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Lecture 19 MEMS Metrology
Lecture 19 MEMS Metrology
Lecture 19 MEMS Metrology
• What is metrology?
– It is the science of weights and measures
• Refers primarily to the measurements of length,
MEMS Metrology wetight, time, etc.
• Mensuration- A branch of applied geometry
– It measure the area and volume of solids from
Dr. Bruce K. Gale lengths and angles
Fundamentals of Micromachining • It also includes other engineering
measurements for the establishment of a
flat, plane reference surface
Tip
SEM Components SEM Operation
• Electron gun assembly • Small area irradiated by electrons
– Stable source of primary electrons • E-beam can be static or swept
• Electromagnetic lenses and apertures • Secondary and backscattered electrons detected
– Focus electron beam
• Vacuum system
– Allows passage of electrons without
interference
• Electron collector, display, and recorder
• Specimen stage
– Goniometer stage
SEM Operation
• Current in the focused e-beam determines magnitude of
Comparison of
emitted signals
• Size of focused beam determines the resolution
Systems
Optical SEM
Transmission Electron
Atomic Force Microscopy
Microscopy (TEM)
• Only for thin materials • Atomically
• Usually used to study sharp tip
crystals
• Measures
• Gives good information
minute atomic
on nanometer structure
forces that
cause repulsion
• Can measure
individual
atoms