Professional Documents
Culture Documents
Akusti̇k Mi̇kroskobi̇
Akusti̇k Mi̇kroskobi̇
Acoustic
Microscopy
Training
This presentation and images are copyrighted by
Sonix, Inc. They may not be copied, reproduced,
modified, published, uploaded, posted, transmitted,
or distributed in any way, without prior written
permission from Sonix.
What
Whatare
areUltrasonic
UltrasonicWaves?
Waves?
Ultrasonic
Ultrasonicwaves
wavesrefer
referto
tosound
soundwaves
wavesabove
above20
20kHz
kHz
(not
(notaudible
audibleto
tothe
thehuman
humanear)ear)
Copyright Sonix, Inc
4
Non-Destructive Testing
•Failure Analysis
•Failure Analysis
•Reliability
•Reliability
•Process Control
•Process Control
•Vendor Qualification
•Vendor Qualification
•Production
•Production
•Quality Control
•Quality Control
•Research
•Research
Copyright Sonix, Inc
6
Common Applications
•Plasticencapsulated
•Plastic encapsulatedIC
ICpackages
packages
•FlipChips
•Flip Chips
•BondedWafers
•Bonded Wafers
•PrintedCircuit
•Printed CircuitBoards
Boards
•Capacitors
•Capacitors
•Ceramics
•Ceramics
•Metallic
•Metallic
•PowerDevices/Hybrids
•Power Devices/Hybrids
•MedicalDevices
•Medical Devices
•MaterialCharacterization
•Material Characterization
Die Crack
•Theory
•System Components
•Transducers
Characteristics
Characteristicsof
ofUltrasonic
UltrasonicWaves
Waves
••Freely
Freelypropagate
propagatethrough
throughliquids
liquidsand
andsolids
solids
••Reflect
Reflectatatboundaries
boundariesofofinternal
internalflaws
flawsand
and
change
changeofofmaterial
material University of California Medical Center
San Francisco, California
••Capable
Capableofofbeing
beingfocused,
focused,straight
straight
transmission
transmission
••Suitable
Suitablefor
forReal-Time
Real-Timeprocessing
processing
••Harmless
Harmlessto
tothe
thehuman
humanbody
body
••Non-destructive
Non-destructiveto
tomaterial
material
Z
F
A
o
x
c
i
u
s
s
ep is
Ax
Y-
St
X-Axis
ScanCopyright Sonix, Inc
13
Transducers
General
Generalrules:
rules:
• •Ultra
UltraHigh
HighFrequency
Frequency(200+
(200+MHz)
MHz)for
forflip
flipchips
chipsand
andwafers.
wafers.
• •High
High Frequency (50-75 MHz) for thin plastic packages.(110MHz-UHF)
Frequency (50-75 MHz) for thin plastic packages. (110MHz-UHF)for
for
flip chips.
flip chips.
• •Low
LowFrequency
Frequency(15
(15MHz)
MHz)for
forthicker
thickerplastic
plasticpackages.
packages.
Copyright Sonix, Inc
14
Transducer Beam Profile
Depth of Field
•Acoustic Reflections
•Acoustic Waveforms
•Image Display
0
Water (20 C) 1.00 1483 1.48
0
Alcohol (20 C) 0.79 1168 0.92
0
Air (20 C) 0.00 344 0.00
Silicon 2.33 8600 20.04
Gold 19.3 3240 62.53
Copper 8.90 4700 41.83
Aluminum 2.70 6260 16.90
Epoxy Resin 1.20 2600 3.12
Resin (for IC pkg) 1.72 3930 6.76
Glass (Quartz) 2.70 5570 15.04
Alumina (AL2O3) 3.80 10410 39.56
Z=
Z= ρC
ρC Plastic Z2 Transmitted Energy
Z1 = ρ C where: Z2 = ρ C where:
ρ=1.00 gram/cm3 ρ =2.00 gram/cm3
C= 1.5 x 106 C= 2.00 x 106
Z1 = 1.5 x 106 Z2 = 4.00 x 106
2 (Z 1 )
T =
(Z + Z ) R =
(Z 2 − Z 1 )
2 1
(Z 2 + Z 1 )
2 (1 . 5 ) 45% of the
T = ( 4 .0 − 1 .5 )
( 4 .0 + 1 .5 ) sound entering R =
( 4 .0 + 1 .5 )
( 3 .0 ) the boundary is
T = ( 2 .5 )
( 5 .5 ) reflected. R =
( 5 .5 )
T = . 55
Copyright Sonix, IncR = . 45
21
Reflected Sound Information
• Amplitude Information
• Polarity Information
• Time Information
Front surface
Interface of Sample
interest
Back surface
Amplitude %FSH 0%
_ Phase
-100%
Time / Depth
Area of interest
The red box (data gate) indicates
the depth of information.
Signal from
indication
Back surface
Back surface
Front surface Signal from
indication
Copyright Sonix, Inc
28
Inspection Modes
•Pulse Echo
•Through Transmission
Transmit
Transmit
&
Receive
Receive
Pulse-Echo
Pulse-Echo- -One
OneTransducer
Transducer
Through
ThroughTransmission
Transmission- -Two TwoTransducers
Transducers
• • Ultrasound reflected from the sample is
Ultrasound reflected from the sample is used. used.
• • Ultrasound
Ultrasound transmitted throughthe
transmitted through the
• • Can determine which interface is delaminated.
Can determine which interface is delaminated. sample is used.
sample is used.
• • Requires
Requiresscanning
scanningfrom
fromboth
bothsides
sidestotoinspect
inspect • • One
OneScan
Scanreveals
revealsdelamination
delaminationatatall
all
all interfaces.
all interfaces. interfaces.
interfaces.
• • Provides
Providesimages
imageswith
withhigh
highdegree
degreeofofspatial
spatial • • No
Noway
waytotodetermine
determinewhich
whichinterface
interfaceisis
detail.
detail. delaminated.
delaminated.
• • Peak Amplitude, Time of Flight (TOF)
Peak Amplitude, Time of Flight (TOF) and and
• • Less
Lessspatial
spatialresolution
resolutionthan
thanpulse-echo.
pulse-echo.
Phase Inversion measurement
Phase Inversion measurement • • Commonly
Commonly used to verify pulse-echo
used to verify pulse-echo
Copyright Sonix, Inc
results.
30 results.
Inspection Modes
Pulse-Echo Front Surface
Back surface
1 2
Transmit 1
&
Receive
Air Gap
2
1 2 3 Transmit
3
Receive
Too Far
Focused 3
Too Close
Focused
2
2 1
Too Far
85%
2. Also note
the amplitude
of the signal.
(white box)
When the
De-focused-- too far signal is not
in focus the
33% amplitude is
lower
compared to
that of correct
focus.
Amplitude = 42% Time =10.5 us Amplitude = 82% Time = 14.5 us Amplitude = 55% Time = 18.5 us
•Digital Oscilloscope
•Front Surface Follower
•Data Gates
•Theabsolute
•The absolutevalue
valueof
ofthe
thehighest
highest
amplitude
amplitudesignal
signalwhich
whichbreaks
breaksthe
thegate
gate Highest Amplitude signal
threshold within the gated region is
threshold within the gated region is
recorded.
recorded. (Figure
(Figure1)
1)
•Ifno
•If nosignal
signalbreaks
breaksthe
thegate
gatethreshold
threshold
no
nodata
dataisisrecorded.
recorded. (Figure
(Figure2)2) 2
•Signalamplitude
•Signal amplitudecan
canbe
beincreased
increasedor
or
decreased by adjusting gain. No data recorded
decreased by adjusting gain.
•Image Data
•Peak Amplitude
•Time of Flight (TOF)
•Phase Inversion
100
78
75
X1
50
25
X2
X1
X2 X2
X1 X1
Amplitude =73% Time =14.2 microseconds Amplitude =67% Time =14.6 microseconds
Copyright Sonix, Inc
45
Phase Inversion
Phase Inverted
Sonix
Sonixuses
usesaa
proprietary
proprietaryalgorithm
algorithm
RED to
todetect
detectphase
phase
inversion.
inversion. This
This
method
method isis
X
independent
independentof ofsignal
signal
amplitude
amplitude as longas
as long as
the signal is not
the signal is not
saturated
saturated(100%
(100%
screen height).
screen height).
Yellow