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Deep Submicron
Deep Submicron
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Jan M. Rabaey
BWRC
University of California @ Berkeley
http://bwrc.eecs.berkeley.edu
∝ DSM ∝ 1/DSM
“Microscopic Problems” “Macroscopic Issues”
• Wiring Load Management • Time-to-Market
• Noise, Crosstalk • Millions of Gates
• Reliability, Manufacturability • High-Level Abstractions
• Complexity: LRC, ERC • Reuse & IP: Portability
• Accurate Power Prediction • Predictability
• Accurate Delay Prediction • etc.
• etc.
1010
*0.08µm
Human
Humanmemory
memory
Human DNA 4 Gbits
109 Human DNA 0.15µm P7
1 Gbits 1000.0
0.15-0.2µm
108
P6
0.25-0.3µm
100.0
107
64 Mbits 0.35-0.4µm
1970 1980 1990 2000 2010 1980 1985 1990 1995 2000
Year Year
Due to 30%
10,000
Vdd scaling 70
60
1,000
50
2
100
Watts/cm
Pentium 40
Icc (amps)
Pro (R)
10 30
Pentium 100-2,000amps 20
1 (R)
486 10
386
0 0
1985 1990 1995 2000 2005 2010
Courtesy Intel
Challenges in Deep-Submicron Design
● Device scaling
– Scaling of the voltage
– The leaky transistor
– Short- and long-term reliability
● Interconnect scaling
– Capacitance
– Resistance
– Inductance
DSM devices: Evolution of Idsat
NMOS
800 PMOS 800
700 700
Idsat (µA/µm)
600 600
500 500
400 400
300 300
200 200
0.08 0.12 0.16 0.20 0.24
Drawn Channel Length (µm)
Data taken from 16 papers (IBM,TI, Bell Labs, Motorola, Intel, AMD)
Demonstrates a relatively constant Idsat from Ldrawn of 0.25 to 0.09 µm
[Sylvester, Keutzer, 98]
Scaling the Supply Voltage
5
0.2
4.5
4
0.15
3.5
Supply Voltage (V)
Vout (V)
0.1
2.5
1.5 0.05
0.5
-1 0
1 10 0 0.05 0.1 0.15 0.2
Minimum Feature Size (micron) V (V)
in
88
Off-current
66
44
22
00
250
250 180
180 130130 100
100 70
70 50
50
Te
Technology
chnologyNode
Node
Silicon-on-Insulator
Drain
Gate Gate
Source
SiO2
[Huang, IEDM99]
Device Challenges — Summary
● Conventional planar CMOS continues as long as
possible
● Transistor gets (slightly) faster and (plenty) leakier
– Off-current and gate-current will both increase to meet
design limit
– Circuit design techniques needed to address standby power
dissipation
● Deep sub-micron effects (VT-variation, drain-induced
effects, hot-carrier) impact predictability
● Non-planar transistors separate shrinks from
performance improvements
Dual-gate devices help to suppress DSM effects
The Interconnect Challenge
● With increases in performance and integration
density, wire parasitics gain dominance
● The wire combines capacitance, resistance, and
inductance
● Wire parasitics impact performance, energy
dissipation and reliability
transmitters receivers
Interconnect Distribution
Source: Intel
10 100 1,000 10,000 100,000
Length (u)
The Ideal Wire Scaling Model
“The RC Dilemma”
70 70
60 60
50 50
40 40
30 30
20 20
10 10
0 0
0.1 0.13 0.18 0.25
Process Generation (µm)
fringing parallel
Crosstalk
W S
• Neighboring wires switch,
Cc Cc
T coupling to a quiet line
Ca Cv Ca
• Quiet line sees a undesired
H
Ground Plane
voltage spike
• Crosstalk can lead to:
- Logic faults (especially in dynamic circuits)
- Voltage overshoot (stress, forward-bias PN junctions)
• Voltage spike, Vx ∝ Cc / Ctotal
• Vx is a complex function of
- Driver strength
- Fan-out capacitance
- Wiring resistance
Delay Degradation
Miller Effect
- Both terminals of capacitor are switched in opposite directions
(0 → Vdd, Vdd → 0)
- Effective voltage is doubled and additional charge is needed
(from Q=CV)
Structured and Predictable Interconnect
V S G S V S
S
V
S
G
S
V
Example: Dense Wire Fabric (DWF) [Khatri, DAC99]
Trade-off:
• Cross-coupling capacitance 40x lower, 2% delay variation
• Increase in area and overall capacitance
The Impact of Resistivity
Tr
C1 C2 CN-1 CN
Vin
2 .5
2 .5
x= L /1 0
Diffused signal 2
2
x= L /1 0
x = L /4
propagation x = L /4
v o lta g e (V)
1 .5
v o lta g e (V)
1 .5
x = L /2
x = L /2
1
1
x= L
Delay ~ L2 0 .5
0 .5
x= L
0
00 0 .5 1 1 .5 2 2 .5 3 3 .5 4 4 .5 5
0 0 .5 1 1 .5 2 2 .5 3 3 .5 4 4 .5 5
tim e ( n se c )
tim e ( n se c )
Using Copper as Interconnect
Material
• With cladding and other effects,
Cu ~ 2.2 mW-cm vs. 3.5 for Al(Cu)
⇒ 40% reduction in resistance
•Yields 12% performance
improvement over an aluminum
process in a PowerPC design
•Electromigration improvement;
100X longer lifetime (IBM, IEDM97)
Electromigration is a limiting
factor beyond 0.18 mm if Al is
used (HP, IEDM95)
Transistor SEM
The Global Wire Problem
Td = 0.377 R w C w + 0.693(R d C out + R d C w + R w C out )
Challenges
● No further improvements to be expected after the
introduction of Copper (superconducting, optical?)
● Design solutions
– Use of fat wires
– Insert repeaters — but might become prohibitive (power, area)
– Efficient chip floorplanning
● Towards “communication-based” design
– How to deal with latency?
– Is synchronicity an absolute necessity?
Architecture Must Evolve to Fit
the Landscape
Global operations
Low bandwidth 20 Clocks
High latency &
High power
90,000
tracks
3.0 3.5
3.0
2.5
M3
2.5
2.0 M5 M5
2.0
M4 M4
1.5
M3 1.5 M3
M2
1.0 M2 M2
M1
1.0 M1
M1
0.5 Poly 0.5 Poly
poly
substrate 0.0 0.0
1.0µ 0.8µ 0.6µ 0.35µ 0.25µ 1.0µ 0.8µ 0.6µ 0.35µ 0.25µ
0.25 µm wiring stack
Resistance and the Power
Distribution Problem
10,000
1,000
100
Pentium
Icc (amps)
10
Pro (R) 100-3,000amps RI drop
Pentium
VDD I
1 (R)
486
386
0
1985 1990 1995 2000 2005 2010
φpr e R’ VDD - ∆V’
I ∆V
∆V
R
Resistance and the Power
Distribution Problem
Before After
Vdd GND
Bus lines
Inductive Noise - Ldi/dt
1.E+08
1.E+07
1.E+06
di/dt in AU
1.E+05
Pentium
1.E+04 Pro
1.E+03 Pentium di/dt noise
increases
1.E+02 486
1.E+01
386
1.E+00
1.5µ 0.8µ 0.35µ 0.18µ 0.1µ
Source: Intel
Inductive Noise - Ldi/dt
● Decoupling
capacitance problem
Board Bonding becoming extreme
Wiring Wire – DEC 21164: 128
+
nF of on-chip
decoupling
SUPPLY Cd CHIP
– DEC 21264: add
- flip-chip decoupling
capacitor chip