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Chapter 2 - SEM Week 2-3
Chapter 2 - SEM Week 2-3
Charles Oatley
sample
chamber
Depth of Focus
The larger the aperture used, the smaller the depth of focus (the same as the
aperture in a camera). This can be useful to distinguish objects at different heights.
Objective
Aperture
Depth of Depth of
focus focus
Secondary
electrons, d
backscatter
detector housed
in here