Accepted Manuscript

Title: Positioning control effectiveness of optical knife edge

displacement sensor-embedded monolithic precision stage

Author: ChaBum Lee Sun-Kyu Lee Joshua A Tarbutton

PII: S0924-4247(15)30091-1
DOI: http://dx.doi.org/doi:10.1016/j.sna.2015.07.035
Reference: SNA 9267

To appear in: Sensors and Actuators A

Received date: 16-12-2014

Revised date: 28-5-2015
Accepted date: 29-7-2015

Please cite this article as: ChaBum Lee, Sun-Kyu Lee, Joshua A Tarbutton,
Positioning control effectiveness of optical knife edge displacement sensor-
embedded monolithic precision stage, Sensors and Actuators: A Physical
http://dx.doi.org/10.1016/j.sna.2015.07.035

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 Positioning control effectiveness of optical knife edge displacement
sensor-embedded monolithic precision stage

ChaBum Lee1,2, Sun-Kyu Lee3 and Joshua A Tarbutton2

1
Department of Mechanical Engineering, Tennessee Technological University
1 William L Jones Dr., Cookeville, TN, 38505, USA
2
Department of Mechanical Engineering, University of South Carolina
300 Main St., Columbia, SC 29208, United States
3
School of Mechatronics, Gwangju Institute of Science and Technology
123 Cheomdangwagi-ro, Buk-gu, Gwangju 500-712, South Korea

Abstract
This paper presents positioning control effectiveness of optical knife edge sensors (OKES) for compact
nanopositioning stage applications. The OKES performance was characterized in terms of precision,
dynamic characteristics, working range and control effectiveness. The OKES consists of the laser diode,
collimation lens, beam splitter, mirror, double-side sharp knife edge, and two lensed photodiodes. The
double compound notch type flexure stage was fabricated by additive manufacturing process,
stereolithography, and the OKES was successfully embedded into the flexure stage to control the
positioning in a compact and efficient configuration. The voice coil motor was aligned along the moving
axis of the stage without offset to mitigate Abbe error, and the OKES was setup at the center
perpendicular to the moving axis. The positioning of flexure stage was proportional-integral-derivative
feedback controlled. As a result, the AM flexure mechanism was successfully position controlled to a
margin of 50 nm within a 500μm range. It was also found that the OKES is sensitive to torsional motion
and it can be used for angular motion measurement such as parasitic motions with high sensitivity.
Therefore, the OKES and voice coil actuator can be a good alternative to the capacitive sensors and
piezoelectric transducers in terms of performance: measuring and actuation range, positioning accuracy,
resolution, bandwidth and control effectiveness.

Keywords: Nanopositioning, Optical knife edge sensor, Additive manufacturing, Voice coil motor,
Flexure mechanism

1
1. Introduction
Nowadays, manufacturing technologies such as machine tool and semiconductor manufacturing processes
and measuring technologies such as scanning probe microscopes rapidly increase and stimulate the
development of precision positioning devices [1-3]. Precision positioning stages are the key to major
breakthroughs in a variety of research areas and industrial applications including bio-nanotechnology,
nanometrology, semiconductor manufacturing, chemical science and engineering, nano-machining and
nanofabrication, material science, and high-density data storage systems [4-8]. Those stages often rely on
flexures to provide linear or rotational motions with no friction or stiction. A selection of proper sensors
and actuators plays an important role to determine working range, accuracy and cost.
Displacement sensing technology in precision positioning systems is the key to fast and robust
positioning control and high resolution measurement relied on by high-tech manufacturing and metrology
operations [9-13]. Non-contact sensors such as capacitive sensors (CS) and optical sensors (laser
interferometer and laser encoder) are traditionally used in high precision stage applications due to their
ability to perform dynamic motion characterization and fast and high resolution measurement [1,2]. The
CS is typically used rather than laser interferometers and laser encoders because CS are more compact
and easily embedded into a precision stage and nanometer level resolution over short distances is possible
with CS. However, a CS is relatively expensive and limited to typically 10’s to 100’s of micrometers
working range. Also, these include conductive targets and the attractive force between the target and the
sensor probe should be considered for precision applications [12]. In many of these fields, the sensing
technology is dominated by two system architectures: 1) compact nanoscale sensors with 10’s to 100’s of
micrometers range and 2) large scale sensors with moderate-to-high accuracy intended for ranges of 10’s
to 1000’s of millimeters. There is a gap in sensing technology, the so-called meso-scale range, where the
desire is to have a compact sensor with moderate range (typically 100μm to 5mm) and relatively high
accuracy (<50 nm) all for a low cost. One potential sensing technology that can help bridge this gap is an
optical sensor using utilizing diffraction at sharp knife edges [14].
Piezoelectric transducers are typically used in order to achieve nanopositioning. In scanning probe
microscopy techniques, scanners are formed directly by piezoelectric components, or they are constructed
as a combination of hinge-based flexure mechanism and piezoelectric components [3]. The range is
usually in the order of tens of micrometers. More than 100μm is rarely obtained for a single positioning
system. There are, Moreover, some principal disadvantages of using piezoceramic components. First of
all, they suffer from many unwanted mechanical and electrical properties such as creep, hysteresis or
aging. Although these effects can be partially compensated using feedback loop-based, independent
displacement sensors or using charge drive instead of voltage drive [15]. Also, they have a limited
actuation range and need a high voltage for their operation. As an alternative to piezoceramics,

2
electromagnetic positioning systems known as voice coils can be used in many precision positioning
applications [16-18]. Voice coil systems are a solution to long-range scanning probe microscopes that
would have a large measuring range rather than piezoceramic components but still preserve nanoscale
accuracy. In addition to a longer working range, these have the numerous advantages of easy control, low
working voltage and low cost as reported in the literature [19-22].
The last few decades have seen significant effort to develop nanometer resolution displacement sensing
instrumentation for high precision stages. Companies such as Physik Instrumente, Lion Precision and
InSitu Tec, have been using the CS integrated with flexure stages, and achieved sub-nanometer resolution.
The literatures also demonstrate a number of efforts of to develop nanopositioning systems. However,
majority of their sensing systems are based on CS [2,4,5], position sensitive detectors [9,10,13], laser
encoders [6,7] or laser interferometers [11]. Recently, with progress of microelectromechanical system
(MEMS) technology, many MEMS motion stages have been introduced, but the total displacement is
limited to a few tens of µm even though those are promising for high bandwidth and high resolution
[23,24]. Despite of many years of studies, nanopositioning systems with high resolution, long working
range and low cost are rarely developed.
In this paper, we propose the concept of a novel nanopositioning system for a meso-scale range, high
resolution and low cost by using new displacement sensor, voice coil motor (VCM), and flexure stage
fabricated by additive manufacturing (AM) process. Optical displacement sensor utilizing optical knife
edge diffraction is embedded the double compound notch-type flexure mechanism (DCNFM) made of
photopolymer to demonstrate this concept. The fundamental limits of the proposed positioning system
such as resolution, bandwidth and control effectiveness are discussed.

2. Design
The proposed nanopositioning system consists of three parts: flexure mechanism, actuator and sensor as
illustrated in Figure 1. The flexure mechanism was designed in a double compound notch-type with
hinges [3]. Each spring was designed with circular flexure hinges at both ends as shown in Figure 2.These
hinges are commonly used in compliant micro-motion stages which required high precision of motions
[3,5,25-27]. In Figure 2, Ax and Ay are the length of the hinge, T is the thickness of the hinge, B is the
width of the hinge, L is the length of the flexure and H is the height of flexure. Based on finite element
method analysis of the proposed flexure [25], the design parameters of the flexure were set as follows:
Ax=0.6mm, Ay=0.2mm, T=0.6mm, H=1.0mm, B=15.0mm, L=20.0mm. The maximum flexure stage
deflection was estimated 4.125mm at 10N. The VCM used in this study has 11N maximum capacity. The
maximum stress was calculated 21.2MPa at a maximum deflection. This value was 2.9 times lower than
the yield strength (62.0MPa) of the material used in the AM process [28]. The DCNFM was fabricated by

3
AM process, so-called, stereolithography process (Projet®6000HD, 3D Systems Inc.). The photo-
sensitive photopolymer (Visijet® SL Tough) was used. The VCM (LVCM-025-038-01, Moticont Corp.)
was assembled with the flexure stage and aligned along the moving axis of the stage to mitigate Abbe
error.
The optical knife edge sensor (OKES) includes the laser diode (LD), collimation lens (CL), beam splitter
(BS), mirror, both-ends sharp knife edge and two lensed photodiodes (PD). The BS-to-knife edge and
knife edge-to-PD distances were equally set to 50mm and the distance between two parallel beams
incident on the knife edge was set to 22mm (knife edge width). The OKES utilizes the light interference
in order to get high sensitivity [14]. The LD (VLM-650-03 Series, Quarton Inc.) light source is collimated
with the CL and separated by a 50:50 at the BS. The reflected light is incident on an upper knife edge
facet mounted on the stage which is oriented parallel to the traveling direction, and the transmitted light at
BS is reflected off the mirror and incident on a lower knife edge facet. The two separated lights are
partially transverse and diffracted at each knife edge and the interference signal is measured at each PD.
The lensed PDs (BPW24R, Vishay Semiconductors) were used to achieve a longer working range and
eliminate the effect on positioning errors induced by nonparallelism between the OKES and DCNFM.
This photovoltaic signals at each PDs are then amplified using a differential amplification signal
processing technique. Consequently, the displacement (ΔD) along the traveling direction can be detected
simultaneously by Eq. (1),

VPD 1  VPD 2
D  K (1)
VPD1  VPD 2
where K is a sensitivity of the sensor, and V PD1 and V PD2 are outputs measured at PD1 and PD2,
respectively. It uses a difference of VPD1 and VPD2 divided by a sum of VPD1 and V PD2, which can
effectively eliminate the dependency of light intensity. This measurement method is considered to
achieve the high resolution and sensitivity of the sensor because the interference is highly sensitive to the
displacement of the knife edge.

3. Experiment
The OKES was successfully embedded with DCNFM as shown in Figure 3. In use of the lensed PDs, the
measuring range became longer. The CS (10nm resolution with 500μm range, Lion Precision) was used
to calibrate the OKES and compare with its performance and control effectiveness in the OKES-based
nanopositioning system. The analog circuit was created for PID controller, motor driver and sensor
amplifier. The OKES measuring range was set similar to the CS working range to compare two sensors at
the same condition. As seen in Figure 4, the OKES was calibrated by using the CS and showed a
sensitivity of 36.0mV/μm with high linearity. Positioning control was achieved by PID turning and the

4
control block diagram is shown in Figure 5, where i and i’ are the input and output signals, respectively.
The offset, C, was set to increase the stiffness of the flexure on purpose and the current feedback loop was
made to eliminate crossover distortion that occurs in push-pull amplifier. The total displacement was
measured by applying the input voltage under the PID positioning control as seen in Figure 6. This result
indicates that the total working range of the stage is approximately 600μm and the sensitivity of
displacement versus input voltage is 29.23μm/V within a full range.
The 100μm step response of the nanopositioner was tested as seen in Figure 7. Positioning control was
achieved with the OKES and CS was used for comparison. The OKES result showed a good agreement
with the CS results in terms of the positioning pattern to the target position such as rising time (0.5ms),
overshoot and settling time (30ms) even though the measurement directions of two sensors are different.
The OKES measures the displacement perpendicular to the driving direction of the stage. On the other
hand, the CS measures along the driving direction. The OKES and input signals showed a perfect overlap
in a steady-state region (0.6~0.9s), and the CS signal appeared within a noise range of the OKES and
input signals. Similarly, the step response for the backward direction of the stage was observed as seen in
Figure 6(c). The OKES and CS showed a similar positioning pattern to the target position: falling time
0.5ms and settling time 45ms.
The stepwise inputs, 500nm and 50nm, were given to test the positioning resolution of the stage and CS
was placed for a comparison with the OKES. Figure 8(a) and (b) showed 500nm and 50nm stepwise
responses. These results indicate that 500nm and 50nm positioning control was successfully achieved The
CS showed a good agreement with the OKES over the full range, but the CS showed small discrepancy in
displacement for the forward and backward direction. It was considered that this discrepancy results in
sensor nonlinearity, sensor installment error due to Abbe or cosine error, or rotational motion of the stage.
The stage was tested under a sinusoidal input with 480μm displacement as shown in Figure 9. Because
maximum measuring range of the CS is 500μm, the maximum test range was determined as 480μm. The
peak-to-peak displacement positioning error was estimated approximately ±4.0μm over 480μm working
range. The CS showed a higher displacement error of 40.0μm over 480μm working range. This
discrepancy was thought as the sensor hysteresis or CS installment error due to Abbe or cosine error. As a
result, the proposed nanopositioner showed 50nm positioning resolution with 500μm working range.
The input voltage-dependent displacement curves of the flexure stage had a nonlinear course that is
subjected to hysteresis as shown in Figure 10. It was thought that the error is due to PID gain
mismatching as well as the hysteresis and non-linearity of the VCM. In previous research [25], the AM
flexure stage was position feedback controlled by using CF, and the hysteresis characteristics of the AM
flexure mechanism were discussed. The maximum hysteresis error (difference between loading and
unloading conditions) was approximately 20μm for CS-based control systems. Here maximum hysteresis

5
error was approximately 25μm. Hysteresis can negatively affect the positioning control loops, decreasing
the performances or even leading to instability. Thus, a proper hysteresis model and control algorithm has
to be used in feedback control loops to compensate for the nonlinearity. Hysteresis compensation will be
studied for the next work.
The dynamic characterization of the stage was investigated by obtaining the frequency response curves as
seen in Figure 11. Two sensors showed similar results below 100Hz and a resonance peak of the stage at
280Hz. However, the OKES showed a large second resonance peak at 400Hz. On the other hand, the CS
showed no significant peak around 400Hz. It was thought that the first resonance peak is due to the
flexural mode of the stage and second resonance peak is related to torsional mode of the stage because the
flexure stage typically has a coupled motion with flexural and torsional modes [29,30]. It was explained
that the CS measures the capacitance change of an effective area (ϕ3.2mm) at a single point and it
becomes less-sensitive to the torsional motion if it is installed along the driving axis with no offset
distance. On the other hand, the OKES measures two points (22mm interval) around the center of the
stage and it can be sensitive to the torsional motion. As such, angular motion, especially for high
frequency signals, has an influence on the OKES readout. This does not mean that OKES does not
perform well. The OKES can measure the angular motions with high sensitivity that CS cannot measure.

4. Conclusion
We devised a novel nanopositioning system with the OKES and investigated on the sensor and VCM
performance and positioning control effectiveness. The AM flexure stage was designed and fabricated to
demonstrate the proposed system and verify the positioning control effectiveness of the AM stage. The
use of the lensed PD was effective to achieve the long working range with high accuracy and eliminate
the effect of positioning error due to nonparallelism of sensing and actuation direction. The positioning
resolution 50nm was achieved with 500μm working range. We found OKES more sensitive to the
torsional motion of the stage than CS. As a result, the OKES was sufficient to not only feedback the
displacement signal but also identify the dynamic characteristics of the AM stage. This result indicates
that the OKES and VCM can be a good alternative to the CS and piezoelectric transducers. The use of
high resolution digital controller is anticipated to show a further improvement in positioning resolution
and accuracy. In addition, multi-degree-of-freedom nanopositioners based on the OKES are expected to
be used in bio-cell scanning, lithography or fiber-optics alignment applications in a near future.

6
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LD

CL
PD1
BS

Knife
edge PD2
Mirror

VCM

Y
X

(a)

(b)
Figure 1. Schematic illustration of the proposed nanopositioning system: measurement principle (a) and
system configuration (b).

9
 2Ax
B
Ay y θy
H x
T θz
z θx
L

Figure 2. Flexure hinge configuration.

LD BS Mirror

Knife
edge

VCM CS

PD1 PD2

Figure 3. Experiment setup.

10
 10

Measured
Linear-fitted
5
OKES output [V]

-5
Sensitivity 36.0mV/m

-10
-300 -200 -100 0 100 200 300
CS output [m]

Figure 4. Calibration result.

C CFB
P

i i’
I MUX AMP PLANT

D C

Figure 5. Positioning PID control block diagram: offset (C), Proportional/Integral/Derivative gain (P/I/D),
Adder (MUX), VCM amplifier (AMP), current feedback (CFB), OKES sensitivity (K).

11
 300
Measured (OKES)
Displacement [m] 200 Linear-fitted

100

-100

-200 Sensitivity 29.23 m/V

-300

-10 -5 0 5 10
Input voltage [V]

Figure 6. Calibration of nanopositioning stage

150
Reference CS OKES

100
Displacement [m]

50

-50
0 1 2 3 4 5
Time [s]

(a)

12
 150
Reference
CS
OKES
100
Displacement [m]

101.0
50
100.5
100.0
99.5
0
99.0
0.6 0.7 0.8 0.9

0.42 0.44 0.46 0.48 0.50

Time [s]

(b)

100 Reference
CS
OKES
Displacement [m]

50

-50
0.92 0.94 0.96 0.98 1.00 1.02
Time [s]

(c)
Figure 7. Results of 100μm step response: step response (a), details of rising direction (b) and details of
falling direction (c).

13
 Reference
CS
Displacement [m/Div.] OKES

2.5
2.0
1.5
1.0
0.5
4 5 6
0 5 10 15 20 25 30 35
Time [s]

(a)

Reference
CS
Displacement [100nm/Div.]

OKES

0 10 20 30 40
Time [s]

(b)
Figure 8. Stepwise positioning resolution test: 500nm (a) and 50nm (b).

14
 Reference CS OKES

Displacement [240m/Div]

0 1 2 3 4 5
Time [s]

(a)

Reference
CS
Displacement [80m/Div.]

OKES
Error [10m/Div.]

Error(Ref-CS)
Error(Ref.-OKES)
0.0 0.2 0.4 0.6 0.8 1.0
Time [s]

(b)
Figure 9. Comparison of sensor output in sinusoidal motion: 480μm full range (a) and detail (b).

15
 300

200
Displacement [m]
100

-100

-200

-300
-9 -6 -3 0 3 6 9
Input voltage [V]

Figure 10. Hysteretic behavior between input voltage and displacement

6 CS
OKES
3
Magnitude [dB]

-3

-6

-9

-12

-15
1 10 100 1000
Frequency [Hz]

Figure 11. Frequency response curves.

ChaBum Leereceived a BS degree in Mechanical Engineering from Chung-Ang University in

2006 and anMS and PhD degree in Mechatronics from Gwangju Institute of Science and
Technology in 2008 and 2012, respectively. After his PhD, he worked in LG Display as a senior
researcher by 2013 and carried out research related to manufacturing and metrology areas as a

16
postdoctoral researcher and research assistant professor at the University of South Carolina. He is currently
appointed as an assistant professor in the Department of Mechanical Engineering at Tennessee Technological
University. His research interests include manufacturing and metrology including optical measurement, sensors and
actuators, and optical analysis and fabrication of diffractive optical components.

Joshua A. Tarbuttonreceived a BS degree in Mechanical Engineering from Georgia Institute of

Technology, GA, USA, in 2005 and an MS and PhD degree in Mechanical Engineering from
Clemson University, SC, USA, in 2007 and 2011, respectively. He has been an assistant professor
in the Department of Mechanical Engineering at the University of South Carolina since 2013. His
research interests are in advanced manufacturing, automated machining, tool path planning,
parallel hardware acceleration, optimization, mechatronics, control systems, system identification,
and signal processing.

Sun-Kyu Lee received a BS degree in Mechanical Engineering from Seoul National University in
1980, and a Doctor of Engineering in Mechanical Engineering for Production from Tokyo
Institute of Technology in 1991. Dr. Lee was a part of research endeavors in the field of machine
tool for high speed machining, and he has specialty in the rolling bearing-spindle design and
manufacturing. Dr. Lee is currently a professor at the School of Mechatronics in Gwangju
Institute of Science and Technology, Korea. His research interests include ultraprecision machine
design and precision machining, and precision measurement.

17