-Team C

Vardhman Kothari(200701034)
Manit Kant(200701088)
 MEMS technology is based on number of tools and
methodologies, which are used to form small structures with
dimensions in the micrometer scale.

 MEMS fabrication approach that conveys the advantages of

miniaturization, multiple components and microelectronics
to the design and construction of integrated
Electromechanical systems

 Micro – Small size , microfabricated structures

 Electro – Electrical signal/control (in/out)
 Mechanical –Mechanical functionality (in/out)
 Systems – Structures , Devices , System Controls
 MEMS are made up of components between 1 to 100
micrometres in size.

 MEMS devices generally range in size from 20 micrometres

(20 millionths of a metre) to a millimetre.

 They usually consist of a central unit that processes data, the

microprocessor and several components that interact with
the outside such as microsensors.
 How are MEMS prepared ?

 There are 3 basic building blocks in MEMS

technology:-

▪ Deposition - The ability to deposit thin films of material

on a substrate

▪ Lithography-To apply a patterned mask on top of the

films by photolithographic imaging

▪ Etching – To etch the films selectively to mask

 Silicon

 Polymers

 Metals
 Bulk micromachining
 oldest paradigm of silicon based MEMS.
 whole thickness of a silicon wafer is used for
building the micro-mechanical structures.
 Surface micromachining
 uses layers deposited on the surface of a
substrate as the structural materials.
 to render micromachining of silicon more
compatible with planar integrated circuit
technology, with the goal of combining
MEMS and integrated circuits on the same
silicon wafer.
 High aspect ratio (HAR) silicon
micromachining
 A new etching technology, deep reactive-ion
etching, has made it possible to combine
good performance typical of bulk
micromachining with comb structures and in-
plane operation typical of surface
micromachining.
MEMS are used in general as:-

 Sensor

 Actuator

 Structure
MEMS used in:-
Accelerometers Inkjet printers
Gyroscopes Displays
pressure sensors etc.
Sound Sensors(microphones)
Chemosensor
Biosensor
blood pressure sensors
• Smaller
• Lighter
• More functional
• Cheaper
• Power
• Easy to integrate into systems or modify
• Small thermal constant
• Can be highly resistant to vibration, shock and radiation
• MEMS sensors, like almost all electronic devices, do not
exhibit ideal behavior. While most designers have learned
how to handle the non-ideal behavior of op-amps and
transistors, few have learned the design techniques used to
compensate for non-ideal MEMS behavior.

• So generally designers must get this type of information

from the MEMS manufacturer.
 MEMS can be unreliable because of rubbing surfaces .Avoiding rubbing
surfaces is one of the key elements in achieving reliable MEMS devices.

 In MEMS, some devices by their very nature require them to be exposed

to the environment, creating a reliability challenge.

 The types of MEMS devices that are the most reliable, and the easiest to
qualify are devices that can be packaged in such a way as to protect them
from the environment. An excellent example of this is the case of optical
MEMS devices. These devices can be packaged in a traditional ceramic
package, with a glass lid. The glass lid, hermetically attached to the
ceramic package creates a "safe" environment for the sensitive MEMS
chip, while still allowing photons to interact with the MEMS device.
 The medical , wireless technology, biotechnology , computer
, automotive , aerospace and defense industry etc. will
greatly benefit from MEMS

 This enabling technology promises to create entirely new

categories of products

 MEMS will be the indispensable factor for advancing

technology in the 21st century
 Sachin Tendulkar – 5’5”

Dr. Manmohan Singh – 5’4”

Mahatma Gandhi - 5’3”

Napoleon Bonaparte – 5’1”

“Small is great”
 PDF Files http://www.scribd.com/mems/
 Introduction to Microengineering
http://www.dbanks.demon.co.uk/ueng/
 http://www.memsnet.org/
 http://www.mems-exchange.org/
 http://www.slideshare.net/vinayak.nandi/memsintro-
presentation-1115551
THANK YOU