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Silicon Photonic S
Silicon Photonic S
Silicon Photonic S
–Outline
http://photonics.intec.ugent.be/download/ocs75.pdf
• SOI wafers
• Si “wire” & ridge waveguides
– SM condition
– Mode structures
Condensed view of
fabrication process
Original silicon on insulator
wafer.
Rib waveguides
EIM analysis - setup
Step 1: Find effective index of slabs of height H and height h. Rather
than solve the transcendental equation, let’s use an approximate
expression (Pogossian, Opt & Quant Elec 25, 1993)
Rib waveguides
Single mode condition, vertical
Step 2: Consider the possibility the first vertical mode beyond the
fundamental in the rib section.
Consider the fundamental vertical mode in the region beyond the rib. Note
that it has good overlap with the lower lobe of the m=1 rib mode. Thus the
rib mode will couple strongly to the exterior mode. To be bound, the
effective index of the m=1 rib mode must be > the effective index of the
m=0 exterior mode. SM condition for vertical modes in rib is thus:
Rib waveguides
Single mode condition, horizontal
w
Step 3: Require second horizontal mode be in cutoff.
N II NI N II
2
π
N I2 − (1 + 1)2 < N II2 N of second mode < N of clad
k w′
0 eff
2 2 2
π π
nf −
2 − 4 < n 2f − π Substitute approx expr
k H k w′ k h
0 eff 0 eff 0 eff
[
′ ≡ w + 2γ y k0 N I2 − N II2
weff ] where
t′ r simplify
<
2 1− r 2
t ′ ≡ weff
′ H eff r ≡ heff H eff where
Condition in the literature (Pogossian, JLT 16, Oct 1998) is
r
t<
1− r 2 t ≡ weff H eff [
weff = w + 2γ c k0 (n 2f − nc2 )
12
]
Or (Soref, IEEE JQE, 27, Aug 1991)
r
t < 0.3 + t≡w H
2
1− r
Robert R. McLeod, University of Colorado Soref, IEEE JQE, 27, Aug 1991, 130
•Silicon photonics ECE 4006/5166 Guided Wave Optics
–Rib waveguides
Rib waveguides
Single mode condition, verification
Pogossian, JLT 16, Oct 1998
r
t < 0.3 +
1− r2
t,r defined in
terms of
actual
thicknesses
r
t<
1− r 2
t,r defined in
terms of
effective
thicknesses
W
≤ 0.05 +
(0.94 + 0.25H )r
H 1− r 2
0.3 < r < 0.5 & 1.0 µm < H < 1.5 µm
Rib waveguides
Comparison to FD mode-solver
w = .25 µm t 0.88
h = .2 µm
H = .3 µm t ′ / 2 .84
r
r = 0.78 2
1.24
1− r
w = .5 µm t 1.43
h = .2 µm
H = .3 µm t ′ / 2 1.11
r
r = 0.78 1.24
1− r 2
w = .75 µm t 1.99
h = .2 µm
H = .3 µm t ′ / 2 1.38
r
r = 0.78 2
1.24
1− r
Both predict MM
Si “wire” waveguides
h
r≡ =0
H
Air clad SiO2 clad
D. Van Thourhout, “Submicron Silicon Strip Waveguides,” Springer Series in Optical Sciences, 2006, number 119, pages 205-238
http://photonics.intec.ugent.be/download/pub_2451.pdf
No modes for w
< 280 nm or V
= 1.89
2π .280
1.89 = 3.47882 − 12
λ0 2
Silica clad
One mode in
two
polarizations
for w < 480 nm
or V < 3.1 ~ π.
Almost exactly
twice the
symmetric slab
case. Why?
Skew mode.
2π w
V= 3.47882 − 1.452 V
λ0 2
2 2.5 3 3.5 4 4.5 5
Robert R. McLeod, University of Colorado Submicron Silicon Strip Waveguides, D. Van Thourhout 135
•Silicon photonics ECE 4006/5166 Guided Wave Optics
–Wire waveguides
E00x N=1.7322
Robert R. McLeod, University of Colorado Submicron Silicon Strip Waveguides, D. Van Thourhout 136
•Silicon photonics ECE 4006/5166 Guided Wave Optics
–Wire waveguides
Robert R. McLeod, University of Colorado Submicron Silicon Strip Waveguides, D. Van Thourhout 139
•Silicon photonics ECE 4006/5166 Guided Wave Optics
–Wire waveguides
Robert R. McLeod, University of Colorado Submicron Silicon Strip Waveguides, D. Van Thourhout 140
•Silicon photonics ECE 4006/5166 Guided Wave Optics
–Wire waveguides
Robert R. McLeod, University of Colorado Submicron Silicon Strip Waveguides, D. Van Thourhout 141