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Car CIA 1988
Car CIA 1988
P. F. Carcia
Perpendicular magnetic anisotropy and magneto-optical Kerr effect of vapor-deposited Co/Pt-layered structures
Journal of Applied Physics 65, 4971 (1989); 10.1063/1.343189
Perpendicular magnetic anisotropy and magnetostriction of sputtered Co/Pd and Co/Pt multilayered films
Journal of Applied Physics 66, 4909 (1989); 10.1063/1.343760
Perpendicular magnetic anisotropy in Co/Pt multilayers studied from a view point of anisotropy of magnetic
Compton profiles
Applied Physics Letters 96, 152505 (2010); 10.1063/1.3374881
Ultrathin Co/Pt and Co/Pd superlattice films for MgO-based perpendicular magnetic tunnel junctions
Applied Physics Letters 97, 232508 (2010); 10.1063/1.3524230
5066 J. Appl. Phys. 63 (10), 15 May 1988 0021-8979/88/105066-08$02.40 © 1988 American Institute of Physics 5066
PdlCo netization when Co layers are thinner than 4.9 A, as illus-
Mlemul trated in Fig. 2. At a thickness of -1 monolayer of Co (2.6
0,01
PdlCo
am OOlT
M{emu) I
t'·-----=="""
~~.::;7iI..---- ~
~..;. M,=Sgemu/cm!
-----;----10 -10-- ::5-=-~~ ""
5
-4
10
H{kOe) __ --~.;.~J"'~ H(kOel
-O.003~
5067 J. Appl. Phys., Vol. 63, No. 10, 15 May 1988 P. F. Carcia 5067
intensity of x-ray satellites is reduced, indicating interdiffu-
ONE-DIMENSIONAL MODEL sion or mixing of the Co and Pd layers. The increase in mag-
><104
2 netization, caused by interdiifusion, is consistent with the
;n ,,,0 ferromagnetic polarization of Pd atoms by Co atoms known
I-
Z
:::>
to occur in dilute Pd-Co alloys.14 The implication of this
0=0-
!Xi
a:: experimental result is that sharp interfaces in Pd/Co LS are
in ~l important for perpendicular magnetic anisotropy. Other
I- >-
Z I-
iii
Pd/Co LS show a similar trend of the loss of the perpendicu-
::;)
z lar easy axis with high-temperature annealing. However, de-
Ili w
I-
a: ~ -3
-1
tails of magnetic and structural property changes differ for
5 0 -4,-2 .1.2
>- 30 34 38 42 46 50 samples with different periodicities and Co thicknesses, and
!::
VI 28 (DEGREES) more experiments are needed to understand these differ-
z
w
I-
ences.
~ When the effective anisotropy field H K is plotted against
the inverse Co thickness for LS with a perpendicular easy
axis, we find a linear relationship (Fig. 5) that can be inter-
preted to be due to an interface anisotropy of the type first
+1
proposed by N eel. 8 That is, the Co atoms at Pd interfaces are
+2 more easily polarized perpendicular to the film surface. The
linear relationship can be seen if the anisotropy energy, ap-
46 40 30
proximated by the triangular area bounded by the saturation
29 (DEGREES)
magnetization Ms and the anisotropy field H K , i.e.,
FIG. 3. Comparison of experimental x-ray diffraction spectrum with that 1/2HKMs, is equated to the an interfacial anisotropy energy
calculated from an ideal one-dimensional diffraction grating model (insert) contribution 2KslI., where A 12 is the number of interfaces
for Pd/Co layered structure: A = 91.8 A, T= 4.9 A.
per centimeter. Then
(1)
PalCo where the saturation magnetization has been approximated
UtlQtlMuled 0.02 by M s = Mo ( T / A), and Mo is the saturation magnetization
for Co. Using this approximate expression, we estimate a
magnitude for Ks ~O.18 erg/cm2, favoring a perpendicular
easy axis.
A more complete accounting of the anisotropy energies
5 10
H(kOe)
A'40.s!
T·4.9A
-0.02
6000r
----- I
=~
-10 -5 5 10
H{kOe) 4000
0;
9
:.:
:r
3000
It BOA
o 50A
2000 II 33A
09.51
A 26A
'V 19A
10
1000
0.06
• 0.14 0.18 0.22
liT (.3.-11
-0.02-
FIG. 5. Anisotropy field H K vs the reciprocal of the Co layer thickness Tin
FIG. 4. Effect of vacuum annealing of a Pd/Co LS on perpendicular anisot- Pd/Co LS. Symbols denote experimental data for different Pd thicknesses.
ropy. Solid line is the linear fit to data.
5068 J. Appl. Phys., Vol. 63, No. i 0, 15 May 1988 P. F. Carcia 506B
0.20
3000
• BOA
o 50A
o
2000
II 33A
O.OS o 9.5A vo
A 26.4
~ O.04~ 0
'V 19A ::t 1000
1 I
! 00°1 6 10 12 T(A)
~-0.O41 II
FIG. 8. Anisotropy field HK vs the Co layer thickness Tin Pt!Co LS.
-o.oa~
-O.12L favors a perpendicular easy axis. The volume contribution
-0.16
Kv = - 9 X 106 erg/cm 3 is -50% larger than thecrystaHo-
graphic anisotropy known for hep Co and some fraction of
-0.20 this anisotropy may be attributable to magnetoelastic anisot-
ropy of strained Co layers. Note that Ku changes sign at Co
FIG. 6. Total anisotropy energy Ku multiplied by the Pd!Co bilayer period thickness ~ 8 A.
A, vs Co layer thickness T. Symbols denote experimental data for different Pt/Co LS are another system exhibiting a perpendicular
Pd thicknesses. Solid line is the fit ofEq. (2). easy axis of magnetization when the Co layers are ultrathin.
This is illustrated by the hysteresis loops in Fig. 7 for Co
thicknesses of 2.6, 5.1, 8.6, and 13.4 A in LS with Pt thick-
can be achieved by considering the uniaxial anisotropy ener- ness of -55 A. Similar sequences were also obtained for Pt
gy K u ' calculated from the difference in the areas of the per- thicknesses of -45 and ~38 A. Several features of these
pendicular (applied field direction) and parallel magnetiza- hysteresis loops are distinct from Pd/Co curves. First is the
tion curves. 15 Figure 6 is a plot of K u J. vs Co thickness for LS lower coercivity, and consequently lower remanent magneti-
with different Pd thicknesses. Ku is set equal to a sum of zation. Second, the in-plane direction is a hard axis ofmag-
energies, consisting of an interfacial anisotropy (2Ks l A), a netization, even for relatively thick Co layers (e.g., 13.4 A.).
volume anisotropy (KvT IA), and a demagnetization ener- Also, ferromagnetism exists at room temperature in aPt/Co
gy (27TM~T /.IL)ofCo layers: LS with ~ a monolayer of Co, whereas a Pd/Co LS with
correspondingly thin Co (Fig. 2) is not ferromagnetic until
Ku= -(2Ks/J.+KvTIA+27TM~TIA). (2) cooled.
The fit (solid line) of this equation to the data is given in Fig. A key distinction between Pt/Co and Pd/Co LS is the
6, from which we find Ks = - 0.16 erg/em 2 , close to the dependence of anisotropy on Co thickness. Figure 8 shows
estimate from Fig. 5< The negative sign in our convention the Co thickness dependence of the anisotropy field, ob-
FUCa
T=S.S A T=13.4 A
x=62.7A ~=69.3A
5069 J. Appl. Phys., Vol. 63, No.1 0, i 5 May 1988 P. F. Carcia 5069
tained by linear extrapolation of the in-plane loop at small have also observed that higher perpendicular anisotropies
applied field to the saturation magnetization. At Co thick- are achieved with a magnetron Co target than with an rf Co
nesses less than ~ 14 A, H K is nearly constant with a value target. In magnetron sputtering, the plasma is confined to
- 3 kOe, falling to < - 500 Oe below 14 A. This dependence the vicinity of the target, and the substrates experience less
is in contrast to the inverse Co dependence for Pd!Co LS bombardment by energetic 'particles, that would promote
shown in Fig. 5, and H K is also smaller for Pt-LS than for Pd- interfacial mixing. Furthermore, we would not anticipate
LS with the thinnest Co. The difference in the Co thickness interfacial alloying as the source of the unusual perpendicu-
dependence of H K suggests that the mechanism for the per- lar anisotropy, since Pd·Co alloys reported in the Hterature l6
pendicular easy axis is different in Pt/Co LS. and synthesized in our laboratory do not have a perpendicu-
The trend toward loss of perpendicular anisotropy with lar easy magnetic axis.
high-temperature vacuum annealing is also observed in Pt/ By contrast, Pt/Co LS with perpendicular magnetic an-
Co. Figure 9 illustrates the changes in magnetic anisotropy isotropy have relatively high resistivity and an enhanced
and structure that occur with annealing. After annealing at magnetization, both of which can be explained by the pres-
400 ·C for 2 h, the in-plane direction becomes the easy axis of ence of chemically mixed Pt-Co interfaces. Pt-Co alloys with
magnetization and the layers interdiifuse, as interpreted by perpendicular magnetic anisotropy have been reported in
the loss in x-ray diffraction intensity of the two satellite the literature, 17 and it is tempting to attribute the perpendic-
peaks. In this particular sample, a reduction in x-ray ular easy axis to mixed Pt-Co interfaces.
linewidths accompanies the annealing and may be interpret-
ed to be due to a reduction of interface roughness with conse- RESISTIVITY
quent longer range structural coherence. Table I summarizes the results of electrical resistivity
measurements on Pt/Co and Pd!Co LS, and the influence of
DISCUSSION sputtering conditions on magnetic anisotropy energy Ku'
A key question in Pd/Co and Pt!Co LS is what is the Room-temperature resistivities for the individually sput-
character of the interfaces and how does it relate to magnetic tered metals are also included. Pd!Co LS sputtered at 10
anisotropy in these films. In the following sections, resistiv- mTorr of Ar and 400-W total power applied to both targets
ity, magnetization, and x-ray diffraction results are inter- have room-temperature resistivities in the range 21-26
preted in terms of differences in the interfaces of these LS. In fln em; films sputtered under higher mobility conditions, 6
summary, we have found that Pd/Co LS with an easy per- mTorr(Ar) and 900 W or 3 mTorr(Ar) and 400 W, have
pendicular magnetic axis and high remanent magnetization higher resistivities: 28-38 pO em over the same range of per-
are optimized when the films are sputtered under low ada- iodicities and Co concentrations. For reference, thick (- 1
tom or low mobility conditions. Optimized films are charac- pm), sputtered metal films have resistivities of -10 flO em
terized by lower resistivity ( p) and higher resistance ratio (Co) and-iS flO em (Pd). Also, the resistance ratio for
(R 30c/R 4 .2 ), and a magnetization which can be approxi- lew mobility conditions is higher, 2.1-2.5 versus 1.3-1.7 fer
mately accounted for by the Co layers alone. These charac- high mobility conditions. Both the lower p and higher resis-
teristics, we contend, are those of sharper interfaces, as con- tance ratio (RR) are more metallic characteristics. Pt/Co
trasted with mixed or anoyed interfaces. Consistent with this LS were only sputtered at 10 mTorr(Ar). The room-tem-
contention is the higher anisotropy found for evaporated perature resistivity for LS with perpendicular magnetic an-
Pd!Co LS.5 Evaporated atoms have at least an order of mag- isotropy was in the range 40-50 pO em, even higher than for
nitude lower energy than sputtered atoms, and thus sharper Pd/Co LS synthesi.zed under high mobility conditions.
interfaces should be anticipated in evaporated films. We In a recent publication,18 Rowell has argued that the
electrical resistivity behavior of metal superlattices reflects
the character of their interfaces. He suggests that metal su-
perlattices with abrupt interfaces should have a resistivity
PlICD
P Pw p(3OO)
p(3OO)
(mTorrl (Watts) (,uo'cm) Ku
p(4.2)
5070 J. Appl. Phys., VoL 63, No.1 0, 15 May i 988 P. F. Carcia 5070
intermediate to those of the constituent metals and a large Pd/Co LS (78 WT % Pa}
resistivity ratio. characteristic of metals. Mixed interfaces
will have resistivities as much as a factor of 10 higher with a 640
RR~ 1. This follows from the fact that interfacial com- Pd ~ Co ~ Pd ~
pounds or alloys will have much higher resistivity than their i-'---- ).. ----ol
metal components and can be expected to dominate the re- M· Mai2W/)')+Mc,,(T~)')
sistivity characteristic. Adopting these guidelines, we ob- 560
serve in Pd/CoLS that resistivity trends correspond to more
metallic or sharper interfaces for lower mobility sputtering W1>J3 ATOMIC
/ LAVERS
conditions that optimize perpendicular magnetic anisotro-
py. Then the higher pin Pt/Co LS signals even greater inter-
"
p.. =900W
facial mixing than occurs in Pd LS. The higher kinetic ener-
PAr·6mToH
gy of sputtered Pt atoms l9 and its greater propensity for
440
alloy formation with Co20 are consistent with more interfa- "
cial mixing, as interpreted by resistivity data.
400 ._._,_,_.~,_._._._,_L~~_._._._._,_._._.
a wen-studied phenomenon. 2l In LS it can cause magnetic FIG, 10. Fit of interfacial alloy model for magnetization ofPd/Co LS with
enhancements, which may be used to estimate the degree of 22 wt. % Co.
interfacial mixing. In a previous publication, II we reported
enhanced magnetization in Pd/Co LS and modeled it by an
induced magnetization in unmixed Pd layers caused by adja- abrupt interfaces, with only unmixed Co layers contributing
cent Co layers. Those films were synthesized under "high to the magnetization, Le., W = Mi = O. The agreement is
mobility" conditions (6-mTorr Ar and 900 W). The calcu- quite good, although we do not mean to imply by this result
lated magnetic moment induced in the Pd atoms nearest the that these interfaces are perfectly abrupt, but instead that
Co layers was ~ l.4-bohr magnetons, very large compared they are sharp. In contrast. most ofthe Pt/Co LS lie on the
to literature values obtained for dilute alIoys.22 An alterna- curve corresponding to 2 WI A = 0.4. 23 For A = 65 A, this
tive explanation is that interfacial alloying causes the in- corresponds to W-13 A (-6 atomic layers). Clearly, at-
duced magnetization.
The relationship between the width ( W) of the alloyed
region, the remaining unmixed Co thickness (T'), and the
mass fraction (x) of Co in one period (A) can be written as Pt/Co
600
(3)
,;:;
E 400
~
where PI' P2. and p a are, respectively. the densities of Co, Pd, E
and the alloyed region, assumed to contain 50% Co; vii i and ..!!
,Al2 are the atomic masses of Co and Pd. The total magneti-
zation is then given by
(4)
5071 J, Appl. Phys" Vol. 63, No. 10, 15 May 1988 P. F. Carcia 5071
- q • • • • • • • •- . - . ' , . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ~•••~. . . . . . . . . . . . .- ••• "' •••••• ~. . . . . . . . . . ' . ' •••" ' ••••••~. . . . . . . . . . . . .' • • v."..-..·.·.·.··.· .,,"'"...•.•.•...•.••......••• o', ••••••-.;-•• •••
"< •••••.-.................. ~ ;O;'..................""""" ••~...................""•••--.;~. . . . . . . . . . .~•••o;<;>• ..-.--. ...............~.~••• <;<; •••..--..........~.o;-.<; • .-•••••••',',9",.- •• n ••
XRD of Pd/Cc lS PdlCo
0.8
5 0 .6
~
e: 04
"
u
0.2
30 40
29
FIG. l4. Co compositional profile YS film depth calculated from low angle
x-ray diffraction data fDr PdlCo LS with A = 58 A, T = 7 A.
Pt/Co
A" 89.9A
T ~ 13.9£
1.0
z
~ 0.8
u LS
.,
~ Q,St-
I
~~r'
u..
X300
.3 0.4
0.2
!I~U
~~ ~ ~3 n"4
,
_".:~~._~ _ _ _ _~~
.-10
70
D~TH 110
1.2 2.0 3.0 4.0 5..0 6.0 7.0 8..0 9.0 10..0 120
28 SO FILM (.4) iOO
FIG. 13. Low and high angle x-ray diffracticn characterization of Pt/Co FIG. 15. Co compositional profile vs film depth calculated from low angle
=
LS: l.. 88.3 fl., T= 13.6 fl.. x-ray diffraction data for Pt/Co LS with A = 88.3 A, T= 13.6 A.
5072 J. Appl. Phys., Vol. 63, No.1 0, 15 May 1988 P. F. Carcia 5072
Co thickness. We chose the phases of the experimental pro- 'See, for example, articles on metal superlattices and references in Synthetic
files to correspond to ideal rectangular modulation. The in- Modulated Structures, edited by L. L. Chang and B. C. Glessen (Aca-
demic, Orlando, FL, 1985).
terface in the Pt/Co film is clearly diffuse. Although the 2S. Iwasaki, K. Ouchi, and N. Honda, IEEE Trans. Magn. MAG-14, 849
profile for the Pd/Co LS is based on fewer diffracted peaks, it (1978).
is closer to that for the ideal rectangular modulation and 'P. Chandhari, J. J. Cuomo, and R. J. Gambino, IBM J. Res. Dev. 17, 66
(1973).
corroborates a sharper interface.
4p. F. Carcia, A. D. Meinhaldt. and A. Suna, App!. Phys. Lett. 47, 178
( 1985).
CONCLUSION 'H. J. G. Draaisma, F. J. A. den Broooer and W. J. M. deJonge, J. Magn.
Magn. Mater. 66, 351 (1987).
Pd/Co and Pt/Co LS have an easy axis of magnetization "N. Sato, J. Appl. Phys. 59, 2514 (1986).
perpendicular to the thin-film plane, when the Co layers are 7E. M. Gyorgy, J. F. Dillon, D. B. McWhan, L. W. Rupp, and L. R. Tes-
very thin ( < 8 A in Pd and < 14 A in Pt). In Pd/Co, inter- tardi, Phys. Rev. Lett. 45,57 (1980).
face anisotropy is responsible. The inverse dependence of xL. Neel, J. Phys. Rad. 15, 225 (1954).
gpo F. Carcia and A. Sum" J. AppL Phys. 54, 2000 (1983).
HK on Co layer thickness, metallic electrical resistivity be- "'D. E. Cox, MRS Bulletin, xn, 16 (1987). See also references therein.
havior, negligible enhancement in magnetization, and a lip. F. Carcia, A. Sun a, D. G. Onn, and R. van Antwerp, J. Superlattices
sharper Co compositional profile estimated from low angle Microstructures I, 10 i (1985).
12M. R. Khan, C. S. L Chlln, G. P. Felcher, M. Grimsditch, A. KlIcny, C.
x-ray diffraction support relatively sharp interfaces. The Co
M. Falco, and L K. Schuller, Phys. Rev. B 27, 7186 (1983).
atoms at Pd interfaces are thus more easily polarized perpen- 13R. M. Fleming, D. B. McWhan, A. C. Gossard, W. Wiegmann, and R. A.
dicular to the film surface. As the Co layer increases, the Logan, J. App). Phys. 51, 257 (1980).
influence of interior Co atoms becomes more important and 14R. M. Bozarth, P. A. Wolff, D. D. Davis, V. B. Compton, and I. H. Wer-
nick, Phys. Rev.i22, 1157 (1961).
the magnetic easy axis switches to in-plane. In Pt/Co LS, we "n. D. Cullity, Introduction to Magnetic Materials (Addison-Wesley,
contend that interfacial mixing occurs, which may be the Reading, MA, 1972), p. 248.
source of perpendicular anisotropy. We also note that Pt~Co "'K. Kobayashi and G. Ishida, J. App!. Phys. 52, 2453 (1981).
alloys with a perpendicular easy magnetic axis are known in I7D. Treves, J. T. Jacobs, and E. Sawatzky, J. Appl. Phys. 46, 2760 (1975).
'"J. M. Rowell, in Frontiers in Electronic Materials and Processing, edited by
the literature. Alternatively, interface Co atoms may also L. 1. Brillsoll (American Institute of Physics, New York, 1986), p. 64.
contribute to the perpendicular easy axis in Pt/Co LS, but ,qG. K. Wehner and G. S. Anderson, Handbook of Thin Film Technology,
interfacial mixing may dilute that anisotropy contribution. edited by L. Maissel and R. Giang (McGraw-Hili, New York, 1970), pp.
As evidence for a mixed interface, we find high electrical 3-23.
I
2[ A. R. Miedema, PhiL Tech. Rev. 33,149 (1973).
resistivity, enhanced magnetization, and a diffuse Co com- 2tJ. A. Mydosh and G. J. Nicuwenhuys, Ferromagnetic l11aterials, edited by
positional profile from x-ray diffraction in Pt/Co LS. E. P. Wohlfarth (North-Holland, Amsterdam, 1980), Vol. I, p. 71.
220. G. Low and T. M. Holden, Proc. Phys. Soc. 89, (1966).
ACKNOWLEDGMENTS 231'0 simplify the analysis, 2 W / A was a fitting parameter, and therefore the
vallie of Wis only approximate. However, since the periodicities analyzed
The author wishes to thank A. D. Meinhaldt for techni- were in a narrow range of values, ~ 50-65 A, the approximation should be
cal assistance in sputtering the films and characterizing valid.
24D. B. McWhan, in Synthetic Modulated Structures, edited by 1.. L Chang
them magnetically. I also gratefully acknowledge D. Cox of
and B. C. Giessen (Academic, Orlando, FL, 1985), p. 53.
the Brookhaven National Laboratory, R. Harlow, and G. "It should be noted that the integrated intensity of the first-order diffrac-
Jones for their assistance in acquiring and analyzing the x- tion peak would be underestimated, if the recovery time is not < 1 p.s,
ray diffraction data. which we estimate.
5073 J. Appl. Phys., Vol. 63, No. 10, 15 May 1988 P. F. Carcia 5073