Work chamber: Borosilicate glass,100mm ID mounted on a
1m length of flexible vacuum hose, fittings to a rotary pump, aluminium collar
comprehensive operating manual Sputter targets: Disc style 57mm gold/palladium target
(SC502-314B) is tted as standard.
Optional accessories and consumables Other metals available see Ordering Information
SC7620-CF Carbon bre evaporation attachment, including 1m C5421 Power: 20V AC x 50Amp. Available for either 230V
carbon bre cord (3A max) or 110V (6A max) operation
EK3175 50L/m two-stage rotary vacuum pump with oil mist lter at 50/60Hz
07803 Spare oil mist lter Vacuum pump requirement: 50L/m two-stage rotary pump with oil mist
lter (order separately, see EK3175)
Additional / spare sputtering targets. All 57mm in diameter Vacuum measurement: Pirani gauge with analogue display
SC502-314A Gold (Au) target 0.1mm thick Typical ultimate vacuum: 2 x 10-2mbar in a clean system
SC502-314A/0.2mm Gold target (Au) 0.2mm thick Specimen stage: 89mm diameter, height-adjustable (normal
SC502-314B Gold/palladium (Au/Pd) target 0.1mm thick working distance: 45mm). No rotation or tilt
SC502-314B/0.2mm Gold/palladium (Au/Pd) target 0.2mm thick Timer: Manually by a 180 second analogue timer
SC502-314E Silver (Ag) target 0.1mm thick with 15 second resolution
SC502-314G Palladium (Pd) target 0.1mm thick Glow discharge: Operates at 100mA in DC + mode
and 30mA in DC- mode
Additional carbon bre for use with the optional carbon Power supply output: Normal operation is up to 800V DC at 20mA.
evaporation attachment Maximum output 1,200V DC
C5421 Carbon bre cord standard grade 1m Electrical supply: 90-250V 50/60Hz 1,400VA including
C5421-10 Carbon bre cord standard grade 10m RV3 rotary pump power. 110/240V voltage
C5421-100 Carbon bre cord standard grade 100m selectable
A0819 Carbon bre cord high purity 1m Gases: Argon sputtering process gas, 99.999% purity
recommended
A0819-5 Carbon bre cord high purity 5m
C5461 Carbon bre cord standard purity, ne strands 1m Optional carbon bre evaporation attachment (SC7620-CF)
C5421-10 Carbon bre cord standard purity, ne strands 10m Power: 20VAC x 50A. Available for either 230V
C5421-100 Carbon bre cord standard purity, ne strands 100m (3A max) or 110V (6A max) operation
at 50/60Hz
Carbon source: Carbon bre cord

For full specifications, please see our website

Distributed by:

Q u o r u m Te c h nologies Ltd
Quor u m Technologies
Units 1-2 Eden Business Centre, South Stour Avenue, Ashford, Kent TN23 7RS
T: +44(0)1233 646332 F: +44(0)1233 640744
E: sales@quorumtech.com www.quorumtech.com