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    Deal-Grove Model

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    Jesús Martínez
    The Deal-Grove model describes the relationship between the maximum depth of diffusion (tmax) and the time (t) required for dopant atoms to diffuse into a semiconductor material. The model contains terms for the diffusion coefficient (B), the initial dopant concentration (A0), and a characteristic diffusion time (τ) that depends on material properties and temperature.

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    Deal-Grove Model

    Uploaded by

    Jesús Martínez
    13 views1 page
    The Deal-Grove model describes the relationship between the maximum depth of diffusion (tmax) and the time (t) required for dopant atoms to diffuse into a semiconductor material. The model contains terms for the diffusion coefficient (B), the initial dopant concentration (A0), and a characteristic diffusion time (τ) that depends on material properties and temperature.

    Original Description:

    Curvas de modelos de oxidación para oxigeno húmedo y seco en wafers de silicio (100) y (111)

    Original Title

    Deal-Grove_Data_Sheet

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    The Deal-Grove model describes the relationship between the maximum depth of diffusion (tmax) and the time (t) required for dopant atoms to diffuse into a semiconductor material. The model contains terms for the diffusion coefficient (B), the initial dopant concentration (A0), and a characteristic diffusion time (τ) that depends on material properties and temperature.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Flag for inappropriate content
    Download as pdf or txt
    13 views1 page

    Deal-Grove Model

    Uploaded by

    Jesús Martínez
    The Deal-Grove model describes the relationship between the maximum depth of diffusion (tmax) and the time (t) required for dopant atoms to diffuse into a semiconductor material. The model contains terms for the diffusion coefficient (B), the initial dopant concentration (A0), and a characteristic diffusion time (τ) that depends on material properties and temperature.

    Copyright:

    © All Rights Reserved
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    ଶ ௧೚మ ା஺௧೚

    Deal-Grove Model: ‫ݐ‬௢௫ ൅ ‫ݐܣ‬௢௫ ൌ ‫ܤ‬ሺ‫ ݐ‬൅ ߬ሻ, ߬ൌ


    ஻

    Table and Graphs from S. Campbell, Fabrication Engineering at the Micro- and Nanoscale, 3rd edition.

    - For (111) silicon

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