Mems 3

Date
Jul 16, 2015 11:24:29 AM

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Contents
1. Global ............................................................................................................................................... 3
2. Component 1 ................................................................................................................................... 4
2.1. Definitions ................................................................................................................................ 4
2.2. Geometry 1 .............................................................................................................................. 4
2.3. Materials .................................................................................................................................. 5
2.4. Solid Mechanics ....................................................................................................................... 5
2.5. Mesh 1...................................................................................................................................... 6
3. Study 1 ............................................................................................................................................. 7
3.1. Eigenfrequency ........................................................................................................................ 7
3.2. Frequency-Domain Modal ....................................................................................................... 7
4. Results .............................................................................................................................................. 8
4.1. Data Sets .................................................................................................................................. 8
4.2. Plot Groups .............................................................................................................................. 9

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1 Global
Used products
COMSOL Multiphysics
CAD Import Module
MEMS Module

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2 Component 1
2.1 Definitions
2.1.1 Coordinate Systems

Boundary System 1
Coordinate system type Boundary system
Tag sys1

2.2 Geometry 1

Geometry 1

Units
Length unit m
Angular unit deg

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2.3 Materials
2.3.1 Polysilicon

Polysilicon

Selection
Geometric entity level Domain
Selection Domain 1

2.4 Solid Mechanics

Solid Mechanics

Features

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Linear Elastic Material 1
Free 1
Initial Values 1
Fixed Constraint 1
Boundary Load 1

2.5 Mesh 1

Mesh 1

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3 Study 1
3.1 Eigenfrequency
Study settings
Property Value
Include geometric nonlinearity Off

Physics and variables selection

Physics interface Discretization
Solid Mechanics (solid) physics

Mesh selection
Geometry Mesh
Geometry 1 (geom1) mesh1

3.2 Frequency-Domain Modal

Study settings
Property Value
Include geometric nonlinearity Off

Physics and variables selection

Physics interface Discretization
Solid Mechanics (solid) physics

Mesh selection
Geometry Mesh
Geometry 1 (geom1) mesh1

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4 Results
4.1 Data Sets
4.1.1 Study 1/Solution 1
Solution
Name Value
Solution Solution 1
Component Save Point Geometry 1

Data set: Study 1/Solution 1

4.1.2 Study 1/Solution Store 1

Solution
Name Value
Solution Solution Store 1
Component Save Point Geometry 1

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Data set: Study 1/Solution Store 1

4.2 Plot Groups

4.2.1 Stress (solid)

freq(57)=2.5000E7 Surface: von Mises stress (N/m 2)

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4.2.2 1D Plot Group 2

Point Graph: Displacement, RMS (m)

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