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Compact Fabry Perot Spectrometers
Compact Fabry Perot Spectrometers
Compact Fabry Perot Spectrometers
Click
Dr. to Rissanen
Anna edit Master text MEMSstyles
FPI technoloy
Second
Dr. Heikki level
Saari Piezo-actuated FPI and hyperspectral
Third level technology
Fourth level
Dr. Mikko Karppinen Spectrometer integration
Fifth level
Dr. Pentti Karioja R2R printed sensors
Dr. Timo Aalto Silicon photonics
Mr. Kari Tukkiniemi ASIC design
Clickminiature
Why to edit Master text styles
Second level
Fabry-Perot tunable filter
Third level
MEMS spectral engines
Fourth level
Spectrometer integration
Fifth level
Piezo-actuated FPI
Emerging sensor developments
Passband = 430 nm
ClickPIEZO-ACTUATED
to edit Master text styles
MEMS
Second level
Third level
Fourth level
Fifth level
1.3 - 1.7 µm
Click toranges
Wavelength edit Master text styles 1.6 - 2.0 µm
1.7 - 2.2 µm
Second level
Resolution
0.7-1.4 %
Third
(% of wavelength) 1
level
Wavelength settling time
Fourth level < 0.8 ms
memsNIR prototype
SNR (typical) Fifth level 3000
Power consumption <1W
Optical interface SMA 905
Input fiber core diameter Max. 400 µm diam.
Numerical aperture 0.22
Wavelength stability < 0.1 nm / C
Dynamic range > 15 bits
Size 50 x 35 x 20 mm3
Weight < 50 g
Operating temperature range +10..+35 C Moisture in paper (0.1, 3.5 and 10.1%)
Size 77 x 38 x25 mm
Weight 95 g
Mannila R., Tuohiniemi , M., Mäkynen, J., Näkki, I., Antila, J., "Hydrocarbon gas detection with
microelectromechanical Fabry-Perot interferometer ", Proc. SPIE 8726, 872608 (2013).
Tuohiniemi, M., Näsilä, A., Mäkynen, J., “Characterization of the tuning performance of a micro-machined Fabry-Pérot
interferometer for thermal infrared”, J. Micromech. Microeng. Vol. 23 (7), 075011, (2013).
Spectrometer performance
at sensor price point
www.spectralengines.com
05/05/2014 SPIE Next Generation Spectroscopic Technologies 2014 13
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Spectrometer integration
14
Competences and challenges for miniaturization
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High-precision 3D integration and
alignment packaging
(passive or active;
Click to edit Master text styles (electronics,
e.g. fiber pigtailing) bare die mounting
Second level gas/liquid channels,…)
Third level
Thermal management Fourth level Encapsulation
(CTE matching, Fifth level (hermetic sealing,
temperature control, windows)
minimized dissipation)
Test setup
Proto
sensor head
10 cm
Piezo-actuated FPI -
spectrometers and
hyperspectral cameras
17
Click to edit
Piezo-FPI Master title style
platform
Commercially
Large
biomass available:
Publications: www.rikola.fi
Saari, H et al, “Unmanned Aerial Vehicle
(UAV) operated spectral camera system for
forest and agriculture applications”, Proc.
SPIE 8174 (2011).
05/05/2014 19
Click to edit
VIS-VNIR Master title camera
hyperspectral style in medical
application studies
VTT’s
Click to edit Master textcamera
styles can detect skin cancer within seconds
Second level Easy-to-use hand held instrument
Third level Fast screening and early detection of skin cancer
Application being studied at the University of Jyväskylä
Fourth level
Fifth level
Wavelength range:
500-900 nm
Wavelength resolution:
Ca. 10-30 nm
Spatial resolution:
2 Mpix
Development status:
• 1st generation
Neittaanmäki-Perttu, N., Grönroos, M., Tani, T., Pölönen, I., Ranki, A., Saksela, O. prototype done
and Snellman, E., “Detecting Field Cancerization using Hyperspectral Imaging • Application studies
System”, accepted for publication in Lasers in Surgery & Medicine Journal in June ongoing
2013.
05/05/2014 SPIE Next Generation Spectroscopic Technologies 2014 20
Wavelength ranges of Piezo-FPI Available, dielectric mirrors
Click
and to edit
image Master title style
sensors Available, metallic mirrors
Customizable, dielectric mirrors
Click FPI
Dielectric to edit Master text styles
mirrors
Second level
Metallic FPI
mirrors Third level
Dielectric FPI Fourth level
mirrors Fifth level
.2 .3 .4 .6 .8 11 2 3 4 6 10
8 10 11 12 14
Wavelength (µm)
CMOS&CCD
InGaAs
Ext-InGaAs
InSb
MCT
.2 .3 .4 .6 .8 11 2 3 4 6 10
8 10 11 12 14
Wavelength (µm)
05/05/2014 SPIE Next Generation Spectroscopic Technologies 2014 21
Click to edit
Stand-off Master
Raman title style at FOI with
spectroscopy
UV-FPI
Click toselection
Precise edit Master
of Raman textshifts
styles
Second level
in combination with high out-of-
band blocking
Third level
Works in the UV range
Fourth levelwhere no
comparable filtering systems
Fifth level are
commercially available
Compact, high resolution (~0.2 nm
@ FWHM) UV-FPI
Module operation stable under
varying environmental conditions
Glimtoft, M., Bååth, P., Östmark , H., Saari, H., Mäkynen, J., Näsilä, A.,
“Towards eye-safe standoff Raman imaging systems”, SPIE Proceedings 9072,
(2014).
Emerging sensor
developments
26
Printed
Clickand Hybrid
to edit Functionalities
Master title style research at VTT
Research Focus
From printed components to printed and hybrid systems
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Solutions edit Master text styles
Technology
Second(material
level development and tuning, process planning and design,
device and systems designs and modelling) and business development services,
examples:Third level
Printed Fourth
solar cells,
levellighting solutions (ILEDs, OLEDs), printed transistors,
printed sensors and
Fifth indicators, printed power sources, nanoparticles and
level
functional inks
Scaling up services using printing and hybrid pilot lines
Benefit to Customers
New thin flexible product concepts made possible
Help in finding new business opportunities available
Low risk for scaling up production
05/05/2014 31
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Microspectrometers withstyle
silicon photonics ?
Emerging technology
Click to edit Master text forstyles
microspectrometers in the future
Multiple wavelength
Second level filters in a single circuit
Wideband & level
Third narrowband filtering combined
Fourthswitching
Filter tunability, level and modulation
Fifth level
Light sources and detectors can be hybrid
integrated on SOI chips
jouko.malinen@vtt.fi