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Acceleration Sensor
Acceleration Sensor
Sensor Structure
No. Description
1 Housing Ass'y
2 Circuit Ass'y
3 Tapping Screw
4 Cover
5 Terminal
6 G-CELL
Acceleration Sensor is made by MEMS(Micro
electro Mechanical System) process. Seismic
mass is supported by static plate. Between
seismic mass and silicon block two electrically
charged stationary plates are attached. When
acceleration or vibration happens, seismic
mass is vibrating up and down. This
movement results in capacitive change in two
electrically charged plates. Acceleration sensor
can detect this capacity change and convert it
as acceleration speed. This type of acceleration
sensor can detect Zero Hz and can have self
test mode in itself.