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Diamagnetic Levitation With Permanent Magnets For Contactless Guiding and Trapping of Microdroplets and Particles in Air and Liquids
Diamagnetic Levitation With Permanent Magnets For Contactless Guiding and Trapping of Microdroplets and Particles in Air and Liquids
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Principle and Analysis of a Two-dimensional On-Chip Magnetophoresis of Bioparticles for Contamination-free Biochemical Reactors View project
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approaches to organize and pattern particles fall into two Fmx = ∫∫∫ ⎜ Bx + By + Bz ⎟.dv = ∫∫∫ ⎜ ⎟.dv
µ0 v ⎝ ∂x ∂x ∂x ⎠ 2µ0 v ⎜⎝ ∂x ⎟⎠
categories. The first method involves paramagnetic or
superparamagnetic particles, or para-/superparamagnetic (χ − χm ) ⎛ ∂Bx ∂By ∂Bz ⎞ Δχ ⎛⎜ ∂ B ⎞⎟
2 (2)
Fmy = ∫∫∫ ⎜⎜ Bx + By + Bz ⎟⎟.dv =
p
∫∫∫ ⎜ .dv
v ⎝ ∂ ∂ ∂ ⎠ 2 ∂ ⎟
labeling of the target particles [2-4,6,7]. However, the µ0 y y y µ0 v ⎝ y ⎠
microdroplets and particles are in contact with labelling (χ − χm ) ⎛ ∂Bx ∂By ∂Bz ⎞ Δχ ⎛⎜ ∂ B ⎞⎟
2 (3)
Fmz = ∫∫∫ ⎜ Bx + By + Bz ⎟.dv =
p
∫∫∫ ⎜ .dv
materials, magnets or surfaces [7]. Adsorption and µ0 v ⎝ ∂z ∂z ∂z ⎠ 2µ0 v ⎝ ∂ z ⎟⎠
position of the particle can be determined from the balance of at x=0 and y=0. Therefore, the microparticle will stabilize at
forces. x=0, y=0 and z= 4.2µm.
r r
Fd = 6 ⋅ π ⋅ Rp ⋅η ⋅ Vp (4) 3
Fmz (pN)
r 4 r
Fg (pN) (a)
Fg = ⋅ π ⋅ Rp ⋅ ρp ⋅ g (5) 2
12
0
3 x=y=0
r 4 r 0 112
Fa = − ⋅ π ⋅ Rp ⋅ ρm ⋅ g (6) (7) (2) (1)
3
00
where Rp is the particle radius, η is the dynamic viscosity of z(µm)
7
4
3
5µm B. On-chip magnet microarrays
6
5 3µm
2
1
Different magnet microarray configurations were designed
4
0 2.5µm and fabricated as shown in Fig.5.
3
-1
2 7 µm 5 µm 15 µm
-2
1
2.5µm -3 5µm
0
-4
-1
-5
-2
-6
-5 -4 -3 -2 -1 0 1 2 3 4 5 6 X -6 -5 -4 -3 -2 -1 0 1 2 3 4 5 6 X
Fig. 2 (a) Side view, and (b) top view of a matrix of four cubic magnets.
Fig. 5 Electroplated CoPt micro-magnet arrays.
Relation between the components of magnetic force and
displacements of the particle are reported in Fig.3. The A brief summary of the fabrication of micro-magnet arrays
gravitational force value Fg and Fmz illustrated in Fig. 3(a) is described in Fig. 6. First, a thin conductive layer of gold
demonstrate two equilibrium positions but only the position was spotted above a silicon wafer (1). Then, patterns were
(1) is stable as the balance of forces is null and δFmx/δx, formed through a thick NFR15 photoresist (2). Then, a 10µm-
δFmy/δy and δFmz/δz are <0 at this position. The components thick CoPt layer was electroplated (3). Finally, photoresist
Fmx and Fmy demonstrate respectively that the particle is stable layer was removed (4).
CB-03 3
(3) (4)
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