Professional Documents
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Challenges and Solutions For Impedance
Challenges and Solutions For Impedance
Impedance measurements
Gustaaf Sutorius
Application
Engineer
1
Challenges and solutions for Impedance measurements
2
Challenges and solutions for Impedance measurements
3
Agenda
1. Introduction
2. Impedance Basics & Measurement Methods
3. LCR Meters
4. Impedance Analyzers
5. Accessories/test-fixtures
6. Vector Network Analyzers
• E5061B VNA as Impedance Analyzer
7. Reference Documents + Q&A
4
Agenda
1. Introduction
2. Impedance Basics & Measurement Methods
3. LCR Meters
4. Impedance Analyzers
5. Accessories/test-fixtures
6. Vector Network Analyzers
• E5061B VNA as Impedance Analyzer
7. Reference Documents + Q&A
5
Objectives
6
Impedance Measurement Applications
Auto-balancing Bridge
In-circuit Capacitor
Tests Measurements
LCR Meters
Impedance Analyzers (ZA) RF I-V
Wide Variety of Test Fixtures
7
www.agilent.com/find/impedance
Solutions for Measuring Impedance
Low-Cost High-Performance Capacitance RF LCR Meter ZA RF ZA
LCR Meter LCR Meter Meter
‘60
4270A
‘70 4260A
4271A
4272A/73A
‘80 4261A
4274A/75A
4276A/77A 4192A
4262A
‘90 4191A
4278A
4194A
4284A/85A
4263A/B 4286A 4291A/B
‘00
4268A/88A
4294A
‘10 4287A
E4980A E4991A
E4981A
8
Agenda
1. Introduction
2. Impedance Basics & Measurement Methods
3. LCR Meters
4. Impedance Analyzers
5. Accessories/test-fixtures
6. Vector Network Analyzers
• E5061B VNA as Impedance Analyzer
7. Reference Documents + Q&A
9
Impedance
Z = R + jX (rectangular-coord)
Imaginary axis
Z = |Z| (polar form)
+j
Z (R,
X
X)
R = |Z| cos
|Z| X = |Z| sin
|Z| = R2 + X2
Real axis = tan-1(X/R)
R
10
Series and Parallel Combinations
R jX
Real and imaginary Z = R + jX
components are (Impedance is easier to express)
connected in series
R
jRX RX2 R2X
Z= = 2 +j
R + jX R + X2 R2 + X2
(Impedance is too complex)
Real and imaginary jX
components are
connected in parallel G
Y = G + jB
(Admittance is easier)
jB
Unit of admittance: Siemens (S)
conductance, G and the susceptance, B
11
Inductive and Capacitive Reactance
L (Inductance) C (Capacitance)
XL= 2fL = L 1 1
XC = =
: Angular frequency (= 2f)
2fC C
R jXL R -jXC
Z R
jXL
-jXC
R Z
(a) Inductive vector (b) Capacitive vector
on impedance plane on impedance plane
XL -XC 1
Q = quality factor= = D = dissipation factor =
R R Q
= tan = tan
12
Parasitics
Unwanted
R and L of
leads
Unwanted R and C
of dielectric
13
Series and Parallel Models
Capacitor Equivalent
Circuit
Series Parallel
R
Model C p
Model
R
s
s
C
p
Low-Impedance Device
(Large C, Small L; |Z| 10 ) High-Impedance Device
(Small C, Large L; |Z| 10 k)
14
Equivalent circuit models of components
15
Relationship between Series and Parallel mode
16
Component Dependency Factors
17
X versus Test Signal Frequency
Capacitor
|X| C L
1
XC =
C
XL = L
18
Example Capacitor Resonance
L
1
C
|Z|
fs
19
C versus Test Signal Level
C
High K
Mid K
Low K
20
C versus DC Voltage Bias
C
Type I
C0G or NPO (Low K)
0
Type II
X7R,Y5V, or Z5U (High K)
DC bias voltage
21
L versus DC Current Bias
DC bias current
22
C versus Temperature
C
Mid K
0
|
25 Temperature (C)
23
Agenda
1. Introduction
2. Impedance Basics & Measurement Methods
3. LCR Meters
4. Impedance Analyzers
5. Accessories/test-fixtures
6. Vector Network Analyzers
• E5061B VNA as Impedance Analyzer
7. Reference Documents + Q&A
24
(1) Auto-Balancing Bridge method
Measurement Principle
Virtual ground (driven at 0 V)
Rr
DUT
HIGH LOW
Signal I Ir
Source V1 I = Ir
-
+
V2
V2 = - Ir Rr
V1 - V1 Rr
Z= =
Ir V2
25
(2) RF I-V method
Measurement Principle
Current detection
R Vi
R/2 I Z
V
Signal Voltage V DUT
x
Source detection v
R
R = 50
V R Vv
Zx= = ( - 1)
I 2 Vi
As V = Vv – Vi and I = 2Vi /R
26
(3) Network Analysis method
Measurement Principle
VINC
DUT
VINC V V Vr Vr
Reflected
Signal
OSC Vr ZX - Z0
Incident
ZX = = X+
Z
Signal VINC Z0
Directional Bridge
or Coupler
Zo: 50 or 75
27
Summary of Measurement Methods Auto-Balancing Bridge
Impedance ()
RF I-V
Network An.
Frequency (Hz)
Auto-
1 m Z 100 M 4-terminal pair,
Balancing 20 f 110 MHz (10% acc) 1
BNC
Bridge
0.2 Z 20 k
RF I-V 1 MHz f 3 GHz 7 mm 1
(10% acc)
Network
f 300 kHz Z Z0 7 mm, N-type N1
Analysis
28
Measurement Methods and Agilent products
29
Impedance Measurement Methods and Instrument selection
1) Frequency
These determine the most
2) DUT impedance
suitable method
3) Required measurement accuracy
30
Agenda
1. Introduction
2. Impedance Basics & Measurement Methods
3. LCR Meters
4. Impedance Analyzers
5. Accessories/test-fixtures
6. Vector Network Analyzers
• E5061B VNA as Impedance Analyzer
7. Reference Documents + Q&A
31
Historical Product Overview
Over 40 Years Experience LCR ZA
Low-Cost High-Performance Capacitance RF LCR Meter ZA RF ZA
LCR Meter LCR Meter Meter
‘60
4270A
‘70 4260A
4271A
4272A/73A
‘80 4261A
4274A/75A
4276A/77A 4192A
4262A
‘90 4191A
4278A
4194A
4284A/85A
4263A/B 4286A 4291A/B
‘00
4268A/88A
4294A
‘10 4287A
E4980A E4991A
E4981A
32
Current Product Portfolio for Impedance
www.agilent.com/find/impedance
4263B E4980AL
LCR meter precision LCR meter E5071C
4294A ENA network analyzer
Precision impedance analyzer
E4981A E4980A
Capacitance meter precision LCR meter
E5061B
ENA-L network analyzer
E4991A
E4982A RF impedance/material analyzer
LCR meter
33
Product Overview
LCR Meters & Impedance Analyzers & Network Analyzers
Specialized to measure LCR & impedance Measure S-parameter, also can be used for
High impedance accuracy impedance measurement
Wide impedance measurement range Higher Frequency range
Main target application: Main target application:
• Capacitors, inductors, resonators • Filters, Antennas
• Materials • DC-DC converters
• Semiconductor • Amplifiers, Mixers
• In-circuit (4294A w/42941A)
34
Product Overview
LCR Meters & Impedance Analyzers Product Portfolio
E4991A ZA
RF impedance/material analyzer
1 MHz – 3 GHz
General Purpose
4263B LCR
R&D Lab
LCR meter
100 Hz – 100 kHz
Main Usage
4285A E4982A
Precision LCR meter RF LCR meter
75 kHz – 30 MHz 1 MHz – 3 GHz
+ Wide Variety of
Manufacturing
High Volume
Accessories
E4981A
Capacitance meter
120 Hz, 1 kHz, 1 MHz Unit Price [$]
$10k $20k $30k $40k $50k
35
LCR Meters
4263B E4980AL
LCR meter precision LCR meter E5071C
4294A ENA network analyzer
precision impedance analyzer
E4981A E4980A
capacitance meter precision LCR meter
E5061B
ENA-L network analyzer
E4991A
4339B E4982A RF impedance/material analyzer
high-R meter LCR meter
36
LCR Meters
What Is LCR & Impedance Measurement?
E4980A
(Cp-D measurement)
37
LCR Meters
Overview
20 Hz – 2 MHz
E4980A precision LCR meter
20 Hz – 300 kHz/500 kHz/1 MHz E4980AL precision LCR meter
100 Hz – 100 kHz 4263B LCR meter
120 Hz, 1 kHz, 1 MHz E4981A capacitance meter
Frequency (Hz)
38
LCR Meters
List Sweep : the poor mans Impedance Analyzer”
• Instrument: E4980A
• DUT: 100 nF ceramic capacitor & 100 uH chip inductor
• Key Word:
– Adapter Compensation
– ALC function
– List Sweep
39
LCR Meters
Key Products Overview
40
Agenda
1. Introduction
2. Impedance Basics & Measurement Methods
3. LCR Meters
4. Impedance Analyzers
5. Accessories/test-fixtures
6. Vector Network Analyzers
• E5061B VNA as Impedance Analyzer
7. Reference Documents + Q&A
41
Impedance Analyzers
4263B E4980AL
LCR meter precision LCR meter E5071C
4294A ENA network analyzer
precision impedance analyzer
E4981A E4980A
capacitance meter precision LCR meter
E5061B
ENA-L network analyzer
E4991A
4339B E4982A RF impedance/material analyzer
high-R meter LCR meter
42
Impedance Analyzers
Parasitics
• No real components are purely resistive or reactive
• Every component is a combination of R, C and L elements
• The unwanted elements are called parasitics
Intrinsic C
Unwanted
R and L of
leads
Unwanted R and C
of dielectric
43
Impedance Analyzers
X versus Test Signal Frequency
Impedance |X| L C
1
XC =
C
XL = L
44
Impedance Analyzers
Example Capacitor Resonance
L
1
C
|Z|
45
Impedance Analyzers
Overview
1 MHz – 3 GHz
Frequency (Hz)
10 100 1k 10k 100k 1M 10M 100M 1G 10G
46
Impedance Analyzers
4294A Impedance Analyzer
Key numbers…
Frequency range: 40 Hz ~ 110 MHz
Basic measurement accuracy: 0.08 %
L
Ca Ca
Ca
L
L R R
R
D E
Frequency DC LVL AC LVL
Cb
Frequency Sweep DC Bias Sweep AC Level Sweep
L Ca R
L Ca R
47
Impedance Analyzers allow to measure:
48
Impedance Analyzers
Key Products Overview
49
Summary: Impedance Analyzer versus LCR Meter
50
Summary:
Frequency range Impedance Analyzer & LCR Meter
Low-cost
LCR
0.1% 4263B
100 Hz 100 kHz
Impedance
0.08% 4294A 110 MHz
Analyzer
40 Hz
1 MHz 0.8% E4991A 3 GHz
51
Agenda
1. Introduction
2. Impedance Basics & Measurement Methods
3. LCR Meters
4. Impedance Analyzers
5. Accessories/test-fixtures
6. Vector Network Analyzers
• E5061B VNA as Impedance Analyzer
7. Reference Documents + Q&A
52
Accessories
Introduction
53
Accessories
Wide Variety of Fixtures to Cover Various Applications
54
Accessories
Top 3 Fixtures for Auto balancing Bridge Instruments
55
Agenda
1. Introduction
2. Impedance Basics & Measurement Methods
3. LCR Meters
4. Impedance Analyzers
5. Accessories/test-fixtures
6. Vector Network Analyzers
E5061B VNA as Impedance Analyzer
7. Reference Documents + Q&A
56
Vector Network Analyzers for measuring Impedance
one of the 3 Key Impedance Measurement Methods
Network Analysis
Auto-Balancing Bridge
57
Network Analysis Measurement Range
Impedance Accuracy versus frequency
100M
10M E4981A 4263B E4980A/AL 4294A
1M Auto-Balancing Bridge
100k
Impedance (Ω)
10k
1k RF I-V E4982A E4991A
1m
10 100 1k 10k 100k 1M 10M 100M 1G 10G
Frequency (Hz)
10% accuracy range for each measurement technique
58
Measurement Frequency Range
Summary
59
E5061B-3L5 LF-RF Network Analyzer
E5061B-3L5
Zin Zin T1 T2
• C Impedance analysis function (Option 005) Gain-phase test port S-parameter test port
(5 Hz to 30 MHz) (5 Hz to 3 GHz)
Gain-phase S-parameter
test port test port
60
6 A: E5061B as VNA for S-Parameters (5Hz to 3GHz)
- Filter
- Antenna
- Amplifier
- Cable
61
6 B: E5061B as gain-phase analyzer (5 Hz – 30 MHz)
Detail: E5061B’s R and T receiver ports are semi-floated
This eliminates the measurement error associated with the source-to-receiver test
cable ground loop. As receivers are semi-floated with the impedance |Zg|, which is
about 30 Ω in the lowfrequency range below 100 kHz. Similarly to the case of
using the magnetic core, we can intuitively understand that the shield current is
blocked with the impedance |Zg|. More details in appnote
http://cp.literature.agilent.com/litweb/pdf/5990-5578EN.pdf
AC current
T port
Rc2 LF OUT
VT = Vo + Vc2 Vo Zsh
VT V=Vc2
= Vo + (Va/(Zg+Rc2)) x Rc2
= Vo, because Zg >> Rc2
Va VR
|Zg| = about 30 Ω at low freq. range
Rc2 = 10 mΩ or several 10 mΩ
Zg Zg
Common-mode noise
R port
Measured attenuation
Easy & accurate solution for
DUT’s true
attenuation • High attenuation DUTs (<-80 dB)
Freq • milliohm-|Z| of LF PDN components
62
6 C: E5061B as Impedance Analyzer using Option E5061B-005 ZA firmware
Reflection
method
• Fully supports basic functions of (for low to mid-Z)
impedance analyzer (ZA)
Series-thru
• Displays Z parameters method
(for mid to high-Z)
• Calibration + Fixture compensation
• Equivalent circuit analysis Shunt-thru
method
• Covers variety of ZA applications (for very low-Z)
with multiple meas. techniques
63
E5061B Impedance Measurement methods
Both test ports are available for impedance measurements
64
Reflection method
Z = 50 x ((1 + S11) / (1 - S11))
S-Parameter S11
-30
Mid-Z
-40
-50
0.1 1.E+00
1.E-01 1 10
1.E+01 100 1.E+03
1.E+02 1k 10k
1.E+04
Impedance [Ω]
65
Series-thru method
Z = (50 x 2) x ((1 - S21) / S21)
S-Parameter S21
-20
V I -50
0.1 1.E+00
1.E-01 1 10
1.E+01 100 1.E+03
1.E+02 1k 10k
1.E+04
Impedance [Ω]
66
Shunt-thru method
Z = (50 / 2) x (S21 / (1 - S21))
S-Parameter S21
-20
VS VDUT -50
0.1 1.E+00
1.E-01 1 10
1.E+01 100 1.E+03
1.E+02 1k 10k
1.E+04
Impedance [Ω]
67
Measurement method & impedance range
Mid
Reflection
Low - Mid
Shunt-thru
Impedance [ohm]
68
10% measurement accuracy range
S-Parameter test port
1.E+06
1.E+05
100 kΩ
1.E+04
10 kΩ Port 1-2 Series
1 1.E+03
kΩ
Impedance [Ohm]
1.E+02
100 Ω
Port 1 Refl
1.E+01
10 Ω
1 1.E+00
Ω
1.E-01
100 mΩ Port 1-2 Shunt
1.E-02
10 mΩ
1 1.E-03
mΩ
1.E-04
1.0E+00 1.0E+01
10 Hz 1.0E+02
100 Hz 1.0E+03
1 kHz 1.0E+04
10 kHz 1.0E+05
100 kHz 1.0E+06
1 MHz 1.0E+07
10 MHz 1.0E+08
100 MHz 1.0E+09
1 GHz 1.0E+10
Frequency [Hz]
Supplemental performance data (SPD): It is not guaranteed by the product warranty.
Represents the value of a parameter that is most likely to occur; the expected mean or average.
69
10% measurement accuracy range
Gain-Phase test port
1.E+06
1.E+05
100 kΩ
1.E+04
10 kΩ
1 1.E+03
kΩ
GP Series
Impedance [Ohm]
1.E+02
100 Ω
1.E+01
10 Ω
1 1.E+00
Ω
1.E-01
100 mΩ
GP Shunt
1.E-02
10 mΩ
1 1.E-03
mΩ
1.E-04
1.0E+00 1.0E+01
10 Hz 1.0E+02
100 Hz 1.0E+03
1 kHz 1.0E+04
10 kHz 1.0E+05
100 kHz 1.0E+06
1 MHz 1.0E+07
10 MHz 1.0E+08
100 MHz 1.0E+09
1 GHz 1.0E+10
Frequency [Hz]
Supplemental performance data (SPD): It is not guaranteed by the product warranty.
Represents the value of a parameter that is most likely to occur; the expected mean or average.
70
Measurement Methods Summary
Configuration & Test port & Method
Impedance range S-Parameter (5 Hz - 3 GHz) Gain-Phase (5 Hz - 30 MHz)
Port 1-2 Series GP Series (T: 50Ω, R: 1MΩ)
User 4-terminal pair
Series-thru,
Mid - High
Port 1 Refl
7-mm
Reflection,
Mid
(Splitter)
71
Test Fixtures (1)
7 mm test fixture with
16201A
Reflection method
(S-Parameter, Port 1) 16092A
5 Hz to 3 GHz
16201A
16047E
72
Test Fixtures (2)
S-Parameter test port (Reflection method)
Test Fixtures available in actual FW: (None), 16191A, 16192A, 16193A, 16194A, 16196A/B/C, 16197A,
(User)
73
Test Fixtures (3)
Gain-Phase test port (Series-thru method)
74
E5061B demonstration
75
Calibration and Fixture Compensation (1)
76
Calibration and Fixture Compensation (2)
Fixture compensation
- The open/short (and optional load)
compensation eliminates the fixture’s Open/Short Compensation and Z Port
residual impedance and stray admittance. Extension
The recommended fixture compensation method
-The electrical length compensation up to a few hundreds of MHz is the open/short
(selecting fixture type, or Z port extension) compensation.
For the measurement at higher frequencies over
eliminates the phase shift error that occurs a few hundreds of MHz, it is recommended to
at 7 mm fixtures in the RF range. perform the combination of the fixture electrical
length compensation and the open/short
[Cal] > Fixture Compen > Compensate compensation.
77
Z measurement with Network Analyzer (1)
Reflection method
Middle Zdut
S11=VT/VR
50
50 50
Zdut 50
VT 50 VR
78
VNA Uncertainties Calculator
S11 Magnitude Accuracy
E5061B 3L5 (RSS) with 85033E Calibration Kit
0.05
S21 = S12 = 0; Cal power = -10 dBm; Meas power = -10 dBm
IF Bandwidth = 1 Hz; Average Factor = 1
1MHz
0.04
Uncertainty (Linear)
0.03
0.02
0.01
0
0 0.2 0.4 0.6 0.8 1
Reflection Coefficient (Linear)
79
Impedance Uncertainty
25.0
20.0
Uncertainty (%)
15.0
10.0
5.0
0.0
1.0E-01 1.0E+00 1.0E+01 1.0E+02 1.0E+03 1.0E+04
Impedance (Ohm)
80
Reflection method Configuration example
Ls [henry]
60 dB
(=1 kohm)
81
Typical configuration examples
for S-Parameter Reflection method (Low-Mid Z, up to 3 GHz)
- E5061B options
E5061B Network Analyzer
E5061B-3L5 LF-RF NA with DC bias
E5061B-005 Impedance analysis function for LF-RF NA (*1)
---------------------------------------------------------------
E5061B-1E5 High stability time base
E5061B-020 Standard hard disk drive
E5061B-810 Add key board
E5061B-820 Add mouse
- 7 mm calibration kit
16195B (open/short/load + low-loss capacitor)
- 7 mm test fixtures
16092A (SMD & leaded component, 500 MHz) 16092A
(*1) E5061B-005 is not applicable to the E5061B RF NA option: 1x5 / 2x5 / 1x7 / 2x7.
(*2) Option 001 is the only option for the 16201A. Must choose this option when ordering the 16201A.
82
Reflection method: Home-made fixtures
To
Cal devices
SMA receptacle Port-1
83
Z measurement with Network Analyzer (2)
Series-thru method
Middle to large Zdut, no grounded DUT
50
Zdut
50 50
S21=VT/VR
50
VT 50 VR
84
10% measurement accuracy range (E5061B, S-Parameter test
port) E5061B (SPD)
100 S-Parameter, Series-thru
kΩ
1.E+05
10 kΩ
1.E+04 E5061B (SPD)
1 kΩ S-Parameter, Reflection
1.E+03
100 Ω
1.E+02
10 Ω
Impedance [Ohm]
1.E+01
1Ω
1.E+00
100
mΩ
1.E-01
10 mΩ
1.E-02
1 mΩ
1.E-03
100 100 100
10 Hz 1 kHz 10 kHz 1 MHz 10 MHz 1 GHz
1.E-04 Hz kHz MHz
1.E+00 1.E+01 1.E+02 1.E+03 1.E+04 1.E+05 1.E+06 1.E+07 1.E+08 1.E+09 1.E+10
Frequency [Hz]
Definitions
- Specification (Spec): Warranted performance. Specifications include guardbands to account for the expected statistical performance distribution,
measurement uncertainties, and changes in performance due to environmental conditions.
- Supplemental performance data (SPD): Represents the value of a parameter that is most likely to occur; the expected mean or average. It is not
guaranteed by the product warranty.
For more details about conditions for defining accuracy, please refer to the Data Sheet.
85
10% measurement accuracy range (E5061B, Gain-Phase test
port)
1.E+05
100
kΩ
10 kΩ
1.E+04
E5061B (SPD)
Gain-Phase, Series-thru
1 kΩ
1.E+03
100 Ω
1.E+02
Impedance [Ohm]
10 Ω
4-terminal pair test
1.E+01
fixture
1Ω
1.E+00
100
1.E-01
mΩ
10 mΩ
1.E-02
1 mΩ
1.E-03
Definitions
- Specification (Spec): Warranted performance. Specifications include guardbands to account for the expected statistical performance distribution,
measurement uncertainties, and changes in performance due to environmental conditions.
- Supplemental performance data (SPD): Represents the value of a parameter that is most likely to occur; the expected mean or average. It is not
guaranteed by the product warranty.
For more details about conditions for defining accuracy, please refer to the Data Sheet.
86
Series-thru method with gain-phase test port (<=30 MHz)
• For middle to large Z-range
• Need Open/Short/Load cal at fixture
1 nF |Z| [ohm]
Calibration
100 kohm
Examples of load: Cp [farad]
open
P/N 0699-2829
SMD 50 ohm
short bar 20*log(|Z|) [dB]
P/N 0699-2014 100 dB
Axial-lead 50 ohm (=100 kohm)
50 ohm R (ESL = approx. 14 nH
with minimum lead length)
87
Typical configuration examples
for Gain-Phase Series-thru method (Mid-High Z, up to 30 MHz)
- E5061B options
E5061B Network Analyzer
E5061B-3L5 LF-RF NA with DC bias
E5061B-005 Impedance analysis function for LF-RF NA (*1)
---------------------------------------------------------------
E5061B-720 50 Ω resistor set
E5061B-720
50 Ω resistor set contains the following items for
the impedance calibration at the test fixture:
- SMD 50 Ω (0699-2929), 10 ea
- Leaded 50 Ω (5012-8646), 2 ea
- Tweezers (8710-2018), 1 ea
(*1) E5061B-005 is not applicable to the E5061B RF NA option: 1x5 / 2x5 / 1x7 / 2x7.
88
Series-thru method: Home-made fixtures
50 ohm DUT
short resistor Terminal To R-port
wire block (Zin=1 Mohm)
Cal devices
To T-port From
(Zin=50 ohm) LF OUT
BNC(f)
receptacle
Copper board (GND)
89
Z measurement with Network Analyzer (3)
Shunt-thru method
Small Zdut
S21=VT/VR
50
50 50
50 Zdut
VT 50 VR
90
10% measurement accuracy range (E5061B, S-Parameter test
port)
1.E+05
100
kΩ
10 kΩ
1.E+04
E5061B (SPD)
1 kΩ
1.E+03 S-Parameter,
Reflection
100 Ω
1.E+02
Impedance [Ohm]
10 Ω
1.E+01
1Ω
1.E+00
100
1.E-01
mΩ
10 mΩ
1.E-02
E5061B (SPD)
1 mΩ S-Parameter, Shunt-
1.E-03 thru
Definitions
- Specification (Spec): Warranted performance. Specifications include guardbands to account for the expected statistical performance distribution,
measurement uncertainties, and changes in performance due to environmental conditions.
- Supplemental performance data (SPD): Represents the value of a parameter that is most likely to occur; the expected mean or average. It is not
guaranteed by the product warranty.
For more details about conditions for defining accuracy, please refer to the Data Sheet.
91
10% measurement accuracy range (E5061B, Gain-Phase test
port)
1.E+05
100
kΩ
10 kΩ
1.E+04
1 kΩ
1.E+03
100 Ω
1.E+02
Impedance [Ohm]
10 Ω
1.E+01
1Ω
1.E+00
100
1.E-01
mΩ
10 mΩ
1.E-02
E5061B (SPD)
1 mΩ Gain-Phase, Shunt-
1.E-03
thru
Definitions
- Specification (Spec): Warranted performance. Specifications include guardbands to account for the expected statistical performance distribution,
measurement uncertainties, and changes in performance due to environmental conditions.
- Supplemental performance data (SPD): Represents the value of a parameter that is most likely to occur; the expected mean or average. It is not
guaranteed by the product warranty.
For more details about conditions for defining accuracy, please refer to the Data Sheet.
92
Shunt-thru method
• For small Z-range (down to milliohms / sub-
milliohms)
20*log(|Z|) [dB]
Test board
T: Zin=50 ohm
R: Zin=50 ohm
93
Equivalent Circuit Analysis (1) Equivalent
Circuit Analysis
Simulate =
“ON”
memory trace
e.g., Ceramic
Resonator (Type E
circuit)
# Equivalent Circut
# ----C0----
# -| |-
# -L1-C1-R1-
Type, E
R1, 6.94624374266e+000
L1, 6.79827222119e-003
C1, 2.45000000000e-011
C0, 3.47238726000e-010
94
Equivalent Circuit Analysis (2)
Equivalent
Circuit
Analysis Generally suitable for…
Typical freq. characteristics
Capacitors
*1
Resonator
*2
*1.
*2.
95
End of E5061B demonstration
96
Methods and Fixtures Summary Low-Z Mid-Z High-Z
~ 100
1 mΩ ~ 1Ω 1 kΩ
Test port kΩ
S-Parameter Gain-Phase Applicable
(5 Hz - 3 GHz) (5 Hz - 30 MHz) Z-range
S1
1
Mid
7-mm type fixtures
S2 1MΩ input
Series
TR
1
Mid -
High 4-Terminal Pair type
fixtures
Port 1-2 Shunt GP Shunt (T 50Ω, R 50Ω) Shunt Series
Power
Shunt
splitter
S21 TR
Low -
Mid
User fixtures are required
97
Summary of Impedance measurement methods
98
Impedance Analysis (E5061B-005) Summary
99
Agenda
1. Introduction
2. Impedance Basics & Measurement Methods
3. LCR Meters
4. Impedance Analyzers
5. Accessories/test-fixtures
6. Vector Network Analyzers
• E5061B VNA as Impedance Analyzer
7. Reference Documents + Q&A
100
Key Reference Document
Selection Guide
5952-1530E: Agilent LCR Meters, Impedance Analyzers, and Test Fixtures Selection Guide
101
Key Reference Document
Accessories Selection Guide
Detailed information on
each accessories
102
Key Reference Document
Impedance Measurement Handbook
103
Thank You!
104