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AN516-Thin Film Stress Measurement Using Dektak Stylus P
AN516-Thin Film Stress Measurement Using Dektak Stylus P
AN516-Thin Film Stress Measurement Using Dektak Stylus P
The
scan Duration will automatically be
1. Position the substrate on the stage’s set to provide the fastest scan.
three alignment ball bearings
(the steel balls are included in 6. Set the scan range to the highest
the Stress Measurement Analysis available value, to achieve
package). It may be necessary sufficient resolution while also
to raise the stage’s position pins allowing for significant stress-
slightly to accommodate the height induced curvature.
of the ball bearings.
TIP: The 1mm option for the
TIP: Alternatively, you can place Dektak 8 is recommended for
the substrate on the bare stage, stress measurements as it
but do not apply vacuum, as this accommodates a larger degree
may distort the substrate. The of substrate curvature. Figure 2. Pre-deposition wafer scan
three-ball suspension used with 7. Choose a medium value for Stylus after software leveling.
the Dektak 8 is more repeatable Force. For softer film materials,
and is therefore the reduce the force to avoid
recommended method. scratching at high scan speeds. 12. The Dektak software’s data leveling
2. Verify that the stage is level to algorithm improves measurement
8. Under Profile choose Hills &
within 1% of the measurement accuracy. To invoke it, click and
Valleys, then click OK to close
range. Auto-leveling, a feature with drag the R (Reference) and M
the window.
the programmable stage option, (Measurement) cursors to
simplifies the leveling process. 9. Click the Sample Positioning approximately 500 µm from either
icon . end of the scan. Choose
Now set up the system to measure Edit>Enter Software Leveling.
pre-deposition curvature. 10. Move the scanner to the left edge
Click the Level the Trace icon .
of the wafer (i.e., drive the stage
3. Choose File>New to create a The results will appear similar to
until the X value is at a minimum),
new recipe file. Select Standard Figure 2.
then move in approximately 1⁄ 2"
rather than 3D mode. from the left edge to the start
13. Choose File>Save to store the
4. Click the Scan Routines icon , location. Choose Edit>Enter Scan
pre-deposition data.
or choose Window>Scan Location to store it.
Routines to view the current You are now ready to measure TIP: It is a good idea to save
parameters. Click in the Scan the curvature of the substrate your measurement automation
Parameters area to open the Scan before deposition. at this point as well. Open the
Parameters dialog box (Figure 1). Automation Program screen ,
11. Click the Scan button to then choose File>Save As. With
5. Set the Scan Length to measure the bare substrate. the data stored you will be able
approximately 80% of the
to complete the stress measure-
substrate diameter, to exclude
ment, even if the system is
disturbed in some way during
the deposition step.
Figure 6. Stress Measurement results. The orange trace indicates that both tensile
and compressive stresses are present following deposition.