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  • Grafiacas Q-Q

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    Andres Fierro
    14 views3 pages
    This document contains 5 graphs showing quality control (Q-Q) measurements for different semiconductor manufacturing processes: cleaning, oxidation, lithography, etching, ion implantation, and photoresist strip. Each graph plots experimental values on the y-axis against theoretical quantiles on the x-axis to evaluate whether the process is in statistical control.

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    Grafiacas Q-Q.docx

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    This document contains 5 graphs showing quality control (Q-Q) measurements for different semiconductor manufacturing processes: cleaning, oxidation, lithography, etching, ion implantation, and photoresist strip. Each graph plots experimental values on the y-axis against theoretical quantiles on the x-axis to evaluate whether the process is in statistical control.

    Copyright:

    © All Rights Reserved
    Download as DOCX, PDF, TXT or read online from Scribd
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    Download as docx, pdf, or txt
    14 views3 pages

    Grafiacas Q-Q

    Uploaded by

    Andres Fierro
    This document contains 5 graphs showing quality control (Q-Q) measurements for different semiconductor manufacturing processes: cleaning, oxidation, lithography, etching, ion implantation, and photoresist strip. Each graph plots experimental values on the y-axis against theoretical quantiles on the x-axis to evaluate whether the process is in statistical control.

    Copyright:

    © All Rights Reserved
    Download as DOCX, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    Download as docx, pdf, or txt
    of 3

    Grafico Q-Q Cleaning

    1.5

    0.5

    0
    0 5 10 15 20 25 30 35

    -0.5

    -1

    Grafico Q-Q Oxidation


    1.6
    1.4
    1.2
    1
    0.8
    0.6
    0.4
    0.2
    0
    -30 -20 -10 -0.2 0 10 20 30 40 50 60 70

    -0.4
    -0.6
    Grafico Q-Q Lithography
    1

    0.9

    0.8

    0.7

    0.6

    0.5

    0.4

    0.3

    0.2

    0.1

    0
    -60 -40 -20 0 20 40 60 80 100

    Grafico Q-Q Etching


    0.16

    0.14

    0.12

    0.1

    0.08

    0.06

    0.04

    0.02

    0
    0 5 10 15 20 25 30
    Grafico Q-Q Ion Implantation
    0.9

    0.8

    0.7

    0.6

    0.5

    0.4

    0.3

    0.2

    0.1

    0
    0 5 10 15 20 25 30

    Grafico Q-Q Photoresist Strip


    0.25

    0.2

    0.15

    0.1

    0.05

    0
    0 5 10 15 20 25

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