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Programmable Spin Coating System Technical Specification
Programmable Spin Coating System Technical Specification
Technical Specification:
Dimension: 291mm(L)*448mm(W)*243mm(H)
Power input: Universal
Speed Range: 50-12,000 R.P.M
(based on glass substrate of dimension 38mm(l)*25mm(w) and thickness 1mm
Acceleration: 5-6000 R.P.M/sec
<1% error across full speed range
Controlling Duration: 1-9999 sec/step
30 pre-set editable programs
50 editable steps/program
Micro-controller controlled
Calibration option
High speed DC motor
N2 and other inert gas purging port
PTFE coated working chamber of 8” Diameter
Integrated mechanical lid interlock with lid-open sensor
Integrated Vacuum release switch with on/off indicator
Transparent photo-resist safety lid over working chamber
In-situ sample dispensing port on the transparent photo-resist safety lid