Supplemental Reading List:

Andrew S. Grove, Physics and Technology of Semiconductor Devices, Wiley, New York,
1967. (LOC Classification: TK7871.85.G7)

Sorab K. Ghandi, The Theory and Practice of Microelectronics, Wiley, New York, 1968.
(LOC Classification: TK7874.G47)

Shyam P. Murarka and Martin C. Peckarar, Electronic Materials: Science and

Technology, Academic Press, Boston, 1989. (LOC Classification: TK7871.M87)

Stephen A. Campbell, The Science and Engineering of Microelectronic Fabrication,

Oxford University Press, 1996-2nd Ed. 2001. (LOC Classification: TK7871.85.C25)
Stephen A. Campbell, Fabrication Engineering at the Micro and Nanoscale, Oxford
University Press, 2008. (LOC Classification: TK7871.85.C25)

Stanley Wolf and Richard N. Tauber, Silicon Processing for the VLSI Era: Vol. 1-
Process Technology, Lattice Press, Sunset Beach, CA, 1986-2nd Ed. 2000. (LOC
Classification: TK7874.W635)
Stanley Wolf and Richard N. Tauber, Silicon Processing for the VLSI Era: Vol. 2-
Process Integration, Lattice Press, Sunset Beach, CA, 1990. (LOC Classification:
TK7874.W635)
Stanley Wolf and Richard N. Tauber, Silicon Processing for the VLSI Era: Vol. 3-The
Submicron MOSFET, Lattice Press, Sunset Beach, CA, 1995. (LOC Classification:
TK7874.W635)
Stanley Wolf and Richard N. Tauber, Silicon Processing for the VLSI Era: Vol. 4-Deep-
Submicron Process Technology, Lattice Press, Sunset Beach, CA, 2002. (LOC
Classification: TK7874.W635)

E. H. Nicollian and J. R. Brews, MOS Physics and Technology, Wiley, New York, 1982-
2nd Ed. 2003. (LOC Classification: TK7871.99.M44 N52)